BS ISO 20341-2003 Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials《表面化学.pdf
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1、BRITISH STANDARD BS ISO 20341:2003 Surface chemical analysis Secondary-ion mass spectrometry Method for estimating depth resolution parameters with multiple delta-layer reference materials ICS 71.040.40 BS ISO 20341:2003 This British Standard was published under the authority of the Standards Policy
2、 and Strategy Committee on 8 August 2003 BSI 8 August 2003 ISBN 0 580 42439 1 National foreword This British Standard reproduces verbatim ISO 20341:2003 and implements it as the UK national standard. The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemica
3、l analysis, which has the responsibility to: A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international publications referred to in this document may be found in the BSI Catalogue under the s
4、ection entitled “International Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application
5、. Compliance with a British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor
6、related international and European developments and promulgate them in the UK. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank page, pages 1 to 5 and a back cover. The BSI copyright notice displayed in this document indicates
7、when the document was last issued. Amendments issued since publication Amd. No. Date CommentsINTERNATIONAL STANDARD ISO 20341 First edition 2003-07-15 Reference number ISO 20341:2003(E) OSI 2003 Surface chemical analysis Secondary- ion mass spectrometry Method for estimating depth resolution paramet
8、ers with multiple delta-layer reference materials Analyse chimique des surfaces Spectromtrie de masse des ions secondaires Mthode destimation des paramtres de rsolution en profondeur laide de matriaux de rfrence multicouches mincesBSISO20341:2003ISO :14302(3002)E ii ISO 3002 All rithgs reresvde id F
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13、 fo teh euqertsre. SIc Oopyrigho tfifce saCsop etela 65 -HCG 1121eneva 02 T.le 22 14 + 10 947 11 Fxa + 22 14 0 94774 9 Eam-il ocpyrithgios.ogr Web wwwi.soo.rg BSISO20341:2003ISO 43023002:1)E( ISO 3002 r llAithgs reservde iii Contents Page 1 Scope 1 2 Normative references 1 3 Symbols 1 4 Requirements
14、 for multiple delta-layer reference materials 1 5 Procedures . 2 6 Test report 3 Annex A (normative) Simpler options of estimating SIMS depth resolution parameters . 4 Bibliography . 5 BSISO20341:2003ISO :14302(3002)E iv ISO 3002 All rithgs reresvde Foreword ISO (the International Organization for S
15、tandardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the ri
16、ght to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. Internationa
17、l Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as
18、an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO
19、 20341 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 6, Secondary ion mass spectrometry. BSISO20341:2003ISO 43023002:1)E( ISO 3002 r llAithgs reservde v Introduction Depth resolution is one of the important parameters in SIMS depth profiling. However, spu
20、tter depth profiles in SIMS analysis are affected by many factors which may include ion-beam-induced mixing and segregation, charge-driven diffusion, matrix effects, crater shape, surface microtopography, etc. To obtain the best depth resolution, the deterioration of the depth resolution due to thes
21、e factors should be understood and minimized. The best depth resolution generally requires special conditions of analysis which may include an ultra-low primary-ion beam energy, glancing incidence angle, specimen rotation, specimen cooling to cryogenic temperature, etc., all of which cannot be easil
22、y adopted for daily SIMS analysis. In addition to this, the optimization of the analysis parameters may be quite different for each specimen. Moreover, different aspects of the depth resolution are also affected by instrumental factors such as the crater shape, ion beam homogeneity, removal of the c
23、rater edge effect, mass interference, memory effect, residual gas effect, etc. Therefore, it is not straightforward to estimate the depth resolution under given daily SIMS analysis conditions. In this International Standard, the three essential component parameters of the depth resolution, the leadi
24、ng- edge decay length, the trailing-edge decay length and the Gaussian broadening, are described and procedures are provided for the measurement of each parameter. The depth resolution parameters under daily SIMS analysis conditions can be estimated using multiple delta-layer reference materials. BS
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