KS C 6111-5-2008 Measurements of the thickness of superconductor films at microwave frequencies《利用微波测定高温超导薄膜的厚度》.pdf

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2、 .2 5.3 3 5.4 .4 6 4 6.1 4 6.2 .4 6.3 (tan) .4 6.4 6 6.5 tan 7 6.6 .7 7 8 7.1 .8 7.2 .9 8 .9 8.1 9 8.2 9 8.3 .9 A( ) 10 15 KS C 6111 5:2008 ii , , Nb . , . . (ISO) , (KS) . KS C 6111 5:2008 iii (ZS)(ZS RS iXS) , ZS . , , . Rs 1 5 Rs 2002 (IEC) 6. IEC 3 Rs , (unloaded quality factor) Rs Rs (RSeff) ,

3、RSeff Rs 7. Rs RSeff RSeff Rs 8, . , (SEM) (TEM), (stylus profilometry) . . , 4 9 X- 10, 11 . . , i) ii) . KS C 6111 5:2008 Measurements of the thickness of superconductor films at microwave frequencies 1 . . ： 50 GHz ： 400 nm 5 % ： 15 mm 2 . . ( ) . KS C IEC 60050 815： 2004, 815： 3 ( ) ZS Et Ht . Z

4、S Et/Ht RS j XS (1) RS： XS： 4 (RSeff) TE021 TE012 (Q0) . RSeff RSeff . 30 K 80 KKS C 6111 5:2008 2 5 % . 5 5.1 KS C 6111 3( ) , ( 1 ). (network analyzer), (cryocooler), , . 1 7 2 8 3 9 4 10 5 11 6 12 1 5.2 KS C 6111 3 , ( 2 ). . (opticlean) . , Be-Cu KS C 6111 5:2008 3 . / TE , Z . 2 RS 2 (10 m) . 2

5、 / (on/off) . 2 . 5.3 RS tan (77 K, 10 GHz 10 6 ) (tan 77 K, 10 GHz 10 6). 1 . tan TE012 TE021 Qo 2 . 1 2 tan . 2 f1 tan tan f f2 tan . RS , . Be Cu m KS C 6111 5:2008 4 1 TE012 TE021 mm mm TE012 GHz TE021 GHz 5.00 2.86 40.03 39.93 5.4 , (hollow cylinder) 3 . TE021 , 3 . , 0.1 mm . 2 . 2 mm mm mm 14

6、.00 12 2.96 6 6.1 88 K , 14 mm214 mm2( 14 mm) YBCO LaAlO3 (001) MgO(100) CeO2- r-cut , . 6.2 KS C 6111 3 , 1 . , . , . . , . 6.3 (tan) RS tan TE021 . TE012 TE021 Q0 2 , KS C 6111 3 . . KS C 6111 5:2008 5 6.3.1 . 2- . a) 2- . b) , (through-connector) . c) , S21ref TE021 80 K . , . 6.3.2 a) , ( 1). (

7、2 3), (semi-rigid) . . . b) . c) TE012 TE021 . d) 3 TE012 ( TE021 ) . 3 S21 e) f0 (half power band width) f . (QL) . dB f0IA3.01 dBf3dBKS C 6111 5:2008 6 ffQ0L= (2) f) Q0 IL(dB)( 3 IA .) QL . IL(dB) 6.3.1 . f0 IL0(dB) IL0(dB) 20 log10(S21) , S21ref ILref(dB) 20 log10(S21ref) ILref(dB) IL(dB) IL0(dB)

8、 ILref(dB) . Q0 . 200101ILQLQ= (3) (IL 30 dB) . . Q0 KS C 6111 3 . g) TE012 TE021 f0 Q0 . 4 S11 S22 6.4 (p- ) Q0p p- Rs, tan . ppsSpptSppbSppp0tan1+= kRCRBRAQ (4) RSpt , RSpb , RSps , kp , tanp , Ap , Bp , Cp . Ap, Bp, Cp, kp p- Ohm() . KS C 6111 3 . (4) , Q0p p- RSps . tanp 80 K f0 S11 S2210KS C 61

9、11 5:2008 7 . TE012 TE021 RSps RS1s RS2s . p 1, 2 TE012 TE021 . 3 1/Ap 1/Bp 1/Cp kp TE012 585 585 9.781080.994 6 TE021 1 771 1 771 250 943 0.954 6 6.5 tan tan TE021 . TE012 f01 Q01 TE021 f02 Q02 tan, RSpt, RSpb . fs2p0tspbs20pbspp0p,tantanRffRRffRff= (5) f02 tan RSt . =21121tankAkA+ sS221sS112tS2112

10、021012)( RCARCARBABAQAQA (6) =2112ts1kAkAR+ s112s221tS2111012021)(SSRCkRCkRkBkBQkQk (7) ffkkffBBffAAp0ppkp0ptpk0ppp, = , f f02 . RSb RSt 6.4 RS1s RS2s Q01 Q02 f02 tan2 RS2b . 6.6 6.4 TE021- Q0 RSeff (4) . RSeff , RSeff . KS C 6111 3 . KS C 6111 5:2008 8 6.6.1 , , . 3 . 6.6.2 6.6.1 5 . 5 t1 t5 T1, T2

11、 T3(T1 T2 T3) . 7 7.1 2 . 3 . 3 70 dB 10 GHz 1 Hz 0.1 dB 17 dBm KS C 6111 5:2008 9 4 0.05 mm 0.05 mm 0.005 mm ： 10 nm r.m.s. ： 0.001 mm r.m.s. 0.1 c- (0.3 ) 7.2 . , . . , , . . 8 8.1 . a) b) c) (lot) d) e) f) 8.2 RSeff, tan, . 8.3 . a) b) c) , , d) KS C 6111 5:2008 10 A ( ) A.1 GHz . , KS C 6111 3 , . A.2 . . A.3 A.3.1 Q0 (Q0), , . KS C 6111 3 . A.3.2 (ZS) (ZSeff) A.1 TE0mp ZS ZSeff . KS C 6111 5:2008 11 1 2 3 4,5 (OFHC) . A.1 KS C 6111 3 ZS ZSeff . SSz33zh3z3zheffS)coth()coth(/GZZttZ =