EN ISO TS 80004-8-2015 en Nanotechnologies - Vocabulary - Part 8 Nanomanufacturing processes《纳米技术 词汇表 第8部分 纳米制造过程》.pdf

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1、BSI Standards PublicationNanotechnologies VocabularyPart 8: Nanomanufacturing processesPD CEN ISO/TS 80004-8:2015National forewordThis Published Document is the UK implementation of CEN ISO/TS 80004-8:2015. It is identical to ISO/TS 80004-8:2013.The UK participation in its preparation was entrusted

2、to TechnicalCommittee NTI/1, Nanotechnologies.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication does not purport to include all the necessary provisions ofa contract. Users are responsible for its correct application. The British Standa

3、rds Institution 2015.Published by BSI Standards Limited 2015ISBN 978 0 580 88464 1ICS 01.040.07; 07.030Compliance with a British Standard cannot confer immunity fromlegal obligations.This Published Document was published under the authority of theStandards Policy and Strategy Committee on 31 May 201

4、5.Amendments/corrigenda issued since publicationDate Text affectedPUBLISHED DOCUMENTPD CEN ISO/TS 80004-8:2015TECHNICAL SPECIFICATION SPCIFICATION TECHNIQUE TECHNISCHE SPEZIFIKATION CEN ISO/TS 80004-8 May 2015 ICS 07.030; 01.040.07 English Version Nanotechnologies - Vocabulary - Part 8: Nanomanufact

5、uring processes (ISO/TS 80004-8:2013) Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication (ISO/TS 80004-8:2013) Nanotechnologien - Fachwrterverzeichnis - Teil 8: Industrieller Nanoherstellungsprozess (ISO/TS 80004-8:2013) This Technical Specification (CEN/TS) was approved by CEN

6、on 16 May 2015 for provisional application. The period of validity of this CEN/TS is limited initially to three years. After two years the members of CEN will be requested to submit their comments, particularly on the question whether the CEN/TS can be converted into a European Standard. CEN members

7、 are required to announce the existence of this CEN/TS in the same way as for an EN and to make the CEN/TS available promptly at national level in an appropriate form. It is permissible to keep conflicting national standards in force (in parallel to the CEN/TS) until the final decision about the pos

8、sible conversion of the CEN/TS into an EN is reached. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lit

9、huania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17,

10、B-1000 Brussels 2015 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. CEN ISO/TS 80004-8:2015 EPD CEN ISO/TS 80004-8:2015CEN ISO/TS 80004-8:2015 (E) 2 Contents Page Foreword 3 PD CEN ISO/TS 80004-8:2015CEN ISO/TS 80004-8:2015 (E) 3 For

11、eword The text of ISO/TS 80004-8:2013 has been prepared by Technical Committee ISO/TC 229 “Nanotechnologies” of the International Organization for Standardization (ISO) and has been taken over as CEN ISO/TS 80004-8:2015 by Technical Committee CEN/TC 352 “Nanotechnologies” the secretariat of which is

12、 held by AFNOR. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standa

13、rds organizations of the following countries are bound to announce this Technical Specification: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania

14、, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO/TS 80004-8:2013 has been approved by CEN as CEN ISO/TS 80004-8:2015 without any modification. PD CEN ISO/TS 80004-8:2

15、015ISO/TS 80004-8:2013(E) ISO 2013 All rights reserved iiiContents PageForeword ivIntroduction vi1 Scope . 12 Terms and definitions from other parts of ISO/TS 80004 13 General terms 34 Directed assembly . 45 Self-assembly processes . 46 Synthesis . 56.1 Gas process phase Physical methods . 56.2 Gas

16、process phase Chemical methods . 66.3 Liquid process phase Physical methods 76.4 Liquid process phase Chemical methods 86.5 Solid process phase Physical methods 86.6 Solid process phase Chemical methods 107 Fabrication .117.1 Nanopatterning lithography . 117.2 Deposition processes 147.3 Etching proc

17、esses 167.4 Printing and coating 18Annex A (informative) Identification of output resulting from defined synthesis processes 19Annex B (informative) Index 21Bibliography .27PD CEN ISO/TS 80004-8:2015ISO/TS 80004-8:2013(E)ForewordISO (the International Organization for Standardization) is a worldwide

18、 federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that

19、committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this documen

20、t and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives,

21、 Part 2. www.iso.org/directivesAttention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the

22、document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patentsAny trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and ex

23、pressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationISO/TS 80004-8 was prepared jointly by Technical Committee ISO/TC 229, Nanotechnologies, a

24、nd Technical Committee IEC/TC 113, Nanotechnology standardization for electrical and electronic products and systems.Documents in the 80000 to 89999 range of reference numbers are developed by collaboration between ISO and IEC.ISO/TS 80004 consists of the following parts, under the general title Nan

25、otechnologies Vocabulary: Part 1: Core terms Part 3: Carbon nano-objects Part 4: Nanostructured materials Part 5: Nano/bio interface Part 6: Nano-object characterization Part 7: Diagnostics and therapeutics for healthcare Part 8: Nanomanufacturing processesThe following parts are under preparation:

26、Part 2: Nano-objects: Nanoparticle, nanofibre and nanoplate1) Part 9: Nano-enabled electrotechnical products and systems Part 10: Nano-enabled photonic components and systems Part 11: Nanolayer, nanocoating, nanofilm, and related terms Part 12: Quantum phenomena in nanotechnology1) Revises and repla

27、ces ISO/TS 276875.iv ISO 2013 All rights reservedPD CEN ISO/TS 80004-8:2015ISO/TS 80004-8:2013(E)Graphene and other two-dimensional materials is to form the subject of a future part 13. ISO 2013 All rights reserved vPD CEN ISO/TS 80004-8:2015ISO/TS 80004-8:2013(E)IntroductionNanomanufacturing is the

28、 essential bridge between the discoveries of the nanosciences and real-world nanotechnology products.Advancing nanotechnology from the laboratory into volume production ultimately requires careful study of manufacturing process issues including product design, reliability and quality, process design

29、 and control, shop floor operations, supply chain management, workplace safety and health practices during the production, use, and handling of nanomaterials. Nanomanufacturing encompasses directed self assembly and assembly techniques, synthetic methodologies, and fabrication processes such as lith

30、ography and biological processes. Nanomanufacturing also includes bottom-up directed assembly, top-down high resolution processing, molecular systems engineering, and hierarchical integration with larger scale systems. As dimensional scales of materials and molecular systems approach the nanoscale,

31、the conventional rules governing their behaviour may change significantly. As such, the behaviour of a final product is enabled by the collective performance of its nanoscale building blocks.Biological process terms are not included in this first edition of the nanomanufacturing vocabulary, but cons

32、idering the rapid development of the field, it is expected that terms in this important area will be added in a future update to this Technical Specification or in companion documents in the 80004 series. This could include both the processing of biological nanomaterials and the use of biological pr

33、ocesses to manufacture materials at the nanoscale.Similarly, additional terms from other developing areas of nanomanufacturing, including composite manufacturing, roll-to-roll manufacturing, and others, will be included in future documents.There is a distinction between the terms nanomanufacturing a

34、nd nanofabrication. Nanomanufacturing encompasses a broader range of processes than does nanofabrication. Nanomanufacturing encompasses all nanofabrication techniques and also techniques associated with materials processing and chemical synthesis.This document provides an introduction to processes u

35、sed in the early stages of the nanomanufacturing value chain, namely the intentional synthesis, generation or control of nanomaterials, including fabrication steps in the nanoscale. The nanomaterials that result from these manufacturing processes are distributed in commerce where, for example, they

36、may be further purified, be compatabilized to be dispersed in mixtures or composite matrices, or serve as integrated components of systems and devices. The nanomanufacturing value chain is, in actuality, a large and diverse group of commercial value chains that stretch across these sectors: the semi

37、conductor industry (where the push to create smaller, faster, and more efficient microprocessors heralded the creation of circuitry less than 100 nm in size); electronics and telecommunications; aerospace, defence, and national security; energy and automotive; plastics and ceramics; forest and paper

38、 products; food and food packaging; pharmaceuticals, biomedicine, and biotechnology; environmental remediation; clothing and personal care.There are thousands of tonnes of nanomaterials on the market with end use applications in several of these sectors, such as carbon black and fumed silica. Nanoma

39、terials which are rationally designed with vi ISO 2013 All rights reservedPD CEN ISO/TS 80004-8:2015ISO/TS 80004-8:2013(E)specific purpose are expected to radically change the landscape in areas such as biotechnology, water purification, and energy development.The majority of sections in this docume

40、nt are organized by process type. In the case of section 6, the logic of placement is as follows: in the step before the particle is made, the material itself is in a gas/liquid/solid phase. The phase of the substrate or carrier in the process does not drive the categorization of the process. As an

41、example, consider iron particles that are catalysts in a process by which you seed oil with iron particles, the oil vaporizes and condenses forming carbon particles on the iron particles. What vaporizes is the oil, and therefore it is a gas phase process. Nanotubes grown from the gas phase, starting

42、 with catalyst particles that react with the gas phase to grow the nanotubes, thus this is characterized as a gas process. Indication of whether synthesis processes are used to manufacture nano-objects, nanoparticles, or both, is provided in Annex A.A common understanding of the terminology used in

43、practical applications will enable communities of practice in nanomanufacturing and will advance nanomanufacturing strength worldwide. Extending the understanding of terms across the existing manufacturing infrastructure will serve to bridge the transition between the innovations of the research lab

44、oratory and the economic viability of nanotechnologies.For informational terms supportive of nanomanufacturing terminology, see Reference 1. ISO 2013 All rights reserved viiPD CEN ISO/TS 80004-8:2015Nanotechnologies Vocabulary Part 8: Nanomanufacturing processes1 ScopeThis Technical Specification gi

45、ves terms and definitions related to nanomanufacturing processes in the field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation covering the different aspects of nanotechnologies.All the process terms in this document are relevant to nanomanufacturing. Ma

46、ny of the listed processes are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may result in material features at the nanoscale or, alternatively, larger scales.There are many other terms that name tools, components, materials, systems control methods

47、or metrology methods associated with nanomanufacturing that are beyond the scope of this document.2 Terms and definitions from other parts of ISO/TS 80004The terms and definitions in this clause are given in other parts of ISO/TS 80004. They are reproduced here for context and better understanding.2

48、.1carbon nanotubeCNTnanotube (2.9) composed of carbonNote 1 to entry: carbon nanotubes usually consist of curved graphene layers, including single-wall carbon nanotubes and multiwall carbon nanotubes.SOURCE: ISO/TS 80004-3:2010, 4.3.2.2nanocompositesolid comprising a mixture of two or more phase-sep

49、arated materials, one or more being nanophaseNote 1 to entry: Gaseous nanophases are excluded (they are covered by nanoporous material).Note 2 to entry: Materials with nanoscale (2.7) phases formed by precipitation alone are not considered to be nanocomposite materials.SOURCE: ISO/TS 80004-4:2011, 3.2.2.3nanofibrenano-object with two similar external dimensions in the nanoscale (2.7) and the third dimension significantly largerNote 1 to entry: A nanofibre can be flexible or rigid.Note 2 to entry: The tw