KS C 6521-2008 Method of evaluation for coating components of semiconductor and LCD process《半导体 LCD工艺涂层评估方法》.pdf

《KS C 6521-2008 Method of evaluation for coating components of semiconductor and LCD process《半导体 LCD工艺涂层评估方法》.pdf》由会员分享，可在线阅读，更多相关《KS C 6521-2008 Method of evaluation for coating components of semiconductor and LCD process《半导体 LCD工艺涂层评估方法》.pdf（20页珍藏版）》请在麦多课文档分享上搜索。

1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS C 6521 /LCD KS C 6521:2008 2008 11 28 http:/www.kats.go.krKS C 6521:2008 : ( ) ( ) FITI ( ) : (http:/www.standard.go.kr) ： ： 2008 11 28 2008-0839 ： ： ( 02-509-7294) (http:/www.kats.go.kr). 10 5 , . KS C 6521:2008 i ii .1 1 1 2 .1 3 2 3.1 .2 3.2 .3 3.3 3 4

2、 3 5 3 5.1 3 5.2 .4 6 4 6.1 .4 6.2 .4 6.3 5 6.4 .5 6.5 .5 6.6 .5 6.7 6 6.8 7 6.9 .8 A( ) 9 B( ) .10 C( ) .11 KS C 6521:2008 .12 KS C 6521:2008 ii (ISO) , (KS) . . , , . , , . KS C 6521:2008 /LCD Method of evaluation for coating components of semiconductor and LCD process /LCD , . , , , . . . . . . 1

3、 /LCD (CVD) , , . 2 . 2.1 (leakage current) . 2.2 2.3 KS C 6521:2008 2 2.4 2.5 (corrosion chamber) 2.6 B.1 . 2.7 (breakdown voltage) 3 3.1 . , . a) b) c) /LCD (1 ) (1 ) (1 ) (2 ) (2 ) (2 ) KS C 6521:2008 3 3.2 (probe station) , , . a) . b) (balance) 0.1 mg . c) . 3.3 3 , . 3 . 70 10 . , . 4 4.1 /LCD

4、 , 20 mm20 mm . 4.2 , 100 % . . 4.3 , 1 . . ( , ) . 4.4 (thermo couple) . 4.5 1.010 2 torr , . 5 5.1 20 mm20 mm . KS C 6521:2008 4 5.2 1 . a) 200 mm, 120 mm (teflon) 20 mm . b) 6.35 mm , . c) 1.010 2 torr . d) ( 100 ) . e) . f) 1 . g) 1 . 6 6.1 . 6.2 5. 1, 2 . ： mm 1 KS C 6521:2008 5 ： mm 2 6.3 . 6.

5、4 4.1 . 6.5 a) 1) 20 2 , 65 %5 % 2) 3) 4) 0 V 40 V b) 1) 100 % 2) (25 100 )1 3) 3 . c) 1) 20 2 , 65 %5 % 2) 3) 4) 0 (V) 6.6 KS C 6521:2008 6 . a) 1) . 2) . 3) 0 V 40 V 0.05 V . 4) . 5) 3 . b) 1) 70 . 2) . 3) . 4) 5 . . 5) 70 10 . 6) . 7) . c) ( ) 1) . 2) 5 . d) 1) . 2) 0 V 1 KV , 10 V . 3) . 4) . 6.

6、7 a) 1) . 2) 5 . 1) . 2) . 3) 0 V 40 V , 0.05 V . 4) . 5) 3 . 1) . 2) 0 V 1 KV , 10 V . KS C 6521:2008 7 3) . 4) . b) 1) 70 . 2) ( ). 3) . 4) 5 . . 5) 70 10 . 6) . 7) . c) 1) . 2) 5 . 1) . 2) . 3) 0 V 40 V , 0.05 V . 4) . 5) 3 . 1) . 2) 0 V 1 KV , 10 V . 3) . 4) . 6.8 a) 1) 0 . 2) C 1 . b) 1) ( , ).

7、 2) . 3) C 2 . KS C 6521:2008 8 c) 1) (DC, AC ). 2) C 3 . 6.9 . a) b) c) d) e) , f) , g) , h) i) KS C 6521:2008 9 A ( ) . ( ) . A.1 . 60 60 . . A.2 . A.3 A.1 . A.1 1/4 ( 100 ) KS C 6521:2008 10 B ( ) B.1 a) 1 , 2 . b) UL 1492, UL 60950 . c) 1 , 2 , . B.1 5 mm0.1 KS C 6521:2008 11 C ( ) 1 , 2 3 0.035

8、0.0300.0250.0200.0150.0100.0050.000(g) 10 0 10 20 30 40 50 60 70 80 (h) 10.10.01(I) 200 400 600 800 1 000 (V) KS C 6521:2008 12 KS C 6521:2008 , . 1 1.1 /LCD , . . . . . 1.2 “ /LCD ” . / , / , / 2 KS ( ) a) /LCD . , “ /LCD ” . b) . 3 . 4 ( 1.) /LCD KS C 6521:2008 13 , , . 5 5.1 ( 3.) . . 5.2 ( 4.) .

9、 5.3 ( 5.) , . 5.4 ( 6.) . 5.5 ( A, B, C) , , , . /LCD 135513 7017 (02)60094114 (02)600948878 http:/ KS C 6521:2008 KSKSKS SKSKS KSKS SKS KS SKS KSKS SKSKS KSKSKS Method of evaluation for coating components of semiconductor and LCD process ICS 31.080 Korean Agency for Technology and Standards http:/www.kats.go.kr