JEDEC JEP132-1998 Process Characterization Guideline《处理特性指南》.pdf

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1、 JEDEC PUBLICATION Process Characterization Guideline JEP132 JULY 1998 (Reaffirmed: SEPTEMBER 2003, JANUARY 2007) ELECTRONIC INDUSTRIES ALLIANCE NOTICE JEDEC standards and publications contain material that has been prepared, reviewed, and approved through the JEDEC Board of Directors level and subs

2、equently reviewed and approved by the JEDEC legal counsel. JEDEC standards and publications are designed to serve the public interest through eliminating misunderstandings between manufacturers and purchasers, facilitating interchangeability and improvement of products, and assisting the purchaser i

3、n selecting and obtaining with minimum delay the proper product for use by those other than JEDEC members, whether the standard is to be used either domestically or internationally. JEDEC standards and publications are adopted without regard to whether or not their adoption may involve patents or ar

4、ticles, materials, or processes. By such action JEDEC does not assume any liability to any patent owner, nor does it assume any obligation whatever to parties adopting the JEDEC standards or publications. The information included in JEDEC standards and publications represents a sound approach to pro

5、duct specification and application, principally from the solid state device manufacturer viewpoint. No claims to be in conformance with this standard may be made unless all requirements stated in the standard are met. Inquiries, comments, and suggestions relative to the content of this JEDEC standar

6、d or publication should be addressed to JEDEC at the address below, or call (703) 907-7559 or www.jedec.org Published by JEDEC Solid State Technology Association 2004 2500 Wilson Boulevard Arlington, VA 22201-3834 This document may be downloaded free of charge; however JEDEC retains the copyright on

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8、EASE! DONT VIOLATE THE LAW! This document is copyrighted by JEDEC and may not be reproduced without permission. Organizations may obtain permission to reproduce a limited number of copies through entering into a license agreement. For information, contact: JEDEC Solid State Technology Association 25

9、00 Wilson Boulevard Arlington, Virginia 22201-3834 or call (703) 907-7559 JEDEC Publication No. 132 -i- PROCESS CHARACTERIZATION GUIDELINE Contents Page Introduction iii 1 Scope 1 2 Terms and definitions 1 3 References 1 3.1 Government Documents 1 3.2 Industry Standards 1 3.3 Examples of Process Cha

10、racterization Related Documents 1 4 General requirements 2 4.1 Description of Process Characterization Flow 2 4.1.1 Identify process 2 4.1.2 Define process 2 4.1.3 Determine characteristics and measurables 2 4.1.4 Perform gauge studies 2 4.1.5 Collect data 2 4.1.6 Characterize process repeatability

11、3 4.1.7 Does process meet requirements 3 4.1.8 Perform capability study 3 4.1.9 Is process acceptable 3 4.1.10 Process improvement 3 4.1.11 Is process in control 3 4.1.12 Corrective action to remove special causes 3 4.1.13 Maintenance 4 4.2 Tools 4 4.2.1 Capability analysis 4 4.2.1.1 Examples of cap

12、ability analysis 4 4.2.2 Cost models 5 4.2.3 Data collection 5 4.2.4 DOE 5 4.2.5 Expert systems 6 4.2.5.1 Example of expert systems 6 4.2.6 Finite element modeling and analysis 6 4.2.7 Flow charting/process mapping 6 4.2.7.1 Examples of flow charting/process mapping 6 4.2.8 FMEA 7 4.2.8.1 Examples o

13、f FMEA 7 4.2.9 Modeling 7 4.2.10 Measurement system evaluation/analysis (MSE/MSA, including gauge studies) 7 4.2.10.1 Example of MSE/MSA 7 4.2.11 Problem solving 8 4.2.11.1 Problem solving tools 8 4.2.11.1.1 Bar chart 8 4.2.11.1.2 Control chart 8 4.2.11.1.3 Fishbone (Cause-and-effect) diagram 8 4.2.

14、11.1.4 Histogram 8 4.2.11.1.5 Pareto chart 8 4.2.11.1.6 Scatter plots 8 JEDEC Publication No. 132 -ii- Contents (concluded) Page 4.2.11.1.7 Time line chart 9 4.2.11.2 Examples of problem solving tools 9 4.2.12 Statistical analysis 9 4.2.12.1 Examples of statistical analysis 9 4.2.13 Statistical proc

15、ess control (SPC) 9 4.2.13.1 Short production run process control 9 4.2.13.2 Example of SPC 10 4.2.14 Yield analysis 10 4.3 Management commitment 10 4.4 Process characterization documentation 10 4.5 Training 11 4.6 Calibration 11 4.7 Self assessment 11 ANNEXES A Process Characterization Flow 12 B Te

16、rms and Definitions 14 C Examples of Process Characterization Related Documents 17 D Failure Mode and Effects Analysis (FMEA) 19 E Exa mple of MSE/MSA 20 F Example o Problem Solving 24 G Example of Statistical Analysis 25 H Example of Statistical Process Control 26 I Self Assessment 27 JEDEC Publica

17、tion No. 132 -iii- PROCESS CHARACTERIZATION GUIDELINE Introduction Process characterization is an essential element of process control. A process is a combination of people, procedures, methods, machines, materials, measurement equipment, and/or environment for specific work activities to produce a

18、given product or service. When properly defined and controlled, it is a repeatable sequence of activities with measurable inputs and outputs. The characterization of a process defines distinguishing features of a process or its output on which variables or attributes data may be collected. Thus, thr

19、ough process characterization, a manufacturer may define and measure the stability, repeatability, sensitivity, and robustness of a process. Additionally, it supplies inputs for modeling which may be used to identify critical variables, optimize efficiency and output, and provide avenues for continu

20、ous improvement. Furthermore, once process characterization has been established, the process predictability may be used for self validation rather than auditing. Management support is essential to the effective implementation and maintenance of a process characterization system. In this manner, the

21、 manufacturer determines appropriate characteristics for each critical process node. Target values for each characteristic chosen will be determined with variability around that value to be identified, quantified, and minimized to acceptable process performance levels. These steps involve the use of

22、 various techniques (e.g., DOE, off-line data analysis, process mapping, customer request, etc.). Process characterization and capability studies shall describe the process limitations with respect to critical characteristics. Both long and short term capability studies shall be performed and docume

23、nted. Results must be substantiated by data. Process/product parameters for each node may change as process flow, process techniques, equipment, or other pertinent factors change. The expected conclusion to each clause of the characterization process is implementation of recommended actions and proc

24、ess changes. Implementation should result in tangible and measurable performance improvements, as well as identification of such things as important variables and process capabilities, that result in a controlled process. While this document was reaffirmed in September 2003 it does not match the ori

25、ginal version published in July 1998. It was noted that the original version did not conform with JM7, JEDEC Style Manual and therefore the document was renumbered in December 2004 and re -posted to the JEDEC website. JEDEC Publication No. 132 -iv- JEDEC Publication No. 132 Page 1 PROCESS CHARACTERI

26、ZATION GUIDELINE (From JEDEC Council Ballot JCB-97-40, formulated under the cognizance of JC-13 Committee: Government Liaison.) 1 Scope This document is applicable to any manufacturing or service process (e.g., customer service, human resources, planning). It may be conducted on part of a process or

27、 on an entire process. While many approaches to process characterization exist, this document is provided as a guideline for analyzing a process. The tools and techniques presented within this guideline are not necessarily the only ones that may be used to gain an understanding of a process. A gener

28、al flow of characterization is presented, along with guidelines for documenting, training, self assessment, and organizational responsibilities. This document provides a general methodology for the characterization of processes to achieve ongoing tangible and measurable performance improvements. 2 T

29、erms and definitions See Annex B. 3 References 3.1 Government Documents MIL-PRF-38534, General Specification for Hybrid Microcircuits MIL-PRF-38535, General Specification for Integrated Circuit (Microcircuits) Manufacturing 3.2 Industry Standards EIA-554, Assessment of Average Outgoing Quality Level

30、s in Parts Per Million (PPM) EIA-557A, General Requirements for Statistical Process Control Systems EIA-599, National Electronic Process Certification Standard EIA-QB6, Guidelines on the Use and Application of CpK JESD43, Component Problem Analysis and Corrective Action Requirements 3.3 Examples of

31、Process Characterization Related Documents See Annex C. JEDEC Publication No. 132 Page 2 4 General requirements A process characterization may be performed by anyone with the knowledge of the process and tools to characterize and maintain the integrity of the effort itself. It is applicable to any p

32、rocess, such as those involving equipment (as in manufacturing) or people (such as finance or human resources). The need for a process characterization is preferably determined proactively - that is, prior to a process being implemented. It can als o be applied, however, when a process has been in p

33、lace over a period of time. Process characterization may also be used as an integral part of an overall process validation. In any case, its intention is to define and reduce the variability using tools and techniques appropriate for the specific step in the characterization process. While the appro

34、ach and tools may be variable from process to process or manufacturer to manufacturer, planning the actual flow of the characterization is critical in understanding its overall implications for success or failure. For example, attempting to control a process may be futile prior to defining and optim

35、izing it. Or, a capability study may be premature if the gauge with which it is performed is inaccurate. Therefore, a careful analysis of the proposed flow of the process characterization and applicable training to personnel involved may render a more thorough and effective effort. Annex A visually

36、portrays the general flow for process characterization and 4.1 herein provides a corresponding description of each clause. Noted next to selected clauses are recommended tools, briefly described in 4.2, that may be applied at that specific point in the flow. The expected conclusion to each clause of

37、 the characterization process is implementation of recommended actions and process changes. Implementation should result in tangible and measurable performance improvements. 4.1 Description of Process Characterization Flow (Also see Annex A.) 4.1.1 Identify Process At the beginning of process charac

38、terization, the process is identified and its performance requirements are established. If these performance requirements have not been met (based on sufficient data analysis later on in the process characterization flow), process identification is reexamined. 4.1.2 Define Process Using appropriate

39、analysis tools, the elements or variables that make up a process (such as equipment, personnel, materials, environments) are identified. This should include the known inputs and desired outputs. 4.1.3 Determine Characteristics and Measurables The characteristics, including measurables, are defined a

40、nd evaluated. 4.1.4 Perform Gauge Studies Gauge studies are performed to understand and minimize the source of measurement error. 4.1.5 Collect Data Methodologies are defined and implemented for assimilation of data. JEDEC Publication No. 132 Page 3 4 General requirements (contd) 4.1 Description of

41、Process Characterization Flow (contd) 4.1.6 Characterize Process Repeatability Data is collected for a defined interval without process changes and analyzed in order to characterize and predict process repeatability. 4.1.7 Does Process Meet Requirements Process characteristics and product parameters

42、 are evaluated against short and long term requirements of the process and the business. A determination is made if sufficient data was collected, if the process is repeatable and if the proper characteristics were selected. 4.1.8 Perform Capability Study Once a process meets the requirements, an an

43、alysis to determine process capability is performed. Process capability is determined by comparing the target to the specification limits and understanding the natural variation of the process due to common causes. Cpks for the process are established at this time. 4.1.9 Is Process Acceptable Based

44、on internal needs, requirements, risk assessments, financials, and logistics, the process acceptability is determined. A determination is made whether process improvement is warranted based on the natural variation of the process. In addition, any recommended improvements are evaluated for impact to

45、 other processes and product characteristics. Forward and backward process interrelationships are established during the process as part of this decision. 4.1.10 Process Improvement Process improvement efforts are made, typically resulting in reduced variability around optimized targets. Other impro

46、vement possibilities include cost reduction, yield increase, throughput increase, and risk reduction. 4.1.11 Is Process in Control Using various process performance analysis tools, the process control status and associated limits are determined. 4.1.12 Corrective Action to Remove Special Causes If t

47、he process has been determined to be in control, variability will occur which may be attributable to natural causes or special causes. Natural causes are considered part of the chance happenstance or “noise” that occurs in processes; typically it is small in number and nature. It is addressed more t

48、horoughly in 4.1.13, “Maintenance”. Special causes, however, are assignable to unnatural, unusual, and typically large events caused by variability in machine settings, raw materials, or operator error. Special causes often drive a process out of control. When a process is identified as such, correc

49、tive action is undertaken and documented, using tools such as Problem Solving. It is imperative that the process minimize the amount of product manufactured out of control. Once special causes have been removed, the process can return to its in-control state and be maintained. JEDEC Publication No. 132 Page 4 4 General requirements (contd) 4.1 Description of Process Characterization Flow (contd) 4.1.13 Maintenance During maintenance, the process performance is periodically evaluated for stability and improvement over time. The process is considered to be in a sustaining mo