JY T 0583-2020 聚焦离子束系统分析方法通则.pdf

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1、书书书 犐犆犛 犢 G21G22G23G24G25G26G27G28G29G2AG2BG2CG2D 犑犢 犜 G2EG2FG30G31G32G33G34G35G36G37G38G39G3A 犌犲狀犲狉犪犾犪狀犪犾 狔 狋犻犮犪犾狉狌犾犲狊犳狅狉狋犺犲犳狅犮狌狊犲犱犻狅狀犫犲犪犿狊 狔 狊狋犲犿 G3BG3C G3DG3E G21G22G23G24G25G26G27G28G29G3F G3B G3C 犑犢 犜 G40 G41 G21G22 G23G24 G25G26G27G28G29 G2AG2BG2CG2DG2EG2F G2AG2BG30G31G32G33 G34G35 G36G37 G2AG

2、2BG38G39 G3AG3BG3CG3D G3EG3FG40G41G42G43 G44G45G46G47 犑犢 犜 G42 G43 G48G49G4AG4BG4C G4DG4EG4FG50G51G52G53。 G48G49G4AG54G55G56G57G58G59G27G5AG5BG5CG5DG5EG4E。 G48G49G4AG54G3FG5AG5BG5CG5FG60G49G4AG61G62G25G63G64G65G61G66G2AG62G25G63G64G65（ ）G67G68。 G48G49G4AG52G53G69G6A：G6BG6CG6DG62G6EG66、G5AG6FG70G71G6

3、DG66G55G72、G73G74G75G76G77G6EG66、G78G6CG6EG66、G79G3EG7AG7BG6EG66、G7C G7DG6EG66。 G48G49G4AG7EG32G52G53G57：G7FG80、G81G82G83、G84G6EG85、G86G21G87、G88G89G89、G8AG8BG8C。 犑犢 犜 G2EG2FG30G31G32G33G34G35G36G37G38G39G3A G44G45 G48G49G4AG50G28G8DG8EG8FG90G91G92G93G94G4FG2AG2BG2CG2DG2EG2F、G2AG2BG30G31G32G33、G34G3

4、5、G2AG2BG36G37、G2AG2BG95G96、G3AG3BG3CG3D G27G3EG3FG40G41G42G43。 G48G49G4AG97G98G99G9AG9BG9CG8EG8FG90G91G92G93G94。 G46G47G26G48G49 G9DG9EG25G26G27G28G29G97G98G99G48G46G9F。 G2EG2FG30G31G32G33G34 犳狅犮狌狊犲犱犻狅狀犫犲犪犿狊狔狊狋犲犿 GA0G98G8EG8FG4FG90G91G92GA1G36G37GA2GA3G87GA4GA5GA6，GA7G54GA8GA9GAAGABGACG90G91G92G4FG

5、ADGAEGAFGB0G76GB1GB2、G95GB3、GB4GB5GB6GB7 G27GB8G30GB9GBA，GBBGBCGBDGA1GBEGBFG4FGC0GC1、GC2GC3、GC4GC5GC6GC7G27G40GC8G4FG2AG2BGB0G76G93G94，GC9GCA 。 G30G31G32G4AG4BG4CG4D 犻狅狀犫犲犪犿犻狀犱狌犮犲犱犱犲狆狅狊犻狋犻狅狀 GA0G98G8EG8FGCBGCCG4FG90G91G92GA5GA6G36G37GA2GA3，GC4GC5GC6GC7GCDG21GCEGCFGD0GD1G36G37GA2GA3G2AGD2GC6GC7GD3GC0

6、GD4GCCG3AGD5。 G30G31G32G4EG4F 犻狅狀犫犲犪犿犿犻犾犾犻狀犵 GA0G98GD6GD7G90G91G92GA5GA6G36G37GA2GA3，GD8G36G37G4FG2EG91GD9GDAG4EGA2GA3，GD3GC0GD4GCCG3AGD5。 G50G51G52G53G4EG4F 犵犪狊犪狊狊犻狊狋犲犱犲狋犮犺犻狀犵 GD1G90G91G92GDBG98G9D，G36G37GDCG40GC8GCFGD0G2AG91GDDGDEG61G66GDFGE0，GDEGC0GE1GE2GDDGCDGE3，GBCGBDGE4GE5GC2GC3GE6G3B。 G30G31G

7、32G54G55 犻狅狀犫犲犪犿犻犿狆犾犪狀狋犪狋犻狅狀 GD6GD7G90G91G92GA5GA6G36G37GA2GA3GB6，GD6GD7G90G91GDCG36G37G2EG91GDDGDEGE7GE8，GE9GEAGEBGECGD7GEDGEEGEFGF0GD1G36G37GA2GF1。 G50G51G54G55G33G34 犵犪狊犻狀犼犲犮狋犻狅狀狊狔狊狋犲犿 G98G99GF2G36G37GA2GA3G40GC8GF3GF4GCFGD0GF5GF6GF7GF8GC0GCDGE3GC6GC7GDCGE4GE5GC2GC3GF9GD7G4FG93G94，GC9GCA 。 G56G57

8、 犱狅狊犲 G69G6AGA3GC7GFAG4FGC8GDAGFBGFCGED，G69G6A：G70GFDGFEG71 （ ）。 G25G2EG2FG58G30 犮狅犻狀犮犻犱犲犱犻狊狋犪狀犮犲 G8EG8FG90G91GFBG91GFFG92G93G94G55GFBG91G92G27G90G91G92G4FG7AG21G22GDCGFBG91G92G93G94GCDG23G9DGA2GA3G4FGB3G90。 G35G36G37G38G59G5A G5BG5CG5DG5EG5FG59G5A G5BG5CG59G5A G8EG8FG4FG90G91G92G4BG4CG24G28GB0G76G2

9、5GD3GADGAEG36G37G4FGA2GA3，GA7GD9GDAG4EG36G37GA2GA3G4FG2EG91，G26GEEGD3GC0G27G28G3AGD5；GAF 犑犢 犜 G29GB6GD1G36G37GA2GA3G2AG5DG2BGC8GF6GF7GCFGD0，GBCGBDG36G37GA2GA3G2AG5DG4FGCDGE3GC6GC7GAFG61G66GDFGE0GE4GE5GC2GC3。 G5EG5FG59G5A G2CG2DG8EG8FG90G91G92GA5GA6G36G37G2EGDEG4FG2FGB9GFBG91GAFG2FGB9G90G91，G30G31G8E

10、G8FG90G91G92G32GFEG25GC1。 G60G61G62G63 G33G34GC0GC1、GC2GC3、GC4GC5GC6GC7G27G40GC8G35G2AG2BGB0G76GF9GD7。 G35G36G64G65G66G67 G64G65G68G69 G36G37G38G28GD1 ，G39G98GB6G3AG3BG3CG36； G6AG6BG6CG69G66G67 G3DG6EG99 ； G6DG6EG6DG6F G69G3EGFBG3FG40 ， ，G41G3EGFBG3FG51G40 ， ； G70G71G66G67 G33G34G42G43G44G45，G46G44G

11、FBG47G3DG48G49 ； G71G60G72G73G66G67 G4AG4BG4AG4CG3DG48G49 （G4AG4BG4DG4EG40 GB6）； G74G45G75G76G77G78G66G67 G4FG50GE5G37G3DG48G49 ；G51G52 G53G9F，G4FG50GE5G37G3DG48G49 。 G79G7A G79G7AG7BG7C G8EG8FG90G91G92G93G94G2AG40G69G92G8EG8FG90G91G92G93G94（G54G55G34G90G91G92G23G56）、GFFG92G8EG8FG90G91G92G93G94（G29G

12、B6G55G34GFB G91G92G23G56G27G90G91G92G23G56）G27G57G92G8EG8FG90G91G92G93G94（G29GB6G55G34GFBG91G92G23G56G27G57G58G90G91G92G23G56）G35。 G79G7AG7DG5E G30G31G7EG7FG33G34 G90G91G3FGDDGDAG4FG90G91G92G59G49G8EG5AG23、G5BG92G5AG5C、G5DGC1G5EG35G27GCDG23G5F，GD1G36G37GA2GA3GD3GC0G8EG8FG4FG90G91G92，GA7 G54G92G60G61

13、G35GABGACG90G91G92GD1G36G37GA2GA3GADGAEG4FG93G94。 G80G81G3BG82G33G34 G62G63G2EGDE G93G94GD7G64G65G4FG25GD3GBAG66，GA7GABGACG90G91G92G4BG67G28G4FGB1GB2、GB4GB5GB6GB7G68GB8G30GB9GBAGBCGBDGB0G76 G4FG93G94。 犑犢 犜 G83G84G85G33G34 G54G36G37G69、G6AG38G35G27GCFGD0G40GC8G93G94G35G6BGC0，GA8GA9GAAG7BG49G6CG49、GAB

14、GACG6D、G6EG6FG27G70G5FG4FG28G6AG93G94GF5GABGAC G36G37G69（ G71、 G71、 G71）、G72G61（ G71）G27G73G61（ G71）G35G2CGF2G4FG74G4B。 G86G87G88G89G8AG5AG8BG8C G2FGB9GFBG91GAFG2FGB9G90G91G75G6AG38G35G46G2C，GA7G7BG49G76GBAG61G77G29G95G78GACG32G79G35G4FG7AG37GD3GC0G25GC1。 G8DG8EG33G34 G54GAAG7BG7C、G2AG91G7CG68G90G91

15、G7CG35G5DG9FG6BGC0，G39G90G91G5AG66G93G94G7DG7EG7FG99 ，G36G37G80G7DG7EG7FG99 。 G8FG48G90G91G2D G34G35GD1G81GC8G39G98G21，G82G83G98G99G38GEDG30G31G84G9FG35GF6GF7G38GEDG4FG34G35，GE0GA0G98G85G28GAFG86G4AG35G2CG87GBBG88G89G8A G8BG8CG8DG8EG85G38G2AG2BG4FG32G33。G34G35G68GF6GF7G38GEDG4FG34G35GD1G81GC8G39G98G

16、5F，GE0G34GA8G8FG44GBCG90G85G28GAFG86G4A，GBBG88G89 G8AG8BG8CG8DG8EG85G38G2AG2BG4FG32G33。G85G28GAFG86G4AGE0G4BG34G91G85G28G50G92、G86G4AG50G23GAFG86G4AG2CG2DG87GA4。 G83G84 G83G84G92G93G94 G36G37GE0G40G93G94G95GCBGD4GD0、G96G97GAFGD4GD0G98G99。 G83G84G92G95G48G96 G36G37GE0G34G9AG28G4FG61G66、GCDG2FG9BG28G9

17、C，GD1G7DG7EG55G3DGE1GE2GDD，G3DGE0G9DG9EG9FG80，GA0GA1GDAG9CG27GA2GC3G9C。 G83G84G92G97G98G99G9A GE0G8DG8EG36G37G69GA3GA4G7EGB7G68G36G37G7AG77G80G4FG7EGB7GA5GA6G32G33，GA7GD7G88G3AGD1G36G37G9FG80GA7G74G4BGB6G3DGD7GE7GE8G8AGA8 G5DG9F。 G83G84G92G4BG6DG4BG9BG96 G36G37GE0G33G34GA9GAAG4FGC5GFBG9C、GC5GABG9C，G

18、ACGC5GFBG9CG36G37GE0GD1GA2GA3GADGAEGC5GFBG99GA7G46G44，GAFGD1G85G38G55GA0GAFG8AGA8 GECGFCGFBGB0G90。 G82G9CG83G84 GDEGCDG36G37GE0G59GD4G28、GB1GB2、GB3GB4G22G93G94GAFGB5GB6G93G94，GB7G5FGD1GA2GA3GADGAEGC5GFBG99；GAFG39G98GB8G98G4FGB9G36GB5GB6 G36G37G69。 G35G36G9DG9E G42G9FG2DGA0G5CGA1 GA2GA3 G4BG4CG34G35G

19、BAGDBGBBGBCGBDG50G28G4FG82GAAG92GBEG87GA4。 犑犢 犜 GA4GA0G93G94G92G8FGA5 G85GBFG80GA7G30G31G27G34G35GCBGCCGA3GC0GFAG9AGF4G32G79GC1，G51G38G60G7DG7EG37、GC2GCFG4FGCFGC3G27GCFGC4GED、G80GA7G36G37G27GC5 G37、GB8G30GB2G4FGB2GC3G27GC4GEDG35。 GA6GA7GA8GA9G92G8FGA5 GA1G90G91G92G23G56GB0GFAGD6GC3，G85GBFG5AGC6GC7G7

20、1GC8GC9。G78GCAG8EG8FG27GC1G5EGB6，G25GCBGE0GA0GCCGCD，G8CG51GE0G68GB6G78GCAG5A GC6GC7G71。G90G91G92G5AG5CGE1G75GC2GC3GCEGCF，GE0G40G41G68GB6GD0G77。 G50G51G6EG92G8FGA5 G82GD1GCFGD0G40GC8G93G94G55G9AGCFGD0G3FG4FG36G37GABGAC，GBBG8DG8EGCFGD0G3FG4FG36G37GDCGD2G37G32G33。 GAAGABGACG92G8FGA5 GA1G36G37G69、G90G91

21、G92G5AG5CG27GCFGD0G40GC8G93G94G87GA4GD3GD4G61GBAGDB。 GADGAEGAFGB0GB1G92G8FGA5 GD1GACG60GD5GDAGFBG23G36G37G21，GA1G70G71GBAGABGD6GD1G59G8EG8FG22G53GD7G87GA4G6AGD8GDCGC6GD9GDAGDB。 G3DG3EGB2GB3 G83G84G92GB4GB5 GD1GB8G98G36G37G69GFAG5FGA4G36G37G5FGDCG7DG7E，GDDG34G35GDEGDFG50G28G7DG7EG37G5F，GD1G4BG90G91G9

22、2G87GA4G36G37G4FGE0GE1G27GACG60。 GACG60GD5GDAGFBG23G36G37GB6，GE0G29GB6G5FGA4GB8G98GA4GE2GDCG36G37。 G5CGA1GB6GB7G92GA4G48 GE3G36G37G4FG67G9C、G2AG2BG32G33G68G34G35G9CGD7G44GBA，G88G28GC7G97G4FG76GDBG84G9F。G7BGE4G36G37GE5G99G59G8EG8FG6AGD8；G90G91G92 G92GC4G6EGE6G40 ；GB0GE7GFBGC3G40 。 GB8GADG5BG5C G2EG2F

23、 G36G37G87GC8G36G37G80，GE8G7DG7EG8DG8EG84G9FG5F，GE9GB9GB0GFAGFBG91GEAGDCG90G91GEAGFBGC3，GEBGECGC7G97G4FGA1G6EGEDGBAGDCG76GDBGB3 G90，GD8G36G37GE8G2AG2BGEEGEFG78GF0G59G8EG8FG6AGD8，G87GA4G8EG8F、G78GF1GF2G37G27G7AG37GBBG68G5DGC1G5EG35，GF3GF0G25GC1GF4GF5GF6G40GF7。 G8EG8FG3AG3BGBBG4CGF8GD3G87GF9GFA。 GB9G3

24、2G6BG21 G7BG49G78GCAG36G37G69 G71GD6G37GAFGFEG78GFBG91G92G2CGF2，G39G90G91G92G25GC1GDCGFBG91G92G25GC1G4FG55G72GFBG88G4FGA1G99G29G9AG49 GF9G22。 GBAGBBG91GBC GFCGA1G25GD3GC2GC3，G78GCAG36G37G69GF0GFFG92G59G8EG8FG6AGD8。GFDG32GB6GFEG98G90G91G92GC2GC3G49GF9，GFFG99G86G4AG6AGD8。 G6DG31G32G4CG4D GFCGA1G8EG8FG

25、90G91GFBG91GFFG92G93G94，G40G8DG21G22G90G91G92GC6GC7GA1G36G37GA2GA3G4FGCEGCF，GFEGBBGD1G90G91G92GC6GC7G21G87GA4GFB 犑犢 犜 G91G92GC6GC7，GEBGECG27G28G4FG34GAAGCFGD0G3FGA7GD8GCFGD0G40GC8G93G94G23G4BGCDG4BGF0G36G37GA2GA3，GD1GFBG91G92GADGAEG76G87G55GEBGECG24 G49GEEGEFG87GA4GC6GC7。GFBG91G92GC6GC7G4FGD3G25GBBG

26、4CGF8GD3G87GF9GFA。 G30G31G32G4CG4D GEBGECG27G28G4FGCFGD0G3FGA7GD8GCFGD0G40GC8G93G94G23G4BGCDG4BGF0G36G37GA2GA3，GD1G8EG8FG90G91G92G76G87G55GEBGECG24G49GEEGEFG87GA4 GC6GC7，GC6GC7GF8GC0G5FG91G26GCFGD0G40GC8G93G94GA7GD8G8AG27G28G2EG6A。G90G91G92GC6GC7G4FGD3G25GBBG4CGF8GD3G87GF9GFA。 G4EG4F GC2GC3G25GD3G3A

27、GD5GB6GFEGBBG29GC8G92GBEGAFG25GD3G46G9F，GA7GEBG98GC7G97G92GC4G6EGE6G4FG90G91G92GD1G24G49GEEGEFGA7G87GA4GC2GC3。 GC2GC3G3AG3BGBBG4CGF8GD3G87GF9GFA。 GBDGBE G39G98G70G71GBAGABGD6G5EGAFG2AGB0G76G36G37，G39G8AGDCG2EG36G37G2AG90。 GBFGC0 G7BG49GDFG2BG73G61G36G37G69，GEBG98GC7G97G4FG90G91G92GC4GD8G36G37GFFGA3G

28、2CG98GF0G24G49G2DG37。G2CG98G3AG3BGBBG4CGF8GD3G87 GF9GFA。 GC1GC2 GA0G98GB9GFBGC3（GE0G3DG6EG99 ），GE6G92GC4（GE0G3DG6EG99 ），GADGAEG36G37GA2GA3G4FGCEGCFGF1。GF5G2EG3AG3BGBBG4CGF8 GD3G87GF9GFA。 GBEG83 G91G26GFBG91GEAGDCG90G91GEAGFBGC3，GD2G2FG7DG7E，GAFG4EG36G37G69，GD8G36G37GA1GD8G99G36G37G30（G31G32GEBGAFGD6

29、G33G99G30GAFG7DG7E G34G53G99G30）G55，GBBG35GF7G36G37G36G37GA2GA3GFEGE0G3AGD5。G36G37G4FG32GFEGD3G25GBBG4CGF8GD3G87GF9GFA。 GC3GA3 G4BG4CG34G35GBAGDBGBBGBCGBDG50G28G4FG91GAAG92GBEG87GA4G91GAAGF0GE8GAAGCBGCC。 GC4GC5GC6GC7 G60G61G86GC8 G3AG3BG3CG3DG55GFEG82G83：G63G38G69G6AG39G3A、G36G37G39G3A、G34G35G38G60G

30、39G3A、G30G31G84G9F、GACG36G2CG2D、G85G38G2CG2D（GE9G66G49 G4A）、G85G38G3AG3B、G85G38G57、G86G3BG57、G3CG4AG57、G85G38G3DG3EG35。GFDG32G27GFEGA4GB6GFEG4DG4EG28GEDG2AG2BG2CG2DG27G3AG3BG4FG3FG40 G39G3A。 G35G36GC4GC5 G2AG2BG3AG3BG55G36G37GD3GCBGDCG2DG37G8DG8EGD5GDAGFBG23G35G85G38G38G60G4FG32G33。G2AG2BG3AG3BGBBG3

31、6G37G27G4CGF8GD3G87G5EG41，G29 GB6G5EG41G85G38GFBGC3、G85G38G92GC4、G76GDBGB3G90、G49GA5G27GA1G6EGEDGBAG35G44GBAG39G3A。 GB4GC9G54GCAGCBGCC G39G98GD6GC3G42G43GE0G44G45G3EGE0G3EG3FG50G23。 犑犢 犜 G7DG7EG7CG26G36G37G80GDCG4EG4FGCFGD0GE0G46GDFG80G47。 G40G35GF7G48GFB、G49GE0GFBG27G4AGFB，G34G35G4FG46G44GFBG47GE0GE6G99 ，GA7G46G4BGA9GAA。 G38GEDG21GE0GA1G36G37G4FG9CGE3G34G27G8DGD2，G21G22G4CG9C、GA2GC3G9CG36G37G27GE2GDDG9CG36G37GF3G46GFAGAAG38G39，GA1G34G35G4DGC0 GCEG4E。 犑犢 犜 GCD GCE GCF GD0 GFEG71G4FG50G37G4FGADGAEGFBG23G38GEDG2CG2DG7BG51 G70G71G4FG50G37G4FGADGAEGFBG23G38GEDG2CG2DG7BG51