BS ISO 16700-2016 Microbeam analysis Scanning electron microscopy Guidelines for calibrating image magnification《微电子束分析 扫描电子显微镜 图像放大校准指南》.pdf
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1、BS ISO 16700:2016Microbeam analysis Scanning electron microscopy Guidelines for calibratingimage magnificationBSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06BS ISO 16700:2016 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of ISO 1670
2、0:2016. It supersedes BS ISO 16700:2004 which is withdrawn.The UK participation in its preparation was entrusted to Technical Committee CII/9, Microbeam analysis.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to inc
3、lude all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2016 .Published by BSI Standards Limited 2016ISBN 978 0 580 89052 9 ICS 37.020 Compliance with a British Standard cannot confer immunity from legal obligations.This B
4、ritish Standard was published under the authority of the Standards Policy and Strategy Committee on 31 July 2016.Amendments/corrigenda issued since publicationDate T e x t a f f e c t e dBS ISO 16700:2016 ISO 2016Microbeam analysis Scanning electron microscopy Guidelines for calibrating image magnif
5、icationAnalyse par microfaisceaux Microscopie lectronique balayage Lignes directrices pour ltalonnage du grandissement dimageINTERNATIONAL STANDARDISO16700Second edition2016-08-01Reference numberISO 16700:2016(E)BS ISO 16700:2016ISO 16700:2016(E)ii ISO 2016 All rights reservedCOPYRIGHT PROTECTED DOC
6、UMENT ISO 2016, Published in SwitzerlandAll rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written
7、 permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgBS ISO 16700:2016ISO
8、 16700:2016(E)Foreword ivIntroduction v1 Scope . 12 Normative references 13 Terms and definitions . 14 Image magnification . 34.1 Scale marker 34.2 Expressing magnification 35 Reference material . 35.1 General . 35.2 Requirements for CRM . 45.3 Pitch patterns on CRM 45.4 Storage and handling . 46 Ca
9、libration procedures 56.1 General . 56.2 Mounting CRM . 56.3 Setting SEM operation conditions for calibration . 56.4 Image recording . 66.5 Measurement of image . 66.6 Calibration of magnification and scale marker . 76.6.1 General 76.6.2 Magnification 76.6.3 Scale marker 77 Accuracy of image magnifi
10、cation and scale marker 88 Calibration report . 98.1 General . 98.2 Contents of calibration report . 9Annex A (informative) Reference materials for magnification 11Annex B (informative) Parameters that influence the resultant magnification of an SEM .13Annex C (informative) Uncertainties in magnific
11、ation measurements .15Annex D (informative) Example of a test report 16Bibliography .18 ISO 2016 All rights reserved iiiContents PageBS ISO 16700:2016ISO 16700:2016(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member b
12、odies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental a
13、nd non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are d
14、escribed in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is draw
15、n to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on t
16、he ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment
17、, as well as information about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.The committee responsible for this document is ISO/TC 202, Microbeam analysis, Subcommittee SC 4, Scanning elec
18、tron microscopy (SEM).This second edition cancels and replaces the first edition (ISO 16700:2004), which has been technically revised.iv ISO 2016 All rights reservedBS ISO 16700:2016ISO 16700:2016(E)IntroductionThe scanning electron microscope is widely used to investigate the surface structure of a
19、 range of important materials such as semiconductors, metals, polymers, glass, food and biological materials, and this International Standard is relevant to the need for magnification calibration of the images. It describes the requirements for calibration of the image magnification in the scanning
20、electron microscope using a reference material or a certified reference material. ISO 2016 All rights reserved vBS ISO 16700:2016BS ISO 16700:2016Microbeam analysis Scanning electron microscopy Guidelines for calibrating image magnification1 ScopeThis International Standard specifies a method for ca
21、librating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not a
22、pply to the dedicated critical dimension measurement SEM.2 Normative referencesThe following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest
23、 edition of the referenced document (including any amendments) applies.ISO/IEC 17025:2005, General requirements for the competence of testing and calibration laboratoriesISO Guide 30, Reference materials Selected terms and definitionsISO Guide 34, General requirements for the competence of reference
24、 material producersISO Guide 35, Reference materials General and statistical principles for certification3 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.3.1scanning electron microscopeSEMinstrument that produces magnified images of a specimen by sc
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