EN ISO 18452-2016 en Fine ceramics (advanced ceramics advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer《精细陶瓷(高级陶瓷 高技术陶瓷)-由接触式.pdf

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1、BSI Standards PublicationBS EN ISO 18452:2016Fine ceramics (advancedceramics, advanced technicalceramics) Determination ofthickness of ceramic films bycontact-probe profilometerBS EN ISO 18452:2016 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN ISO 18452:2016.

2、It is identical to ISO 18452:2005. It supersedes BS EN 1071-1:2003 which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee RPI/13, Advanced technical ceramics.A list of organizations represented on this committee can be obtained on request to its secretary.Thi

3、s publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2016. Published by BSI Standards Limited 2016ISBN 978 0 580 91165 1 ICS 81.060.30 Compliance with a British Standard cannot confe

4、r immunity from legal obligations.This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 April 2016.Amendments/corrigenda issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 18452 April 2016 ICS 81.0

5、60.30 Supersedes EN 1071-1:2003English Version Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005) Cramiques techniques - Dtermination de lpaisseur des films cramiques avec un profilomtre contact

6、(ISO 18452:2005) Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005) This European Standard was approved by CEN on 25 March 2016. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for

7、giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three

8、official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodie

9、s of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spa

10、in, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2016 CEN All rights of exploitation in any form and by any means reserved worldwid

11、e for CEN national Members. Ref. No. EN ISO 18452:2016 EBS EN ISO 18452:2016EN ISO 18452:2016 (E) 3 European foreword The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” ofthe International Organization for Standardization (ISO) and has been taken over as E

12、N ISO 18452:2016 by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held byDIN. This European Standard shall be given the status of a national standard, either by publication of anidentical text or by endorsement, at the latest by October 2016, and conflictin

13、g national standards shallbe withdrawn at the latest by October 2016. Attention is drawn to the possibility that some of the elements of this document may be the subject ofpatent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patentrights. This document supe

14、rsedes EN 1071-1:2003. According to the CEN-CENELEC Internal Regulations, the national standards organizations of thefollowing countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of M

15、acedonia,France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,Turkey and the United Kingdom.Endorsement notice The text of ISO 18452:2005 has been approved by CEN

16、 as EN ISO 18452:2016 without any modification. BS EN ISO 18452:2016ISO18452:2005(E) ISO2005All rights reserved iiiContents Page1Scope 12Normative references13Terms anddefinitions14Principleofmeasurement .15Testenvironment . 16Apparatus . 27Testpieces . 38Procedure .49Calculation .510 Limitsto steph

17、eight511 Test report 6AnnexA(informative) Effect ofamplificationfactor andlevellingerror onmeasuredlayer thickness 7BS EN ISO 18452:2016ISO18452:2005(E)iv ISO2005All rights reservedForewordISO(theInternationalOrganizationfor Standardization)is aworldwidefederationofnational standards bodies(ISO memb

18、er bodies).The work of preparing International Standards is normally carried out throughISOtechnical committees. Eachmemberbody interestedinasubject for whicha technical committeehas beenestablishedhas the right tobe representedonthat committee.Internationalorganizations,governmentalandnon-governmen

19、tal,inliaison withISO,also takepartin the work.ISOcollaborates closely with theInternationalElectrotechnicalCommission(IEC)onallmattersofelectrotechnical standardization.InternationalStandards aredraftedinaccordancewith the rules givenin theISO/IECDirectives,Part2.Themain task of technicalcommittees

20、 is to prepareInternational Standards. DraftInternationalStandardsadoptedby thetechnical committees arecirculated to the member bodies for voting. Publication as anInternationalStandard requires approvalbyat least 75%of themember bodies castinga vote.Attentionis drawn to thepossibilitythat someof th

21、eelementsof this document may be the subject ofpatentrights.ISO shallnot beheldresponsiblefor identifyingany or all suchpatent rights.ISO18452 was preparedby TechnicalCommitteeISO/TC206, Fine ceramics.BS EN ISO 18452:2016INTERNATIONALSTANDARDISO18452:2005(E) ISO2005All rights reserved 1Fineceramics

22、(advancedceramics,advanced technicalceramics)Determinationof thickness ofceramicfilms bycontact-probeprofilometer1ScopeThis InternationalStandardspecifies amethodfor thedeterminationof thefilm thickness ofafineceramicfilmandceramiccoatings byacontact-probeprofilometer.Themethodis suitableforfilm thi

23、cknesses in therangeof to .NOTE Themethod requires adistinct andclearly formedboundarybetweencoatedand uncoatedparts of thesubstrate.2Normative referencesThefollowing referenced documentsare indispensable for theapplication of this document.For datedreferences,only theeditioncitedapplies.For undated

24、 references, thelatesteditionofthe referenceddocument(includingany amendments)applies.ISO3274, Geometrical Product Specifications (GPS) Surface texture:Profile method Nominalcharacteristics of contact (stylus) instruments3Terms anddefinitionsFor thepurposes ofthisdocument, thefollowing terms anddefi

25、nitions apply.3.1fineceramicfilmcoatingconsistingofafineceramicmaterial which thinlycovers the substrate surfaceEXAMPLETypicalmaterials are oxides,carbides, nitrides, etc., deposited by methods such as vacuum evaporating,sputtering,chemical vapour deposition,etc.4PrincipleofmeasurementThis Internati

26、onalStandardconcerns themeasurement of thefilm thickness of fine ceramic coatings on asubstrate usingacontact-probe profilometer. The film thickness shall be calculatedfrom the profile which isobtainedby scanning the contact probe in thedirection ,as showninFigure1.The profileis inproportion to thed

27、ifferenceinheightbetween theparts coveredandnot coveredwith thefineceramicfilm.5Test environmentThe test shallbecarried outinanenvironment free from mechanical vibrations that may affect themeasurement.10nm 10000nmC B ABS EN ISO 18452:2016ISO18452:2005(E)2 ISO2005All rights reserved6Apparatus6.1 Con

28、tact-probeprofilometerThecontact-probeprofilometer shall be in accordance withISO3274.The instrument shall be calibratedbyusing step-heightcalibrationstandards inaccordancewith thelimitsgiveninClause10.In metrology,it is always very important to have calibration andchecking conditions corresponding

29、to themeasurement conditions. Therefore, the calibration or certified reference materials shouldbeas similar aspossible to the stepheight tobemeasured.6.2 Contact probeThe stylus chipofacontact probeis madeofdiamond,andhas aconical shape.Theverticalangleofthechipis or .The radius of thechipis any of

30、 , ,and .NOTE Theeffect of thestylus-tip radiuson thelateralprofile resolution,i.e.the step-edgebroadeningdueto thebluntnessof the tip (seeFigure2), should be considered. However, due to the horizontal compressionofthedisplayedpicture (fargreater vertical than horizontal magnification), this effect

31、canbeneglected for routine coating thickness measurementswheredefinitivehorizontal resolutionis unimportant.Key1contactprobe2film3leveldifference4substratefilm thicknessFigure1Principleofmeasurement using thecontact-probeprofilometert60 90 2 m 5 m 10 m12,5 mBS EN ISO 18452:2016ISO18452:2005(E) ISO20

32、05All rights reserved 37Test pieces7.1 GeneralconsiderationThe test pieces shallcompriseafineceramic thinfilmcoatedonto the surfaceofa substrate suchas glass,orapiececutfrom suchanitem.The testpieces shallhavedimensions sufficient toensure stabilityon the test piece supportof theprofilometer.Select

33、a representativetestspecimenfrom thecoatingtobetested.Cleanthespecimen, usinganappropriatemethodfor thecoating, so that it is freefromdust,oil,moistureandany other surfacefilms.The test-pieces maybeproducedby machiningfromalarger boardon which thefineceramic thinfilm was formedto theappropriatesize.

34、NOTE1Theleveldifferenceis formedby takingawaypartof thefilmby chemicaletching,or by depositing thefilm throughamask.NOTE2Whencovering partof the substrate duringdeposition, it can happen that the deposition rate near the stepisinfluencedby thecoveringmedium.This results ina step whichis not represen

35、tativefor thecoating thickness.This canbepreventedbyusing very thincoveringplates,or it canbecircumventedbyetchingaway partof thecoatingafter thecoatingprocess.7.2 SurfaceconditionsBecause surface roughness willaffect the result, the valueofboth substrateandcoating shallbenogreaterthan of the stephe

36、ight,and the average wavelengthofthe roughness shall be of AB forthesubstrateor CDfor thecoating(seeFigure3).NOTE The repeatability of the step-height measurement depends on the electronic noiselevel of the instrument, thedigitizationincrement of the signaland themechanical stability ofthe stylus or

37、 samplemotion.However, themajor sourceofstatistical variation in calculated stepheights is the surface roughness of the step specimen, which is the ultimateuncertainty inassigningaheight value toa stylus stepprofile.Key1substrate2stepFigure2Broadingofthe step“B”due to thebluntness(radius )ofthe styl

38、ustiprRa1/5 10%RaBS EN ISO 18452:2016ISO18452:2005(E)4 ISO2005All rights reservedSystematicerrorsare related tonon-parallel referencelines at both sides of the stepeither due toinsufficientlyflat substrates or tolocalcoating thickness artefacts related to samplepreparation.7.3 Number of test piecesA

39、t least three testpieces shallbe used.8Procedure8.1 Calibrate thecontact-probeprofilometer(6.1).8.2 Level the sample so that the uncoated portion of the substrate is parallel to the -axis datumof themeasuringmachine.Procedures for this willdepend upon themachinebeing used.Errors inlevelling will res

40、ultindifferencesbetween themeasuredand the true valueofthecoating thickness(seeAnnexA).As showninAnnexA, the magnitudeof theerror depends on both the angular levelling error and the ratio width of thestep/coating thickness.Stepheight =Key1directionof travelof stylusXHorizontal.YVertical.-positionofp

41、oint B-positionofpoint CFigure3Procedurefor thedeterminationof thecoating step-height thicknessy h y Ly b yy c yxBS EN ISO 18452:2016ISO18452:2005(E) ISO2005All rights reserved 58.3 Set the stylus loadingtoitslowest value(fromto)and scan the step stridingover theleveldifference.Inorder for thelimits

42、of the step width(pointsBandCinFigure3)tobeaccurately identified, thetravelfor theprobeon the uncoatedandcoatedportions of the sample(distances ABandCD respectively; seeFigure3) shalleachbeaminimumof .Thecontact probe shouldbe scannedalongalineperpendicular to theboundarybetweencoatedand uncoatedpor

43、tions of the substrate.To avoiddamage to theprofileof the step, scanning shall takeplacein thedirectionfrom thecoating surface tothe substrate surface,i.e.down the stepgiveninClause4.NOTE It is desirable that the stylusloadingis small so that it does not give rise todamageof thecoatingor the substra

44、te.However,if the stylus loadingis too smallit may pick upexternal vibrations andproduceanirregularprofile.8.4 Inspectthe scan,for example by light microscopy, in order to determine whether any damage tothesamplehas occurred.8.5 Repeattheproceduretogivefivemeasurementsforeach sample tested.Because t

45、he surfaces oneithersideof the stepareoftennot flat andnot parallel,asinglecoating step-height thickness measurement is notsignificant.9CalculationLocate the-positionfor the inflectionpoint in the step. Calculate the twoleast-squares straight lines fromrepresentativepointsoneither sideof the step(se

46、eFigure3).Calculate thedifferencein -values of thetwostraight lines at the -position previously determined for theinflectionpoint.The obtained valueis thestep-height thickness of thecoating.If the dataare notdigitized (chart record),the drawing of thetwo least-squares straight lines may be donevisua

47、lly, uponagreement between theparties.When substrate surface roughnessandtheaverage wavelengthof the roughness aremuch smaller than thevalues specified in 7.2, thefilm thickness may be directly calculated from the difference of and(inFigure3), uponagreementbetween theparties.It is recommendedthat th

48、eplotted-outstepheightbeatleast toenableaccuratemeasurement ofthestep.Only the representativedataforthe upper andlower levelof the step shouldbeconsideredtoeliminateartifactscausedby thecurvatureofthe step.In the case of the standardmeasurement,15valuesof thefilm thicknesses areobtainedfrom the thre

49、etestpieces.Theaverageof these15values given to three significant figures shouldbe takenas the value.When thestandarddeviationis required,it shouldbecalculatedin thenormal way usingeachof the15separate valuesand rounded to two significant figures.10 Limits tostepheightUsing themethod specified above, contact-probeprofilometers can repeatedly identify steps in the torange and repeatedly measurelarger steps. Height calibrations of contact-probe profilometerscan beaccuratetoabout,assuming thatthe standardiscalibrated toanaccuracy ofbetter