DIN ISO 21360-1-2016 Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1 General description (ISO 21360-1 2012)《真空技术 测量真空泵性能的标准方法 第1部分 一般描述(ISO 2136.pdf

《DIN ISO 21360-1-2016 Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1 General description (ISO 21360-1 2012)《真空技术 测量真空泵性能的标准方法 第1部分 一般描述(ISO 2136.pdf》由会员分享，可在线阅读，更多相关《DIN ISO 21360-1-2016 Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1 General description (ISO 21360-1 2012)《真空技术 测量真空泵性能的标准方法 第1部分 一般描述(ISO 2136.pdf（30页珍藏版）》请在麦多课文档分享上搜索。

1、September 2016 English price group 15No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 23.160!%0K“2561340www.din.deDI

2、N ISO 21360-1Vacuum technology Standard methods for measuring vacuum-pump performance Part 1: General description (ISO 21360-1:2012),English translation of DIN ISO 21360-1:2016-09Vakuumtechnik Standardverfahren zur Messung der Leistungsdaten von Vakuumpumpen Teil 1: Grundlegende Beschreibung (ISO 21

3、360-1:2012),Englische bersetzung von DIN ISO 21360-1:2016-09Technique du vide Mthodes normalises pour mesurer les performances des pompes vide Partie 1: Description gnrale (ISO 21360-1:2012),Traduction anglaise de DIN ISO 21360-1:2016-09www.beuth.deDocument comprises 30 pagesDTranslation by DIN-Spra

4、chendienst.In case of doubt, the German-language original shall be considered authoritative.08.16 A comma is used as the decimal marker. Contents Page National foreword 3 Introduction . 4 1 Scope . 5 2 Normative references 5 3 Terms and definitions . 5 4 Symbols and abbreviated terms 7 5 Test method

5、s . 8 5.1 Volume flow rate (pumping speed) measurement by the throughput method . 8 5.2 Volume flow rate (pumping speed) measurement by the orifice method. 12 5.3 Volume flow rate (pumping speed) measurement by the pump-down method 17 5.4 Measurement of the base pressure . 21 5.5 Measurement of the

6、compression ratio and the critical backing ressure. 22 Annex A (informative) Mean free path of some important gases 26 Annex B (informative) Measuring uncertainties 27 Bibliography . 30 DIN ISO 21360-1:2016-09 2 National foreword The German version of DIN ISO 21360-1:2012 is a German translation of

7、ISO 21360-1:2012 and was prepared by DIN-Normenausschuss Maschinenbau (DIN Standards Committee Mechanical Engineering),Working Committee NA 060-07-01 AA “Vacuum pumps”. ISO 21360-1 was prepared by Technical Committee ISO/TC 112 “Vacuum technology”. This first edition of ISO 21360-1 cancels and repla

8、ces ISO 21360:2007, and contains minor amendments. DIN ISO 21360 consists of the following parts, under the general title Vacuum technology Standard methods for measuring vacuum-pump performance: Part 1: General description Part 2: Positive displacement vacuum pumps Further parts of the standard are

9、 currently being prepared by ISO/TC 112. DIN ISO 21360-1:2016-09 3 IntroductionThis part of ISO 21360 is a basic standard for measuring the performance data of vacuum pumps. The methods specified here are well known from existing national and International Standards. In developing this part of ISO 2

10、1360, the aim has been to provide a single document containing the measurements of performance data of vacuum pumps and to simplify the future development of specific vacuum pump standards.Specific vacuum pump standards will contain a suitable selection of measurement methods from this part of ISO 2

11、1360 in order to determine the performance data, limiting values and specific operational conditions on the basis of the specific properties of the particular kind of pump. Whenever a discrepancy exists between this part of ISO 21360 and the specific standard, it is the specific standard which is va

12、lid.DIN ISO 21360-1:2016-09 4 Vacuum technology Standard methods for measuring vacuum-pump performance Part 1: General description1 ScopeThis part of ISO 21360 specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and t

13、he critical backing pressure of a vacuum pump.The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated

14、 or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput.The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It i

15、s based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice.The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a lar

16、ge vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in

17、 the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate.The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the meas

18、urement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this part of ISO 21360 (e.g. measurement of power consumption), are defined in the specific pump standard.2 Normative referencesThe

19、 following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 3529-2, Vacuum technology Vocabulary Part 2: Vacu

20、um pumps and related terms3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 3529-2 and the following apply.DIN ISO 21360-1:2016-09 5 3.1volume flow rateqVqVtV=ddwhereV is volume;t is timeISO 80000-4:20064, 4-30EXAMPLE In the context of this part of ISO

21、21360, the volume flow rate is the volume of gas which, under ideal conditions, flows from the test dome through the pump inlet per time.NOTE 1 For practical reasons, the volume flow rate of a given pump and for a given gas is conventionally considered to be equal to the quotient of the throughput o

22、f this gas and of the equilibrium pressure at a given location. The volume flow rate is expressed in cubic metres per hour or litres per second.NOTE 2 The term “pumping speed” and symbol “S” are often used instead of “volume flow rate”.3.2inlet pressurep1, pd, pepressure at the inlet of the pump, me

23、asured at a defined location in the test dome3.3base pressurepbpressure obtained in the test dome after conditioning the vacuum pump and the test domeSee 5.4.NOTE The base pressure is the value which the pressure in the test dome approaches asymptotically. It is the lowest pressure obtainable with t

24、he pump, but there is no practical method of measurement or specification.3.4maximum working pressurep1maxhighest pressure on the inlet side that the vacuum pump and the driving device can withstand for a prolonged period of operation time without being damaged3.5backing pressurep3pressure at the ou

25、tlet of a vacuum pump3.6critical backing pressurepcmaximum backing pressure for which the conditions are defined in the instruction manual or in a specific standard for the particular vacuum pump3.7compression ratioK0ratio of the backing pressure, p3, to the inlet pressure, p1, of the vacuum pump wi

26、thout throughput, expressed by the equation:Kpp031=DIN ISO 21360-1:2016-09 6 3.8test domespecial vacuum vessel with precisely defined size, diameter and connection flanges on specified locations, used for standard performance data measurements on vacuum pumps3.9throughputQamount of gas flowing throu

27、gh a duct, expressed by the equation:QpVtpqV=11wherep1is the (high) vacuum pressure on the inlet;qVis the volume flow rate of the test pump;t is time;V is the volume of the test dome3.10standard gas flow rateqVstdvolume flow rate at standard reference conditions, i.e. 0 C and 101 325 PaNOTE Standard

28、 reference conditions are defined in ISO 3529-1:19811, 1.0.2.4 Symbols and abbreviated termsSymbol Designation Unita inner diameter of the connection pipe between test pump and quick-acting valve (items 3 and 5 in Figure 6)mA cross-section of the connection pipe between test pump and quick-acting va

29、lve (items 3 and 5 in Figure 6)m2C conductance m3/s (= 103l/s)d diameter of orifice mD inner diameter of test dome mDNnominal diameter of test dome mK0compression ratio of vacuum pump with zero throughput l length of the connection pipe between test pump and quick-acting valve (items 3 and 5 in Figu

30、re 6)mlmean free path mM molar mass of gas kg/molp0standard atmospheric pressure 101 325 Pa (defined in ISO 3529-1:19811, 1.0.2)Pap1(high) vacuum pressure on inlet Pa (or mbar)DIN ISO 21360-1:2016-09 7 p1maxmaximum working pressure on inlet Pa (or mbar)p3vacuum pressure in backing line Pa (or mbar)p

31、t1, pt2,pt3pressures in the test dome for the pump-down method, measured before and after time intervals t1, t2, t3Pa (or mbar)pb1, pb2, pb3base pressures Pa (or mbar)pccritical backing pressure Pa (or mbar)pd, pepressures in the test dome for the orifice method Pa (or mbar)Q gas throughput of vacuu

32、m pump Pal/s (or mbarl/s)Qrtest gas load Pal/s (or mbarl/s)qVvolume flow rate of test pump l/s (or m3/h)qVBPvolume flow rate of backing pump l/s (or m3/h)qVsccmvolume flow rate at standard reference conditions for gases, i.e. 0 C and 101 325 Pasccm (or cm3/min)qVstdvolume flow rate at standard refer

33、ence conditions for gases, i.e. 0 C and 101 325 Pal/s (or m3/h)Qmaxmaximum gas throughput of vacuum pump which the pump can withstand without damagePal/s (or mbarl/s)R ideal gas constant 8,314 J/(molK)T thermodynamic temperature KT0273,15 K (defined as 0 C in ISO 3529-1:19811, 1.0.2) KTDtemperature

34、of the test dome KTftemperature of the flow meter Ku measurement uncertainty V volume of the test dome l, m3Vivolume of connection pipe between test pump and quick-acting valve (items 3 and 5 in Figure 6)l, m3d thickness of the orifice wall at the orifice diameter m5 Test methods5.1 Volume flow rate

35、 (pumping speed) measurement by the throughput method5.1.1 GeneralThe throughput method is the one most used for vacuum pumps and is applicable to all pressure ranges and pump sizes where flow meters for gas throughput measurements are available with sufficient accuracy. The gas flow measuring range

36、s shall be chosen by multiplying the expected volume flow rate by the maximum and minimum working pressure of the test pump.DIN ISO 21360-1:2016-09 8 All measuring devices shall be calibrated either:a) in a traceable way to a vacuum primary or to a national standard, orb) by means of instruments of

37、absolute measure which are traceable to the SI units and to which measurement uncertainties can be attributed.In the case of calibrated measuring instruments, there should exist a calibration certificate in accordance with ISO/IEC 170253.5.1.2 Test dome for the throughput methodFor these measurement

38、s, use a test dome as shown in Figure 1 with the same nominal diameter, DN, as that of the pump inlet. The face of the dome opposite the inlet flange may be flat, conical or slightly curved, with the same average height above the flange as the flat face. Three flanges are preferable for pressure mea

39、surement at a height of D/2 above the bottom flange if more than one pressure gauge is used. The diameter of these flanges should be greater than or equal to the flanges of the gauges used, and their mounting dimensions shall be noted. No measuring port shall be located in the angle range 45 next to

40、 a gas inlet port. The connection pipes between flange and dome shall not protrude beyond the dome wall on the inside, with the exception of the gas inlet pipe.If necessary for the test pump, the test dome shall be fitted with a device for bake-out that ensures uniform heating of the dome to achieve

41、 the base pressure.The volume of the test dome may depend on the pump type. Refer to the specific pump standard for details.For pumps with an inlet flange diameter of less than DN= 100 mm, the diameter of the dome shall correspond to DN= 100 mm. The transition to the pump inlet flange shall be made

42、through a 45 conical adaptor, as shown in Figure 1.Key1 gas inlet pipe and temperature measuring point for TD2 vacuum gauge and mass spectrometer connectionsD inner diameter of test dome, in metresFigure 1 Test dome for the throughput methodDIN ISO 21360-1:2016-09 9 5.1.3 Experimental setupSee Figur

43、e 2.The test dome shall be clean and dry. The cleanness of the pump, seals and other components shall be appropriate for the expected base pressure. All components are mounted together under clean conditions in accordance with Figure 2. Because of the narrow measuring range, flow meters with differe

44、nt ranges may be switched in series. If flow is restricted by a small flow meter, they may be used in parallel with a manifold, adding a valve between every flow meter and the manifold. Instead of the flow meter and the gas inlet valve, mass flow controllers with programmable throughputs may be used

45、. They shall be combined in parallel on a manifold.The leak-tightness of large mass flow controllers is not sufficient in many cases. In such cases, it is advisable that valves be used between the flow controller and the manifold. Ionization gauges and mass spectrometers shall be installed in such a

46、 way that there is no direct geometrical path between them.CAUTION Observe the safety instructions of the vacuum pump manufacturer.Key1 test dome 4 gas inlet valve 7 heating jacket (optional)2 backing pump 5 flow meters to measure Q 8 vacuum gauge to measure p33 test pump 6 vacuum gauge to measure p

47、19 temperature measuring point for TDNOTE Items 2 and 8 are only used in connection with high-vacuum test pumps.Figure 2 Arrangement for measuring volume flow rate (pumping speed) with throughput method5.1.4 Determination of the volume flow rateThe method adopted for the measurement of the volume flow rate, qV, is the throughput method for which the gas throughput, Q, is measured outside the dome. If the pressure, p