KS D 0261-2012 Visual inspection for silicon wafers with specular surfaces《镜面硅片的外观检验》.pdf

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2、afers with specular surfaces 1 ( , .) ( ) . 2 . . ( ) . KS C 7612, KS I ISO 14644 1, 1： 3 . 3.1 (macroscratch) 3.2 (microscratch) 3.3 (flake type chip) . 3.4 (edge chip) . 3.5 (crack) KS D 0261:2012 2 3.6 (crows foot, crow track) 3.7 (dirt, contaminant area) ( 1, 2 ) 3.8 (cloud, haze) 3.9 (pin hole)

3、 3.10 (orange peel) 3.11 (pit) 3.12 (particle) ( 3, 4 ) 3.13 (light point defect) LPD (輝點 ), , ( 5 ). 3.14 (crater) ( 6 ) 4 KS C 7612 1 000 lx . 10 lx KS I ISO 14644 1 4 . 5 1 . KS D 0261:2012 3 6 1 . a) 1 1 0002 000 lx . b) 2 20 000100 000 lx . 1 1 1 2 1 1 1 2 1 2 2 1 1 2 7 2 . KS D 0261:2012 4 2 .

4、 10aDmm . 4aDmm . 0.3 mm . 1.0 mm , 0.5 mm 3 . 0.3 mm . . . 3 . a D (mm) 3 mm 125 20 150 25 200 30 1 , 100 2 KS D 0261:2012 5 3 , 200 4 5 , 200 6 , 50 153787 1 92 3(13) (02)26240114 (02)262401489 http:/ Korean Agency for Technology and Standards http:/www.kats.go.kr KS D 0261:2012 KSKSKS SKSKS KSKS SKS KS SKS KSKS SKSKS KSKSKS Visual inspection for silicon wafers with specular surfaces ICS 77.120.99