BS PD ISO TR 18394-2016 Surface chemical analysis Auger electron spectroscopy Derivation of chemical information《表面化学分析 俄歇电子光谱法 化学信息的推导》.pdf
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1、PD ISO/TR 18394:2016 Surface chemical analysis Auger electron spectroscopy Derivation of chemical information BSI Standards Publication WB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06PD ISO/TR 18394:2016 PUBLISHED DOCUMENT National foreword This Published Document is the UK implementation o
2、f ISO/TR 18394:2016. It supersedes PD ISO/TR 18394:2006 which is withdrawn. The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis. A list of organizations represented on this committee can be obtained on request to its secretary. This publicat
3、ion does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The British Standards Institution 2016. Published by BSI Standards Limited 2016 ISBN 978 0 580 85351 7 ICS 71.040.40 Compliance with a British Standard cannot confer immunit
4、y from legal obligations. This Published Document was published under the authority of the Standards Policy and Strategy Committee on 31 May 2016. Amendments issued since publication Date Text affectedPD ISO/TR 18394:2016 ISO 2016 Surface chemical analysis Auger electron spectroscopy Derivation of c
5、hemical information Analyse chimique des surfaces Spectroscopie des lectrons Auger Dduction de linformation chimique TECHNICAL REPORT ISO/TR 18394 Reference number ISO/TR 18394:2016(E) Second edition 2016-05-01PD ISO/TR 18394:2016ISO/TR 18394:2016(E)ii ISO 2016 All rights reserved COPYRIGHT PROTECTE
6、D DOCUMENT ISO 2016, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior w
7、ritten permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 CP 401 CH-1214 Vernier, Geneva, Switzerland Tel. +41 22 749 01 11 Fax +41 22 749 09 47 copyrightiso.org www.iso.orgPD ISO/
8、TR 18394:2016ISO/TR 18394:2016(E)Foreword iv Introduction v 1 Scope . 1 2 Normative references 1 3 T erms and definitions . 1 4 Abbreviated terms 1 5 Types of chemical and solid-state effects in Auger-electron spectra .1 6 Chemical effects arising from core-level Auger-electron transitions 3 6.1 Gen
9、eral . 3 6.2 Chemical shifts of Auger-electron energies . 3 6.3 Chemical shifts of Auger parameters . 4 6.4 Chemical-state plots . 6 6.5 Databases of chemical shifts of Auger-electron energies and Auger parameters . 7 6.6 Chemical effects on Auger-electron satellite structures . 7 6.7 Chemical effec
10、ts on the relative intensities and line shapes of CCC Auger-electron lines . 8 6.8 Chemical effects on the inelastic region of CCC Auger-electron spectra . 9 7 Chemical effects on Auger-electron transitions involving valence electrons 10 7.1 General 10 7.2 Chemical-state-dependent line shapes of CCV
11、 and CVV Auger-electron spectra .10 7.3 Information on local electronic structure from analysis of CCV and CVV Auger- electron line shapes .15 7.4 Novel techniques for obtaining information on chemical bonding from Auger processes 16 Bibliography .21 ISO 2016 All rights reserved iii Contents PagePD
12、ISO/TR 18394:2016ISO/TR 18394:2016(E) Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body
13、 interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotec
14、hnical Commission (IEC) on all matters of electrotechnical standardization. The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO
15、 documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives). Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held res
16、ponsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents). Any trade name used in this document is information giv
17、en for the convenience of users and does not constitute an endorsement. For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT), see the follow
18、ing URL: Foreword Supplementary information. The committee responsible for this document is ISO/TC 201, Surface chemical analysis, Subcommittee SC 7, Electron spectroscopies. This second edition cancels and replaces the first edition (ISO/TR 18394:2006), which has been technically revised.iv ISO 201
19、6 All rights reservedPD ISO/TR 18394:2016ISO/TR 18394:2016(E) Introduction This Technical Report provides guidelines for the identification of chemical effects on X-ray or electron- excited Auger-electron spectra and for using these effects in chemical characterization. Auger-electron spectra contai
20、n information on surface/interface elemental composition as well as on the environment local to the atom with the initial core hole 12345 . Changes in Auger-electron spectra due to alterations of the atomic environment are called chemical (or solid-state) effects. Recognition of chemical effects is
21、very important in proper quantitative applications of Auger-electron spectroscopy and can be very helpful in identification of surface chemical species and of the chemical state of constituent atoms in surface or interface layers. ISO 2016 All rights reserved vPD ISO/TR 18394:2016PD ISO/TR 18394:201
22、6Surface chemical analysis Auger electron spectroscopy Derivation of chemical information 1 Scope This Technical Report provides guidelines for identifying chemical effects in X-ray or electron-excited Auger-electron spectra and for using these effects in chemical characterization. 2 Normative refer
23、ences The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. I
24、SO 18115 (all parts), Surface chemical analysis Vocabulary 3 T erms a nd definiti ons For the purposes of this document, the terms and definitions given in ISO 18115 (all parts) apply. 4 Abbreviated terms CCC core-core-core (Auger-electron transition) CCV core-core-valence (Auger-electron transition
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