ANSI UL 2360-2000 UL Standard for Saftey Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction (First Edition Reprint.pdf

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1、UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL UL 2360 Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool ConstructionUL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DI

2、STRIBUTION WITHOUT PERMISSION FROM ULUL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL UL Standard for Safety for Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction, UL 2360 Fir

3、st Edition, Dated May 10, 2000 SUMMARY OF TOPICS This revision of ANSI/UL 2360 is being issued to reect the reaffirmation of ANSI approval. Text that has been changed in any manner or impacted by ULs electronic publishing system is marked with a vertical line in the margin. The revisions are substan

4、tially in accordance with Proposal(s) on this subject dated April 12, 2013. All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form by any means, electronic, mechanical photocopying, recording, or otherwise without prior permission

5、 of UL. UL provides this Standard as is without warranty of any kind, either expressed or implied, including but not limited to, the implied warranties of merchantability or tness for any purpose. In no event will UL be liable for any special, incidental, consequential, indirect or similar damages,

6、including loss of prots, lost savings, loss of data, or any other damages arising out of the use of or the inability to use this Standard, even if UL or an authorized UL representative has been advised of the possibility of such damage. In no event shall ULs liability for any damage ever exceed the

7、price paid for this Standard, regardless of the form of the claim. Users of the electronic versions of ULs Standards for Safety agree to defend, indemnify, and hold UL harmless from and against any loss, expense, liability, damage, claim, or judgment (including reasonable attorneys fees) resulting f

8、rom any error or deviation introduced while purchaser is storing an electronic Standard on the purchasers computer system. The requirements in this Standard are now in effect, except for those paragraphs, sections, tables, gures, and/or other elements of the Standard having future effective dates as

9、 indicated in the note following the affected item. The prior text for requirements that have been revised and that have a future effective date are located after the Standard, and are preceded by a SUPERSEDED REQUIREMENTS notice. MAY 31, 2013 UL 2360 tr1UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FU

10、RTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL MAY 31, 2013 UL 2360 tr2 No Text on This PageUL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL MAY 10, 2000 (Title Page Reprinted: May 31, 2013) 1 UL 2360 Standard for Test Methods

11、for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction First Edition May 10, 2000 This ANSI/UL Standard for Safety consists of the First Edition including revisions through May 31, 2013. The most recent designation of ANSI/UL 2360 as a Reaffirmed Amer

12、ican National Standard (ANS) occurred on May 31, 2013. ANSI approval for a standard does not include the Cover Page, Transmittal Pages, Title Page, or effective date information. Comments or proposals for revisions on any part of the Standard may be submitted to UL at any time. Proposals should be s

13、ubmitted via a Proposal Request in ULs On-Line Collaborative Standards Development System (CSDS) at http:/. ULs Standards for Safety are copyrighted by UL. Neither a printed nor electronic copy of a Standard should be altered in any way. All of ULs Standards and all copyrights, ownerships, and right

14、s regarding those Standards shall remain the sole and exclusive property of UL. COPYRIGHT 2013 UNDERWRITERS LABORATORIES INC. ANSI/UL 2360-2004 (R2013)UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL MAY 31, 2013 UL 2360 2 No Text on This Pag

15、eUL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL CONTENTS INTRODUCTION 1 Scope .5 2 General 5 2.1 Units of measurement .5 2.2 Undated references .5 TESTS 3 General 6 4 Cone Calorimeter Tests 6 4.1 Cone calorimeter ignition response test .6 4

16、.2 Cone calorimeter combustibility tests 6 4.3 Fire performance calculation methodology .7 5 Parallel Panel Test 8 5.1 General .8 5.2 Test equipment 8 5.3 Propane sand burner ignition source 8 5.4 Collection hood and exhaust duct 9 5.5 Photographic and video equipment 11 5.6 Samples .11 5.7 Test con

17、guration .14 6 Material Classication 14 7 Test Report .15 JUNE 12, 2008 UL 2360 3UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL This page intentionally left blank. JUNE 12, 2008 UL 2360 4UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER RE

18、PRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL INTRODUCTION 1 Scope 1.1 These requirements cover the test methods for measuring the re performance of sheet plastics used in semi-conductor wet bench tool construction. 1.2 Plastic materials that are classied as Class 1 or Class 2 demonstrate li

19、mited re propagation without the use of sprinklers. 1.3 Variations from the construction or conditions that are tested are capable of substantially changing the performance characteristics of the plastic. 1.4 This standard is not intended for evaluation of small plastic components used in semi-condu

20、ctor tool constructions such as tubing or wiring. 1.5 This standard does not measure mechanical or structural properties of plastic, and this standard does not measure the hazards from the smoke generated by the plastic material. 1.6 A product that contains features, characteristics, components, mat

21、erials, or systems new or different from those covered by the requirements in this standard, and that involves a risk of re or of electric shock or injury to persons shall be evaluated using appropriate additional component and end-product requirements to maintain the level of safety as originally a

22、nticipated by the intent of this standard. A product whose features, characteristics, components, materials, or systems conict with specic requirements or provisions of this standard does not comply with this standard. Revision of requirements shall be proposed and adopted in conformance with the me

23、thods employed for development, revision, and implementation of this standard. 2 General 2.1 Units of measurement 2.1.1 Values stated without parentheses are the requirement. Values in parentheses are explanatory or approximate information. 2.2 Undated references 2.2.1 Any undated reference to a cod

24、e or standard appearing in the requirements of this standard shall be interpreted as referring to the latest edition of that code or standard. MAY 10, 2000 UL 2360 5UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL TESTS 3 General 3.1 The plas

25、tic material covered by this standard shall be subjected to: a) Four cone calorimeter ignition response tests, see 4.1; b) Three cone calorimeter combustibility tests, see 4.2; and c) Three large scale parallel panel tests, see Parallel Panel Test, Section 5. When the average ame propagation index i

26、s less than 6, as determined by the cone calorimeter tests, then the large scale parallel panel test is not required to be conducted. 3.2 When the Cone Calorimeter Tests, Section 4, and the Parallel Panel Test, Section 5, indicate different performance classications, then the parallel panel test res

27、ults shall be utilized in determining the classication of the plastic material tested. 4 Cone Calorimeter Tests 4.1 Cone calorimeter ignition response test 4.1.1 Four cone calorimeter ignition response tests are to be conducted in accordance with ASTM E1354- 97 a using a sample size of 3.9 by 3.9 in

28、ches (100 mm by 100 mm) with a thickness representative of the nal product, up to 2 inches (50 mm) thick. a ASTM E1354-97 Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter, American Society for Testing and Materials, Phil

29、delphia, PA. 4.1.2 The cone calorimeter ignition response tests are to be conducted using the following conditions: a) Horizontal orientation of samples; b) Samples tested using an edge frame sample holder, and c) The test conducted with a radiant heat ux setting of 20, 35, 50 and 75 kW/m 2 . The co

30、ne calorimeter ignition response tests are terminated when sustained ignition has occurred. When ignition does not occur at values below 75kW/m 2 , then intermediate radiant heat ux values shall be selected so that at least four cone calorimeter ignition response tests have ame ignition test results

31、. See 4.3 for test calculations. 4.2 Cone calorimeter combustibility tests 4.2.1 Three cone calorimeter combustibilty tests are to be conducted in accordance with ASTM E1354- 97 b using a sample size of 3.9 by 3.9 inches (100 mm by 100 mm) with a thickness representative of the nal product, up tro 2

32、 inches (50 mm) thick. b ASTM E1354-97 Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter, American Society for Testing and Materials, Philadelphia, PA. MAY 10, 2000 UL 2360 6UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURT

33、HER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL 4.2.2 The cone calorimeter combustibility tests are to be conducted using the following conditions: a) Horizontal orientation of samples, b) Samples tested using an edge frame sample holder, c) Wire grid, and d) The tests conducted with a 5

34、0 kW/m 2 radiant heat ux setting. 4.3 Fire performance calculation methodology 4.3.1 Thermal Response Parameter (TRP) To calculate TRP, the time to ignition date is plotted with 1/ t ig on the y-axis and the radiant heat ux on the x-axis. The equation for TRP is as follows: in which: t ig is the ign

35、ition time at the radiant heat ux and is the radiant heat ux to the sample. A least-square error analysis is used to produce a line (with a slope of m) for the plotted points. Then: 4.3.2 The Fire Propagation Index (FPI) is calculated as follows: in which: MAY 10, 2000 UL 2360 7UL COPYRIGHTED MATERI

36、AL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL is the peak heat ux in kW/m 2 . The re propagation index value shall be rounded to the nearest tenth. 4.3.3 The Smoke Damage Index (SDI) is calculated as follows: in which: s is the specic extinction cross section

37、area (m 2 /kg). The smoke damage index value shall be rounded to the nearest tenth. 5 Parallel Panel Test 5.1 General 5.1.1 The test specimen rating shall be determined using the test criteria described in Table 6.1. 5.2 Test equipment 5.2.1 The test equipment is to consist of the following componen

38、ts: a) A propane sand burner ignition source, see 5.3; b) A collection hood and exhaust duct, see 5.4; and c) Photographic and video equipment, see 5.5. 5.2.2 The building in which the tests are conducted is to have vents for the discharge of the combustion products and have provisions for fresh air

39、 intake so that no oxygen-decient air is introduced into the test conguration during the test. 5.3 Propane sand burner ignition source 5.3.1 The ignition source for the test is to consist of a 2 foot (0.61 m) long, 1 foot (0.31 m) wide and 1 foot (0.31 m) high propane sand burner as shown in Figure

40、5.1. This is generated text for gtxt. MAY 10, 2000 UL 2360 8UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL 5.3.2 The propane gas supplied to the burner is to be CP-grade propane (99 percent pure) having a nominal heating value of 2500 Btu (

41、thermochemical) per cubic foot 93.0 MJ/m 3 or 22.2 Kilo-calories (thermochemical) per cubic meter. 5.3.3 The propane gas ow is to be adjusted to provide a heat release rate of 60 kW. 5.4 Collection hood and exhaust duct 5.4.1 The face dimensions of the hood are to be at least 8 by 8 feet (2.4 by 2.4

42、 m) and the depth is to be at least 3.5 feet (1.07 m). The distance between the lower edge of the hood and the oor is to measure 9 12 feet (2.7 3.6 m). The system is shown in Figure 5.2. This is generated text for gtxt. Figure 5.1 Propane sand burner ignition source MAY 10, 2000 UL 2360 9UL COPYRIGH

43、TED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL Figure 5.2 Collection hood and exhaust duct system MAY 10, 2000 UL 2360 10UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL 5.4.2 The exhaust syste

44、m is to have sufficient draft to collect all products of combustion developed by the burning sample. The exhaust ow is to be variable from 1000 7500 cubic feet per minute (0.47 3.5 m 3 /s). 5.5 Photographic and video equipment 5.5.1 A still camera, camera video equipment, or both are to be used to r

45、ecord the test specimen performance throughout each test. 5.6 Samples 5.6.1 The test samples shall have a thickness representative of the nal product, up to 2 inches (50 mm thick). 5.6.2 The test samples shall be composed of one or more continuous 8-foot (2.4-m) lengths so that the backer board is c

46、ompletely covered. 5.6.3 Prior to the test, the three test specimens are to be conditioned at 74 6F (23 3C) and 50 5 percent RH for a minimum of 24 hours. 5.6.4 The test samples are to be mechanically fastened to inorganic noncombustible backer boards c measuring 2 by 8 feet (620 by 2438 mm), which

47、are mechanically fastened to the test frame with Type 1/4 by 20 bolts, and washers spaced 16 inches (0.41 m) on centers along the perimeter of the test specimen as indicated in Figures 5.3 and 5.4. c 1/4 inch thick Dens-Deck , manufactured by Georgia-Pacica has been determined suitable for this purp

48、ose. This is generated text for gtxt. MAY 10, 2000 UL 2360 11UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL This is generated text for gtxt. Figure 5.3 Test specimen setup MAY 10, 2000 UL 2360 12UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FU

49、RTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL Figure 5.4 Parallel panel test setup MAY 10, 2000 UL 2360 13UL COPYRIGHTED MATERIAL NOT AUTHORIZED FOR FURTHER REPRODUCTION OR DISTRIBUTION WITHOUT PERMISSION FROM UL 5.7 Test conguration 5.7.1 The tests are to be conducted in a draft-protected room which has provision for a free inow of air during the test, to maintain the room at atmospheric pressure during the entire test run. During the test, all