BS ISO 11039-2012 Surface chemical analysis Scanning-probe microscopy Measurement of drift rate《表面化学分析 扫面探针显微镜 漂移率的测定》.pdf

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1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS ISO 11039:2012Surface chemical analysis Scanning-probe microscopy Measurement of drift rateBS ISO 11039:2012 BRITISH STANDARDNational forewordThis British Standard is the UK i

2、mplementation of ISO 11039:2012.The UK participation in its preparation was entrusted to TechnicalCommittee CII/60, Surface chemical analysis.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessar

3、yprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2012. Published by BSI StandardsLimited 2012ISBN 978 0 580 66878 4ICS 71.040.40Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was publ

4、ished under the authority of theStandards Policy and Strategy Committee on 29 February 2012.Amendments issued since publicationDate Text affectedBS ISO 11039:2012 ISO 2012Surface chemical analysis Scanning-probe microscopy Measurement of drift rateAnalyse chimique des surfaces Microscopie par sonde

5、balayage Mesurage du taux de driveINTERNATIONAL STANDARDISO11039First edition2012-02-01Reference numberISO 11039:2012(E)BS ISO 11039:2012ISO 11039:2012(E)ii ISO 2012 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2012All rights reserved. Unless otherwise specified, no part of this publication m

6、ay be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCase postale 56 CH-1211 Geneva 20Tel. +

7、 41 22 749 01 11Fax + 41 22 749 09 47E-mail copyrightiso.orgWeb www.iso.orgPublished in SwitzerlandBS ISO 11039:2012ISO 11039:2012(E) ISO 2012 All rights reserved iiiContents PageForeword ivIntroduction v1 Scope 12 Normative references . 13 Terms and definitions and abbreviated terms . 13.1 Terms an

8、d definitions . 13.2 Abbreviated terms . 24 Measurement method . 25 Requirements . 35.1 Instrument requirements . 35.2 Environment requirements . 36 Measurement procedures . 36.1 Initial check . 36.2 Basic characterization and the settling time . 46.3 Further characterization and fresh image areas .

9、 56.4 Other specimens . 77 Measurement report . 7Annex A (normative) Image correlation method 8Annex B (normative) Characteristic-marker method 11Annex C (normative) Non-periodic grating method 13Annex D (informative) Guidance to users 16Annex E (informative) Instrumental parameters to consider to r

10、educe drift rates .17Annex F (informative) Example of drift results and analysis 18Bibliography .19BS ISO 11039:2012ISO 11039:2012(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing Inte

11、rnational Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison wi

12、th ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.The main task of technical

13、 committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.Attention is drawn to t

14、he possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights.ISO 11039 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 9, Scanning probe micros

15、copy.iv ISO 2012 All rights reservedBS ISO 11039:2012ISO 11039:2012(E)IntroductionScanning-probe microscopy (SPM) is a well-known microscopic technique for nanoscience and nanotechnology. Working at, or close to, atomic-scale resolution, it is recognized that the time stability of such instruments i

16、s very sensitive to their design, operating environment and usage. Among the many technical specifications of SPM, the drift rate is an essential parameter. A knowledge of, and minimization of, drift in the X-, Y- and Z-directions is required for designing many experiments. It is not only important

17、for obtaining undistorted images and series of images throughout an experiment, but is also critical when, for example, measuring physical properties, monitoring dynamic behaviour, making micro/nanoassemblies, and manipulating materials at the nanoscale. Furthermore, a knowledge of the instrumental

18、drift rate is also important when selecting an instrument for use. It is therefore desirable that manufacturers provide suitable information about the instrumental drift characteristics in a common way. Many manufacturers provide closed-loop scanners in their instruments. Unfortunately, drift is sti

19、ll present, although the magnitude of the drift rate is significantly reduced. Therefore, practical methods to measure and characterize drift rates of SPM instruments in the X-, Y- and Z-directions are required and are contained in this International Standard.Two measures, the maximum and the averag

20、e drift rates, are described for both the X-Y plane and the Z-axis. The maximum drift rate is given as the maximum observed, for reasons of economy, after a small number of fairly simple measurements. The maximum drift rate allows the user to design experiments that fall within the working zone avai

21、lable given the duration of the intended experiments; however, the maximum observed X-Y and Z-drift rates are based on a small number of observations and are less precise than the average drift rates determined. To deduce a working zone, a rule of thumb is to assume that the maximum is twice the val

22、ue of the average. Clearly, in any population, the true maximum for a very large number of measurements would be very large, but here it is expected that the user only expects some 90 % of experiments not to require repetition as a result of the drift properties of the instrument. Depending on the i

23、mportance of the measurements, users may, of course, set themselves any chosen margin of safety based on the data derived using this International Standard. ISO 2012 All rights reserved vBS ISO 11039:2012BS ISO 11039:2012Surface chemical analysis Scanning-probe microscopy Measurement of drift rate1

24、ScopeThis International Standard defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the

25、long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.This International Standard is suitable for evaluating the drift rate based on SPM images

26、. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.2 Normative referencesThe fo

27、llowing referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 18115-2, Surface chemical analysis Vocabulary Part 2

28、: Terms used in scanning-probe microscopy3 Terms and definitions and abbreviated terms3.1 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 18115-2 and the following apply.3.1.1driftchange in position of the probe tip, for a given positional setting by th

29、e instrument controller, relative to the test specimenNOTE Drift occurs in all parameters (e.g. X-, Y-, Z-displacements, laser positioning on the cantilever, intensity in SNOM sources) but in this International Standard the term drift is restricted to the unintended change in position of the probe t

30、ip for given scanner X-, Y- and Z-coordinates, relative to the test specimen.3.1.2drift ratequotient of the linear displacement of the probe tip, for a given positional setting, relative to the test specimen over a given time interval by that time intervalNOTE 1 The time interval is usually chosen t

31、o be the time between successive images.NOTE 2 The drift rate may be given for each of the X-, Y- and Z-axes separately or as the magnitude of the resulting vector.INTERNATIONAL STANDARD ISO 11039:2012(E) ISO 2012 All rights reserved 1BS ISO 11039:2012ISO 11039:2012(E)3.1.3average drift rateaverage

32、of appropriate drift rates measured during a specified period of timeNOTE 1 The average drift rate may be given for each of the X-, Y- and Z-axes separately or as the magnitude of the resulting vector.NOTE 2 The average drift over a long period might be low if, by chance, the test specimen returns t

33、o its original position whilst the average drift rate, being measured non-vectorially between successive images, remains high.NOTE 3 The average drift rate obtained here is intended for designing experiments so that the effects of the drift can be minimized or eliminated so that e.g. the important r

34、egion of the test specimen remains in the field of view. Thus, the user may multiply the average drift rate by a factor of 2 and add some safety factor to ensure that a certain fraction of the field of view is maintained during the experiment.3.1.4maximum drift ratemaximum of the drift rates measure

35、d during a specified period of timeNOTE 1 The maximum drift rate may be given for each of the X-, Y- and Z-axes separately or as the magnitude of the resulting vector.NOTE 2 As in any set of measurements, the true maximum drift rate measured might increase slowly with the number of measurements. The

36、 maximum value obtained here is intended for designing experiments so that the effects of the drift can be minimized or eliminated so that e.g. the important region of the test specimen remains in the field of view. Thus, the user may add some safety factor and a very accurate value of the maximum i

37、s not required.3.1.5settling timetime after selecting the area of the test specimen or point on the test specimen for measurement and the commencement of the measurements for which the drift data are relevantNOTE Settling times are often chosen to be from 5 min to 60 min, for convenience.3.2 Abbrevi

38、ated termsAFM atomic-force microscopeNPG non-periodic gratingSPM scanning-probe microscopy4 Measurement methodTo characterize the drift behaviour of an SPM instrument, it is important to recognize that drift occurs as a result of many processes, as shown in Annex E, and each of these processes cause

39、s an onset of drift that might slowly reduce with time. Thus, after switching on the final part of the instrument, a drift behaviour may be observed that, after a suitable waiting period, will generally be lower than that initially obtained. After inserting a new test specimen into the measurement p

40、osition, a similar behaviour occurs. After moving the specimen to a new point using the specimen stage controls, a further drift will be initiated. Finally, after moving the SPM probe to a new region of the specimen using the piezoelectric scanner, a fourth drift behaviour is seen. Each of these beh

41、aviours might occur in a different direction and be of different magnitude. Indeed, each time this process is repeated, all these might change in magnitude and direction. Nevertheless, after deciding on a certain protocol for operating the instrument, typical average and maximum drift rate behaviour

42、s can be established. Important in this protocol is the settling time, i.e. the period during which the instrument is allowed to stabilize after selecting the area of the specimen or point on the specimen for measurement and the commencement of the measurements for which the drift data are relevant.

43、 The average and maximum drift rates permit the user to decide what influences the drift behaviour and hence what actions need to be taken to ensure that the drift performance is suitable for the users requirements. This is described in Clause 6 and Annex E. Subclause 6.1 describes an initial check

44、to see if there is a significant drift behaviour that might need further investigation. If the instrument is adequate, the investigation may cease. If further investigation is required, a 2 ISO 2012 All rights reservedBS ISO 11039:2012ISO 11039:2012(E)basic characterization is described in 6.2 to ev

45、aluate an appropriate settling time. For those interested in a fuller characterization, the effects of changing operating conditions are evaluated in 6.3.For the drift rate measurement, the following three methods are specified in this International Standard: image correlation method (see Annex A);

46、characteristic-marker method (see Annex B); non-periodic grating method (see Annex C).To facilitate the selection of the drift rate measurement method, guidance is given in Annex D.5 Requirements5.1 Instrument requirements5.1.1 The SPM instrument shall have the capability of measuring and recording

47、digital images of the specimen surface, as a function of time, throughout the work.5.1.2 The instrument shall maintain its dimensional calibration throughout the work.5.2 Environment requirements5.2.1 The instrument should, if possible, be operated under the required, or better, environment conditio

48、ns specified in the manufacturers documented instructions.5.2.2 It is recommended that the measurement be performed in controlled conditions with the temperature stable within 1 C and the relative humidity preferably less than 50 %. The laboratory environment should be clean, with levels of electrom

49、agnetic interference, ambient vibration and ambient noise which are sufficiently low that they do not influence the characterization of the instrument. The measured data will relate to the instrument used in whatever operating conditions are selected and might or might not be relevant to any other operating conditions. Suggested ways to improve the operating conditions, likely to lead to improved drift characteristics, are provided in Annex E.6 Measurement procedures6.1 Initial check6.1.1 Select the probe in accordance with the manufactu