ASTM E1458-1992(2001) Standard Test Method for Calibration Verification of Laser Diffraction Particle Sizing Instruments Using Photomask Reticles 《用光掩模原版校准检验激光绕射粒子定尺寸仪器的试验方法》.pdf

《ASTM E1458-1992(2001) Standard Test Method for Calibration Verification of Laser Diffraction Particle Sizing Instruments Using Photomask Reticles 《用光掩模原版校准检验激光绕射粒子定尺寸仪器的试验方法》.pdf》由会员分享，可在线阅读，更多相关《ASTM E1458-1992(2001) Standard Test Method for Calibration Verification of Laser Diffraction Particle Sizing Instruments Using Photomask Reticles 《用光掩模原版校准检验激光绕射粒子定尺寸仪器的试验方法》.pdf（12页珍藏版）》请在麦多课文档分享上搜索。

1、Designation: E 1458 92 (Reapproved 2001)Standard Test Method forCalibration Verification of Laser Diffraction Particle SizingInstruments Using Photomask Reticles1This standard is issued under the fixed designation E 1458; the number immediately following the designation indicates the year oforiginal

2、 adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.INTRODUCTIONThere exists a large variety of techniques and instruments for the

3、 sizing of particles and droplets influid suspension. These instruments are based on a number of different physical phenomena andinterlaboratory comparisons of data on, for example, reference liquid sprays have shown significantvariability. This test method evolved in conjunction with efforts to exp

4、lain the observed variability.The effectiveness of this test method can be traced to the fact it circumvents difficulties associated withproducing, replicating, and maintaining a standard sample of liquid particles in a spray. This testmethod uses a photomask reticle to provide a simulation of some

5、of the optical properties of areference population of spherical particles. This test method is only applicable to optical particle sizinginstruments that are based on measurement and analysis of light scattered in the forward direction byparticles illuminated by a light beam. Since modern optical in

6、struments generally use a laser toproduce a light beam, and since the light scattered in the forward direction by particles can often beaccurately described using diffraction theory approximations, the class of instruments for which thistest method applies have become generally known as laser diffra

7、ction particle sizing instruments.Because it is specifically Fraunhofer diffraction theory2,3that is used in the approximation, theseinstruments are also known as Fraunhofer diffraction particle sizing instruments.The diffraction approximation to the general problem of electromagnetic wave scatterin

8、g byparticles is strictly valid only if three conditions are satisfied. The conditions are: particle sizes mustbe significantly larger than the optical wavelength, particle refractive indices must be significantlydifferent than the surrounding medium, and only very small (near-forward) scattering an

9、gles areconsidered. For the case of spherical particles with sizes on the order of the wavelength or for largescattering angles, the complete Lorenz-Mie scattering theory2,3rather than the Fraunhofer diffractionapproximation must be used. If the size and angle constraints are satisfied but the parti

10、cle refractiveindex is very close to that of the medium, the anomalous diffraction approximation3may be used.A complication is introduced by the fact that the optical systems of most laser diffraction particlesizing instruments can be used, with only minor modifications such as changing a lens or tr

11、anslatingthe sample, for measurement configurations outside the particle size or scattering angle range forwhich the diffraction approximation is valid. In this situation the scattering inversion software in theinstrument would generally incorporate a scattering model other than Fraunhofer diffracti

12、on theory, inwhich case the term “laser diffraction instrument” might be considered a misnomer. However, such aninstrument is still in essence a laser diffraction instrument, modified to decrease the lower particle sizelimit. A calibration verification procedure as described by this test method woul

13、d be applicable to allinstrument configurations (or operational modes) where the photomask reticle accurately simulates therelevant optical properties of the particles.The ideal calibration test samples for laser diffraction particle sizing instruments would becomprised of the actual particle or dro

14、plet material of interest in the actual environment of interestwith size distributions closely approximating those encountered in practice. However, the use of suchcalibration test samples is not currently feasible because multi-phase mixtures may undergo changesduring a test and because actual samp

15、les (for example, a spray) are not easily collected and stabilizedfor long periods of time. The subject of this test method is an alternative calibration test samplecomprised of a two-dimensional array of thin, opaque circular discs (particle artifacts) deposited ona transparent substrate (the photo

16、graphic negative, that is, clear apertures in an opaque substrate, may1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.be used as well). Each disc or particle artifact represents the orthogonal projection of the cross-sectionof one me

17、mber of a population of spherical particles comprising the reference population. Thecollection of particle artifacts on a reticle represents an orthogonal projection of all the particles in thereference population for one particular three-dimensional arrangement of the population where themember par

18、ticles are positioned within a finite reference volume. The reference volume is generallydefined such that the area covered by particle artifacts on the reticle is roughly equivalent to thecross-section of the instrument light beam. The reference population would generally contain a largenumber of p

19、articles, with a size distribution that approximates distributions of practical interest,randomly distributed over the reference volume. Large numbers and random positions minimizecomplications that can arise from optical coherence effects (interference).Of importance here is the fact that the near-

20、forward scattering characteristics of the orthogonalprojections of the particle cross-sections onto the reticle plane accurately simulate, in regimes wherethe diffraction approximation is valid, the near-forward scattering characteristics of the referencepopulation (independent of the chemical compo

21、sition of the particles in the reference population). Inother words the photomask reticle, when illuminated with a laser beam of known properties, generatesa reference scattered light signature which can be predicted analytically from a knowledge of the sizedistribution of the reference population.

22、The properties of the reference population can be inferredfrom a characterization (using optical microscopy) of the sizes of the particle artifacts on the reticle.As the instrument is operated away from the diffraction regime, the scattering properties of thephotomask reticle diverge from that which

23、 would be produced by the reference population andinterpretation of the measurements becomes more problematic.The most complete test result for this test method would be a discrete size distribution reported fora very large number of size class intervals, but intercomparisons of such distributions a

24、re difficult. Forthat reason statistical parameters (for example, representative diameters and measures of thedispersion) of the particle size distribution are used. Two examples of statistical parameters are thevolume median diameter DV0.5and the relative span (DV0.9 DV0.1)/DV0.5as defined in Pract

25、iceE 799 (recall that volume parameters such as DVffor a photomask reticle are defined in the sense thattwo-dimensional particle artifacts scatter light like spherical particles of the same diameter). Estimatesof the true values of these statistical parameters for a photomask reticle (or more precis

26、ely the truevalues for the reference population simulated by the reticle) can be established using optical orelectron microscope measurements of the diameters of the particle artifacts on the reticle. The valuesso established are termed image-analysis reference values and will be used herein as the

27、acceptedreference values. It is the stability of DV0.5, the relative span, and all other statistical parametersrepresentative of the particle artifact size distribution for a reticle and the ability to produce nearlyidentical replicate copies of the reticles that make this test method useful. A comp

28、arison of theaccepted reference value of DV0.5, the relative span, or any other parameter of a reticle with acorresponding test result from the instrument under evaluation can be used to assess the acceptabilityof the instrument and of the data routinely obtained with the instrument.1. Scope1.1 This

29、 test method describes a procedure necessary topermit a user to easily verify that a laser diffraction particlesizing instrument is operating within tolerance limit specifica-tions, for example, such that the instrument accuracy is asstated by the manufacturer. The recommended calibrationverificatio

30、n method provides a decisive indication of theoverall performance of the instrument at the calibration pointor points, but it is specifically not to be inferred that all factorsin instrument performance are verified. In effect, use of this testmethod will verify the instrument performance for applic

31、ationsinvolving spherical particles of known refractive index wherethe near-forward light scattering properties are accuratelymodeled by the instrument data processing and data reductionsoftware. The precision and bias limits presented herein are,therefore, estimates of the instrument performance un

32、der idealconditions. Nonideal factors that could be present in actualapplications and that could significantly increase the bias errorsof laser diffraction instruments include vignetting4(that is,where light scattered at large angles by particles far away fromthe receiving lens does not pass through

33、 the receiving lens andtherefore does not reach the detector plane), the presence ofnonspherical particles, the presence of particles of unknownrefractive index, and multiple scattering.1.2 This test method shall be used as a significant test of theinstrument performance. While the procedure is not

34、designed1This test method is under the jurisdiction of ASTM Committee E29 on ParticleSize Measurement and is the direct responsibility of Subcommittee E29.04 onLiquid Particle Measurement.Current edition approved May 20, 1992. Published July 1992.2Bohren, C. F. and Huffman, D. R. Absorption and Scat

35、tering of Light by SmallParticles, John Wiley and Sons, New York, 1983.3van de Hulst, H. C. Light Scattering by Small Particles, Dover PublicationsInc., New York, 1981.4Hirleman, E. D., Oechsle, V., and Chigier, N. A., “Response Characteristics ofLaser Diffraction Particle Sizing Systems: Optical Sa

36、mple Volume and LensEffects,” Optical Engineering, Vol 23, 1984, pp. 610619.E 14582for extensive calibration adjustment of an instrument, it shallbe used to verify quantitative performance on an ongoing basis,to compare one instrument performance with that of another,and to provide error limits for

37、instruments tested.1.3 This test method provides an indirect measurement ofsome of the important parameters controlling the results inparticle sizing by laser diffraction. A determination of allparameters affecting instrument performance would comeunder a calibration adjustment procedure.1.4 This te

38、st method shall be performed on a periodic andregular basis, the frequency of which depends on the physicalenvironment in which the instrumentation is used. Thus, unitshandled roughly or used under adverse conditions (for ex-ample, exposed to dust, chemical vapors, vibration, or combi-nations thereo

39、f) shall undergo a calibration verification morefrequently than those not exposed to such conditions. Thisprocedure shall be performed after any significant repairs aremade on an instrument, such as those involving the optics,detector, or electronics.1.5 The values stated in SI units are to be regar

40、ded as thestandard.1.6 This standard does not purport to address all of thesafety problems, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to

41、use.2. Referenced Documents2.1 ASTM Standards:A 340 Terminology of Symbols and Definitions Relating toMagnetic Testing5D 123 Terminology Relating to Textiles6D 3244 Practice for Utilization of Test Data to DetermineConformance with Specifications7E 131 Terminology Relating to Molecular Spectroscopy8

42、E 135 Terminology Relating to Analytical Chemistry forMetals, Ores, and Related Materials9E 284 Terminology of Appearance10E 456 Terminology Relating to Quality and Statistics10E 799 Practice for Determining Data Criteria and Process-ing for Liquid Drop Size Analysis10E 1187 Terminology Relating to

43、Conformity Assessment102.2 Military Standard:MIL-STD-45662 Calibration Systems Requirements112.3 NIST Standard:NIST SP 676-1 Measurement Assurance Programs122.4 ANSI Standard:13ANSI-ASQC Z-1 Standard for Calibration Systems132.5 ISO Standard:14ISO Guide 2A General Terms and Their Definitions Con-cer

44、ning Standardization Certification, and Testing Lab.Accreditation3. Terminology3.1 Current ASTM Standard DefinitionsDefinitions of theterms listed below, as used in this test method are from theCompilation of ASTM Standard Definitions,15:3.1.1 accuracysee Terminology D 123, (CommitteeD-13).3.1.2 ass

45、ignable causesee Terminology E 456, (Commit-tee E-11).3.1.3 biassee Terminology D 123, (Committee D-13).3.1.4 calibrationsee Terminology E 1187, (CommitteeE-36).3.1.5 DiscussionThis and many other commonly useddefinitions for calibration are very broad in the sense that theycould encompass a wide ra

46、nge of tasks. (See for exampleMIL-STD-45662, NBS (NIST) SP 676I, and ANSI ASQC Z-1Draft Standard for Calibration Systems). For example, in somecases calibration is only the determination of whether or not aninstrument is operating within accuracy specifications ( toler-ance testing in NBS SP 676I).

47、In other cases calibrationincludes reporting of differences between the instrument re-sponse and the accepted value of the standard, for example, toproduce a “Table of Corrections” to be used with the instru-ment. Finally, calibration can also include any repairs oradjustments required to make the i

48、nstrument response consis-tent with the standard within the stated accuracy specifications.To clarify the situation it is proposed that the more specificterms calibration verification and calibration adjustment (see3.4) both of which would fall under these broad definitions ofcalibration.3.1.6 coeff

49、cient of variationsee Terminology D 123,(Committee D-13). Also known as the relative standarddeviation (see Terminology E 135, Committee E-1).3.1.7 reference materialsee Terminology E 1187, (Com-mittee E-36) (see ISO Guide 2, A).3.1.8 scatteringsee Terminology E 284, (CommitteeE-12).3.1.9 standard reference materialsee Terminology E 131,(Committee E-13).3.1.10 test method, nsee Terminology D 123, (CommitteeD-13).3.1.11 test method equationsee Terminology D 123,(Committee D-13).3.1.12 test resultsee Terminology D 123, (CommitteeD-13).3.1.13 tolerance limits, specification or