IEST RP-CC012 3-2015 CONSIDERATIONS IN CLEANROOM DESIGN.pdf

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1、 Institute of Environmental Sciences and Technology IEST-RP-CC012.3 Contamination Control Division Recommended Practice 012.3 Considerations in Cleanroom Design Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510 Phone: (847) 981-0100 Fax: (847) 981-4130 E-

2、mail: informationiest.org Web: www.iest.org 2 IEST 2015 All rights reserved Institute of Environmental Sciences and Technology IEST-RP-CC012.3 This Recommended Practice was prepared by and is under the jurisdiction of Working Group 12 of the IEST Contamination Control Division (WG-CC012). The follow

3、ing WG voting members contributed to the development of this edition of this Recommended Practice: Wei Sun, WG-CC012 Chair, Engsysco, Inc. Mark Camenzind, Air Liquide Electronics Balazs NanoAnalysis Roger Diener, Analog Devices, Inc. Gordon M. Ely, WuXi App Tec Mark Mohwinkel, 3M Company Peter JB Te

4、ague, UTC Aerospace Systems R. Vijayakumar, AERFIL Tengfang (Tim) Xu, Lawrence Berkeley National Laboratory Copyright 2015 by the Institute of Environmental Sciences and Technology First printing, February 2015 ISBN 978-1-937280-16-1 PROPOSAL FOR IMPROVEMENT: The Working Groups of the Institute of E

5、nvironmental Sciences and Tech-nology are continually working on improvements to their Recommended Practices and Reference Documents. Sug-gestions from users of these documents are welcome. If you have a suggestion regarding this document, please use the online Proposal for Improvement form found on

6、 the IEST website at www.iest.org. Institute of Environmental Sciences and Technology Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510 Phone: (847) 981-0100 Fax: (847) 981-4130 E-mail: informationiest.org Web: www.iest.org _IEST-RP-CC012.3 Institute of E

7、nvironmental Sciences and Technology IEST 2015 All rights reserved 3 NOTICE AND DISCLAIMER: This Recommended Practice is published by the Institute of Environmental Sciences and Technology (IEST) to advance the technical and engineering sciences. Use of this document is entirely voluntary, and deter

8、mination of its applicability and suitability for any particular use is solely the responsibility of the user. Use of this Recommended Practice does not imply any warranty or endorsement by IEST. The information in this publication was considered technically sound by the consensus of persons engaged

9、 in the development and approval of the document at the time it was developed. Consensus does not necessarily mean that there is unanimous agreement among all persons participating in the development of this document. IEST standards, recommended practices, and guideline publications, of which the do

10、cument contained herein is one, are developed through a voluntary consensus standards development process. This process brings together volunteers and seeks out the views of persons who have an interest in the topic covered by this publication. While IEST administers the process to promote fairness

11、in the development of consensus, the organization does not write the document and does not independently test, evaluate, or verify the accuracy or completeness of any information or the soundness of any judgments contained in IEST standards, recommended practices, and guideline publications. IEST di

12、sclaims liability for any personal injury, property, or other damages of any nature whatsoever, whether special, indirect, consequential, or compensatory, directly or indirectly resulting from the publication, use of, application, or reliance on this document. IEST disclaims and makes no guaranty or

13、 warranty, express or implied, as to the accuracy or completeness of any information published herein, and disclaims and makes no warranty that the information in this document will fulfill any of the particular purposes or needs of users of the document. IEST does not guarantee the performance of a

14、ny individual manufacturer or sellers products or services by virtue of this standard or guide. In publishing and making this document available, IEST is not undertaking to render professional or other services for or on behalf of any person or entity, nor is IEST undertaking to perform any duty owe

15、d by any person or entity to someone else. Anyone using this document should rely on his or her own independent judgment or, as appropriate, seek the advice of a competent professional in determining the exercise of reasonable care in any given circumstances. Information and other standards on the t

16、opic covered by this publication may be available from other sources, which the user may wish to consult for additional views or information not covered by this publication. IEST has no power, nor does it undertake to police or enforce compliance with the contents of this document. IEST does not cer

17、tify, test, or inspect products, designs, or installations for safety or health purposes. Any certification or other statement of compliance with any health or safety-related information in this document shall not be attributable to IEST and is solely the responsibility of the certifier or maker of

18、the statement. 4 IEST 2015 All rights reserved Institute of Environmental Sciences and Technology IEST-RP-CC012.3 Considerations in Cleanroom Design IEST-RP-CC012.3 CONTENTS SECTION 1 SCOPE AND LIMITATIONS 5 2 REFERENCES . 5 3 TERMS AND DEFINITIONS 8 4 PLANNING PROCEDURES . 13 5 DESIGN REQUIREMENTS

19、26 6 CLEANROOM CONSTRUCTION PROTOCOL 62 FIGURE 1 CLEANROOM ENERGY END USE (EXAMPLE 1) . 22 2 CLEANROOM ENERGY END USE (EXAMPLE 2) . 22 3 UNIDIRECTIONAL AIRFLOW 27 4 NONUNIDIRECTIONAL AIRFLOW . 27 5 MIXED AIRFLOW 28 6 MAKE-UP AIR UNIT WITH NO RETURN AIR . 33 7 MAKE-UP AIR UNIT WITH RETURN AIR 33 8 MA

20、KE-UP AIR UNIT WITH ADDITIONAL RECIRCULATION FAN UNIT(S) 34 9 MAKE-UP AIR UNIT WITH ADDITIONAL RECIRCULATION AHU 34 10 MAKE-UP AIR UNIT WITH ADDITIONAL RECIRCULATION AHU AND RECIRCULATION FAN(S) 34 11 GRAPHICAL DEFINITION OF CRITERION CURVES SHOWN IN TABLE 5 47 C1 EXAMPLE OF AN HVAC CONFIGURATION AN

21、D PARTICLE BALANCE IN A CLEANROOM . 79 D1 IN-SITU ISO CLASS 5 CLEANROOM AIR VELOCITIES AND AIR CHANGE RATES 81 TABLE 1 CATEGORIES OF CONTAMINANTS . 14 2 REDUNDANCY LEVELS . 19 3 KEY CONSIDERATIONS FOR IMPROVING ENERGY EFFICIENCY IN CLEANROOMS 23 4 TYPICAL AIRFLOW RANGES IN CLEANROOMS IN COMMON PRACT

22、ICES . 30 5 NUMERICAL DEFINITION OF CRITERION CURVES SHOWN IN FIGURE 11 . 46 6 APPLICATION AND INTERPRETATION 48 APPENDIX A REVIEWING AND TESTING CONCEPTS 66 B SAMPLE CLEANROOM CONSTRUCTION PROTOCOL . 68 C CLEANROOM MODELING APPROACH . 79 D (EXAMPLE) COMPARISON OF RECOMMENDED AND SURVEYED AIR CHANGE

23、 RATES FOR ISO CLASS 5 CLEANROOMS . 81 E BIBLIOGRAPHY . 82 _IEST-RP-CC012.3 Institute of Environmental Sciences and Technology IEST 2015 All rights reserved 5 Institute of Environmental Sciences and Technology Contamination Control Division Recommended Practice 012.3 Considerations in Cleanroom Desi

24、gn IEST-RP-CC012.3 1 SCOPE AND LIMITATIONS 1.1 Scope This Recommended Practice (RP) makes recommendations regarding factors to consider in the design of cleanroom facilities. This discussion is limited to those environmental conditions that typically confront cleanroom designers and users. 1.2 Limit

25、ations This RP is limited to the design of cleanroom facilities. Equipment design is not within the scope of this RP, nor does this RP address process or operational considerations, except as these considerations relate to cleanroom design. This RP is intended to provide users with a means to establ

26、ish performance criteria for cleanrooms. The factors considered are those commonly encountered in cleanrooms, but discussion of these factors is not intended to be all-inclusive. The specified ranges and recommended criteria are intended only to provide a framework. Specific process or other needs m

27、ay dictate requirements beyond the scope of this document. This RP is not intended to supersede specific requirements established by a recognized national or international regulating body. 2 REFERENCES The following publications were used in the preparation of this document or are considered critica

28、l to its content; their citation in no way represents an endorsement or recommendation. The cited editions of these documents are incorporated into this RP to the extent specified herein. Subsequent revisions of these publications do not automatically supersede the cited editions. Users should inves

29、tigate the applicability of revised editions of the references. 2.1 FM Global Cleanroom Materials Flammability Test Protocol (Class 4910) June 2009 2.2 Food and Drug Administration (FDA) Guidance for Industry: Sterile Drug Products Produced by Aseptic Processing Current Good Manufacturing Practice.

30、FDA 2.3 Institute of Environmental Sciences and Technology (IEST) IEST-RP-CC001.5: HEPA and ULPA Filters IEST-RP-CC006.3: Testing Cleanrooms 6 IEST 2015 All rights reserved Institute of Environmental Sciences and Technology IEST-RP-CC012.3 IEST-RP-CC007.2: Testing ULPA Filters IEST-RP-CC022.2: Elect

31、rostatic Charge in Cleanrooms and Other Controlled Environments IEST-RP-CC023.2: Microorganisms in Cleanrooms IEST-RP-CC024.1: Measuring and Reporting Vibration in Microelectronics Facilities IEST-RP-CC031.3 Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Component

32、s IEST-RP-CC034.3: HEPA and ULPA Filter Leak Tests IEST-G-CC035.1: Design Considerations for Airborne Molecular Contamination Filtration Systems in Cleanrooms and Other Controlled Environments 2.4 International Code Council (ICC) 2012 International Building Code 2012 International Fire Code 2.5 Inte

33、rnational Disk Drive Equipment and Materials Association (IDEMA) IDEMA M11-99: General Outgas Test Procedure by Dynamic Headspace Analysis 2.6 International Organization for Standardization (ISO) ISO 13408-1:2008 Aseptic processing of health care productsPart 1: General Requirements ISO 14644-1: 199

34、9 Cleanrooms and associated controlled environmentsPart 1: Classification of air cleanliness ISO 14644-2: 2000 Cleanrooms and associated controlled environmentsPart 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 ISO 14644-4: 2001 Cleanrooms and associated

35、 controlled environmentsPart 4: Design, construction and start-up ISO 14644-8: 2013 Cleanrooms and associated controlled environmentsPart 8: Classification of air cleanliness by chemical concentration (ACC) ISO/DIS 14644, Cleanrooms and associated controlled environments - Part 12: Classification of

36、 air cleanliness by nanoscale particle concentration 2.7 National Environmental Balancing Bureau (NEBB) Procedural Standards for Certified Testing of Cleanrooms, 3rd ed. (2009) 2.8 National Fire Protection Association (NFPA) NFPA 70: National Electrical Code, 2011 ed. NFPA 318, Standard for the Prot

37、ection of Semiconductor Fabrication Facilities, 2012 ed. 2.9 Semiconductor Equipment and Materials International (SEMI) SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port SEMI E30-0611 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E78-0309,

38、 Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment SEMI E82-0706 Specification for Interbay/Intrabay AMHS SEM (IBSEM) SEMI E84-1109 Specification for Enhanced Carrier Handoff Parallel I/O Interface _IEST-RP-CC012.3 Institute of Environmental S

39、ciences and Technology IEST 2015 All rights reserved 7 SEMI E88-0706 Specification for AMHS Storage SEM (Stocker SEM) SEMI F21-1102 Classification of Airborne Molecular Contaminant Levels in Clean Environments SEMI S6-0707 EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipmen

40、t SEMI S12-0298 Guidelines for Equipment Decontamination SEMI S14-0309 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment 2.10 Sources and Addresses FDA Food and Drug Administration 10903 New Hampshire Avenue Silver Spring, MD 20993 Phone: 888- 463-63

41、32 www.fda.gov FM Global 270 Central Avenue Johnston, RI 02919 Phone: 401-275-3000 Fax: 401-275-3029 ICC International Code Council 500 New Jersey Avenue, NW 6th Floor, Washington, DC 20001 Phone: 888-422-7233 Fax: 202-783-2348 www.iccsafe.org IDEMA US International Disk Drive Equipment and Materia

42、ls Association 1226 Lincoln Ave., #100 San Jose, CA 95125 T: 408-294-0082 F: 408-294-0087 www.idema.org IEST Institute of Environmental Sciences and Technology Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510 Phone: 847-981-0100 Fax: 847-981-4130 www.ies

43、t.org 8 IEST 2015 All rights reserved Institute of Environmental Sciences and Technology IEST-RP-CC012.3 ISO International Organization for Standardization In the US: 14644 Series documents available from IEST 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510 Phone: 847-981-

44、0100 Fax: 847-981-4130 www.iest.org Outside the US: Documents available from representative ISO member body organization NEBB National Environmental Balancing Bureau 8575 Grovemont Circle Gaithersburg, MD 20877 Phone: 301-977-3698 Fax: 301-977-9589 www.nebb.org NFPA National Fire Protection Associat

45、ion 1 Batterymarch Park Quincy, MA 02169-7471 Phone: 617-770-3000 Fax: 617-770-0700 www.nfpa.org SEMI Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134Phone: 408-943-6900 Fax: 408-428-9600 www.semi.org 3 TERMS AND DEFINITIONS 3.1 Definitions The definitions of t

46、he following terms are specific to their usage within this document and may not apply to their use in other technical documents. Whenever possible, an equivalent term used in the industry or scientific communities will be mentioned along with the definition. airborne molecular contamination (AMC) Th

47、e presence of molecular (non-particulate) species in the gas or vapor phase that may have deleterious and other contamination effects on the product, process, equipment, activity, occupant, or facility. certification Statement by a testing agency that a cleanroom has been tested in accordance with I

48、SO 14644-1 and IEST-RP-CC006.3 or other applicable document and that the requirements (including cleanliness class) of these specified documents have been achieved. class (airborne particulate) The cleanliness class, as defined by ISO 14644-1, or 14644-12 for nanoparticles. cleanroom A room in which the concentration of airborne particles is controlled and which contains one or more clean zones. _