DIN EN ISO 25178-603-2014 Geometrical product specifications (GPS) - Surface texture Areal - Part 603 Nominal characteristics of non-contact (phase-shifting interferometric microsc.pdf

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1、February 2014 Translation by DIN-Sprachendienst.English price group 15No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).I

2、CS 17.040.30!%+)“2089706www.din.deDDIN EN ISO 25178-603Geometrical product specifications (GPS) Surface texture: Areal Part 603: Nominal characteristics of non-contact (phase-shiftinginterferometric microscopy) instruments (ISO 25178-603:2013);English version EN ISO 25178-603:2013,English translatio

3、n of DIN EN ISO 25178-603:2014-02Geometrische Produktspezifikation (GPS) Oberflchenbeschaffenheit: Flchenhaft Teil 603: Merkmale von berhrungslos messenden Gerten (phasenschiebendeinterferometrische Mikroskopie) (ISO 25178-603:2013);Englische Fassung EN ISO 25178-603:2013,Englische bersetzung von DI

4、N EN ISO 25178-603:2014-02Spcification gomtrique des produits (GPS) tat de surface: Surfacique Partie 603: Caractristiques nominales des instruments sans contact (microscopesinterfromtriques glissement de franges) (ISO 25178-603:2013);Version anglaise EN ISO 25178-603:2013,Traduction anglaise de DIN

5、 EN ISO 25178-603:2014-02www.beuth.deDocument comprises 34 pagesIn case of doubt, the German-language original shall be considered authoritative.01.14 DIN EN ISO 25178-603:2014-02 2 A comma is used as the decimal marker. National foreword This document (EN ISO 25178-603:2013) has been prepared by Te

6、chnical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” (Secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” (Secretariat: AFNOR, France). The responsible German

7、 body involved in its preparation was the Normenausschuss Technische Grundlagen (Fundamental Technical Standards Committee), Working Committee NA 152-03-03 AA Oberflchen. The aim of the ISO 25178-60X (X from 2 to 7) series of standards is to lay down uniform specifications for optical instruments us

8、ed for measuring surface topography. The standards have been drawn up over a period of time by different internationally recognized experts with the participation of German experts. During the development of these standards it became evident that the “Terms and definitions” clause and the “Descripti

9、ons of the influence quantities” clause should contain the same information in each standard for ease of reading. Nevertheless, there are minor differences between each standard in the series. For this reason ISO/TC 213 decided in 2012 to publish a standard numbered 25178-600 summarizing the aspects

10、 common to all the standards in the series, and to have each ISO 25178-60X standard only contain the information specific to the method covered in that particular standard. Draft versions of ISO 25178-60X standards that are not yet at an advanced stage of development can be corrected; however the st

11、andards that have already been published cannot be changed until the next planned revision. Until then, some terminology will still differ between the standards in this series. ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) Surface texture

12、: Areal: Part 1: Indication of surface texture Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 601: Nominal characteristic

13、s of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning inte

14、rferometric microscopy) instruments Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments Part 702: Calibrati

15、on of non-contact (confocal chromatic probe) instruments Part 703: Calibration and measurement standards for non-contact (interferometric) instruments The following part is under preparation: Part 72: XML file format x3p EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-603 October 2013

16、 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments(ISO 25178-603:2013) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Par

17、tie 603: Caractristiques nominales des instruments sans contact (microscopes interfromtriques glissement de franges)(ISO 25178-603:2013) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 603: Merkmale von berhrungslos messenden Gerten (phasenschiebende interferome

18、trische Mikroskopie)(ISO 25178-603:2013) This European Standard was approved by CEN on 19 August 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.

19、Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by tra

20、nslation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finl

21、and, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATI

22、ON COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-603:2013: EContents PageForeword 3Intr

23、oduction 41 Scope . 52 Terms and definitions . 52.1 Terms and definitions related to all areal surface texture measurement methods . 52.2 Terms and definitions related to x- and y-scanning systems . 122.3 Terms and definitions related to optical systems 142.4 Terms and definitions related to optical

24、 properties of the workpiece 162.5 Terms and definitions specific to phase-shifting interferometric microscopy .163 Descriptions of the influence quantities 173.1 General 173.2 Influence quantities . 18Annex A (informative) Components of a phase-shifting interferometric (PSI) microscope 20Annex B (i

25、nformative) Phase-shifting interferometric (PSI) microscope Theory of operation .21Annex C (informative) Errors and corrections for phase-shifting interferometric (PSI) microscopes .26Annex D (informative) Relation to the GPS matrix model .29Bibliography .31DIN EN ISO 25178-603:2014-02 EN ISO 25178-

26、603:2013 (E) 2 Foreword This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verifica

27、tion” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the latest by April 2014. Atte

28、ntion is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of

29、 the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Neth

30、erlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-603:2013 has been approved by CEN as EN ISO 25178-603:2013 without any modification. DIN EN ISO 25178-603:2014-02 EN ISO 25178-603:2013

31、(E) 3 IntroductionThis part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture.This part of ISO 25178 describes the metrological characteris

32、tics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes, designed for the measurement of surface topography maps. For more detailed information on the phase-shifting interferometry technique, see Annex A and Annex B.The ISO/GPS Masterplan given in ISO /TR

33、 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless otherwise indicated.NOT

34、E Portions of this document, particularly the informative clauses, may describe patented systems and methods. This information is provided only to assist users in understanding the operating principles of phase-shifting interferometry. This document is not intended to establish priority for any inte

35、llectual property, nor does it imply a license to any proprietary technologies that may be described herein.DIN EN ISO 25178-603:2014-02 EN ISO 25178-603:2013 (E) 4 1 ScopeThis part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surf

36、ace texture measuring microscopes.2 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.2.1 Terms and definitions related to all areal surface texture measurement methods2.1.1areal referencecomponent of the instrument that generates a reference surface w

37、ith respect to which the surface topography is measured2.1.2coordinate system of the instrumentright hand orthonormal system of axes (x, y, z) where (x, y) is the plane established by the areal reference of the instrument (note that there are optical instruments that do not possess a physical areal

38、guide); z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane for a stylus instrument Note 1 to entry: Normally, the x-axis is the tracing axis an

39、d the y-axis is the stepping axis. (This note is valid for instruments that scan in the horizontal plane.)Note 2 to entry: See also “specification coordinate system” ISO 25178-2:2012, 3.1.2 and “measurement coordinate system” ISO 25178-6:2010, 3.1.1.SEE: Figure 1.DIN EN ISO 25178-603:2014-02 EN ISO

40、25178-603:2013 (E) 5 12Key1 coordinate system of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of the instrument2.1.3measurement loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding f

41、ixture, the measuring stand, the drive unit, the probing systemNote 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.SEE: Figure 1.2.1.4real surface of a workpieceset of features which physically exist and separate th

42、e entire workpiece from the surrounding mediumNote 1 to entry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also “mechanical surface” ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and “electromagnetic surfac

43、e” ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.Note 3 to entry: The electromagnetic surface considered for one type of optical instrument may be different from the electromagnetic surface for other types of optical instruments.2.1.5surface probedevice that converts the surface height into a s

44、ignal during measurementNote 1 to entry: In earlier standards, this was termed “transducer”.DIN EN ISO 25178-603:2014-02 EN ISO 25178-603:2013 (E) 6 2.1.6measuring volumerange of the instrument stated in terms of the limits on all three coordinates measured by the instrumentNote 1 to entry: For area

45、l surface texture measuring instruments, the measuring volume is defined by the measuring range of the x- and y- drive units, and the measuring range of the z-probing system.SOURCE: ISO 25178-601:2010, 3.4.12.1.7response curveFx, Fy, Fzgraphical representation of the function that describes the rela

46、tion between the actual quantity and the measured quantityNote 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity xM(respectively yMor zM).Note 2 to entry: The response curve can be used for adjustments and error corrections.SEE: Figure 21234Key1 response cu

47、rve 3 measured quantities2 assessment of the linearity deviation by polynomial approximation4 input quantitiesFigure 2 Example of a nonlinear response curveISO 25178-601:2010, 3.4.22.1.8amplification coefficientx, y, zslope of the linear regression curve obtained from the response curve (2.1.7)Note 1 to entry: There will be amplification coefficients applicable to the x, y and z