EN ISO 25178-605-2014 en Geometrical product specifications (GPS) - Surface texture Areal - Part 605 Nominal characteristics of non-contact (point autofocus probe) instruments《产品几何.pdf

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1、BSI Standards PublicationBS EN ISO 25178-605:2014Geometrical productspecifications (GPS) Surfacetexture: ArealPart 605: Nominal characteristics of non-contact (point autofocus probe) instrumentsBS EN ISO 25178-605:2014 BRITISH STANDARDNational forewordThis British Standard is the UK implementation o

2、f EN ISO25178-605:2014.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovi

3、sions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2014. Published by BSI StandardsLimited 2014ISBN 978 0 580 68207 0ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published

4、under the authority of theStandards Policy and Strategy Committee on 31 January 2014.Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-605 January 2014 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface t

5、exture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 605: Caractristiques nominales des instruments sans contact (capteur autofocus point) (ISO 25178-6

6、05:2014) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 605: Merkmale von berhrungslos messenden Gerten (Punkt-Autofokus-Sensor) (ISO 25178-605:2014) This European Standard was approved by CEN on 13 January 2014. CEN members are bound to comply with the CEN/CEN

7、ELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre

8、or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the of

9、ficial versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherland

10、s, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2014 CEN All rights o

11、f exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-605:2014 EBS EN ISO 25178-605:2014EN ISO 25178-605:2014 (E) 3 Foreword This document (EN ISO 25178-605:2014) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical

12、 product specifications and verification” in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publicatio

13、n of an identical text or by endorsement, at the latest by July 2014, and conflicting national standards shall be withdrawn at the latest by July 2014. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not b

14、e held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Es

15、tonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice Th

16、e text of ISO 25178-605:2014 has been approved by CEN as EN ISO 25178-605:2014 without any modification. BS EN ISO 25178-605:2014ISO 25178-605:2014(E) ISO 2014 All rights reserved iiiContents PageForeword ivIntroduction vi1 Scope . 12 Normative references 13 Terms and definitions . 13.1 Terms and de

17、finitions related to all areal surface texture measurement methods . 23.2 Terms and definitions related to x- and y-scanning systems 93.3 Terms and definitions related to optical systems 113.4 Terms and definitions related to optical properties of workpiece 123.5 Terms and definitions specific to po

18、int autofocus profiling .134 Descriptions of the influence quantities 144.1 General 144.2 Influence quantities . 14Annex A (informative) General principles .16Annex B (informative) Spot size and focal shift20Annex C (informative) Beam offset direction and maximum acceptable local slope 23Annex D (in

19、formative) Features of an areal surface texture measuring instrument 26Annex E (informative) Others: Non-measured point (autofocus error) .28Annex F (informative) Relation to the GPS matrix 29Bibliography .31BS EN ISO 25178-605:2014ISO 25178-605:2014(E)ForewordISO (the International Organization for

20、 Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the

21、right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedu

22、res used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial

23、rules of the ISO/IEC Directives, Part 2. www.iso.org/directivesAttention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identifie

24、d during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patentsAny trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the mean

25、ing of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 213,

26、 Dimensional and geometrical product specifications and verification.ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture: Areal : Part 1: Indication of surface texture Part 2: Terms, definitions and surface texture parameters Pa

27、rt 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic prob

28、e) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instrument

29、s Part 606: Nominal characteristics of non-contact (focus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instrumentsThe following parts are under preparation:iv ISO 2014 All rights reservedBS EN ISO 25178-605:2014ISO 25178-605:2014(E) Part 72: XML file fo

30、rmat x3pCalibration and measurement standards for non-contact (confocal chromatic probe) instruments and calibration and measurement standards for non-contact (phase-shifting interferometric microscopy) instruments are to form the subject of future parts 702 and 703.A part 600 is planned which is in

31、tended to contain provisions common with the other 600-level parts of ISO 25178. Once it has been submitted as a Final Draft International Standard, those provisions in the other 600-level parts that are then redundant will be removed from them. ISO 2014 All rights reserved vBS EN ISO 25178-605:2014

32、ISO 25178-605:2014(E)IntroductionThis part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a General GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chains of standards on roughness profile, waviness profile, primary profile, and areal sur

33、face texture.For more detailed information on the relationship of this standard to the GPS matrix model, see Annex G.The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this standard is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this

34、 standard and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this standard, unless otherwise indicated.The point autofocus optical principle can be implemented in various set-ups. The configuration described in this document comprises three basic elem

35、ents: an autofocus optical system, an autofocus mechanism, and an electronic controller.This type of instrument is mainly designed for areal measurements, but it is also able to perform profile measurements.This part of ISO 25178 describes the metrological characteristics of an optical profiler usin

36、g a point autofocus probe for the measurement of areal surface texture.For more detailed information on the point autofocus method, see Annex A. Reading this annex before the main body may lead to a better understanding of this standard.vi ISO 2014 All rights reservedBS EN ISO 25178-605:2014INTERNAT

37、IONAL STANDARD ISO 25178-605:2014(E)Geometrical product specifications (GPS) Surface texture: Areal Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments1 ScopeThis part of ISO 25178 describes the metrological characteristics of a non-contact instrument for measuring s

38、urface texture using point autofocus probing.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of

39、the referenced document (including any amendments) applies.ISO 4287:1997, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parametersISO 10360-1, Geometrical Product Specifications (GPS) Acceptance and reverification tests for coordinate

40、 measuring machines (CMM) Part 1: VocabularyISO 14406:2010, Geometrical product specifications (GPS) ExtractionISO 14978:2006, Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipmentISO 25178-2:2012, Geometrical product specifications (GPS) Surface text

41、ure: Areal Part 2: Terms, definitions and surface texture parametersISO 25178-3:2012, Geometrical product specifications (GPS) Surface texture: Areal Part 3: Specification operatorsISO 25178-6:2010, Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for

42、 measuring surface textureISO 25178-601:2010, Geometrical product specifications (GPS) Surface texture: Areal Part 601: Nominal characteristics of contact (stylus) instrumentsISO 25178-602:2010, Geometrical product specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-

43、contact (confocal chromatic probe) instruments3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 4287, ISO 10360-1, ISO 14406, ISO 14978, ISO 25178-2, ISO 25178-3, ISO 25178-6, ISO 25178-601, ISO 25178-602 and the following apply. ISO 2014 All rights res

44、erved 1BS EN ISO 25178-605:2014ISO 25178-605:2014(E)3.1 Terms and definitions related to all areal surface texture measurement methods3.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured3.1.2coordinate system of t

45、he instrumentright hand orthonormal system of axes (x,y,z)Note 1 to entry: In this system (x,y) is the plane established by the areal reference of the instrument (Note that there are optical instruments that do not posses a physical areal guide).Note 2 to entry: In this system, z-axis is mounted par

46、allel to the optical axis and is perpendicular to the (x,y) plane for an optical instrument. The z-axis is in the plane of the stylus trajectory and is perpendicular to the (x,y) plane for a stylus instrument (see Figure 1)Note 3 to entry: Normally, the x-axis is the tracing axis and the y-axis is t

47、he stepping axis. (This note is valid for instruments that scan in the horizontal plane.)Note 4 to entry: See also specification coordinate system and measurement coordinate system, as defined in ISO 25178-2:2012, 3.1.2 and ISO 25178-6:2010, 3.1.1, respectively.3.1.3measurement loopclosed chain whic

48、h comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the measuring stand, the drive unit, the probing systemNote 1 to entry: See Figure 1. The measurement loop will be subjected to external and internal disturbances that influenc

49、e the measurement uncertainty.12YZXKey1 coordinate system of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of instrument2 ISO 2014 All rights reservedBS EN ISO 25178-605:2014ISO 25178-605:2014(E)3.1.4real surface of a workpieceset of features which physically exist and separate the entire workpiece from the surrounding mediumSOURCE: ISO 14660-1:1999, 2.4Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the