EN 61040-1992 en Power and Energy Measuring Detectors Instruments and Equipment for Laser Radiation《激光辐射能量与功率测量检测器 仪表和设备》.pdf

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1、= 3404583 0082889 402 EUROPEAN STANDARD EN 61040 NORME EUROPENNE EUROPISCHE NORM October 1992 UDC 621.317.7 : 621.37 Descriptors: Laser, safety, equipment classification, users guide English version Power and energy measuring detectors, instruments and equipment for laser radiation (IEC 1040 : 1990)

2、 Dtecteurs, instruments et matriels de mesurage de puissance et dnergie des rayonnements laser Laserstrahlung (CE1 1040 : 1990) Empfnger, MeBgerte und Anlagen zur Messung von Leistung und Energie von (IEC 1040 : 1990) This European Standard was approved by CENELEC on 1992-09-15. CENELEC members are

3、bound to comply with the CENKENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the

4、 Central Secretariat or to any CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the Central Secretariat has the sa

5、me status as the official versions. CENELEC members are the national electrotechnical committees of Austria, Belgium, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and United Kingdom. CENELEC European Committ

6、ee for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung Central Secretariat: rue de Stassart 35, B-1050 Brussels O 1992 Copyright reserved to CENELEC members Ref. No. EN 61040 : 1992 E Page 2 EN 61040 : 1992 Foreword At

7、 the request of the CENELEC Technical Committee TC 76, Laser equipment, the International Standard IEC 1040 : 1990 was submitted to the CENELEC Unique Acceptance Procedure (UAP) in December 1991 for acceptance as a European Standard. The text of the International Standard was approved by CENELEC as

8、EN 61040 on 15 September 1992. The following dates were fixed: - latest date of publication of an identical national standard (dop) 1993-09-01 - latest date of withdrawal of conflicting national standards (dow) 1993-09-01 For products which have complied with the relevant national standard before 19

9、93-09-01, as shown by the manufacturer or by a certification body, this previous standard may continue to apply for production until 1998-09-01. Annexes designated nonnative are part of the body of the standard. In this standard, annex ZA is normative. W 3404583 008289L Ob0 Page 3 EN 61040 : 1992 CO

10、NTENTS Clause Pase 5 1 Scope and object 2 Terminology 5 . 2.1 Calibration 2.2 Calibration factor 2.3 Detector . 2.4 Equipment (for measuring laser power or energy) 2.5 Error of measurement 2.6 Fall time constant . 2.7 Indicator (for a laser detector) 2.8 Individual uncertainties 2.9 Instrument (for

11、measuring laser power or energy) . 2.10 2.11 2.12 2.13 2.14 2.15 2.16 2.17 2.18 2.19 2.20 2.21 2.22 2.23 2.24 Irradiance Laser . Laser detector . Laser radiation Measurement result Optical spectral range . Radiant energy Radiant exposure Radiant power (radiant flux) . Range of a pp I i ca t ion Rela

12、tive uncertainty . Response time constant Responsivity Root -s um-squa re u ncerta i n ty Ca I i b ration spectral bandwidth . . 6 6 6 6 7 7 7 7 7 7 7 7 8 8 8 8 2.25 Spectral responsivity 2.26 Uncertainty of measurement 8 2.27 Waiting time 8 2.28 Zero drift 8 . . 3 Requirements 8 9 3.1 Minimum requi

13、rements . 3.2 Additional requirements for a detector, an instrument or equipment with specification of an accuracy class 9 3.3 Calibration 10 3.4 Overload 10 3.5 Users possibility of checking proper operation 10 m 3404583 0082892 TT7 m Page 4 EN 61040 : 1992 Clause Page 4 Tests . 11 4.1 Change of re

14、sponsivity with time 11 4.3 Change of responsivity during irradiation 11 4.4 Temperature dependence of responsivity . 12 non-polarized radiation 12 4.7 Wavelength dependence of responsivity . 12 polarized radiation . 12 4.9 Averaging with respect to time 12 4.2 Spatial change of responsivity (non-un

15、iformity) 11 4.5 4.6 Dependence of responsivity on radiant power or radiant Dependence of responsivity on the angle of incidence for energy (non-linearity) . 12 4.8 Dependence of responsivity on the angle of incidence for 4.10 Zero drift . 13 4.11 Calibration 13 4.12 Overload 13 5 Operating instruct

16、ions . 13 5.1 5.2 5.3 5.4 5.5 5.6 5.7 5.8 5.9 5.10 Characteristic data 14 Limiting values 14 15 Special instructions for operation Power range (energy range) . 15 Adjustment 15 Damage 15 Hazards 15 Maintenance 15 15 Storage conditions . Limits of checking the proper operation 15 . . 6 Designation an

17、d inscriptions . 16 Annex ZA (normative) Other international publications quoted in this standard with the references of the relevant European publications 17 = 3L109583 0082893 933 Page 5 EN 61040 : 1992 POWER AND ENERGY MEASURING DETECTORS, INSTRUMENTS AND EQUIPMENT FOR LASER RADIATION 1 Scope and

18、 object This standard is applicable to instruments and equipment measuring the laser radiant power and laser radiant energy in the optical spectral range (with wavelength from 100 nm to 1 mm). If detectors are offered separately, this standard is also applicable to them. The object of this standard

19、is to lay down definitions and minimum re- quirements as well as suitable test procedures for the characteristics and the manufacturing standards for detectors, instruments and equipment for the measurement of power and energy of laser radiation. For the electrical safety of indicators and equipment

20、, see IEC 1010-1. 2 Terminology For the purposes of this standard, the following definitions apply: 2.1 Calibration The set of operations which establish, under specified conditions, the relationship between values indicated by the measuring instrument or output signal of the detector and the corres

21、ponding known values of a measurand. NOTE - The result of a calibration is sometimes expressed as a cali- bration factor or as a series of calibration factors in the form calibration curve. 2.2 Calibration factor Quotient of instrument indication by the detector input quantity. 2.3 Detector See lase

22、r detector. 2.4 Instrument measuring laser power or energy combined with aux devices. Equipment for measuring laser power or energy) 2.5 Error of measurement The difference between measured value and true value of a measurand of a liary 3404583 0082894 87T Page 6 EN 61040 : 1992 2.6 Fall time consta

23、nt The time required for the detector output to .fall, after a removal of a steady input, from its initial value to the fraction $ of its total change. 2.7 Indicator (for a laser detector) Device to indicate the detector output in radiometric units. 2.8 Individual uncertainties When a measurement re

24、sult y depends on various (noncorrelated) influence quantities xi( = 1, 2, 3 . . .), its uncertainty, which is caused only by the uncertainty Ax- when determining on fixing the variable x is an indi- vidual uncertainty Ay J jr J - ay 3Xj Ayj - - . AX. J It is approximately given by 2.9 instrument (f

25、or measuring laser power or energy) Combination of a laser detector and an indicator. 2.1 O Irradiance At a point of a surface, the quotient of the radiant power dO incident on an element dA of a surface containing the point by the area to that element. Symbol: Unit: W/m2 2.1 1 Laser Any device whic

26、h can be made to produce or amplify electromagnetic radiation in the optical spectral range primarily by the process of con- trolled stimulated emission. (See IEC 825. ) 2.12 Laser detector (brief: detector) A device which transduces radiant power or radiant energy into another, usually electrical,

27、quantity without signal processing or indication. 2.13 Laser radiation All electromagnetic radiation emitted by a laser product in the optical spectral range which is produced as a result of controlled stimulated emission. 3404583 0082895 706 Page 7 EN 61040 : 1992 2.14 Measurement result The value

28、obtained after applying all appropriate corrections (including calibration factor) to the indicated value. 2.15 Optical spectral range Wavelength range between 100 nm and 1 mm of the electromagnetic radi- ation. 2.16 Radiant energ y Energy emitted, transferred, or received in the form of radiation.

29、Symbol: 4. Unit: J 2.17 Radiant exposure At a point on a surface, the radiant energy incident on an element of a surface divided by the area of that element. Symbol: H Unit: J/m2 2.18 Radiant power (radiant flux) Power emitted, transferred, or received in the form of radiation. H = dQ d = if dt Symb

30、ol: H I=- dQ dt Unit: W 2.19 Range of application The range within which all parameters of the det ctor, instrument r equipment significant for reliable measurements are known within the accuracy of the class and where there is no overload hazard for the detector. 2.20 Relative uncertainty The uncer

31、tainty of measurement divided by the true value of the measur- and. 2.21 Response time constant The time required for a detector output to rise from its initial value to (1 - of its final value, when a steady input is instantaneously applied. 3404583 008289b 642 Page 8 EN 61040 : 1992 2.22 Responsiv

32、ity Quotient of the detector output quantity Y by the detector input quan- tity x. Symbol: s s = Y/X 2.23 Root-sum-square uncertainty Square root of the sum of squares of the individual uncertainties. 2.24 Calibration spectral bandwidth Wavelength interval within which the spectral responsivity chan

33、ges at the most by 1/10 of the calibration uncertainty under otherwise constant conditions. 2.25 Spectral responsivity Quotient of the detector output increment dY(X) to the monochromatic detector input quantity increment dX(X) at a wavelength X as a function of the wavelength. Symbol: s(X) 2.26 Unc

34、ertainty of measurement An estimate characterizing the rang falues within whi of measurand lies at a 95-2, confidence level. of h the tri value 2.27 Waiting time Interval between the beginning of the irradiation of the detector surface with constant radiant power and the approximation of the detecto

35、r output or instrument indication to its final stationary value to up to 1/10 of the ca I ib ra tion uncertainty . 2.28 Zero drift The change of a detector output or an instrument indication is referred to as zero drift if this change occurs without irradiation of the detector surface. 3 Requirement

36、s All detectors, instruments and equipment for measuring laser radiation shall be suitably calibrated, pass the overload test and meet the minimum requirements specified in Sub-clause 3.1. When the range, where the minimum requirements are met, depends on certain parameters: These parameters and the

37、ir tolerable ranges shall be stated, and a) b) the devices shall continue to satisfy the requirements of Sub- clause 3.1. W 3404583 O082897 589 Page 9 EN 61040 : 1992 3.1 Minimum requirements When applying the test methods and test conditions laid down in clause 4, the following errors of measuremen

38、t shall not be exceeded. When some of the error sources mentioned are insignificant due to the limited applica- bility of a detector or instrument indicated by the manufacturer, they can be neglected (e.g. the wavelength dependence of responsivity in the case of a measuring instrument which is only

39、intended for a certain laser wave- length). If the tests are to apply to an instrument or an equipment instead of a detector, the responsivity shall be replaced by the calibration factor. 3.1.1 3.1.2 3.1.3 3.1.4 3.1.5 3.1.6 3.1 -7 3.1.8 3.1.9 Change of responsivity with time 5 % Non-uniformity of re

40、sponsivity over the detector surface 25 % Change of responsivity during irradiation 22 % Temperature dependence of responsivity 5 % Dependence of responsivity on the angle of incidence for non- polarized radiation 22 % Dependence of responsivity on radiant power or radiant energy (non-linearity 25 %

41、 Wavelength dependence of responsivity 25 % Polarization dependence of responsivity for linearly polarized radiation 12 % Errors of averaging with respect to time of repetitively pulsed radiation +5 % 3.1.10 Zero drift +5 % 3.1 . 1 1 Calibration uncertainty 2 10 % 3.2 Additional requirements for a d

42、etector, an instrument or equipment with specification of an accuracy class For the classification in a special accuracy class (referred to as class in the following), all error sources mentioned in Sub-clauses 3.1.1 to 3.1.11 shall be taken into account unless they are insignificant due to the limi

43、ted applicability of the detector, instrument or equipment indicated by the man ufactu per. If the errors of measurement due to temperature dependence, non-linearity or wavelength dependence of responsivity are corrected by the user by means of tables, graphic representations or functional correlati

44、ons to the extent that class accuracy is complied with, the letter “L“ (for limited) shall be added to the class designation. The same applies when only by means of a correction procedure, or only in special air-conditioned rooms, the zero drift can be kept so small that the error of measurement cau

45、sed by it is compatible with the class accuracy. M 3404583 0082898 415 M Page 10 EN 61040 : 1992 NOTE - The class designation provides a rough estimation of the measurement uncertainty in per cent. An exact statement on the measure- ment uncertainty is only possible in the individual case by analyzi

46、ng the measurement conditions and the individual uncertainties. It can be larger or smaller than estimated by the class designations. 3.2.1 Class 20 Detectors, instruments and equipment meeting clause 3.1 are included in class 20. 3.2.2 Class 10 The sum of the absolute amounts of the indivic ua exce

47、ed 20 8; the root-sum-square uncertainty shall 3.2.3 Class 5 The sum of the absolute amounts of the individua exceed 10 %; the root-sum-square uncertainty shall 3.2.4 Class 2 the requirements of Sub- uncertainties shall not not exceed 8 %. uncertainties shall not not exceed 4 %. The sum of the absol

48、ute amounts of the individual uncertainties shall not exceed 4 %; the root-sum-square uncertainty shall not exceed 1.6 the root-sum-square uncertainty shall not exceed 0.8 %. 3.3 Calibration The detector, instrument or equipment shall be calibrated by comparison with a standard radiometer at least a

49、t one wavelength, X with monochro- matic radiation or with polychromatic radiation, which is limited to a spectral bandwidth around X (see Sub-clause 2.24). 3.4 Overload The minimum requirements and the requirements of the respective accuracy class shall be complied with even after the overload tests according to Sub-clause 4.12 have been carried out. 3,5 Users possibility of checking proper operation Detectors, instruments and equipment of class 5, class 2 and class 1 shall comprise some means (e.g. electrical heating of the absorber, auxiliary radiation source), whi