EN ISO 25178-603-2009 en Geometrical product specifications (GPS) - Surface texture Areal - Part 603 Nominal characteristics of non-contact (phase-shifting interferometric microsco.pdf

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1、BSI Standards PublicationBS EN ISO 25178-603:2013Geometrical productspecifications (GPS) Surfacetexture: ArealPart 603: Nominal characteristics of non-contact (phase-shifting interferometricmicroscopy) instrumentsBS EN ISO 25178-603:2013 BRITISH STANDARDNational forewordThis British Standard is the

2、UK implementation of EN ISO25178-603:2013.The UK participation in its preparation was entrusted to TechnicalCommittee TDW/4, Technical Product Realization.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all

3、 the necessaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2013. Published by BSI StandardsLimited 2013ISBN 978 0 580 82360 2ICS 17.040.20Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Stan

4、dard was published under the authority of theStandards Policy and Strategy Committee on 31 October 2013.Amendments issued since publicationDate Text affectedEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 25178-603 October 2013 ICS 17.040.20 English Version Geometrical product specification

5、s (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013) Spcification gomtrique des produits (GPS) - tat de surface: Surfacique - Partie 603: Caractristiques nominales des instruments sans contact

6、 (microscopes interfromtriques glissement de franges) (ISO 25178-603:2013) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 603: Merkmale von berhrungslos messenden Gerten (phasenschiebende interferometrische Mikroskopie) (ISO 25178-603:2013) This European Standa

7、rd was approved by CEN on 19 August 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning su

8、ch national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its ow

9、n language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany,

10、Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORM

11、UNG CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-603:2013: EBS EN ISO 25178-603:2013EN ISO 25178-603:2013 (E) 3 Foreword This document (EN ISO 25178

12、-603:2013) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification“ in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. Th

13、is European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the latest by April 2014. Attention is drawn to the possibility that some of the

14、elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement thi

15、s European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovaki

16、a, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 25178-603:2013 has been approved by CEN as EN ISO 25178-603:2013 without any modification. BS EN ISO 25178-603:2013ISO 25178-603:2013(E) ISO 2013 All rights reserved iiiContents PageForeword iv

17、Introduction vi1 Scope . 12 Terms and definitions . 12.1 Terms and definitions related to all areal surface texture measurement methods . 12.2 Terms and definitions related to x- and y-scanning systems 82.3 Terms and definitions related to optical systems 102.4 Terms and definitions related to optic

18、al properties of the workpiece 122.5 Terms and definitions specific to phase-shifting interferometric microscopy .123 Descriptions of the influence quantities 133.1 General 133.2 Influence quantities . 14Annex A (informative) Components of a phase-shifting interferometric (PSI) microscope 16Annex B

19、(informative) Phase-shifting interferometric (PSI) microscope Theory of operation .17Annex C (informative) Errors and corrections for phase-shifting interferometric (PSI) microscopes .22Annex D (informative) Relation to the GPS matrix model .25Bibliography .27BS EN ISO 25178-603:2013ISO 25178-603:20

20、13(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which

21、 a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all mat

22、ters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This do

23、cument was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directivesAttention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such p

24、atent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patentsAny trade name used in this document is information given for the convenience of users and does not cons

25、titute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe co

26、mmittee responsible for this document is ISO/TC 213, Dimensional and geometrical product specifications and verification.ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS) Surface texture: Areal: Part 1: Areal surface texture drawing indication

27、 Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 70: Material measures Part 71: Software measurement standards Part 601: Nominal characteristics of contact (stylus) instruments Part 602: No

28、minal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 604: Nominal characteristics of non-contact (coherence scanning interferometric microscopy) instruments Part 605:

29、Nominal characteristics of non-contact (point autofocus probe) instruments Part 606: Nominal characteristics of non-contact (focus variation microscopy) instruments Part 701: Calibration and measurement standards for contact (stylus) instruments Part 702 Calibration of non-contact (confocal chromati

30、c probe) instrumentsiv ISO 2013 All rights reservedBS EN ISO 25178-603:2013ISO 25178-603:2013(E) Part 703: Calibration and measurement standards for non-contact (interferometric) instrumentsThe following part is under preparation: Part 72: XML file format x3p ISO 2013 All rights reserved vBS EN ISO

31、25178-603:2013ISO 25178-603:2013(E)IntroductionThis part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture.This part of ISO 25178 describes

32、 the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes, designed for the measurement of surface topography maps. For more detailed information on the phase-shifting interferometry technique, see Annex A and Annex B.The ISO/GP

33、S Masterplan given in ISO /TR 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, u

34、nless otherwise indicated.NOTE Portions of this document, particularly the informative clauses, may describe patented systems and methods. This information is provided only to assist users in understanding the operating principles of phase-shifting interferometry. This document is not intended to es

35、tablish priority for any intellectual property, nor does it imply a license to any proprietary technologies that may be described herein.vi ISO 2013 All rights reservedBS EN ISO 25178-603:2013INTERNATIONAL STANDARD ISO 25178-603:2013(E)Geometrical product specifications (GPS) Surface texture: Areal

36、Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments1 ScopeThis part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.2 Terms and definitionsFor

37、the purposes of this document, the following terms and definitions apply.2.1 Terms and definitions related to all areal surface texture measurement methods2.1.1areal referencecomponent of the instrument that generates a reference surface with respect to which the surface topography is measured2.1.2c

38、oordinate system of the instrumentright hand orthonormal system of axes (x, y, z) where (x, y) is the plane established by the areal reference of the instrument (note that there are optical instruments that do not possess a physical areal guide); z-axis is mounted parallel to the optical axis and is

39、 perpendicular to the (x, y) plane for an optical instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane for a stylus instrument Note 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for in

40、struments that scan in the horizontal plane.)Note 2 to entry: See also “specification coordinate system” ISO 25178-2:2012, 3.1.2 and “measurement coordinate system” ISO 25178-6:2010, 3.1.1.SEE: Figure 1. ISO 2013 All rights reserved 1BS EN ISO 25178-603:2013ISO 25178-603:2013(E)12Key1 coordinate sys

41、tem of the instrument2 measurement loopFigure 1 Coordinate system and measurement loop of the instrument2.1.3measurement loopclosed chain which comprises all components connecting the workpiece and the probe, e.g. the means of positioning, the work holding fixture, the measuring stand, the drive uni

42、t, the probing systemNote 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the measurement uncertainty.SEE: Figure 1.2.1.4real surface of a workpieceset of features which physically exist and separate the entire workpiece from the surrounding me

43、diumNote 1 to entry: The real surface is a mathematical representation of the surface that is independent of the measurement process.Note 2 to entry: See also “mechanical surface” ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1 and “electromagnetic surface” ISO 25178-2:2012, 3.1.1.2 or ISO 14406:

44、2010, 3.1.2.Note 3 to entry: The electromagnetic surface considered for one type of optical instrument may be different from the electromagnetic surface for other types of optical instruments.2.1.5surface probedevice that converts the surface height into a signal during measurementNote 1 to entry: I

45、n earlier standards, this was termed “transducer”.2 ISO 2013 All rights reservedBS EN ISO 25178-603:2013ISO 25178-603:2013(E)2.1.6measuring volumerange of the instrument stated in terms of the limits on all three coordinates measured by the instrumentNote 1 to entry: For areal surface texture measur

46、ing instruments, the measuring volume is defined by the measuring range of the x- and y- drive units, and the measuring range of the z-probing system.SOURCE: ISO 25178-601:2010, 3.4.12.1.7response curveFx, Fy, Fzgraphical representation of the function that describes the relation between the actual

47、quantity and the measured quantityNote 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity xM(respectively yMor zM).Note 2 to entry: The response curve can be used for adjustments and error corrections.SEE: Figure 21234Key1 response curve 3 measured quantitie

48、s2 assessment of the linearity deviation by polynomial approximation4 input quantitiesFigure 2 Example of a nonlinear response curveISO 25178-601:2010, 3.4.22.1.8amplification coefficientx, y, zslope of the linear regression curve obtained from the response curve (2.1.7)Note 1 to entry: There will b

49、e amplification coefficients applicable to the x, y and z quantities.Note 2 to entry: The ideal response is a straight line with a slope equal to 1 which means that the values of the measurand are equal to the values of the input quantities. ISO 2013 All rights reserved 3BS EN ISO 25178-603:2013ISO 25178-603:2013(E)Note 3 to entry: See also “sensitivity of a measuring system” (ISO/IEC Guide 99:2007, 4.12)1.SEE: Figure 3123465Key1 measured quantities 4 linearization of the response curve of Figure 22