BS PD IEC TS 62878-2-4-2015 Device embedded substrate Guidelines Test element groups (TEG)《装置内埋基板 指南 测试元件组 (TEG)》.pdf
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1、BSI Standards Publication Device embedded substrate Part 2-4: Guidelines Test element groups (TEG) PD IEC/TS 62878-2-4:2015National foreword This Published Document is the UK implementation of IEC/TS 62878-2-4:2015. The UK participation in its preparation was entrusted to Technical Committee EPL/501
2、, Electronic Assembly Technology. A list of organizations represented on this committee can be obtained on request to its secretary. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Insti
3、tution 2015. Published by BSI Standards Limited 2015 ISBN 978 0 580 82121 9 ICS 31.180; 31.190 Compliance with a British Standard cannot confer immunity from legal obligations. This Published Document was published under the authority of the Standards Policy and Strategy Committee on 30 April 2015.
4、Amendments/corrigenda issued since publication Date Text affected PUBLISHED DOCUMENT PD IEC/TS 62878-2-4:2015 IEC TS 62878-2-4 Edition 1.0 2015-03 TECHNICAL SPECIFICATION SPECIFICATION TECHNIQUE Device embedded substrate Part 2-4: Guidelines Test element groups (TEG) Substrat avec appareil(s) intgr(
5、s) Partie 2-4: Directives Groupes dlments dessai (TEG) INTERNATIONAL ELECTROTECHNICAL COMMISSION COMMISSION ELECTROTECHNIQUE INTERNATIONALE ICS 31.180; 31.190 ISBN 978-2-8322-2435-9 Registered trademark of the International Electrotechnical Commission Marque dpose de la Commission Electrotechnique I
6、nternationale Warning! Make sure that you obtained this publication from an authorized distributor. Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agr. colour inside PD IEC/TS 62878-2-4:2015 2 IEC TS 62878-2-4:2015 IEC 2015 CONTENTS FOREWORD . 4 INTRODUCT
7、ION . 6 1 Scope 7 2 Normative references. 7 3 Terms, definitions and abbreviations 7 3.1 Terms and definitions 7 3.2 Abbreviations 7 4 Test conditions and sample preparation . 7 4.1 General . 7 4.2 Test conditions 7 4.2.1 Classification of tests and evaluation 7 4.2.2 Measuring environment 8 4.2.3 T
8、est methods . 8 4.3 Test specimens and number of specimens . 8 4.3.1 Specimen. 8 4.3.2 Number of specimens. 9 4.3.3 Test report . 9 5 TEG 9 5.1 Preparation of the TEG 9 5.2 Structures of TEG . 17 5.3 Test pattern guide . 18 5.3.1 Test items 18 5.3.2 Area array arrangement of TEG for an active device
9、 . 19 5.3.3 Peripheral arrangement of TEG 20 5.3.4 TEG size for active devices 23 5.3.5 TEG for passive devices. 24 5.3.6 Complex test pattern for the area arrangement, TEG-A . 24 5.3.7 Complex pattern for area arrangement of TEG-B 27 5.3.8 Complex test pattern for peripheral arrangement 29 5.3.9 Co
10、mplex test pattern for passive components . 30 5.3.10 Guide of measurement terminals of a complex test pattern for an active device 33 5.3.11 Terminal arrangement using complex patterns 34 Bibliography . 36 Figure 1 Area array arrangement TEG for conductor resistivity and via-to-via insulation 10 Fi
11、gure 2 Area array arrangement TEG for insulation measurement of resistance between conductors and insulation resistance between layers . 11 Figure 3 Chip arrangement in a shot . 12 Figure 4 Shot arrangement in a wafer . 13 Figure 5 Pitch chip specification of peripheral terminal of 60m TEG . 14 Figu
12、re 6 Peripheral arrangement of TEG for complex tests . 15 Figure 7 Chip arrangement in a shot . 16 Figure 8 Shot arrangement in a wafer . 16 Figure 9 Structure of test board and pad connection . 17 PD IEC/TS 62878-2-4:2015IEC TS 62878-2-4:2015 IEC 2015 3 Figure 10 Structure of a test board and via c
13、onnection 17 Figure 11 Area array arrangement 19 Figure 12 Peripheral arrangement of TEG 21 Figure 13 Example of pad arrangement of peripherals 22 Figure 14 TEG size of active device . 23 Figure 15 TEG for passive device . 24 Figure 16 Test pattern for conduction and insulation resistance between vi
14、as (seen from L6) 25 Figure 17 Complex test patterns for conduction and via-to-via insulation . 26 Figure 18 Test patterns for insulation between conductor and between layers in an area array arrangement 27 Figure 19 Complex test patterns for L1 to L6 for insulation between conductors and layers . 2
15、8 Figure 20 L1 to L6 complex test patterns for the peripheral arrangement . 29 Figure 21 Conduction test patterns for L1 to L6 of passive components . 30 Figure 22 Insulation test patterns between terminals for L1 to L6 of passive components 31 Figure 23 Interlayer insulation test patterns of L1 to
16、L6 of passive components . 32 Figure 24 Terminal arrangement (1) for measurement and evaluation using complex pattern for an active device . 33 Figure 25 Terminal arrangement (2) for measurement and evaluation using complex pattern for an active device . 34 Figure 26 Terminal arrangement for measure
17、ment and evaluation using complex pattern for passive device . 35 Figure 27 Terminal arrangement for measurement and evaluation using complex pattern for device embedded substrate 35 Table 1 Application and embedded device 8 Table 2 Measuring environment . 8 Table 3 Test items . 18 Table 4 Terminal
18、dimensions 20 Table 5 Detailed dimensions of the peripheral arrangement of TEG 21 Table 6 Detailed dimensions of the peripheral arrangement of pad connections . 22 Table 7 Dimension of passive device TEG 24 Table 8 Dimensions of the area array arrangement of TEG-A 25 Table 9 Dimensions of TEG-B for
19、the area array arrangement . 27 PD IEC/TS 62878-2-4:2015 4 IEC TS 62878-2-4:2015 IEC 2015 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ DEVICE EMBEDDED SUBSTRATE Part 2-4: Guidelines Test element groups (TEG) FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization f
20、or standardization comprising all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publi
21、shes International Standards, Technical Specifications, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may p
22、articipate in this preparatory work. International, governmental and non- governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreemen
23、t between the two organizations. 2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees. 3) IEC Publ
24、ications have the form of recommendations for international use and are accepted by IEC National Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or
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