KS D ISO 20341-2005 Surface chemical analysis-Secondary-ion mass spectrometry-Method for estimating depth resolution parameters with multiple delta-layer reference materials《表面化学分析.pdf

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3、, AT B, C I(z) 4. 4.1 KS D ISO 18115 . , . . D ISO 20341：2005 4.2 (sputtered) (matrix) SIMS (matrix effect), SIMS . . 4.3 SIMS , . 4.4 . 4.5 1 % . 4.6 , , , X , . 5. 5.1 , , , , , , , , , . SIMS , . SIMS SIMS SIMS 20 % 10 , SIMS 1 % . 5.2 SIMS , (rounded top) . SIMS 2 (1) fL(z), (2) fT(z) g(z) (3) ,

4、 3 , L, T, . L0zzz zTexp0(2) 2202)(exp2zzBg(z)= (3) 5.3 SIMS , 1 % , . (： nm) . 5.4 . 2 D ISO 20341：2005 +2LL022LL01TL5.0exp)erf1( 5.0exp)erf1(zzzzCI(z) = (4) =L0121zz (5) =T0221zz (6) yeyd202 (7) erf = , 1 2 SIMS A . (4) 1 , 2 . 6. . a) , , b) c) d) . (4) A e) , , SIMS , f) g) 3 D ISO 20341：2005 A(

5、) SIMS A.1 SIMS . . 2 . A.2 ( nm .) . e . 10 . 5.1 5.3 , . SIMS SIMS 10 SIMS , SIMS 1 % . 4 D ISO 20341：2005 1 Dowsett M. G., Rowland G., Allen P. N. and Barlow R. D.： Surf. Interface Anal., 21, P. 310(1994) 2 Moon D.W., Won J.Y, Kim K,J., Kim H.J., Kang H. J., Petravic M., Surf. Interface Anal., 29

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