BS ISO 17862-2013 Surface chemical analysis Secondary ion mass spectrometry Linearity of intensity scale in single ion counting time-of-flight mass analysers《表面化学分析 次级离子质谱法 单离子计数飞行.pdf
《BS ISO 17862-2013 Surface chemical analysis Secondary ion mass spectrometry Linearity of intensity scale in single ion counting time-of-flight mass analysers《表面化学分析 次级离子质谱法 单离子计数飞行.pdf》由会员分享,可在线阅读,更多相关《BS ISO 17862-2013 Surface chemical analysis Secondary ion mass spectrometry Linearity of intensity scale in single ion counting time-of-flight mass analysers《表面化学分析 次级离子质谱法 单离子计数飞行.pdf(36页珍藏版)》请在麦多课文档分享上搜索。
1、BSI Standards PublicationBS ISO 17862:2013Surface chemical analysis Secondary ion massspectrometry Linearity ofintensity scale in single ioncounting time-of-flight massanalysersBS ISO 17862:2013 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of ISO 17862:2013.The UK
2、participation in its preparation was entrusted to TechnicalCommittee CII/60, Surface chemical analysis.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are re
3、sponsible for its correctapplication. The British Standards Institution 2013. Published by BSI StandardsLimited 2013ISBN 978 0 580 78684 6ICS 71.040.40Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published under the authority of theStandar
4、ds Policy and Strategy Committee on 31 December 2013.Amendments issued since publicationDate Text affectedBS ISO 17862:2013 ISO 2013Surface chemical analysis Secondary ion mass spectrometry Linearity of intensity scale in single ion counting time-of-flight mass analysersAnalyse chimique des surfaces
5、 Spectromtrie de masse des ions secondaires Linarit de lchelle dintensit des analyseurs de masse temps de vol pour comptage des ions individuelsINTERNATIONAL STANDARDISO17862First edition2013-12-15Reference numberISO 17862:2013(E)BS ISO 17862:2013ISO 17862:2013(E)ii ISO 2013 All rights reservedCOPYR
6、IGHT PROTECTED DOCUMENT ISO 2013All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permiss
7、ion. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCase postale 56 CH-1211 Geneva 20Tel. + 41 22 749 01 11Fax + 41 22 749 09 47E-mail copyrightiso.orgWeb www.iso.orgPublished in SwitzerlandBS ISO 17862:2013ISO
8、 17862:2013(E) ISO 2013 All rights reserved iiiContents PageForeword ivIntroduction v1 Scope . 12 Symbols and abbreviations . 12.1 Abbreviated terms . 12.2 Symbols . 13 Outline of method 24 Procedure for evaluating the intensity linearity 54.1 Obtaining the reference sample . 54.2 Preparation for mo
9、unting the sample . 54.3 Mounting the sample . 54.4 Operating the instrument 64.5 Acquiring the data 84.6 Checking the linearity 125 Interval for repeat measurements 17Annex A (normative) Computation of raster size, ion beam current, number of frames for analysis, and counts per pulse .18Annex B (no
10、rmative) Charge compensation setting .20Annex C (normative) Ion detector setting 21Annex D (informative) Instrumental factors affecting linearity .23Bibliography .25BS ISO 17862:2013ISO 17862:2013(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of nationa
11、l standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. Internation
12、al organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended f
13、or its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.o
14、rg/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be
15、 in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions
16、related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 201, Surface chemical analysis, Subcommittee S
17、C 6, Secondary ion mass spectrometry.iv ISO 2013 All rights reservedBS ISO 17862:2013ISO 17862:2013(E)IntroductionFor the quantitative analysis of materials using secondary ion mass spectrometry (SIMS), measurements are made of the spectral intensities. Nonlinearity in the instrument intensity scale
18、, unless corrected, leads directly to errors in the relative amounts of material determined at surfaces and in depth profiles. In general, intensity scales are linear at very low count rates, or more correctly low counts per pulse, but become progressively nonlinear as the count rates rise. Measurem
19、ents of intensity rely on the measurement system delivering an intensity signal fixed in proportion to the intensity being measured. In counting systems, this proportionality is expected to be unity. If this proportionality varies with the signal level or counting rate, the measurement system is sai
20、d to be nonlinear. It is rare for nonlinearities below 1 % to be treated as significant. The intensity scale nonlinearity can exceed 1 % for count rates that exceed 5 % of the maximum permissible count rate.1For many instruments, the nonlinearity behaviour will not vary significantly from month-to-m
21、onth, provided the detection system is correctly set. For these instruments, the count rate can be corrected, using the relevant relationship, so that the corrected intensity is then linear for a greatly extended fraction of the maximum obtainable count rate. This correction to the intensity scale c
22、an or cannot already be available in the instruments data capture or processing computer. In this International Standard, a simple test of linearity is provided for the intensity lost in systems in which secondary ions arrive at a detector based on a microchannel plate or scintillator and photomulti
23、plier followed by a time-to-digital converter. If this test is shown to be valid, a correction is provided that, for suitable instruments, can extend the intensity scale by up to a factor of more than 50. For some instruments, the nonlinearity cannot be predictable nor described by any simple relati
24、onship. For these instruments, this International Standard allows the extent of the nonlinearity to be measured and a maximum count rate for an acceptable limit of divergence from linearity to be defined. In some cases, adjustments to the instrumental settings can improve the situation so that the r
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