ASTM D2442-1975(2016) Standard Specification for Alumina Ceramics for Electrical and Electronic Applications《电工和电子用氧化铝陶瓷的标准规格》.pdf

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1、Designation: D2442 75 (Reapproved 2016)Standard Specification forAlumina Ceramics for Electrical and ElectronicApplications1This standard is issued under the fixed designation D2442; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision,

2、the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This specification covers the requirements for fabricatedalumina parts suitable for electronic and electri

3、cal applicationsand ceramic-to-metal seals as used in electron devices. Thisstandard specifies limits and methods of test for electrical,mechanical, thermal, and general properties of the bodies usedfor these fabricated parts, regardless of part geometry.1.2 The values stated in SI units are to be r

4、egarded as thestandard. The values given in parentheses are for informationonly.2. Referenced Documents2.1 ASTM Standards:2C20 Test Methods for Apparent Porosity, Water Absorption,Apparent Specific Gravity, and Bulk Density of BurnedRefractory Brick and Shapes by Boiling WaterC108 Symbols for Heat T

5、ransmissionC242 Terminology of Ceramic Whitewares and RelatedProductsC408 Test Method for Thermal Conductivity of WhitewareCeramicsC573 Methods for Chemical Analysis of Fireclay and High-Alumina Refractories (Withdrawn 1995)3C623 Test Method for Youngs Modulus, Shear Modulus,and Poissons Ratio for G

6、lass and Glass-Ceramics byResonanceD116 Test Methods for Vitrified Ceramic Materials forElectrical ApplicationsD149 Test Method for Dielectric Breakdown Voltage andDielectric Strength of Solid Electrical Insulating Materialsat Commercial Power FrequenciesD150 Test Methods for AC Loss Characteristics

7、 and Permit-tivity (Dielectric Constant) of Solid Electrical InsulationD257 Test Methods for DC Resistance or Conductance ofInsulating MaterialsD618 Practice for Conditioning Plastics for TestingD1711 Terminology Relating to Electrical InsulationD1829 Test Method for Electrical Resistance of Ceramic

8、Materials at Elevated Temperatures (Withdrawn 2001)3D2149 Test Method for Permittivity (Dielectric Constant)And Dissipation Factor Of Solid Dielectrics At Frequen-cies To 10 MHz And Temperatures To 500CD2520 Test Methods for Complex Permittivity (DielectricConstant) of Solid Electrical Insulating Ma

9、terials at Mi-crowave Frequencies and Temperatures to 1650CE6 Terminology Relating to Methods of Mechanical TestingE12 Terminology Relating to Density and Specific Gravityof Solids, Liquids, and Gases (Withdrawn 1996)3E122 Practice for Calculating Sample Size to Estimate, WithSpecified Precision, th

10、e Average for a Characteristic of aLot or ProcessE165 Practice for Liquid Penetrant Examination for GeneralIndustryE228 Test Method for Linear Thermal Expansion of SolidMaterials With a Push-Rod DilatometerF19 Test Method for Tension and Vacuum Testing Metal-lized Ceramic SealsF77 Test Method for Ap

11、parent Density of Ceramics forElectron Device and Semiconductor Application (With-drawn 2001)3F109 Terminology Relating to Surface Imperfections onCeramicsF134 Test Methods for Determining Hermeticity of ElectronDevices with a Helium Mass Spectrometer Leak Detector(Withdrawn 1996)3F417 Test Method f

12、or Flexural Strength (Modulus of Rup-ture) of Electronic-Grade Ceramics (Withdrawn 2001)32.2 Other Standards:MIL-STD-105 Sampling Procedures and Tables for Inspec-tion by Attributes41This specification is under the jurisdiction of Committee C21 on Electrical andElectronic Insulating Materials.Curren

13、t edition approved Nov. 1, 2016. Published November 2016. Originallyapproved in 1965. Last previous edition approved in 2012 as D2442 75 (2012).DOI: 10.1520/D2442-75R16.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annua

14、l Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3The last approved version of this historical standard is referenced onwww.astm.org.4Available from the Superintendent of Documents, Government Printing Office,Washington, D.C. 20402.Copyright

15、 ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States1MIL-STD-883 Test Methods and Procedures for Microelec-tronics5ANSI B46.1 Surface Texture63. Terminology3.1 Definitions:3.1.1 The applicable definitions of terms in the followingdocuments shall ap

16、ply to this specification: Symbols C108, andDefinitions C242, D1711, E6, E12, and F109.4. Classification4.1 Ceramics covered by this specification shall be classi-fied by alumina content as follows:TypeAlumina ContentWeight percent, minI82II 93III 97IV 995. Basis of Purchase5.1 Purchase orders for c

17、eramic parts furnished to thisspecification shall include the following information:5.1.1 Type designation (see 3.1),5.1.2 Surface finish and allowable defect limits (if required)(Definitions F109, ANSI B46.1, and Appendix X1),5.1.3 Part drawing with dimensional tolerances (AppendixX1),5.1.4 Specifi

18、c tests (if required),5.1.5 Certification (if required), and5.1.6 Packing and marking.6. Requirements6.1 This material shall conform to the electrical,mechanical, thermal, and general property requirements speci-fied in Table 1, Table 2, Table 3, and Table 4.6.2 Dimensional and surface finish requir

19、ements of the partsshall be as agreed between the supplier and the purchaser;however, guidance for establishing such an agreement isprovided in Appendix X1.6.3 Visual Requirements:6.3.1 Parts shall be uniform in color and texture. Cracks,blisters, holes, porous areas, inclusions, and adherent foreig

20、nparticles shall not be permitted. The limits of surface imper-fections such as pits, pocks, chips (open or closed), surfacemarks, fins, ridges, and flow lines shall be set by mutualagreement between the supplier and the purchaser. Limitingdimensions for these defects, when required for clarificatio

21、n,will be listed in the parts drawing or purchase description. Fordefinitions of the surface imperfections enumerated above, seeDefinitions F109.6.3.2 For hermetic seal applications at least34 of the widthof the seal surface shall remain intact at the location of anydefect.6.3.3 On other surfaces th

22、e limits for defects are such thatthe dimensional tolerances of the part are not affected at thelocation of the defect.7. Test Specimens7.1 The preferred specimens for test are, where possible, theactual part. When necessary, however, specific test specimensshall be prepared from the same batch of m

23、aterial and by thesame processes as those employed in fabricating the ceramicpart insofar as possible.8. Specimen Preparation8.1 The specimens for tests described in 9.1 9.3 shall bepreconditioned in accordance with Procedure A of Test Meth-ods D618.9. Test Methods9.1 Dielectric Constant and Dissipa

24、tion FactorDeterminein accordance with Test Methods D150. Determine values athigher frequencies in accordance with Test Methods D2520.7Determine values at higher temperatures in accordance withTest Method D2149.9.2 Volume ResistivityDetermine in accordance with TestMethods D257. For elevated tempera

25、ture measurements useProcedure A of Test Method D1829.5Available from Standardization Documents Order Desk, Bldg. 4 Section D, 700Robbins Ave., Philadelphia, PA 19111-5094, Attn: NPODS.6Available from American National Standards Institute (ANSI), 25 W. 43rd St.,4th Floor, New York, NY 10036, http:/w

26、ww.ansi.org7For another suitable method see Dielectric Materials and Applications, editedby Von Hippel, A., John Wiley and Sons, Inc., New York, N.Y., 1954.TABLE 1 Electrical RequirementsProperty Type I Type II Type III Type IVDielectric constant,max 25C:at 1 MHzat 10 GHz8.88.79.69.69.89.810.110.1Di

27、ssipation factor,max 25C:at 1 MHzat 10 GHzVolume resistivity,min cm:0.0020.0020.0010.0010.00050.00050.00020.0002at 25C 1014101410141014at 300C 1 1010110101101071010at 500C 4 107210781071108at 700C 4 106210661061107at 900C 4 105210581051106Dielectricstrength:3.175 mm(0.125 in.)min kV/mm9.85(250 V/mil

28、)9.85(250 V/mil)9.85(250 V/mil)9.85(250 V/mil)TABLE 2 Mechanical RequirementsProperty Type I Type II Type III Type IVFlexural strength,min avg,AMPa (psi)240(35 000)275(40 000)275(40 000)275(40 000)Modulus ofelasticity, min,GPa (psi)215(31106)275(40106)310(45106)345(50106)Poissons ratio,average0.20 t

29、o 0.25 0.20 to 0.25 0.20 to 0.25 0.20 to 0.25AMaximum permissible coefficient of variation is 10 percent.D2442 75 (2016)29.3 Dielectric StrengthRun this test under oil in accor-dance with 6.1.1 ofTest Methods D149, with a rise rate of 1000V/s on a 3.175-mm (0.125-in.) thick test specimen.9.4 Flexura

30、l StrengthDetermine in accordance with TestMethod F417 or Methods D116. Somewhat lower values willresult if Methods D116 are used. The method to be used shallbe agreed upon between the supplier and the purchaser.9.5 Modulus of Elasticity and Poissons RatioDeterminein accordance with Test Method C623

31、.9.6 Thermal ExpansionDetermine in accordance withTest Method E228.9.7 Thermal ConductivityDetermine in accordance withTest Method C408. For temperatures in excess of 149 C (300F), use a suitable method.89.8 Thermal Shock ResistanceThis test is to be agreedupon between supplier and purchaser. It is

32、suggested that thecold end of the cycle be ice water at 0C. Methods of heatingand conditions at elevated temperatures shall be negotiated.The transfer from one temperature extreme to another shall beimmediate.9.9 Temperature DeformationDetermine deformation at1500C in accordance with Appendix X2.9.1

33、0 Apparent DensityDetermine in accordance with TestMethod F77. For large ceramic parts not covered by thismethod, determine in accordance with Test Methods C20.9.11 Compositional AnalysisUse either quantitative emis-sion spectrographic analysis of the fired ceramic with aluminacontent determined by

34、difference or Methods C573 afterassuming that all determined metallic and reactive elementsoriginally are present as their highest form of oxide.9.12 Gas ImpermeabilityWhen air fired at 900C for 30min and handled with tweezers only, then tested on a heliummass spectrometer leak detector capable of d

35、etecting a leak of109atmcm3/s, the ceramic is considered impermeable if aspecimen 0.254 mm (0.010 in.) thick shows no indication ofhelium leakage when an area of 322.6 mm2(0.5 in.2) is testedfor 15 s at room temperature (Method 1014, Seal, of MIL-STD-883 and Test Methods F134).9.13 Liquid Impermeabi

36、lityDetermine in accordance withMethods D116.9.14 Surface ImperfectionsExamine visually for surfaceimperfections with or without the aid of a dye penetrant as inPractice E165. Agreement by purchaser and supplier regardingspecific techniques is strongly recommended.9.15 Surface FinishIf surface finis

37、h is specified, it shall bedetermined by any appropriate method agreed upon by pur-chaser and supplier.8For a suitable method see Francl, J., and Kingery, W. D., “An Apparatus forDetermining Conductivity by a Comparative Method,” Journal of the AmericanCeramic Society, JACTA Vol 37, 1954, p. 80.TABL

38、E 3 Thermal RequirementsPropertyType I Type II Type III Type IVmin max min max min max min maxMean coefficient of linear thermalexpansion, m/mC:25200C 5.4 6.2 5.2 6.7 5.2 6.5 5.5 6.725500C 6.5 7.0 6.6 7.4 6.7 7.5 6.8 7.625800C 7.0 7.7 7.3 8.1 7.4 8.1 7.3 8.1251000C 7.4 8.2 7.5 8.3 7.6 8.3 7.5 8.4The

39、rmal conductivity, cal/scmC:at 100C 0.023 0.049 0.031 0.077 0.048 0.073 0.052 0.090at 400C 0.015 0.022 0.014 0.036 0.022 0.033 0.023 0.047at 800C 0.009 0.018 0.009 0.021 0.014 0.021 0.014 0.025Thermal shock resistance pass pass pass passMaximal deformation at 1500C . . 0.51 mm(0.02 in.)0.51 mm(0.02

40、in.)TABLE 4 General RequirementsAPropertyTypeI II III IVDensity, apparent minBg/cm33.37 3.57 3.72 3.78Composition, minweight percent82 93 97 99Gas Impermeability gas tightLiquid Impermeability passMetallizabilityACAVendors shall, upon request, provide information on these properties as well asa visu

41、al standard of a typical microstructure of their specific ceramic body depictingits grain size and pore volume. Changes in microstructure of the ceramic are notacceptable as they can affect the behavior of the ceramic toward a metallizingprocess.BThe apparent density of a ceramic body is a function

42、of the amount and thedensity of the primary Al2O3phase and the secondary phase plus the amount ofpores inherent to that body. The acceptable density limits for a specific aluminabody must be consistent with the composition and the pore volume of the ceramicsupplied by supplier and shall be agreed up

43、on between the purchaser and thesupplier. Variation in the apparent density of a specific ceramic body shall be within1 percent of the nominal value.CGenerally, very high alumina content results in increased difficulty of metallizing;however, variations in metallizing compositions and techniques can

44、 produceexcellent seals in all four types of alumina ceramics. Because of a wide variationin materials and techniques, no specific test is recommended. A referee test forseal strength is Method F19.D2442 75 (2016)310. Inspection10.1 When agreed upon between the manufacturer and thepurchaser, the pur

45、chaser may inspect the ceramic parts andverify the test results at the manufacturers facility. Otherwisethe purchaser shall inspect and test the ceramic parts within onemonth of the date of receipt by the purchaser or at such othertimes as may be agreed upon between the purchaser and themanufacturer

46、.10.2 When agreed upon between the manufacturer and thepurchaser, the manufacturer shall supply, prior to fabrication,duplicate test specimens to the purchaser for his testingpurposes. These specimens shall be identical with those testedby the manufacturer, insofar as it is possible.11. Lot Acceptan

47、ce Procedure11.1 Unless otherwise specified Practice E122 shall be used.When so specified, appropriate sample sizes shall be selectedfrom each lot according to MIL-STD-105. Each quality char-acteristic shall be assigned an AQL value in accordance withMIL-STD-105 definition for critical, major, and m

48、inor classi-fications. Inspection levels shall be agreed upon between thesupplier and the purchaser.12. Certification12.1 Any test results requiring certification shall be explic-itly agreed upon, in writing, between the purchaser and themanufacturer.13. Packing and Marking13.1 Special packing techn

49、iques shall be subject to agree-ment between the purchaser and the manufacturer. Otherwiseall parts shall be handled, inspected, and packed in such amanner as to avoid chipping, scratches, and contamination, andin accordance with the best practices to provide ample protec-tion against damage during shipment.13.2 The ceramics furnished under this specification shallbe identified by the name or symbol for the ceramic body and,if necessary, by an identification number. This identificationnumber shall p