IEST RP-CC018 4-2007 CLEANROOM HOUSEKEEPING OPERATING AND MONITORING PROCEDURES.pdf
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1、INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Contamination Control Division Reco ended Practice 018.4 IEST-RP-C018.4 Cleanrom Housekeping: Operating and Monitoring Procedures INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Arlington Place One 2340 S. Arlington Heights Road, Suite 10 Arlingt
2、on Heights, IL 6005-4516 Phone: (847) 981-010 Fax: (847) 981-4130 E-mail: iestiest.org Web: ww.iest.org 2 Copyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C018.4 This Recomended Practice is published by the INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY to advance
3、the technical and enginering sciences. Its use is entirely voluntary, and determination of its aplicability and suitability for any particular use is solely the responsibility of the user. This Recomended Practice was prepared by and is under the jurisdiction of Working Group 018 of the IEST Con-tam
4、ination Control Division. Copyright 207 by the INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY First printing, October 207 ISBN 978-0-9787868-3-0 PROPOSAL FOR IMPROVEMENT: The Working Groups of the INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY are continualy working on improvements to their
5、Recomended Practices and Reference Documents. Sugestions from those who use these documents are welcome. If you have a sugestion regarding this document, please use the online Proposal for Improvement form found on the IEST website at ww.iest.org/proposal/form.html. INSTITUTE OF ENVIRONMENTAL SCIENC
6、ES AND TECHNOLOGY Arlington Place One 2340 S. Arlington Heights Road, Suite 10 Arlington Heights, IL 6005-4516 Phone: (847) 981-010 Fax: (847) 981-4130 E-mail: iestiest.org Web: ww.iest.org IEST-RP-C018.4 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 3 Cleanroom Housekeping
7、: Operating and Monitoring Procedures IEST-RP-C018.4 CONTENTS SECTION 1 SCOPE AND LIMITATIONS.5 2 REFERENCES5 3 TERMS AND EFINITIONS.6 4 BACKGROUND6 5 PROCEDURES.7 6 TEST METHODS14 FIGURE 1 RECOMENDED WIPING SEQUENCE10 2 WAL-CLEANING STROKE METHOD10 3 FLOR-CLEANING STROKE METHOD1 4 CLEANING CHECKLIS
8、T.13 5 WIPING SUB-ASEMBLY18 6 CAMERA ND UV LIGHT SUB-ASEMBLY.19 TABLE 1 CLEANING FREQUENCY FOR ISO CLAS 5 CLEANROM.13 2 APLICATION OF TEST METHODS ACORDING TO TYPE OF CONTAMINATION.14 A1 EFECT OF PARTICLE SIZE ON ADHESION TO SURFACE24 APPENDIX A PARTICLE ADHESION AND REMOVAL.23 B BIBLIOGRAPHY26 4 Co
9、pyrighted material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C018.4 IEST-RP-C018.4 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Copyrighted material 5 INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY Contamination Control Division Recommended Practice 018.4 Cleanroom Houseke
10、ping: Operating and Monitoring Procedures IEST-RP-C018.4 1 SCOPE AND LIMITATIONS 1.1 Scope This Recomended Practice (RP) provides guidance for maintaining a cleanrom at the level for which it was designed. This document is intended as a guide for establishing apropriate housekeping procedures es-sen
11、tial for the overal contamination control program of the cleanrom. In adition, test procedures are pro-vided for use in establishing the frequency of house-keping and monitoring the efectivenes of the housekeping. The test methods also are designed to help determine apropriate levels of surface clea
12、nlines for specific cleanroms. 1.2 Limitations This RP does not specify aceptance limits, but does provide standard terminology for specifying desired limits. NOTE: References to “cleanrom” in this document are to be construed, where apropriate, as including clean zones and clean-air devices. 2 REFE
13、RENCES The cited editions of the folowing documents are in-corporated into this RP to the extent specified herein. Users are encouraged to investigate the posibility of aplying the most recent editions of the references. 2.1 American Society for Testing and Materials (ASTM) ASTM F24-04: Standard Met
14、hod for Measuring and Counting Particulate Contamination on Surfaces 2.2 Institute of Environmental Sciences and Technology (IEST) IEST-RP-C03.3: Garment System Considerations in Cleanroms and Other Controled Environments IEST-RP-C04.3: Evaluating Wiping Materials Used in Cleanroms and Other Control
15、ed Environments IEST-RP-C05.3: Gloves and Finger Cots Used in Cleanroms and Other Controled Environments IEST-RP-C07.1: Testing ULPA Filters 2.3 International Organization for Standardization (ISO) ISO 1464-1:199 Cleanroms and asociated con-troled environmentsPart 1: Clasification of air cleanlines
16、2.4 United States Pharmacopeia (USP) USP30-NF25: The United States Pharmacopeia and National Formulary 2.5 Sources and Addresses ASTM American Society for Testing and Materials 10 Bar Harbor Drive West Conshohocken, PA 19428-2959 USA Phone: 610-832-9585 Fax: 610-832-955 Web: ww.astm.org 6 Copyrighte
17、d material INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY IEST-RP-C018.4 IEST Institute of Environmental Sciences and Technology Arlington Place One 2340 S. Arlington Heights Rd., Ste. 10 Arlington Heights, IL 6005-4516 USA Phone: 847- 981-010 Fax: 847-981-4130 Web: ww.iest.org ISO In the US, do
18、cuments may be ordered from: IEST Arlington Place One 2340 S. Arlington Heights Rd., Ste. 10 Arlington Heights, IL 6005-4516 USA ww.iest.org Outside the US: Documents available from represen-tative ISO member body organization USP United States Pharmacopeia 12601 Twinbrok Parkway Rockvile, MD 20852-
19、1790 USA Phone: 301-81-066 Fax: 301-816-8148 Web: ww.usp.org 3 TERMS AND EFINITIONS adhesion The force exerted acros a surface of contact betwen liquids and solids, or solids and solids, that resists their separation. clases of air cleanlines The airborne particle concentration levels defined by ISO
20、 1464-1. cleaning agent Any liquid that has the ability to aid in the removal of surface contamination, is compatible with the product and proces, and does not contribute substantialy to the contamination of the cleanrom. cleanrom A rom in which the air filtration, air distribution, utilities, mater
21、ials of construction, equipment, and operating procedures are specified and regulated to control airborne particle concentrations to met ap-propriate airborne particulate cleanlines clasifica-tions, as defined by ISO 1464-1. clean zone A defined space in which the concentration of air-borne particle
22、s is controled to specified limits. contamination The result of the adition of contaminants to a mate-rial or to any surface within a clean zone. filter A device used to remove particulate mater or impuri-ties from a fluid (gas or liquid) flowing through it. filter, high-eficiency particulate air (H
23、EPA) A throwaway, extended-medium, dry-type filter in a rigid frame, having a minimum particle-colection eficiency of 9.97% (that is, a maxi-mum particle penetration of 0.03%) for 0.3-m particles of thermaly generated dioctyl phthalate (DOP) or specified alternative aerosol. filter, ultralow-penetra
24、tion air (ULPA) A throwaway, extended-medium, dry-type filter in a rigid frame, having a minimum particle-colection eficiency of 9.99% (that is, a maximum particle penetration of 0.01%) for particles in the size range of 0.1 to 0.2 m, when tested in acordance with the methods of IEST-RP-C07. houseke
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