DIN EN ISO 25178-605-2014 Geometrical product specifications (GPS) - Surface texture Areal - Part 605 Nominal characteristics of non-contact (point autofocus probe) instruments (IS.pdf

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1、June 2014 Translation by DIN-Sprachendienst.English price group 16No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 1

2、7.040.30!%2M“2156142www.din.deDDIN EN ISO 25178-605Geometrical product specifications (GPS) Surface texture: Areal Part 605: Nominal characteristics of non-contact (point autofocus probe)instruments (ISO 25178-605:2014);English version EN ISO 25178-605:2014,English translation of DIN EN ISO 25178-60

3、5:2014-06Geometrische Produktspezifikation (GPS) Oberflchenbeschaffenheit: Flchenhaft Teil 605: Merkmale von berhrungslos messenden Gerten (Punkt-Autofokus-Sensor)(ISO 25178-605:2014);Englische Fassung EN ISO 25178-605:2014,Englische bersetzung von DIN EN ISO 25178-605:2014-06Spcification gomtrique

4、des produits (GPS) tat de surface: Surfacique Partie 605: Caractristiques nominales des instruments sans contact (capteur autofocus point) (ISO 25178-605:2014);Version anglaise EN ISO 25178-605:2014,Traduction anglaise de DIN EN ISO 25178-605:2014-06www.beuth.deIn case of doubt, the German-language

5、original shall be considered authoritative.Document comprises 39 pages05.14 DIN EN ISO 25178-605:2014-06 2 A comma is used as the decimal marker. National forewordThis document (EN ISO 25178-605:2014) has been prepared by Technical Committee ISO/TC 213 “Dimen-sional and geometrical product specifica

6、tions and verification” (Secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” (Secretariat: AFNOR, France). The responsible German body involved in its preparation was the Normenausschuss Technische Grundl

7、agen (Fundamental Technical Standards Committee), Working Committee NA 152-03-03 AA Oberflchen. The aim of the ISO 25178-60X (X from 2 to 7) series of standards is to lay down uniform specifications for optical instruments used for measuring surface topography. The standards have been drawn up over

8、a period of time by different internationally recognized experts with the participation of German experts. During the development of these standards it became evident that the “Terms and definitions” clause and the “Descriptions of the influence quantities” clause should contain the same information

9、 in each standard for ease of reading. Nevertheless, there are minor differences between each standard in the series. For this reason ISO/TC 213 decided in 2012 to publish a standard numbered 25178-600 summarizing the aspects common to all the standards in the series, and to have each ISO 25178-60X

10、standard only contain the information specific to the method covered in that particular standard. Draft versions of ISO 25178-60X- standards that are not yet at an advanced stage of development can be corrected; however the standards that have already been published cannot be changed until the next

11、planned revision. Until then, some terminology will still differ between the standards in this series. The DIN Standards corresponding to the International Standards referred to in this document are as follows: ISO 4287 DIN EN ISO 4287 ISO 10360-1 DIN EN ISO 10360-1 ISO 14406 DIN EN ISO 14406 ISO 14

12、978 DIN EN ISO 14978 ISO 25178-2 DIN EN ISO 25178-2 ISO 25178-3 DIN EN ISO 25178-3 ISO 25178-6 DIN EN ISO 25178-6 ISO 25178-601 DIN EN ISO 25178-601 ISO 25178-602 DIN EN ISO 25178-602 DIN EN ISO 25178-605:2014-06 3 National Annex NA (informative) Bibliography DIN EN ISO 4287, Geometrical product spe

13、cifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters DIN EN ISO 8015, Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules DIN EN ISO 10360-1, Geometrical product specifications (GPS) Acceptance and reverification tests f

14、or coordinate measuring machines (CMM) Part 1: Vocabulary DIN EN ISO 14253-1, Geometrical product specifications (GPS) Inspection by measurement of workpieces and measuring equipment Part 1: Decision rules for proving conformity or nonconformity with specifications DIN EN ISO 14406, Geometrical Prod

15、uct Specifications (GPS) Extraction DIN EN ISO 14978, Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment DIN EN ISO 25178-2, Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters D

16、IN EN ISO 25178-3, Geometrical product specifications (GPS) Surface texture: Areal Part 3: Specifi-cation operators DIN EN ISO 25178-6, Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classifi-cation of methods for measuring surface texture DIN EN ISO 25178-601, Geometrical p

17、roduct specifications (GPS) Surface texture: Areal Part 601: Nominal characteristics of contact (stylus) instruments DIN EN ISO 25178-602, Geometrical product specifications (GPS) Surface texture: Areal Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments VIM), Int

18、ernational vocabulary of metrology ) Obtainable from: Beuth Verlag GmbH, 10772 Berlin, Order no. 22472, ISBN 978-3-410-22472-3. DIN EN ISO 25178-605:2014-06 4 This page is intentionally blank EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-605 January 2014 ICS 17.040.20 English Versio

19、n Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 605: Caractristiques nominales des instrumen

20、ts sans contact (capteur autofocus point) (ISO 25178-605:2014) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 605: Merkmale von berhrungslos messenden Gerten (Punkt-Autofokus-Sensor) (ISO 25178-605:2014) This European Standard was approved by CEN on 13 January

21、2014. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtaine

22、d on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-C

23、ENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, I

24、taly, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGCEN-CENELEC Management Centre: Aven

25、ue Marnix 17, B-1000 Brussels 2014 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-605:2014 EContents Page Foreword . 3 Introduction . 4 1 Scope . 5 2 Normative references. 5 3 Terms and definitions 5 3.1 Terms and defini

26、tions related to all areal surface texture measurement methods 6 3.2 Terms and definitions related to x- and y-scanning systems . 13 3.3 Terms and definitions related to optical systems 15 3.4 Terms and definitions related to optical properties of workpiece 16 3.5 Terms and definitions specific to p

27、oint autofocus profiling . 17 4 Descriptions of the influence quantities 18 4.1 General 18 4.2 Influence quantities 18 Annex A (informative) General principles . 20 Annex B (informative) Spot size and focal shift 24 Annex C (informative) Beam offset direction and maximum acceptable local slope . 27

28、Annex D (informative) Features of an areal surface texture measuring instrument . 30 Annex E (informative) Others: Non-measured point (autofocus error) 32 Annex F (informative) Relation to the GPS matrix 33 Bibliography 35 2DIN EN ISO 25178-605:2014-06EN ISO 25178-605:2014 (E)ForewordThis document (

29、EN ISO 25178-605:2014) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held

30、by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by July 2014, and conflicting national standards shall be withdrawn at the latest by July 2014. Attention is drawn to the possibility that so

31、me of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to imp

32、lement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romani

33、a, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-605:2014 has been approved by CEN as EN ISO 25178-605:2014 without any modification. 3DIN EN ISO 25178-605:2014-06EN ISO 25178-605:2014 (E)IntroductionThis part of ISO 25178 is

34、a Geometrical Product Specification standard and is to be regarded as a General GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chains of standards on roughness profile, waviness profile, primary profile, and areal surface texture.For more detailed information on the relations

35、hip of this standard to the GPS matrix model, see Annex G.The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this standard is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this standard and the default decision rules given in ISO 14253

36、-1 apply to specifications made in accordance with this standard, unless otherwise indicated.The point autofocus optical principle can be implemented in various set-ups. The configuration described in this document comprises three basic elements: an autofocus optical system, an autofocus mechanism,

37、and an electronic controller.This type of instrument is mainly designed for areal measurements, but it is also able to perform profile measurements.This part of ISO 25178 describes the metrological characteristics of an optical profiler using a point autofocus probe for the measurement of areal surf

38、ace texture.For more detailed information on the point autofocus method, see Annex A. Reading this annex before the main body may lead to a better understanding of this standard.4DIN EN ISO 25178-605:2014-06EN ISO 25178-605:2014 (E)1 ScopeThis part of ISO 25178 describes the metrological characteris

39、tics of a non-contact instrument for measuring surface texture using point autofocus probing.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies

40、. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 4287:1997, Geometrical Product Specifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parametersISO 10360-1, Geometrical Product Specifications (GPS) Ac

41、ceptance and reverification tests for coordinate measuring machines (CMM) Part 1: VocabularyISO 14406:2010, Geometrical product specifications (GPS) ExtractionISO 14978:2006, Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipmentISO 25178-2:2012, Geome

42、trical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parametersISO 25178-3:2012, Geometrical product specifications (GPS) Surface texture: Areal Part 3: Specification operatorsISO 25178-6:2010, Geometrical product specifications (GPS) Surface text

43、ure: Areal Part 6: Classification of methods for measuring surface textureISO 25178-601:2010, Geometrical product specifications (GPS) Surface texture: Areal Part 601: Nominal characteristics of contact (stylus) instrumentsISO 25178-602:2010, Geometrical product specifications (GPS) Surface texture:

44、 Areal Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 4287, ISO 10360-1, ISO 14406, ISO 14978, ISO 25178-2, ISO 25178-3, ISO 25178-6, ISO 25178-601, ISO 25178-602

45、and the following apply.5DIN EN ISO 25178-605:2014-06EN ISO 25178-605:2014 (E)3.1 Terms and definitions related to all areal surface texture measurement methods3.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured3

46、.1.2coordinate system of the instrumentright hand orthonormal system of axes (x,y,z)Note 1 to entry: In this system (x,y) is the plane established by the areal reference of the instrument (Note that there are optical instruments that do not posses a physical areal guide).Note 2 to entry: In this sys

47、tem, z-axis is mounted parallel to the optical axis and is perpendicular to the (x,y) plane for an optical instrument. The z-axis is in the plane of the stylus trajectory and is perpendicular to the (x,y) plane for a stylus instrument (see Figure 1)Note 3 to entry: Normally, the x-axis is the tracin

48、g axis and the y-axis is the stepping axis. (This note is valid for instruments that scan in the horizontal plane.)Note 4 to entry: See also specification coordinate system and measurement coordinate system, as defined in ISO 25178-2:2012, 3.1.2 and ISO 25178-6:2010, 3.1.1, respectively.3.1.3measure

49、ment loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the measuring stand, the drive unit, the probing systemNote 1 to entry: See Figure 1. The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.12YZXKey1 coordinate system of