EN ISO 25178-603-2013 9463 Geometrical product specifications (GPS) - Surface texture Areal - Part 603 Nominal characteristics of non-contact (phaseshifting interferometric microsc.pdf

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1、BSI Standards PublicationBS EN ISO 25178-603:2013Geometrical productspecifications (GPS) Surfacetexture: ArealPart 603: Nominal characteristics of non-contact (phase-shifting interferometricmicroscopy) instrumentsCopyright European Committee for Standardization Provided by IHS under license with CEN

2、Not for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:2013 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of EN ISO25178-603:2013.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Techn

3、ical Product Realization.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2013.

4、Published by BSI StandardsLimited 2013ISBN 978 0 580 82360 2ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 31 October 2013.Amendments issued since pu

5、blicationDate Text affectedCopyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-603 October 2013 ICS 17.040.20 English V

6、ersion Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 603: Caractristique

7、s nominales des instruments sans contact (microscopes interfromtriques glissement de franges) (ISO 25178-603:2013) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 603: Merkmale von berhrungslos messenden Gerten (phasenschiebende interferometrische Mikroskopie) (

8、ISO 25178-603:2013) This European Standard was approved by CEN on 19 August 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and

9、bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the re

10、sponsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav

11、Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE N

12、ORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-603:2013: ECopyright European Committee for Standardization

13、 Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:2013EN ISO 25178-603:2013 (E) 3 Foreword This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrica

14、l product specifications and verification“ in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publicati

15、on of an identical text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the latest by April 2014. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall no

16、t be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark,

17、 Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice

18、 The text of ISO 25178-603:2013 has been approved by CEN as EN ISO 25178-603:2013 without any modification. Copyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:20

19、13ISO 25178-603:2013(E) ISO 2013 All rights reserved iiiContents PageForeword ivIntroduction vi1 Scope . 12 Terms and definitions . 12.1 Terms and definitions related to all areal surface texture measurement methods . 12.2 Terms and definitions related to x- and y-scanning systems 82.3 Terms and def

20、initions related to optical systems 102.4 Terms and definitions related to optical properties of the workpiece 122.5 Terms and definitions specific to phase-shifting interferometric microscopy .123 Descriptions of the influence quantities 133.1 General 133.2 Influence quantities . 14Annex A (informa

21、tive) Components of a phase-shifting interferometric (PSI) microscope 16Annex B (informative) Phase-shifting interferometric (PSI) microscope Theory of operation .17Annex C (informative) Errors and corrections for phase-shifting interferometric (PSI) microscopes .22Annex D (informative) Relation to

22、the GPS matrix model .25Bibliography .27Copyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:2013ISO 25178-603:2013(E)ForewordISO (the International Organization f

23、or Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has th

24、e right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The proce

25、dures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editoria

26、l rules of the ISO/IEC Directives, Part 2. www.iso.org/directivesAttention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identif

27、ied during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patentsAny trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the me

28、aning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 21

29、3, Dimensional and geometrical product specifications and verification.ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS) Surface texture: Areal: Part 1: Areal surface texture drawing indication Part 2: Terms, definitions and surface texture pa

30、rameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chr

31、omatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments Part 605: Nominal characteristics of non-contact (point auto

32、focus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation microscopy) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments Part 702 Calibration of non-contact (confocal chromatic probe) instrumentsiv ISO 2013 All rights reserve

33、dCopyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:2013ISO 25178-603:2013(E) Part 703: Calibration and measurement standards for non-contact (interferometric) i

34、nstrumentsThe following part is under preparation: Part 72: XML file format x3p ISO 2013 All rights reserved vCopyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:

35、2013ISO 25178-603:2013(E)IntroductionThis part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture.This part of ISO 25178 describes the metro

36、logical characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes, designed for the measurement of surface topography maps. For more detailed information on the phase-shifting interferometry technique, see Annex A and Annex B.The ISO/GPS Masterpl

37、an given in ISO /TR 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless othe

38、rwise indicated.NOTE Portions of this document, particularly the informative clauses, may describe patented systems and methods. This information is provided only to assist users in understanding the operating principles of phase-shifting interferometry. This document is not intended to establish pr

39、iority for any intellectual property, nor does it imply a license to any proprietary technologies that may be described herein.vi ISO 2013 All rights reservedCopyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted w

40、ithout license from IHS-,-,-BS EN ISO 25178-603:2013INTERNATIONAL STANDARD ISO 25178-603:2013(E)Geometrical product specifications (GPS) Surface texture: Areal Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments1 ScopeThis part of ISO 25178 descri

41、bes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.2 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.2.1 Terms and definitions related to all areal surface texture meas

42、urement methods2.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured2.1.2coordinate system of the instrumentright hand orthonormal system of axes (x, y, z) where (x, y) is the plane established by the areal referen

43、ce of the instrument (note that there are optical instruments that do not possess a physical areal guide); z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to th

44、e (x, y) plane for a stylus instrument Note 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for instruments that scan in the horizontal plane.)Note 2 to entry: See also “specification coordinate system” ISO 25178-2:2012, 3.1.2 and “measur

45、ement coordinate system” ISO 25178-6:2010, 3.1.1.SEE: Figure 1. ISO 2013 All rights reserved 1Copyright European Committee for Standardization Provided by IHS under license with CENNot for ResaleNo reproduction or networking permitted without license from IHS-,-,-BS EN ISO 25178-603:2013ISO 25178-60

46、3:2013(E)12Key1 coordinate system of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of the instrument2.1.3measurement loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the

47、measuring stand, the drive unit, the probing systemNote 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.SEE: Figure 1.2.1.4real surface of a workpieceset of features which physically exist and separate the entire wor

48、kpiece from the surrounding mediumNote 1 to entry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also “mechanical surface” ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and “electromagnetic surface” ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.Note 3 to entry: The electromagnetic surface considered for one type of optical instrument may be different from the electromagnetic surface for other types of optical instruments.2.1.5surface probedevice that converts