ber immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A number in p
白光干涉仪Tag内容描述：
1、ber immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This test method covers a procedure for measuring thestrain gradient in thin, reflecting films. It applies only to films,such as found in microelectromechanical systems (MEMS)materials, whic。
2、rsAN AMERICAN NATIONAL STANDARDThree Park Avenue New York, NY 10016 USADate of Issuance: March 30, 2012This Standard will be revised when the Society approves the issuance of a new edition.ASME issues written replies to inquiries concerning interpretations of technical aspects of thisStandard. Periodically certain actions of the ASME B89 Committee may be published as Cases. Casesand interpretations are published on the ASME Web site under the Committee Pages athttp:/cstools.asme.org/ as the。
3、rsAN AMERICAN NATIONAL STANDARDThree Park Avenue New York, NY 10016 USADate of Issuance: March 30, 2012This Standard will be revised when the Society approves the issuance of a new edition.ASME issues written replies to inquiries concerning interpretations of technical aspects of thisStandard. Periodically certain actions of the ASME B89 Committee may be published as Cases. Casesand interpretations are published on the ASME Web site under the Committee Pages athttp:/cstools.asme.org/ as the。
4、规程触式干涉JJG 101-81 1事国家计量总局北京仪Verification Regulation of Contact Type Interferometer 血事-SSSS旷aEVFHJV呻HCUA咱也V叫去品vav-3Haw内xu-dm飞略一长叫dww嘈BE、，wvumGM H./飞晶啼均阻规制崎T山替制崎代制州酬2 品、-Av品、.品E言接触式干涉仪检定规程本检定规程由上海市标准计量局组织报批，经国家计量总局于1981年4月29日批准，自1982年1月1日起施行.归口单位z中国计量科学研究院起草单位z上海市计量技术研究所主要起草人z周方德本规程技术杂文由起草单位负责解释.目录一概述. . 0 ,. ,e. C 0 .0.01:1. (1) 二、检定项目和检寇工具。
，. , 1111 (1 .1 .=0 &. 0 .=0 10 1:1 &。
5、输包装收发货标志GB 191 包装储运图示标志5 术语3.1 双频激光干涉仪利用具有一定频差的两束稳频激光按迈克尔逊原理制成的长度测量系统-3.2 分辨率干涉仪能读出的最小位移量。
3.3 响应速度保证干涉仪正常工作的测量反射器最大移动速度。
3. 4 激光波长准确度干涉仪激光波长与给定波长的一致程度。
3.5 准确度干涉仪示值与被测量真值的一致程度。
4 基本参数干涉仪的基本参数见表10表1参数名称参数数值分辨率量程响应速度m m 0.005 O. 01 O. 02 O. 04 O.08 0.16 510 20 30 40 60 mm/s 50 100 200 300 400 激光波长准确度1 X 10-1 5X 10-8 5 技术要求5.1 外观及相互作用5. ,. 1 干涉仪玻璃表面不应有气泡、裂痕。
金属表面、光学元件不应有锈蚀、碰伤和镀层脱落等缺陷。
各种标志、数字应正确、清晰。
机械电子工业部1991-07-16批准1992-07-01实施J85610-91 5. ,. 2 各紧固部分应牢圄可靠，各运动部分应灵活平稳，无卡滞和松动现象。
5. .3 干涉仪的清零、置数、显示、打。
