KS B 6387-2008 Reliability test method for the vacuum valves－Part 1：Angle valves《真空阀可靠的测试方法 第1部分 角阀》.pdf

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1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS B 6387 1： KS B 6387:2008 2008 4 1 http:/www.kats.go.krKS B 6387:2008 ： ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ：2008 4 1 20080146 ： ： ( 025097290) (http:/www.kats.go.kr). 10 5 , . KS B 6387:2008 1： Reliability test method for the vacuum valves Part 1：

2、Angle valves 1 1.1 . 1.2 ( .) . . 2 . . KS A 0006, KS A 3000, KS A 3004, KS A 5608 1, 1： KS A 5608 2, 2： KS A 5608 3, 3： KS B 00001), 2： KS B 00001), 3： KS M 6518, KS M 6784, RS D 0027, 3 KS A 3004, KS A 5608 1, KS A 5608 2, KS A 5608 3 KS A 3000 . 1) . KS B 6387:2008 2 3.1 . 3.2 3.3 . 3.4 O 3.5 (We

3、ibull) 3.6 (mean time to failure) 3.7 B10 10 % 3.8 (confidence level) (： B10) , 3.9 (crack), (crevice), (hole) 3.10 (leak rate) . . 3.11 , KS B 6387:2008 3 3.12 3.13 . , O 3.14 (leak detection) . 3.15 (mass spectrometer) . (partial pressure) (： ) 4 4.1 . , . . , , (poppet), (bellows), O . 4.2 , , .

4、5 , , 10 . 6 , . 6.1 1 . O 2 . KS B 6387:2008 4 1 7.2 . 10 7.3 . 10 7.4 2 O IRHD (MPa) (%) 7.5.2 7.5.3 7.5.3 IRHD (%) (%) 7.5.4.1 7.5.4.1 7.5.4.1 (%) 7.5.5 6.2 5 7.6 . 3 . 3 7.6.1 . . 7.6.2 . . 5 6.3 5 4 . B10 (5105 ) RS D 0027 . 1.1 , . KS B 6387:2008 5 4 7.7 (0.50.025) MPa 5 200 000 , 25 %, 50 %,

5、75 %, 100 % . . . 5 100 % . 5 7 7.1 KS A 0006 . 7.2 A . 7.3 B . 7.4 C . 7.5 O 7.5.1 KS M 6518 4. . 7.5.2 IRHD IRHD KS M 6784 7. . 7.5.2.1 KS M 6518 7.2.1 . 7.5.3 KS M 6518 5.( ) . 7.5.4 KS B 6387:2008 6 KS M 6518 8.3( ) . 7.5.4.1 IRHD , IRHD , KS M 6518 8.7 . 7.5.5 O KS M 6518 11. . 7.5.5.1 150 , 20

6、0 24 . 25 % . 7.6 , . 7.6.1 1 . 20 , 20 , 1 300 . . , 20 . 1 150 O . 2 200 O . KS B 6387:2008 7 1 7.6.2 5 1 1 4 . , . 5 (Hz) (min) (mm) (h) 5 100 10 0.4 4 7.7 a) 2 , . b) , , , , . c) . d) . e) ( 5 %) . . f) . . g) 3 1 . (0.50.025) MPa , . ( ) 1 KS B 6387:2008 8 h) 25 %, 50 %, 75 %, 100 % . i) ( 5 %

7、) . , . j) , , , . k) . , e) j) . l) 200 000 . , , . m) . 6 . , . 1 5 9 2 6 10 3 7 11 4 8 2 41 2 3591167810KS B 6387:2008 9 3 6 mm N m 50 5 10 100 10 20 250 20 30 8 . a) ( , ) b) ( , , , ) c) ( , , ) d) e) f) g) h) 2 2 2 2 1KS B 6387:2008 10 A ( ) A.1 A.1.1 . A.1.2 (leak standard system) (standard l

8、eak) . A.2 KS B ISO 3530, ASME E 1603, Standard test methods for leakage measurement using the mass spectrometer leak detector or residual gas analyzer in the hood mode ASTM E 498, Standard test methods for leaks using the mass spectrometer leak detector or residual gas analyzer in the trace probe m

9、ode A.3 a) (standard leak) . (permeation type leak) (capillary type leak) , . b) (virtual leak) . c) (mass spectrometer leak detector) . . d) (trace gas, search gas) . e) (vent) . f) (Helium background signal) g) (repeatability) A.4 A.4.1 KS A 0006 (231) . KS B 6387:2008 11 A.4.2 A.4.2.1 A.1 , . A.1

10、 A.4.2.2 A.2 , . He： (He leak detector)KS B 6387:2008 12 A.2 A.4.3 , . . A.4.4 5 . A.4.5 a) , (231) 24 . b) , . c) 4 . d) . e) . A.4.6 a) . b) 10 (Rsc) . He： (He leak detector) KS B 6387:2008 13 c) . 3 (Rso) Rs(=Rso-Rsc) . d) b) c) (RTc) (RTo) RT(=RTo-RTc) . e) RTc , RTo 1 . f) b) d) 5 . g) . STSTRR

11、LL = (A.1) LT： LS： RT： RS： A.5 A.5.1 . (A.1) . LR RS RT (RT/RS) . A.1 LS(Pa l/s) RS(Pa l/s) RT(Pa l/s) LR(RT/RS) LT(Pa l/s) 1 1.37E 05 1.4E 05 4.2E 05 3.00 4.11E 05 2 1.37E 05 1.5E 05 4.2E 05 2.80 3.84E 05 3 1.37E 05 1.5E 05 4.2E 05 2.80 3.84E 05 4 1.37E 05 1.4E 05 4.0E 05 2.86 3.91E 05 5 1.37E 05 1

12、.4E 05 4.0E 05 2.86 3.91E 05 1.37E 05 1.44E 05 4.12E 05 2.86 3.92E 05 a) u(LR) ：2121018.8)(11)(=niRRRLLnLsi(A.2) 21066.3)()(=nLsLuRR(A.3) b) u(LS) 95 % (k 2) . sl/Pa1085.621037.12)()(76=SSLULu (A.4) KS B 6387:2008 14 c) u(CR) 1.010 6Pa l/s , 1/2 . . sl/Pa1089.232101)(76=RCu (A.5) A.5.2 . A.2 Xi , xi

13、 (Pa l/s) u(xi) (Pa l/s) ci (Pa l/s) iLS1.3710 56.8510 7 2.86 1.9610 64 LR2.86 3.6610 2 1.3710 52.3910 74 CR 2.8910 7 1 2.8910 7 2.0510 6 A.5.3 U (coverage factor) k . U k uC(A.6) 22.0510 6Pa l/s 4.1010 6Pa l/s( 95 % k 2) A.5.4 (LT) 95 % k 2 , LT 3.9210 5Pa l/s, U 4.1010 6Pa l/s . A.6 . a) ( , ) b)

14、( , , , ) c) ( , , ) d) e) f) g) h) i) KS B 6387:2008 15 B ( ) B.1 B.1.1 . B.1.2 . B.2 KS B ISO 3530, ASME E 1603, Standard test methods for leakage measurement using the mass spectrometer leak detector or residual gas analyzer in the hood mode ASTM E 498, Standard test methods for leaks using the m

15、ass spectrometer leak detector or residual gas analyzer in the trace probe mode B.3 B.3.1 KS A 0006 (231) . B.3.2 A A.1 . B.3.3 , . . B.3.4 a) , (231) 24 . b) , . c) 4 . d) . e) . KS B 6387:2008 16 B.3.5 a) . b) 10 (Rsc) . c) . 3 (Rso) Rs( Rso Rsc) . d) (RTc) (RTo) RT( RTo RTc) A.4.6 g) . e) (3 ) d) . f) O . B.4 . a) ( , ) b) ( , , , ) c) ( , , ) d) e) f) g) h) KS B 6387:2008 17 C ( ) C.1 . C.2 AVS, Recommended practices for measuring and reporting of outgassing data C.3 a) (outgassing rate) ( ) , Pa m3 s 1m 2 Pa m3 s 1kg 1 b) (evolved gas quantity) , Pa m3 c) (rough pumping time)