EN 62435-5-2017 en Electronic components - Long-term storage of electronic semiconductor devices - Part 5 Die and wafer devices.pdf
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1、Electronic components Long-term storage of electronic semiconductor devicesPart 5: Die and wafer devicesBS EN 62435-5:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06National forewordThis British Standard is the UK implementation of EN 62435-5:2017. It isidentica
2、l to IEC 62435-5:2017.The UK participation in its preparation was entrusted to TechnicalCommittee EPL/47, Semiconductors.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication does not purport to include all the necessary provisions ofa cont
3、ract. Users are responsible for its correct application. The British Standards Institution 2017.Published by BSI Standards Limited 2017ISBN 978 0 580 83550 6ICS 31.020Compliance with a British Standard cannot confer immunity fromlegal obligations.This Published Document was published under the autho
4、rity of theStandards Policy and Strategy Committee on 30 April 2017.Amendments/corrigenda issued since publicationDate Text affectedPUBLISHED DOCUMENTBS EN 62435-5:2017EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN 62435-5 March 2017 ICS 31.020 English Version Electronic components - Long-term
5、 storage of electronic semiconductor devices - Part 5: Die and wafer devices (IEC 62435-5:2017) Composants lectroniques - Stockage de longue dure des dispositifs lectroniques semiconducteurs - Partie 5: Dispositifs de puces et plaquettes (IEC 62435-5:2017) Elektronische Bauteile - Langzeitlagerung e
6、lektronischer Halbleiterbauelemente - Teil 5: Chip- und Wafererzeugnisse (IEC 62435-5:2017) This European Standard was approved by CENELEC on 2017-02-24. CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the
7、 status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CENELEC member. This European Standard exists in three official versions (English, F
8、rench, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CENELEC members are the national electrotechnical committees of Austr
9、ia, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Sloveni
10、a, Spain, Sweden, Switzerland, Turkey and the United Kingdom. European Committee for Electrotechnical Standardization Comit Europen de Normalisation Electrotechnique Europisches Komitee fr Elektrotechnische Normung CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2017 CENELEC All rig
11、hts of exploitation in any form and by any means reserved worldwide for CENELEC Members. Ref. No. EN 62435-5:2017 E EN 62435-5:2017 2 European foreword The text of document 47/2328/FDIS, future edition 1 of IEC 62435-5, prepared by IEC/TC 47 “Semiconductor devices“ was submitted to the IEC-CENELEC p
12、arallel vote and approved by CENELEC as EN 62435-5:2017. The following dates are fixed: latest date by which the document has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2017-11-24 latest date by which the national standards conflictin
13、g with the document have to be withdrawn (dow) 2020-02-24 Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CENELEC and/or CEN shall not be held responsible for identifying any or all such patent rights. Endorsement notice The text
14、of the International Standard IEC 62435-5:2017 was approved by CENELEC as a European Standard without any modification. In the official version, for Bibliography, the following notes have to be added for the standards indicated: IEC 60068-2-17 NOTE Harmonized as EN 60068-2-17. IEC 60068-2-20 NOTE Ha
15、rmonized as EN 60068-2-20. IEC 60749-3 NOTE Harmonized as EN 60749-3. IEC 60749-20-1 NOTE Harmonized as EN 60749-20-1. IEC 60749-21 NOTE Harmonized as EN 60749-21. IEC 60749-22 NOTE Harmonized as EN 60749-22. IEC 61340-5-1 NOTE Harmonized as EN 61340-5-1. IEC 61340-2-1 NOTE Harmonized as EN 61340-2-
16、1. IEC/TR 62258-3 NOTE Harmonized as CLC/TR 62258-3. IEC 62435-1 NOTE Harmonized as EN 62435-1. BS EN 62435-5:2017EN 62435-5:2017 3 Annex ZA (normative) Normative references to international publications with their corresponding European publications The following documents, in whole or in part, are
17、 normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. NOTE 1 When an International Publication has been modifi
18、ed by common modifications, indicated by (mod), the relevant EN/HD applies. NOTE 2 Up-to-date information on the latest versions of the European Standards listed in this annex is available here: www.cenelec.eu Publication Year Title EN/HD Year IEC 62435-2 - Electronic components - Long-term storage
19、of electronic semiconductor devices - Part 2: Deterioration mechanisms EN 62435-2 - BS EN 62435-5:2017 2 IEC 62435-5:2017 IEC 2017 CONTENTS FOREWORD . 4 INTRODUCTION . 6 1 Scope 8 2 Normative references 8 3 Terms, definitions and abbreviated terms 8 3.1 Terms and definitions 8 3.2 Abbreviations 9 4
20、Storage requirements 9 4.1 General . 9 4.2 Assembly data 9 4.3 Prerequisite for storage. 9 4.4 Damage to die products during long-term storage . 9 4.5 Mechanical storage conditions 10 4.6 Long-term storage environment 10 4.7 Recommended inert atmosphere purity . 11 4.8 Chemical contamination 11 4.9
21、Vacuum packing . 11 4.9.1 General . 11 4.9.2 Vacuum dry pack . 11 4.10 Positive pressure systems for packing 11 4.11 Use of packing material having sacrificial properties . 11 4.12 Use of bio-degradable material . 12 4.13 Plasma cleaning . 12 4.14 Electrical effects . 12 4.15 Protection from radiati
22、on . 12 4.16 Periodic qualification of stored die products 12 5 Long-term storage failure mechanisms 13 6 LTS concerns, method, verification and limitations 13 6.1 General . 13 6.2 Wafers 13 6.3 Bare dice 14 7 Deterioration mechanisms specific to bare die and wafers . 15 7.1 Wire bondability 15 7.2
23、Staining 15 7.3 Topside delamination 16 8 Specific handling concerns 16 8.1 Die on wafer film frames . 16 8.2 Devices and dice embossed or punched tape storage . 16 8.3 Handling damage 16 Annex A (informative) Audit checklist . 17 Bibliography 20 BS EN 62435-5:2017IEC 62435-5:2017 IEC 2017 3 Table 1
24、 LTS exposure concerns for wafers 14 Table 2 LTS exposure concerns for bare dice 15 Table A.1 Planning checklist 17 BS EN 62435-5:2017 4 IEC 62435-5:2017 IEC 2017 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ ELECTRONIC COMPONENTS LONG-TERM STORAGE OF ELECTRONIC SEMICONDUCTOR DEVICES Part 5: Die and w
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