ISO TR 18392-2005 Surface chemical analysis - X-ray photoelectron spectroscopy - Procedures for determining backgrounds《表面化学分析 X射线光电子光谱学 背景测定程序》.pdf
《ISO TR 18392-2005 Surface chemical analysis - X-ray photoelectron spectroscopy - Procedures for determining backgrounds《表面化学分析 X射线光电子光谱学 背景测定程序》.pdf》由会员分享,可在线阅读,更多相关《ISO TR 18392-2005 Surface chemical analysis - X-ray photoelectron spectroscopy - Procedures for determining backgrounds《表面化学分析 X射线光电子光谱学 背景测定程序》.pdf(18页珍藏版)》请在麦多课文档分享上搜索。
1、 Reference number ISO/TR 18392:2005(E) ISO 2005TECHNICAL REPORT ISO/TR 18392 First edition 2005-12-01 Surface chemical analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds Analyse chimique des surfaces Spectroscopie de photolectrons X Protocoles pour dterminer les fonds c
2、ontinus ISO/TR 18392:2005(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobes licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editin
3、g. In downloading this file, parties accept therein the responsibility of not infringing Adobes licensing policy. The ISO Central Secretariat accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. Details of the software products used to create this PDF file can be fo
4、und in the General Info relative to the file; the PDF-creation parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the unlikely event that a problem relating to it is found, please inform the Central Secretariat at th
5、e address given below. ISO 2005 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below o
6、r ISOs member body in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Published in Switzerland ii ISO 2005 All rights reservedISO/TR 18392:2005(E) ISO 2005 All rights reserved ii
7、i Contents Page Foreword iv Introduction v 1 Scope. 1 2 Terms and definitions. 1 3 Symbols and abbreviated terms . 1 4 Types of background in XPS . 1 5 Removal of X-ray satellites from electron spectra 2 6 Estimation and removal of inelastic electron scattering from electron spectra 2 6.1 General In
8、formation 2 6.2 Procedures to account for inelastic electron scattering 2 6.2.1 Introduction . 2 6.2.2 Estimation of the linear background and its removal.3 6.2.3 Integral background removal 3 6.2.4 Removal based on the electron inelastic-scattering cross-section 4 6.3 Procedures accounting for both
9、 inelastic and elastic scattering 5 6.4 Less commonly used procedures. 5 6.5 Role of surface and core-hole effects in background determination 6 6.6 Determining the background for inhomogeneous materials . 6 7 Comparisons of procedures for removing effects of inelastic electron scattering from elect
10、ron spectra 7 Bibliography . 8 ISO/TR 18392:2005(E) iv ISO 2005 All rights reservedForeword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out throu
11、gh ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collabora
12、tes closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standar
13、ds. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. In exceptional circumstances, when a technical committee has collecte
14、d data of a different kind from that which is normally published as an International Standard (“state of the art”, for example), it may decide by a simple majority vote of its participating members to publish a Technical Report. A Technical Report is entirely informative in nature and does not have
15、to be reviewed until the data it provides are considered to be no longer valid or useful. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO/TR 1839
16、2 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 5, Auger electron spectroscopy. ISO/TR 18392:2005(E) ISO 2005 All rights reserved v Introduction This Technical Report gives guidance for determining backgrounds in X-ray photoelectron spectra. The methods o
17、f background determination described in this report are applicable for quantitative evaluation of spectra of photoelectrons and Auger electrons excited by X-rays from solid surfaces and surface nanostructures. The use of background determination in X-ray photoelectron spectroscopy (XPS) has develope
18、d from the need (i) for accurate quantitative information on chemical composition (including in-depth composition) of surface/interface layers and nanostructures, (ii) for unambiguous identification of chemical states of surface species and (iii) for extracting electronic-structure information from
19、photoelectron spectra excited from solids. It is therefore necessary to separate the intrinsic part of a spectrum, which is associated with the photoionization or photoexcitation process by the X-radiation of interest in XPS or the Auger-electron decay process and which is needed for further analysi
20、s, from other parts of the spectrum (the background) appearing due to other processes. There are widely used procedures available for background subtraction in XPS that are reviewed in detail in References 1 to 4. Here, the most common procedures and their use are summarized, including methods (i) c
21、ommonly available in commercial software systems, (ii) available and used in more advanced laboratories and (iii) used in individual laboratories to develop understanding of the processes reflected in the XPS spectra. TECHNICAL REPORT ISO/TR 18392:2005(E) ISO 2005 All rights reserved 1 Surface chemi
22、cal analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds 1 Scope This Technical Report gives guidance for determining backgrounds in X-ray photoelectron spectra. The methods of background determination described in this report are applicable for evaluation of spectra of p
23、hotoelectrons and Auger electrons excited by X-rays from solid surfaces. 2 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 181155apply. 3 Symbols and abbreviated terms AES Auger electron spectroscopy PIA Partial intensity analysis QUASES TMQuantitative
24、 analysis of surfaces by electron spectroscopy REELS Reflection electron energy loss spectroscopy XPS X-ray photoelectron spectroscopy 4 Types of background in XPS The electrons produced by X-ray irradiation of surfaces are either photoelectrons (as a result of the primary photoionization process) o
- 1.请仔细阅读文档,确保文档完整性,对于不预览、不比对内容而直接下载带来的问题本站不予受理。
- 2.下载的文档,不会出现我们的网址水印。
- 3、该文档所得收入(下载+内容+预览)归上传者、原创作者;如果您是本文档原作者,请点此认领!既往收益都归您。
下载文档到电脑,查找使用更方便
10000 积分 0人已下载
下载 | 加入VIP,交流精品资源 |
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- ISOTR183922005SURFACECHEMICALANALYSISXRAYPHOTOELECTRONSPECTROSCOPYPROCEDURESFORDETERMININGBACKGROUNDS

链接地址:http://www.mydoc123.com/p-1257778.html