KS C IEC 60204-33-2010 Safety guideline for semiconductor fabrication equipment《机械安全性 机器电动设备 第33部分 半导体制造设备要求》.pdf

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1、 KSKSKSKS KSKSKSK KSKSKS KSKSK KSKS KSK KS KS C IEC 6020433 KS C IEC 6020433 :2010 2010 9 10 http:/www.kats.go.krKS C IEC 6020433:2010 : ( ) ( ) ( ) ： () ( ) () TUV : (http:/www.standard.go.kr) ： ：2010 9 10 2010-0366 ： ： ( 02-509-7290) (http:/www.kats.go.kr). 10 5 , . KS C IEC 6020433:2010 i .1 1 1

2、2 2 3 .3 4 .13 5 .15 6 19 7 .24 8 .30 9 , (EMO), .35 10 41 11 ：, .46 12 50 13 .53 14 .60 15 61 16 , .62 17 .63 18 66 19 75 20 .77 21 .78 22 80 23 81 24 81 25 .82 26 84 A() TN ( ) .85 B() TT .89 C() , 91 D() 97 E() 99 115 KS C IEC 6020433:2010 117 KS C IEC 6020433:2010 Safety guideline for semiconduc

3、tor fabrication equipment . 2009 12 1 IEC 6020433, Safety of machineryElectrical equipment of machinesPart 33：Requirements for semiconductor fabrication equipment , (, ) . 1 (), , . 1 , (： ). 2 , (person) () . (5.1 ). 3 IEC 60364 . 200 Hz 1 000 V 1 500 V . . 4 . , . (： , ) . . , KS C IEC 6020433:201

4、0 2 (KS C IEC 6020432 ) . 2 . . ( ) . KS B ISO 121002, KS B ISO 138491, 1： KS B ISO 13851, KS C 6702, KS C IEC 6003411, 11： KS C IEC 60073, , KS C IEC 603644-41, 4-41： KS C IEC 603644-43, 4-43： KS C IEC 60446, , KS C IEC 60529, (IP ) KS C IEC 609501, 1： KS C IEC 610006-2, (EMC)6-2： KS C IEC 610006-4

5、, (EMC)6-4： KS C IEC 610101, , 1： KS C IEC 61032, KS C IEC 613101, , 1：, KS C IEC 613102, , 2： KS C IEC 613103, , 3： KS C IEC 615581, , 1： KS C IEC 615582-6, , 2： KS C IEC 618005-1, 5-1：, KS M 1070, (MSDS)1： KS M IEC 6069511-10, 11-10： 50 W KS X IEC 60445, , ISO 13849(all parts), Safety of machinery

6、Safety-related parts of control systems IEC 60038, IEC standard voltages IEC 603646, Low-voltage electrical installationsPart 6：Verification IEC 60417, Graphical symbols for use on equipment IEC 60447, Basic and safety principles for man-machine interface, marking and identificationActuating princip

7、les IEC 60617, Graphical symbols for diagrams KS C IEC 6020433:2010 3 IEC 61310(all parts), Safety of machineryIndication, marking and actuation IEC 61508(all parts), Functional safety of electrical/electronic/programmable electronic safety related systems IEC 615573, Electrical safety in low voltag

8、e distribution systems up to 1 000 V a.c. and 1 500 V d.c. Equipment for testing, measuring or monitoring of protective measuresPart 3：Loop impedance IEC 62061, Safety of machineryFunctional safety of safety-related electrical, electronic and programmable electronic control systems SEMI S2：Environme

9、ntal, health, and safety guideline for semiconductor manufacturing equipment 3 . 3.1 (actuator) IEV 4411522 1 (handle), (knob), (push button), (roller), (plunger) . 2 . 3 3.40 3.2 (ambient temperature) IEV 8260104 3.3 (appliance coupler) (appliance) , , 1 (shroud) (base) . 2 . 3.4 (automatic disconn

10、ection) line 3.5 (barrier) IEV 8260313 3.6 (basic insulation) IEV 1950606 KS C IEC 6020433:2010 4 3.7 (cable tray) IEV 8260608. 3.8 (cable trunking system) , , ( ) IEV 8260604 3.9 (concurrent) ( .) 2 3.10 (conduit) / / / IEV 8260603. 3.11 (control device) ： , , , (contactor), 3.12 (controlgear) , ,

11、, IEV 4411103 3.13 (controlled stop) (0) , 3.14 II (class II equipment) KS C IEC 61140, 7.3 KS C IEC 6020433:2010 5 3.15 (danger zone) , , . KS C IEC 61140, 3.35, 3.16 (direct contact) IEV 1950603 , , , . 3.17 ( ) (opening) direct opening action (of a contact element) ( , ) KS C IEC 609475-1, K.2.2

12、3.18 (double insulation) 3.19 (duct) , , (3.9 ), (3.7 ), . 3.20 (electrical equipment) , , , , (appliance), , 3.27 3.21 (emergency stop device) KS B ISO 13850, 3.2 3.22 (emergency off) EMO , . KS C IEC 6020433:2010 6 3.23 (enclosed electrical operating area) 3.24 (enclosure) . IEV 8260312 IEV (KS C

13、IEC 60529, 3.1 ). a) . b) , (probe) , , . 3.25 (equipotential bonding) IEV 1950110 3.26 (exposed conductive part) . IEV 8260302. 3.27 (extraneous conductive part) IEV 8260303 3.28 (fabrication equipment) (), , , , , (, .) 3.20 3.29 (failure) 1 . 2 “” , “ ” . KS C IEC 6020433:2010 7 3 IEV 1910401. 4

14、. 3.30 (fault) , 1 , . 2 “ ” IEV 1910501 . “dfaut” “Fehler” “panne” “Fehlzustand” . 3.31 (functional bonding) 3.32 (harm) KS B ISO 121001 3.5, 3.33 (hazard) 1 ( , , , , ). 2 . , , (arc) , , , ( , , / , , / ). KS B ISO 121001, 3.6, 3.34 (hazardous electrical power) 240 VA 3.35 (hazardous-live-part) I

15、EV 1950605 30 V r.m.s., 42.4 V 60 V D.C. . 3.36 (hazardous situation) . KS C IEC 6020433:2010 8 . KS B ISO 121001, 3.9 3.37 (hazardous voltage) 30 V r.m.s., 42.4 V , 60 V D.C. 3.38 (indirect contact) IEV 8260306 3.39 (inductive power supply system) , 1 2 . 3.40 (instructed person) IEV 8260902, 3.41

16、(interlock) 3.42 (live part) ( PEN ) IEV 8260301. 3.43 (machine actuator) 3.1 3.44 () machinery(machine) , , , , KS C IEC 6020433:2010 9 , . KS B ISO 121001, 3.1, “” , . 3.45 (maintenance) 3.60 3.46 (marking) 3.47 (neutral conductor) N 3 , , IEV 8260103, A.C. . 3.48 (obstacle) IEV 8260314. 3.49 (ope

17、rator) 1 . 2 . 3.50 (overcurrent) . IEV 8260506. , . 5.3.2 d) , . 3.51 overload (of a circuit) / . KS C IEC 6020433:2010 10 3.52 / (plug/socket combination) / . KS C IEC 61984 KS C IEC 603091 , , KS C IEC 608841 KS C IEC 603201 3.53 (protective bonding) . 3.54 (protective bonding circuit) 3.55 (prot

18、ective earth conductor：PE) 1) 2) 3) IEV 8260405, “ ” . 3.56 (protective interlock circuit) . , . 3.57 (readily accessible) , , . 3.58 (reference designation) , , 3.59 (reinforced insulation) KS C IEC 6020433:2010 11 . IEV 1950609 3.60 (repair) (3.45 ) 3.61 (residual current device) RCD , , (residual current) 1 , . 2 GFCI(ground fault circuit interrupter) RCD . IEV 4420502, 3.62 (risk) KS B ISO 121001, 3.11, 3.63 (safeguard) 3.64 (safeguarding) KS B ISO 121001, 3.20 . 3.65 (safety circuit) (EMO) . 3.66 (servcing level) (level) 3.67 (short-circuit current) IEV 4411107