EN ISO 14880-4-2006 en Optics and photonics - Microlens arrays - Part 4 Test methods for geometrical properties《光学和光子学 显微物镜系列 第4部分 几何学特征的试验办法 ISO 14880-4-2006》.pdf

《EN ISO 14880-4-2006 en Optics and photonics - Microlens arrays - Part 4 Test methods for geometrical properties《光学和光子学 显微物镜系列 第4部分 几何学特征的试验办法 ISO 14880-4-2006》.pdf》由会员分享，可在线阅读，更多相关《EN ISO 14880-4-2006 en Optics and photonics - Microlens arrays - Part 4 Test methods for geometrical properties《光学和光子学 显微物镜系列 第4部分 几何学特征的试验办法 ISO 14880-4-2006》.pdf（34页珍藏版）》请在麦多课文档分享上搜索。

1、BRITISH STANDARDBS EN ISO 14880-4:2006Optics and photonics Microlens arrays Part 4: Test methods for geometrical propertiesThe European Standard EN ISO 14880-4:2006 has the status of a British StandardICS 31.260g49g50g3g38g50g51g60g44g49g42g3g58g44g55g43g50g56g55g3g37g54g44g3g51g40g53g48g44g54g54g44

2、g50g49g3g40g59g38g40g51g55g3g36g54g3g51g40g53g48g44g55g55g40g39g3g37g60g3g38g50g51g60g53g44g42g43g55g3g47g36g58BS EN ISO 14880-4:2006This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 June 2006 BSI 2006ISBN 0 580 48720 2National forewordThis

3、British Standard is the official English language version of EN ISO 14880-4:2006. It is identical with ISO 14880-4:2006.The UK participation in its preparation was entrusted by Technical Committee CPW/172, Optics and photonics, to Subcommittee CPW/172/9, Electro-Optical systems, which has the respon

4、sibility to: A list of organizations represented on this subcommittee can be obtained on request to its secretary.Cross-referencesThe British Standards which implement international or European publications referred to in this document may be found in the BSI Catalogue under the section entitled “In

5、ternational Standards Correspondence Index”, or by using the “Search” facility of the BSI Electronic Catalogue or of British Standards Online.This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a

6、British Standard does not of itself confer immunity from legal obligations. aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep UK interests informed; monitor related international an

7、d European developments and promulgate them in the UK.Summary of pagesThis document comprises a front cover, an inside front cover, the EN ISO title page, the EN ISO foreword page, the ISO title page, pages ii to v, a blank page, pages 1 to 22, an inside back cover and a back cover.The BSI copyright

8、 notice displayed in this document indicates when the document was last issued.Amendments issued since publicationAmd. No. Date CommentsEUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN ISO 14880-4June 2006ICS 31.260English VersionOptics and photonics - Microlens arrays - Part 4: Test methodsfor geo

9、metrical properties (ISO 14880-4:2006)Optique et photonique - Rseaux de microlentilles - Partie4: Mthodes dessai pour les proprits gomtriques (ISO14880-4:2006)Optik und Photonik - Mikrolinsenarrays - Teil 4:Prfverfahren fr geometrische Eigenschaften (ISO 14880-4:2006)This European Standard was appro

10、ved by CEN on 3 May 2006.CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this EuropeanStandard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such nationalstandar

11、ds may be obtained on application to the Central Secretariat or to any CEN member.This European Standard exists in three official versions (English, French, German). A version in any other language made by translationunder the responsibility of a CEN member into its own language and notified to the

12、Central Secretariat has the same status as the officialversions.CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, P

13、oland, Portugal, Romania,Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.EUROPEAN COMMITTEE FOR STANDARDIZATIONCOMIT EUROPEN DE NORMALISATIONEUROPISCHES KOMITEE FR NORMUNGManagement Centre: rue de Stassart, 36 B-1050 Brussels 2006 CEN All rights of exploitation in any form and by a

14、ny means reservedworldwide for CEN national Members.Ref. No. EN ISO 14880-4:2006: EForeword This document (EN ISO 14880-4:2006) has been prepared by Technical Committee ISO/TC 172 “Optics and optical instruments“ in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics “, the secre

15、tariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by December 2006, and conflicting national standards shall be withdrawn at the latest by December 2006. According to th

16、e CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxemb

17、ourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. Endorsement notice The text of ISO 14880-4:2006 has been approved by CEN as EN ISO 14880-4:2006 without any modifications. EN ISO 14880-4:2006Reference numberISO 14880-4:20

18、06(E)INTERNATIONAL STANDARD ISO14880-4First edition2006-06-01Optics and photonics Microlens arrays Part 4: Test methods for geometrical properties Optique et photonique Rseaux de microlentilles Partie 4: Mthodes dessai pour les proprits gomtriques EN ISO 14880-4:2006ii iiiContents Page Foreword iv I

19、ntroduction v 1 Scope . 1 2 Normative references . 1 3 Terms, definitions and symbols 1 4 Coordinate system 3 5 Test methods. 4 5.1 Pitch and surface modulation depth measurement 4 5.2 Physical thickness 9 5.3 Radius of curvature 9 5.4 Surface preparation of microlens array for measurement . 12 6 Pr

20、ocedure 13 6.1 Measurement of pitch and surface modulation depth (lens sag) 13 6.2 Measurement of physical thickness . 13 6.3 Measurement of radius of curvature. 13 7 Results and uncertainties 13 8 Test report . 14 Annex A (normative) Measurement with a Fizeau interferometer system . 16 Annex B (inf

21、ormative) Uniformity of array spacing 19 Bibliography . 22 EN ISO 14880-4:2006iv Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through

22、 ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborate

23、s closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards

24、. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. Attention is drawn to the possibility that some of the elements of this

25、 document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO 14880-4 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-optical systems. ISO 14880 consists of the following parts, und

26、er the general title Optics and photonics Microlens arrays: Part 1: Vocabulary Part 2: Test methods for wavefront aberrations Part 3: Test methods for optical properties other than wavefront aberrations Part 4: Test methods for geometrical properties EN ISO 14880-4:2006vIntroduction This part of ISO

27、 14880 specifies methods for testing geometrical properties of microlens arrays. Examples of applications for microlens arrays include three-dimensional displays, coupling optics associated with arrayed light sources and photo-detectors, enhanced optics for liquid crystal displays, and optical paral

28、lel processor elements. The market in microlens arrays has generated a need for agreement on basic terminology and test methods. Standard terminology and clear definitions are needed not only to promote applications but also to encourage scientists and engineers to exchange ideas and new concepts ba

29、sed on common understanding. This part of ISO 14880 contributes to the purpose of the series of ISO 14880 standards, which is to improve the compatibility and interchangeability of lens arrays from different suppliers and to enhance development of the technology using microlens arrays. The measureme

30、nt of physical characteristics of pitch and surface modulation depth can be made using a stylus instrument and non-contact optical probe system. Physical thickness can be measured with a micrometer. The measurement processes are described in the body of this part of ISO 14880. EN ISO 14880-4:2006bla

31、nk1Optics and photonics Microlens arrays Part 4: Test methods for geometrical properties 1 Scope This part of ISO 14880 specifies methods for testing geometrical properties of microlenses in microlens arrays. It is applicable to microlens arrays with very small lenses formed on one or more surfaces

32、of a common substrate and to graded index microlenses. 2 Normative references The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (includ

33、ing any amendments) applies. ISO 14880-1, Optics and photonics Microlens arrays Part 1. Vocabulary 3 Terms, definitions and symbols For the purposes of this document, the terms, definitions given in ISO 14880-1 and the following apply. NOTE 1 The symbols adopted for this part of ISO 14880 are chosen

34、 for clarity in this application to microlens arrays but some may not be those commonly used for surface texture measurement. NOTE 2 The parameters Px, Pyand h are used in this part of ISO 14880 to describe geometrical parameters encountered in the measurement of surface texture. Px, Pyare spacing p

35、arameters and are defined as the average value of the length of the mean line section containing a profile peak and adjacent valley. An amplitude parameter, h, is defined as the average difference between peak of the lens profile and the rim. Figure 1 illustrates the geometrical properties of microl

36、ens arrays which are to be measured. 3.1 pitch Px, Pydistance between the centres of adjacent lenses which may vary across and will vary with direction See Figure 1. NOTE 1 The pitch is expressed in millimetres. ISO 14880-1:2001, term 6.2.1.5 NOTE 2 For a stylus instrument this will generally equate

37、 to the mean width of the profile elements calculated from the roughness profile, RSm(see 3.2.2 and 4.3.1 in ISO 4287:1997). EN ISO 14880-4:20062 3.2 surface modulation depth h peak-to-valley variation of the surface height See Figure 1. NOTE 1 For a purely refractive microlens, this will be the sam

38、e as the lens sag. NOTE 2 The surface modulation depth is expressed in millimetres. ISO 14880-1:2001, term 6.2.1.8 NOTE 3 For stylus instruments this will generally equate to Rz(see 4.1.3 in ISO 4287:1997). 3.3 physical thickness Tcmaximum local thickness of the array See Figure 1. NOTE The physical

39、 thickness is expressed in millimetres. ISO 14880-1:2001; term 6.2.1.9 3.4 radius of curvature Rcdistance from the vertex of the microlens to the centre of curvature of the lens surface See Figure 1. NOTE 1 The radius of curvature is expressed in millimetres. ISO 14880-1:2001; term 6.1.4 NOTE 2 For

40、rotationally invariant microlenses or cylindrical microlenses. EN ISO 14880-4:20063Key 1 substrate Tcphysical thickness Rcradius of curvature Px, Pypitch h surface modulation depth (lens sag) Figure 1 Geometrical parameters of microlens arrays 4 Coordinate system To measure the geometrical propertie

41、s of a microlens array, a Cartesian coordinate system is used, as shown in Figure 2. In a right-handed Cartesian set, the x- and y-axis lie in the substrate plane and the x-axis provides the direction of trace. The z-axis is the outward direction from the material to the surrounding medium. Key 1 su

42、bstrate 2 microlens 3 light pass Figure 2 Microlens array with a Cartesian coordinate system EN ISO 14880-4:20064 5 Test methods 5.1 Pitch and surface modulation depth measurement 5.1.1 Use of stylus instrument 5.1.1.1 Principle The basic principle using a stylus instrument is to obtain a profile of

43、 the surface of the array. Care shall be taken to ensure that the profile passes through the centre of each lens and that the stylus remains in contact with the surface throughout the measurement process. This enables the pitch and surface modulation depth to be determined. 5.1.1.2 Set-up and prepar

44、ation The measurement of the geometrical characteristics of a microlens array is similar in principle to the measurement of any surface using a stylus instrument. A typical stylus instrument consists of a stylus that physically contacts the surface and a transducer to convert its vertical movement i

45、nto an electrical signal. Other components can be seen in Figure 3 and include the following: a pick-up, driven by a motor and gearbox, which draws the stylus over the surface at a constant speed; an electronic amplifier to boost the signal from the stylus transducer to a useful level; a device for

46、recording the amplified signal or a computer that automates the data collection. The part of the stylus in contact with the surface of the array is usually a diamond tip with a carefully manufactured profile. Owing to their finite shape, some styli on some arrays may not penetrate into valleys and w

47、ill give a distorted or filtered measurement of the surface. The effect of the stylus forces can have a significant influence on the measurement results. Too high a force can cause damage to the surface of the array. Too low a force and the stylus will not stay reliably in contact with the surface.

48、The stylus instrument shall be used in an environment that is as free as possible from dust, vibration and direct sunlight in a location where the ambient temperature is maintained in the range 20 C 5 C (with a condensation-free humidity below 70 % relative humidity). Remove any gross contamination

49、from the surface of the instrument preferably by blowing the surface with filtered air. Any oil or grease may be removed using a suitable solvent. Due consideration shall be given for testing under more adverse conditions. EN ISO 14880-4:20065Key 1 base 2 fixture 3 microlens under test 4 stylus 5 probe (pick-up) 6 measurement loop 7 column 8 drive unit Figure 3 Elements of a typical stylus instrument The electrical unit on the stylus instrument shall be switched on at least one hour before any measurements take place. T