DIN EN ISO 25178-604-2013 Geometrical product specification (GPS) - Surface texture Areal - Part 604 Nominal characteristics of non-contact (coherence scanning interferometry) inst.pdf

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1、December 2013 Translation by DIN-Sprachendienst.English price group 17No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).I

2、CS 17.040.30!%*I+“2073808www.din.deDDIN EN ISO 25178-604Geometrical product specifications (GPS) Surface texture: Areal Part 604: Nominal characteristics of non-contact (coherence scanninginterferometry) instruments (ISO 25178-604:2013);English version EN ISO 25178-604:2013,English translation of DI

3、N EN ISO 25178-604:2013-12Geometrische Produktspezifikation (GPS) Oberflchenbeschaffenheit: Flchenhaft Teil 604: Merkmale von berhrungslos messenden Gerten (Weilicht-Interferometrie)(ISO 25178-604:2013);Englische Fassung EN ISO 25178-604:2013,Englische bersetzung von DIN EN ISO 25178-604:2013-12Spci

4、fication gomtrique des produits (GPS) tat de surface: Surfacique Partie 604: Caractristiques nominales des instruments sans contact ( interfromtriepar balayage cohrence) (ISO 25178-604:2013);Version anglaise EN ISO 25178-604:2013,Traduction anglaise de DIN EN ISO 25178-604:2013-12www.beuth.deDocumen

5、t comprises 47 pagesIn case of doubt, the German-language original shall be considered authoritative.11.13 DIN EN ISO 25178-604:2013-12 2 A comma is used as the decimal marker. National foreword This document (EN ISO 25178-604:2013) has been prepared by Technical Committee ISO/TC 213 “Dimensional an

6、d geometrical product specifications and verification” (Secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” (Secretariat: AFNOR, France). The responsible German body involved in its preparation was the No

7、rmenausschuss Technische Grundlagen (Fundamental Technical Standards Committee), Working Committee NA 152-03-03 AA Oberflchen. The aim of the ISO 25178-60X (X from 2 to 7) series of standards is to lay down uniform specifications for optical instruments used for measuring surface topography. The sta

8、ndards have been drawn up over a period of time by different internationally recognized experts with the participation of German experts. During the development of these standards it became evident that the “Terms and definitions” clause and the “Descriptions of the influence quantities” clause shou

9、ld contain the same information in each standard for ease of reading. Nevertheless, there are minor differences between each standard in the series. For this reason ISO/TC 213 decided in 2012 to publish a standard numbered 25178-600 summarizing the aspects common to all the standards in the series,

10、and to have each ISO 25178-60X standard only contain the information specific to the method covered in that particular standard. Although the development process of the ISO 25178-60X-standards has not progressed so far that the current draft versions cannot be corrected, the standards that have alre

11、ady been published cannot be changed until the next planned revision. Until then, some terminology will still differ between the standards in this series. ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture: Areal: Part 1: Indic

12、ation of surface texture Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Physical measurement standards Part 71: Software measurement standards Part 601: Nominal characteristics of cont

13、act (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning interferometr

14、y) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments The following part is under preparation:

15、 Part 72: XML file format x3p EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-604 August 2013 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instrume

16、nts (ISO 25178-604:2013) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 604: Caractristiques nominales des instruments sans contact ( interfromtrie par balayage cohrence) (ISO 25178-604:2013) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenh

17、aft - Teil 604: Merkmale von berhrungslos messenden Gerten (Weilicht-Interferometrie) (ISO 25178-604:2013) This European Standard was approved by CEN on 15 May 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Stan

18、dard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (Englis

19、h, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bu

20、lgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,

21、Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Member

22、s. Ref. No. EN ISO 25178-604:2013: EContents PageForeword 3Introduction 41 Scope . 52 Terms and definitions . 52.1 Terms and definitions related to all areal surface texture measurement methods . 52.2 Terms and definitions related to x- and y-scanning systems . 102.3 Terms and definitions related to

23、 optical systems 122.4 Terms and definitions related to optical properties of the workpiece 142.5 Terms and definitions specific to coherence scanning interferometric microscopy .143 Descriptions of the influence quantities 183.1 General 183.2 Influence quantities . 18Annex A (informative) Overview

24、and components of a coherence scanning interferometry (CSI) microscope 21Annex B (informative) Coherence scanning interferometry (CSI) theory of operation .26Annex C (informative) Spatial resolution .35Annex D (informative) Example procedure for estimating surface topography repeatability .40Annex E

25、 (informative) Relation to the GPS matrix model41Bibliography .43DIN EN ISO 25178-604:2013-12 EN ISO 25178-604:2013 (E) 2 Foreword This document (EN ISO 25178-604:2013) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collab

26、oration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the la

27、test by February 2014, and conflicting national standards shall be withdrawn at the latest by February 2014. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or a

28、ll such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of

29、 Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-604:2013 has been appro

30、ved by CEN as EN ISO 25178-604:2013 without any modification. DIN EN ISO 25178-604:2013-12 EN ISO 25178-604:2013 (E) 3 IntroductionThis part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences chain link

31、 5 of the chains of standards on roughness profile, waviness profile, primary profile and areal surface texture. The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this doc

32、ument and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless otherwise indicated.For more detailed information on the relation of this part of ISO 25178 to other standards and to the GPS matrix model, see Annex E.This part of ISO 251

33、78 describes the metrological characteristics of coherence scanning interferometric microscopes, designed for the measurement of surface topography maps. For more detailed information on the coherence scanning technique, see Annex A and Annex B.NOTE Portions of this document, particularly the inform

34、ative texts, may describe patented systems and methods. This information is provided only to assist users in understanding the operating principles of coherence scanning interferometry. This document is not intended to establish priority for any intellectual property, nor does it imply a license to

35、any proprietary technologies that may be described herein.DIN EN ISO 25178-604:2013-12 EN ISO 25178-604:2013 (E) 4 1 ScopeThis part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.2 Terms and definitionsFor t

36、he purposes of this document, the following terms and definitions apply.2.1 Terms and definitions related to all areal surface texture measurement methods2.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured2.1.2co

37、ordinate system of the instrumentright hand orthonormal system of axes (x, y, z) defined as: (x, y) is the plane established by the areal reference of the instrument (note that there are optical instruments that do not possess a physical areal guide) z-axis is mounted parallel to the optical axis an

38、d is perpendicular to the (x, y) plane for an optical instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane for a stylus instrument (see Figure 1)DIN EN ISO 25178-604:2013-12 EN ISO 25178-604:2013 (E) 5 Key1 coordinate system of the instrument2 meas

39、urement loopFigure 1 Coordinate system and measurement loop of the instrumentNote 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for instruments that scan in the horizontal plane.)Note 2 to entry: See also “specification coordinate syste

40、m” ISO 25178-2:2012, 3.1.2 and “measurement coordinate system” ISO 25178-6:2010, 3.1.1.2.1.3measurement loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the measuring stand, the drive unit, the probing sy

41、stemNote 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.SEE: Figure 1.2.1.4real surface of a workpieceset of features which physically exist and separate the entire workpiece from the surrounding mediumNote 1 to ent

42、ry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also “mechanical surface” ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and “electromagnetic surface” ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.Note

43、3 to entry: The electro-magnetic surface considered for one type of optical instrument may be different from the electro-magnetic surface for other types of optical instruments.DIN EN ISO 25178-604:2013-12 EN ISO 25178-604:2013 (E) 6 2.1.5surface probedevice that converts the surface height into a s

44、ignal during measurementNote 1 to entry: In earlier standards, this was termed “transducer”.2.1.6measuring volumerange of the instrument stated in terms of the limits on all three coordinates measured by the instrumentNote 1 to entry: For areal surface texture measuring instruments, the measuring vo

45、lume is defined by the measuring range of the x- and y- drive units, and the measuring range of the z-probing system.SOURCE: ISO 25178-601:2010, 3.4.12.1.7response curveFx, Fy, Fzgraphical representation of the function that describes the relation between the actual quantity and the measured quantit

46、yNote 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity xM(respectively yMor zM).Note 2 to entry: The response curve can be used for adjustments and error corrections.SOURCE: ISO 25178-601:2010, 3.4.22.1.8amplification coefficientx, y, zslope of the linear

47、regression curve obtained from the response curve (2.1.7)Note 1 to entry: There will be amplification coefficients applicable to the x, y and z quantities.Note 2 to entry: The ideal response is a straight line with a slope equal to 1, which means that the values of the measurand are equal to the values of the input quantities.Note 3 to entry: See also “sensitivity of a measuring sy