IEC 60204-33-2009 Safety of machinery - Electrical equipment of machines - Part 33 Requirements for semiconductor fabrication equipment《机械安全性.机器电动设备.第33部分 半导体制造设备要求》.pdf

《IEC 60204-33-2009 Safety of machinery - Electrical equipment of machines - Part 33 Requirements for semiconductor fabrication equipment《机械安全性.机器电动设备.第33部分 半导体制造设备要求》.pdf》由会员分享，可在线阅读，更多相关《IEC 60204-33-2009 Safety of machinery - Electrical equipment of machines - Part 33 Requirements for semiconductor fabrication equipment《机械安全性.机器电动设备.第33部分 半导体制造设备要求》.pdf（252页珍藏版）》请在麦多课文档分享上搜索。

1、 IEC 60204-33Edition 1.0 2009-12INTERNATIONAL STANDARD NORME INTERNATIONALESafety of machinery Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment Scurit des machines Equipement lectrique des machines Partie 33: Exigences pour les quipements de fabrication

2、des semi-conducteurs IEC60204-33:2009 THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2009 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopyi

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16、ou si vous avez des questions, visitez le FAQ du Service clients ou contactez-nous: Email: 11Hcsciec.ch Tl.: +41 22 919 02 11 Fax: +41 22 919 03 00 IEC 60204-33Edition 1.0 2009-12INTERNATIONAL STANDARD NORME INTERNATIONALESafety of machinery Electrical equipment of machines Part 33: Requirements for

17、 semiconductor fabrication equipment Scurit des machines Equipement lectrique des machines Partie 33: Exigences pour les quipements de fabrication des semi-conducteursINTERNATIONAL ELECTROTECHNICAL COMMISSION COMMISSION ELECTROTECHNIQUE INTERNATIONALE XFICS 13.110; 25.040.30; 29.020 PRICE CODECODE P

18、RIXISBN 2-8318-1068-6 Registered trademark of the International Electrotechnical Commission Marque dpose de la Commission Electrotechnique Internationale 2 60204-33 IEC:2009 CONTENTS FOREWORD. 2H10 INTRODUCTION. 3H12 1 Scope. 4H13 2 Normative references 5H14 3 Terms and definitions . 6H15 4 General

19、requirements . 7H25 4.1 General considerations 8H25 4.2 Selection of electrical equipment 9H26 4.3 Electrical supply 10H26 4.3.1 General . 11H26 4.4 Physical environment and operating conditions 12H26 4.4.1 General . 13H26 4.4.2 Contaminants 14H27 4.4.3 Ionizing and non-ionizing radiation . 15H27 4.

20、4.4 Vibration, shock, and bump 16H27 4.5 Transportation and storage 17H27 4.6 Provisions for handling 18H27 4.7 Installation. 19H27 5 Incoming supply conductor terminations and devices for disconnecting and switching off . 20H27 5.1 Incoming supply conductor terminations. 21H27 5.1.1 General . 22H27

21、 5.1.2 Termination of the supply conductors . 23H27 5.1.3 Neutral conductor 24H28 5.1.4 Terminal identification 25H28 5.2 Terminal for connection to the external protective earthing system . 26H28 5.3 Supply disconnecting (isolating) device 27H28 5.3.1 General . 28H28 5.3.2 Type 29H29 5.3.3 Requirem

22、ents 30H29 5.3.4 Operating means . 31H30 5.3.5 Supply disconnecting device mounting . 32H30 5.3.6 Supply disconnecting device door interlock. 33H30 5.3.7 UPS disconnection. 34H30 5.4 Additional disconnecting devices 35H31 5.5 Protection against unauthorized, inadvertent and/or mistaken connection of

23、 plug/socket combination 36H31 6 Protection against electric shock. 37H31 6.1 General . 38H31 6.2 Protection against direct contact 39H31 6.2.1 General . 40H31 6.2.2 Protection by enclosures 41H32 6.2.3 Protection by insulation of live parts . 42H32 6.2.4 Protection against residual voltages . 43H32

24、 6.3 Protection against indirect contact . 44H33 6.3.1 General . 45H33 6.3.2 Prevention of the occurrence of a touch voltage . 46H33 60204-33 IEC:2009 3 6.3.3 Protection by automatic disconnection of supply. 47H34 6.4 Protection by the use of PELV 48H35 6.4.1 General requirements 49H35 6.4.2 Sources

25、 for PELV 50H35 6.4.3 Design to minimise risks of live working . 51H36 6.5 Protection of skilled persons and instructed persons against inadvertent contact with hazardous-live-parts . 52H36 6.5.1 General . 53H36 6.5.2 Obstacles 54H36 6.5.3 Probe holes . 55H36 7 Protection of equipment 56H36 7.1 Gene

26、ral . 57H36 7.2 Overcurrent protection . 58H37 7.2.1 General . 59H37 7.2.2 Supply conductors . 60H37 7.2.3 Neutral conductor protection 61H37 7.2.4 Socket outlets and their associated conductors 62H37 7.2.5 Lighting circuits 63H37 7.2.6 Transformers. 64H37 7.2.7 Location of overcurrent protective de

27、vices 65H37 7.2.8 Overcurrent protective devices. 66H38 7.2.9 Rating and setting of overcurrent protective devices. 67H38 7.3 Protection of motors against overheating . 68H39 7.3.1 General . 69H39 7.3.2 Overload protection 70H40 7.3.3 Over-temperature protection 71H40 7.4 Motor overspeed protection

28、72H40 7.5 Abnormal temperature detection 73H40 7.6 Protection against supply interruption or voltage reduction and subsequent restoration . 74H41 7.7 Earth fault/residual current protection. 75H41 7.8 Phase sequence protection 76H41 7.9 Protection against overvoltages due to lightning and to switchi

29、ng surges 77H41 7.10 Electrolytic capacitors 78H41 8 Equipotential bonding . 79H42 8.1 General . 80H42 8.2 Protective bonding circuit. 81H44 8.2.1 General . 82H44 8.2.2 Protective conductors 83H45 8.2.3 Continuity of the protective bonding circuit . 84H45 8.2.4 Exclusion of switching devices from th

30、e protective bonding circuit 85H46 8.2.5 Protective conductor connecting points 86H46 8.2.6 Mobile machines 87H46 8.2.7 Limitation of touch current on cord and plug connected equipment . 88H47 8.3 Functional bonding 89H47 8.4 Measures to limit the effects of high leakage current 90H47 9 Control circ

31、uits, emergency off (EMO), and protective interlock circuits . 91H47 9.1 Control circuits 92H47 9.1.1 Control circuit supply . 93H47 4 60204-33 IEC:2009 9.1.2 DC circuits derived from an a.c. supply 94H47 9.1.3 Start functions . 95H47 9.1.4 Stop functions 96H48 9.1.5 Operating modes . 97H48 9.1.6 Mu

32、ltiple control stations . 98H48 9.2 Emergency Off (EMO) . 99H48 9.2.1 General . 100H48 9.2.2 Circuits to be de-energized 101H49 9.2.3 Requirements for EMO circuits. 102H49 9.3 Operations other than emergency off . 103H49 9.3.1 General . 104H49 9.3.2 Start 105H49 9.3.3 Stop. 106H50 9.3.4 Other contro

33、l functions. 107H50 9.3.5 Cableless control . 108H51 9.4 Protective interlocks 109H51 9.4.1 General . 110H51 9.4.2 Protective interlock circuit design . 111H51 9.5 Suspension of safety functions and/or protective measures 112H53 10 Operator interfaces. 113H53 10.1 General . 114H53 10.1.1 General dev

34、ice requirements . 115H53 10.1.2 Location and mounting. 116H53 10.1.3 Degree of protection 117H53 10.1.4 Portable and pendant control stations 118H54 10.2 Push-buttons . 119H54 10.2.1 Colours 120H54 10.2.2 Markings 121H55 10.3 Indicator lights. 122H55 10.3.1 General . 123H55 10.3.2 Colours 124H55 10

35、.3.3 Flashing lights and displays . 125H56 10.4 Illuminated push-buttons 126H56 10.5 Rotary control devices . 127H56 10.6 Start devices . 128H56 10.7 Emergency off devices. 129H56 10.8 Emergency stop devices 130H57 10.9 Enabling control device 131H57 11 Controlgear: location, mounting, and enclosure

36、s . 132H57 11.1 General requirements 133H57 11.2 Location and mounting. 134H58 11.2.1 Accessibility and maintenance 135H58 11.2.2 Physical separation or grouping . 136H59 11.2.3 Heating effects 137H59 11.3 Degrees of protection 138H59 11.4 Enclosures for electrical equipment 139H59 11.4.1 General .

37、140H59 11.4.2 Fasteners 141H59 11.4.3 Windows 142H59 60204-33 IEC:2009 5 11.4.4 Doors 143H59 11.4.5 Openings. 144H59 11.4.6 High surface temperatures. 145H60 11.4.7 Containment of molten material or burning insulation 146H60 11.4.8 Enclosures that can be fully entered. 147H60 11.4.9 Clearance for ac

38、cess to electrical equipment 148H60 12 Conductors and cables . 149H62 12.1 General requirements 150H62 12.2 Insulation. 151H62 12.2.1 General . 152H62 12.2.2 Fire propagation and fume emissions. 153H62 12.2.3 Printed circuit boards . 154H62 12.3 Current-carrying capacity. 155H63 12.4 Conductor and c

39、able voltage drop 156H63 12.5 Flexible cables. 157H63 12.5.1 General . 158H63 12.5.2 Flexible cables inside enclosures or ducts 159H63 12.5.3 Mechanical rating in cable handling systems 160H63 13 Wiring practices 161H64 13.1 Connections and routing 162H64 13.1.1 General requirements 163H64 13.1.2 Co

40、nductor and cable runs 164H65 13.1.3 Conductors of different circuits. 165H65 13.1.4 Conductors smaller than 50 mm2. 166H65 13.1.5 Temperature exposure of conductors . 167H65 13.1.6 Terminal temperatures. 168H65 13.2 Multi-outlet assemblies 169H65 13.3 Plug/socket combinations 170H66 13.4 Identifica

41、tion of conductors 171H66 13.4.1 General requirements 172H66 13.4.2 Identification of the protective conductor 173H66 13.4.3 Identification of the neutral conductor by colour 174H67 13.4.4 Identification by colour . 175H67 13.4.5 Wiring inside enclosures 176H67 13.5 Wiring outside enclosures 177H68

42、13.5.1 General requirements 178H68 13.5.2 Plug/socket combinations external to electrical enclosures. 179H68 13.5.3 Cables and conductors external to the electrical enclosure. 180H68 13.5.4 Ducts 181H69 13.5.5 Pendant control stations 182H69 13.5.6 Strain relief 183H69 13.5.7 Protection of flexible

43、cables . 184H69 13.5.8 Clearance between cables and moving parts 185H69 13.5.9 Clearance between flexible conduit and moving parts. 186H69 13.5.10 Interconnection of electrical equipment 187H69 13.5.11 Dismantling for shipment . 188H70 13.6 Ducts, connection boxes and other boxes 189H70 13.6.1 Gener

44、al . 190H70 13.6.2 Cable trunking systems 191H70 6 60204-33 IEC:2009 13.6.3 Fabrication equipment compartments and cable trunking systems 192H71 13.6.4 Connection boxes and other boxes. 193H71 14 Electric motors and associated equipment 194H71 14.1 General requirements 195H71 14.2 Remotely installed

45、 motors 196H71 14.3 Motor dimensions 197H71 14.4 Motor mounting and compartments 198H72 15 Accessories and lighting . 199H72 15.1 Accessories. 200H72 15.2 Local lighting of the fabrication equipment 201H72 15.2.1 General . 202H72 15.2.2 Supply . 203H72 15.2.3 Protection 204H73 15.2.4 Fittings 205H73

46、 16 Marking, warning signs and reference designations. 206H73 16.1 General . 207H73 16.2 Electric shock hazard warning signs. 208H73 16.3 Functional identification . 209H73 16.4 Equipment nameplate 210H73 16.5 Reference designations . 211H74 17 Technical documentation 212H74 17.1 General . 213H74 17

47、.2 Information to be provided . 214H74 17.3 Requirements applicable to all documentation 215H75 17.4 Installation documents . 216H75 17.4.1 General . 217H75 17.4.2 Supply cables 218H75 17.4.3 Overcurrent protection devices. 219H75 17.4.4 Ducts, cable trays, or cable supports 220H76 17.4.5 Diagrams.

48、221H76 17.5 Overview diagrams and function diagrams . 222H76 17.6 Circuit diagrams 223H76 17.7 Operating documentation. 224H77 17.8 Maintenance documentation 225H77 17.8.1 General . 226H77 17.8.2 Identification of replacement parts 227H77 18 Testing . 228H77 18.1 General . 229H77 18.1.1 Test schedul

49、e 230H77 18.1.2 Test conditions 231H77 18.2 Earthing continuity and continuity of the protective bonding circuit test . 232H78 18.2.1 General . 233H78 18.2.2 Test equipment 234H78 18.2.3 Procedure 1. 235H78 18.2.4 Procedure 2. 236H78 18.2.5 Acceptable results . 237H79 18.3 Touch current test for cord and plug connected electrical equipment 238H79 18.3.1 Application. 239H79 18.3.2 Test equipment 240H79 60204-33 IEC:2009 7 18.3.3 Procedure