ASTM E2042-2004 Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms《可控区域和清洁室的清洁和维护的标准实施规程》.pdf

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1、Designation: E 2042 04Standard Practice forCleaning and Maintaining Controlled Areas and CleanRooms1This standard is issued under the fixed designation E 2042; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revisi

2、on. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice covers the procedures to be followed forthe initial cleaning and normal maintenance of cleanrooms andcontrolled ar

3、eas. This practice is applicable to aerospace cleanareas where both particles and molecular films (NVR) must becontrolled.1.2 The values stated in SI units are to be regarded as thestandard.1.3 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It i

4、s theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Documents2.1 ASTM Standards:2D 1193 Specification for Reagent WaterE 1234 Practice for Handling, Transporting,

5、and InstallingNonvolatile Residue (NVR) Plates Used in Environmen-tally Controlled Areas for SpacecraftE 1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally ControlledAreas for SpacecraftE 1549 Specification for ESD Controlled Garments Re-quired in Cleanro

6、oms and Controlled Environments forSpacecraft for Non-Hazardous and Hazardous OperationsE 1560 Test Method for Gravimetric Determination of Non-volatile Residue from Cleanroom WipersE 2352 Practice for Aerospace Cleanrooms and AssociatedControlled EnvironmentsCleanroom OperationsF 24 Method for Meas

7、uring and Counting Particulate Con-tamination on SurfacesF 25 Test Method for Sizing and Counting Airborne Par-ticulate Contamination in Clean Rooms and Other Dust-Controlled Areas Designed for Electronic and SimilarApplicationsF 50 Practice for Continuous Sizing and Counting of Air-borne Particles

8、in Dust-Controlled Areas and Clean RoomsUsing Instruments Capable of Detecting Single Sub-Micrometer and Larger Particles2.2 IEST Standards:3IEST-RP-CC007 Testing ULPA FiltersIEST-RP-CC016 The Rate of Deposition of NonvolatileResidue in CleanroomsIEST-RP-CC0018 Cleanroom Housekeeping and Monitor-ing

9、 ProceduresIEST-RP-CC003 Garment System Considerations forCleanrooms and Other Controlled EnvironmentsIEST-RP-CC026 Cleanroom OperationsIEST-STD-CC1246D Product Cleanliness Levels and Con-tamination Control Program42.3 US Federal Standards:5FED-STD-209E Airborne Particulate Cleanliness Classes inCle

10、anrooms and Clean Zones6TT-I-735 Isopropyl AlcoholO-A-51 Acetone52.4 US Department of Defense Standards:5MIL-D-16791 Detergents, General Purpose (Liquid, Non-Ionic)2.5 International Standards:7ISO 14644-1 Cleanrooms and Associated ControlledEnvironmentsPart 1: Classification of Air CleanlinessISO 14

11、644-2 Cleanrooms and Associated ControlledEnvironmentsPart 2: Specifications for Testing andMonitoring to Prove Continued Compliance with ISO14644-11This practice is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and the Applications of Space Technology and is the direct responsibil

12、ityof Subcommittee E21.05 on Contamination.Current edition approved Apr. 1, 2004. Published April 2004. Originallyapproved in 1999. Last previous edition approved in 1999 as E 2042 99.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm

13、.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from Institute of Environmental Science and Technology (IEST),5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841.4IEST-STD-CC1246D replaced MIL-STD-1246.5Ava

14、ilable from Superintendent of Documents, US Government Printing Office,Washington, DC 20402.6Cancelled Nov. 29, 2001 and replaced with ISO 14644-1 and 14644-2.FED-STD-209E may be used by mutual agreement between buyer and seller.Available from U.S. Government Printing Office, Superintendent of Docum

15、ents,732 N. Capitol St., NW, Mail Stop: SDE, Washington, DC 20401. FS209Ecleanroom classes are given for reference in parentheses after the ISO classes.7Available from International Organization for Standardization (ISO), 1 rue deVaremb, Case postale 56, CH-1211, Geneva 20, Switzerland.1Copyright AS

16、TM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.3. Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 clean zone, na defined space in which the concen-tration of airborne particles is controlled to specified limits.3.1.2 cleanroo

17、m, na room in which the air filtration, airdistribution, utilities, materials of construction, equipment, andoperating procedures are specified and regulated to controlairborne particle concentrations to meet appropriate airborneparticulate cleanliness classifications, as defined by ISO14644-1.3.1.3

18、 cleanroom, as-built, na cleanroom that is completeand ready for operation, with all services connected andfunctional, but without equipment or operating personnel in theroom.3.1.4 cleanroom, at-rest, na cleanroom that is complete,with all services functioning and with equipment installed andoperabl

19、e or operating, as specified, but without operatingpersonnel in the room.3.1.5 cleanroom, operational, na cleanroom in normaloperation, with all services functioning and with equipmentand personnel, if applicable, present and performing theirnormal work functions in the room.3.1.6 clean facility, nt

20、he total real property required toaccomplish the cleanroom functions.3.1.6.1 DiscussionIn addition to the cleanroom and asso-ciated clean areas, this includes utility rooms, storage areas,offices, lockers, wash-rooms, and other areas that do notnecessarily require precise environmental control.3.1.7

21、 controlled area, nan environmentally controlledarea, operated as a cleanroom, but without the final stage ofHEPA filters. Controlled areas would meet ISO Class 8.5(FED-STD-209E equivalent to Class 300 000) per Table 1.3.1.7.1 DiscussionOnly rough filters (50 to 60 % effi-ciency) and medium efficien

22、cy filters (80 to 85 % efficiency)are required for a controlled area. The maximum allowableairborne particle concentrations in a controlled area are11 100 000/m3per ISO Class 8.5 for particles $0.5 m and 92500/m3(2620 particles/ft3per Class 300 000/ft3FED-STD-209E) for particles $5.0 m.3.1.8 DI wate

23、r, ndeionized water.3.1.9 discrete-particle counter (DPC), nan instrument,such as an optical particle counter or condensation nucleuscounter, capable of resolving responses from individual par-ticles.3.1.10 HEPA filter, n(high-efficiency particulate air filter)a throwaway, extended-medium, dry-type

24、filter in a rigidframe, having a minimum particle-collection efficiency of99.97 % (that is, a maximum particle penetration of 0.03 %)for 0.3-m particles of thermally generated DOP of specifiedalternative aerosol.3.1.11 HVAC, nheating, ventilating, and air conditioning.3.1.12 nonvolatile residue (NVR

25、), nmatter remaining aftersolvent containing such matter has been evaporated or cleaned.3.1.13 ULPA filter, n(ultra-low-penetration air filter) athrowaway, extended-medium, dry-type filter in a rigid frame,having a minimum particle-collection efficiency of 99.999 %(that is, a maximum particle penetr

26、ation of 0.001 %) forparticles in the size range of 0.1 to 0.2 m, when tested inaccordance with the methods of IES-RP-CC007.1.4. Significance and Use4.1 This practice identifies methods for cleaning and main-taining controlled areas and clean rooms as defined by ISO14644-1 and ISO 14644-2. Cleaning

27、procedures are described,TABLE 1 Comparison of ISO 14644-1 and FED-STD-209E Cleanliness ClassesISO Class NNominal FS209E ClassParticle ConcentrationsMaximum Number of Particles per Cubic Meter / Cubic Footof Air for Particle Sizes Equal to or Greater than the Stated Size0.1 m 0.2 m 0.3 m 0.5 m 1 mA5

28、mISO Class 1 10 2 ISO Class 2 100 24 10 4 FS209E Class 0.1 3 1 ISO Class 3 1000 237 102 35 8 FS209E Class 1 35 7 3 1 ISO Class 4 10 000 2370 1020 352 83 FS209E Class 10 350 75 30 10 2 ISO Class 5 100 000 23 700 10 200 3520 832 29FS209E Class 100 3500B750 300 100 24 ISO Class 6 1 000 000 237 000 102

29、000 35 200 8320 293FS209E Class 1000 35 000B7500B3000B1000 236 7ISO Class 6.7C 176 000 41 700 1470FS209E Class 5000B 5000 1180 42ISO Class 7 352 000 83 200 2930FS209E Class 10 000 10 000 2360 70ISO Class 8 3 520 000 832 000 29 300FS209E Class 100 000 100 000 23 600 700ISO Class 8.5C 11 100 000 2 630

30、 000 92 500FS209E Class 300 000D 300 000 74 500 2620ISO Class 9 35 200 000 8 320 000 293 000FS209E Class 1 000 000D 1 000 000 236 000 8280ANo 1 m designation is listed in FS209E Table 1 for particulate classes. The values shown are equivalents of the ISO values.BThese values were not directly listed

31、 in FS209E. Allowances are made in FS209E for intermediate classes and associated calculations have been shown. If used, anotation should be made indicating that they have been derived.CISO 14644-1 does not include Class 6.7 or 8.5. The values shown are equivalent to those derived for FED-STD-209E C

32、lass 5000 and 300 000.DFS209E does not include Class 300 000 and 1 000 000. The values shown are equivalents of the ISO values for ISO Class 8.5 and 9.E2042042and cleaning frequency for different classes of facility aregiven. Compliance with this practice will make it easier andmore likely that the

33、required level of facility cleanliness will bemaintained. A cleaner facility also will help to protect flighthardware from contamination and should reduce the frequencyfor cleaning flight hardware. This practice does not discussoperation and operational procedures for cleanrooms andcontrolled areas.

34、 Other documents such as IEST-RP-CC026and Practice E 2352 provide recommended practices for oper-ating cleanrooms and controlled areas.5. Cleanrooms and Clean Zones5.1 Airborne Particle ConcentrationsThe types of clean-rooms and clean zones used in this practice are based onairflow, air filtration,

35、and airborne particle concentration limits.The classification of airborne particle concentration limits incleanrooms, clean zones, and controlled areas are defined inTable 1 which is based on ISO 14644-1 and ISO 14644-2.Airflow Air Filtration Typical AirborneParticleConcentrationLimits UnderOperatio

36、nalConditionsIn AccordanceWithISO 14644-1Type I Unidirectional, formerlyknown as 9laminarflow9HEPA or ULPAfiltered withprefiltersClasses less than 7(Classes lessthan 10 000 perFED-STD-209E)Type II Nonunidirectional,formerly known as“turbulent” flowHEPA filtered withprefiltersClasses 7 to 8.5(Classes

37、 10 000 to300 000 per FED-STD-209E)Type III Nonunidirectional without HEPA orULPA filters butwith prefiltersClasses 8 to 8.5(Classes 100 000to 300 000 per FED-STD-209E)5.2 NVR ConcentrationsThere are two categories forNVR requirements in clean areas:5.2.1 Category ICritical clean areas that require

38、specificcontrol and removal of molecular contaminants because ofproducts that either are very sensitive to NVR or can not becleaned. Quantitative NVR measurements may be required asdefined in IEST-STD-CC1246D and IES-RP-CC016. NVRdeposition criteria are defined in Tables 2 and 3.5.2.2 Category IISta

39、ndard clean areas that do not requirequantitative measurements of NVR. All aerospace clean facili-ties, including support shops for the fabrication of componentsfor aerospace hardware, must limit the deposition of nonvola-tile residue (NVR), also known as molecular films. Thecleaning supplies recomm

40、ended in this practice are selected forthe minimal production of NVR.5.2.2.1 Some clean areas require very low levels of NVR tobe compatible with product cleanliness requirements. Theseareas require cleaning methods that will remove NVR. Theuser will state when Category I is required and alowable le

41、velsof NVR on surfaces, that is, NVR level in accordance withIEST-STD-CC1246D (g/cm2or mg/0.1 m2). Category II isassumed unless Category I is expressly specified.5.2.3 NVR VerificationMeasurement of NVR in cleanfacilities may be done in accordance with Practice E 1234 andTest Method E 1235 or other

42、methods that are compatible withthe product requirements and types of NVR. Typical NVRcompounds that are found in cleanrooms include hydrocar-bons, esters, and silicones.6. Materials Used6.1 Wipers, Cleanroom, polyester or cellulose, low NVRand low particle generation.86.2 Gloves, Cleanroom, polyure

43、thane, nitrile or latex.96.3 Gloves, Cleanroom, lint and powder free, latex.96.4 Coveralls, Hoods, Shoe Covers.10,116.5 Deionized Water, shall have a minimum resistance of50 000 ohms and be filtered to remove all particles greater than30 m in size. Total solids (both dissolved and undissolved)shall

44、not exceed 25 ppm.8The sole sources of supply of the product known to the committee at this timeare Miracle Wipe 4000, ITWTexwipe Alpha Wipe, ITWTexwipe Alpha 10,ITWTexwipe/ICP TX 4012, Anticon 100, Allter Al Sorb. If you are aware ofalternative suppliers, please provide this information to ASTM Int

45、ernationalHeadquarters. Your comments will receive careful consideration at a meeting of theresponsible technical committee,1which you may attend.9The sole sources of supply of the products known to the committee at this timeare Pioneer Trionic E-194, QRP Q095, Q125, and Q145 (according to length) a

46、nd27G-2700 (conductive) and Ansell-Edmont Nitrile. If you are aware of alternativesuppliers, please provide this information to ASTM International Headquarters.Your comments will receive careful consideration at a meeting of the responsibletechnical committee,1which you may attend.10Any available so

47、urce not packaged in pink poly or other material that cantransfer molecular contaminants.11Garments worn for maintenance should be the same type and quality as thoseworn by workers in the cleanroom during normal operations.TABLE 2 Product Cleanliness Levels for NVR Based onIEST-STD-CC1246DNVRLevelNV

48、R LimitASurfacemg/0.1 m2Volumemg/LAA5 0.00001AA4.7 0.00002AA4.3 0.00005AA4 0.0001AA3.7 0.0002AA3.3 0.0105AA3 0.001AA2.7 0.002AA2.3 0.005A/100 0.01 0.1A/50 0.02 0.2A/20 0.05 0.5A/10 0.1 1.0A/5 0.2 2.0A/2 0.5 5.0A 1.0 10B 2.0 20C 3.0 30D 4.0 40E 5.0 50F 7.0 70G 10.0 100H 15.0 150J 25.0 250A1 mg/0.1 m2

49、= 1 g/cm2= 0.929 mg/ft2= 10-nm-thick uniform film (r =1g/cm3).E20420436.6 Non-Ionic Detergent, MIL-D-16791, Type 1.126.7 Isopropyl Alcohol (IPA), TT-I-735, Grade A.6.8 Acetone, ACS reagent STD11 or Federal SpecificationO-A-51.6.9 Buckets, food grade, stainless steel or polypropylene orpolyethylene. Buckets with two compartments are recom-mended.6.10 Mop, knit polyester head, roller type, with corrosionresistant handle and mechanism; or knit polyester or polyvinylacetat