IEST RP-CC034 4-2016 HEPA and ULPA Filter Leak Tests.pdf
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1、Institute of Environmental Sciences and Technology IEST-RP-CC034.4 Contamination Control Division Recommended Practice 034.4 HEPA and ULPA Filter Leak Tests Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510 Phone: (847) 981-0100 Fax: (847) 981-4130 E-mail
2、: informationiest.org Web: www.iest.org 2 IEST 2016 All rights reserved Institute of Environmental Sciences and Technology IEST-RP-CC034.4 IEST-RP-CC034.4 Institute of Environmental Sciences and Technology IEST 2016 All rights reserved 3 This Recommended Practice was prepared by and is under the jur
3、isdiction of Working Group 34 of the IEST Con-tamination Control Division (WG-CC034). The following WG voting members contributed to the development of this edition of this Recommended Practice: R. Vijayakumar, WG-CC034 Chair, AERFIL Taguhi Arakelian, Jet Propulsion Laboratory Eugene Bryan, Milholla
4、nd however, it is the responsibility of the customer and supplier to specify which leak-test method is used and the acceptance criteria for each application. A brief guideline on in-situ leak testing based on the procedures recommended in this RP is provided in section 8. CAUTION: Testing in accorda
5、nce with this RP may involve hazardous materials, operations, and equipment. This RP does not purport to address all of the safety problems associated with its use. It is the responsibility of the user to establish appropriate safety and health practices and to determine the applicability of regulat
6、ory limitations prior to use of this RP. 2 REFERENCES The following documents are incorporated into this RP to the extent specified herein. If no specific edition is cited, the most recent edition should be used. Where specific editions are cited, subsequent revisions of these publications do not au
7、tomatically supersede the cited editions and users should investigate the applicability of revised editions. 2.1 Reference documents IEST-RP-CC001: HEPA and ULPA Filters IEST-RP-CC002: Unidirectional-Flow, Clean-Air Devices IEST-RP-CC006: Testing Cleanrooms 8 IEST 2016 All rights reserved Institute
8、of Environmental Sciences and Technology IEST-RP-CC034.4 IEST-RP-CC007: Testing ULPA Filters IEST-RP-CC013: Calibration Procedures and Guidelines for Select Equipment Used in Testing Cleanrooms and Other Controlled Environments IEST-RP-CC014: Calibration and Characterization of Optical Airborne Part
9、icle Counters IEST-RP-CC021: Testing HEPA and ULPA Filter Media IEST-RP-CC028: Minienvironments IEST-RP-CC036: Testing Fan Filter Units ISO 14644-1 Cleanrooms and associated controlled environmentsPart 1: Classification of air cleanliness by particle concentration ISO 14644-3 Cleanrooms and associat
10、ed controlled environmentsPart 3: Test methods MIL-STD-282: Filter Units, Protective Clothing, Gas-Mask Components, and Related Products: Performance Test Methods 2.2 Sources and addresses Referenced documents may be obtained from the following sources: IEST Institute of Environmental Sciences and T
11、echnology Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510, USA Phone: 847-981-0100 Fax: 847-981-4130 Website: www.iest.org ISO (National Standards) IEST Arlington Place One 2340 S. Arlington Heights Road, Suite 620 Arlington Heights, IL 60005-4510, USA
12、Phone: 847-981-0100 Fax: 847-981-4130 Website: www.iest.org MIL-STD Standardization Document Order Desk 700 Robbins Avenue Building 4, Section D Philadelphia, PA 19111-5098, USA Phone: 215-695-3321 Website: dodssp.daps.dla.mil NSF NSF International 789 N. Dixboro Road P.O. Box 130140 Ann Arbor, MI 4
13、8105, USA Phone: 734-769-8010 Website: www.nsf.org IEST-RP-CC034.4 Institute of Environmental Sciences and Technology IEST 2016 All rights reserved 9 3 TERMS AND DEFINITIONS The following terms have special meaning in the context of this RP. aerosol A gaseous suspension of fine solid or liquid parti
14、cles. aerosol generator A device that can supply an aerosol from an oil or microsphere source, in a concentration range and with a mean size suitable for the measurements described in this RP. aerosol photometer (or photometer) An instrument that measures mass concentrations of aerosol using the for
15、ward light scattering principle for multiple particle scattering. For the applications described in this RP, the instrument should be capable of measuring aerosol concentrations of up to 100 g/L and have a threshold sensitivity capable of measuring 0.0001 g/L. The device should have a detection limi
16、t of at least 0.1 the designated leak. The device should have a volumetric flow rate of 28.3 L/min (1.0 ft3/m). calibrated equipment Test equipment that has been calibrated in accordance with the manufacturers recommendations or accepted indus-try practices. challenge aerosol An aerosol derived from
17、 the selected aerosol source material and used as the leak-test challenge for a filter leak test. Challenge aerosols may be produced by a variety of methods, with the choice determined by the aerosol type and the particle size characteristics. clean-air device, unidirectional flow A clean work stati
18、on or other device (other than a cleanroom or clean zone) that incorporates one or more HEPA or ULPA filters and one or more motor-blowers for the purpose of supplying unidirectional-flow, clean air to a con-trolled work space. NOTE: These devices are often referred to as clean benches. clean zone A
19、 defined space in which the concentration of airborne particles is controlled to specified limits. cleanroom A room in which the air supply, air distribution, filtration of air supply, materials of construction, pressure gradients, and operating procedures are regulated to control airborne particle
20、concentrations to meet established air cleanliness levels, as defined by ISO 14644-1. coincidence loss A particle concentration level, determined by the DPC electronics and optics, that represents the point where the presence of two or more particles simultaneously in the sensing volume of the instr
21、ument causes the instrument to interpret the combined signal erroneously as resulting from one larger particle. count or number mean diameter of aerosol The average particle size of the number distribution of the aerosol. count or number median diameter of aerosol (CMD) The 50th percentile of the nu
22、mber distribution of the aerosol; i.e., 50% of the particles are smaller than the count median diameter and 50% are larger than the count median diameter. designated leak Any penetration that has exceeded the maximum allowable penetration. diluter A device that reduces the particle concentration of
23、the challenge aerosol by the dilution ratio of the device. These devices typically mix a known volume of sample air with a known volume of particle-free or filtered air to achieve the dilution. The ratio of the two volumes is the dilution ratio. discrete-particle counter (DPC) An instrument, such as
24、 an optical particle counter or condensation nucleus counter, capable of resolving and count-ing responses from individual particles. The device should be capable of measuring and sizing the challenge aerosols 10 IEST 2016 All rights reserved Institute of Environmental Sciences and Technology IEST-R
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