EN ISO 14644-10-2013 en Cleanrooms and associated controlled environments - Part 10 Classification of surface cleanliness by chemical concentration《洁净室和相关控制环境 第10部分 通过化学浓缩进行表面洁净度分类.pdf

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1、raising standards worldwideNO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAWBSI Standards PublicationBS EN ISO 14644-10:2013Cleanrooms and associated controlled environmentsPart 10: Classification of surface cleanliness by chemical concentrationBS EN ISO 14644-10:2013 BRITISH ST

2、ANDARDNational forewordThis British Standard is the UK implementation of EN ISO14644-10:2013.The UK participation in its preparation was entrusted to TechnicalCommittee LBI/30, Cleanroom technology.A list of organizations represented on this committee can beobtained on request to its secretary.This

3、publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards Institution 2013. Published by BSI StandardsLimited 2013 ISBN 978 0 580 66236 2 ICS 13.040.35 Compliance with a British Standard cannot confer im

4、munity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 30 April 2013. Amendments issued since publicationDate T e x t a f f e c t e dEUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 14644-10 March 2013 ICS 13.040.

5、35 English Version Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) Salles propres et environnements matriss apparents - Partie 10: Classification de la propret chimique des surfaces (ISO 14644-10:2013) R

6、einrume und zugehrige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflchenreinheit (ISO 14644-10:2013) This European Standard was approved by CEN on 2 February 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving t

7、his European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official

8、 versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Aus

9、tria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Swed

10、en, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national M

11、embers. Ref. No. EN ISO 14644-10:2013: EBS EN ISO 14644-10:2013EN ISO 14644-10:2013 (E) 3 Foreword This document (EN ISO 14644-10:2013) has been prepared by Technical Committee ISO/TC 209 “Cleanrooms and associated controlled environments“ in collaboration with Technical Committee CEN/TC 243 “Cleanr

12、oom technology” the secretariat of which is held by BSI. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by September 2013, and conflicting national standards shall be withdrawn at the latest by Sept

13、ember 2013. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulations, the national standards

14、organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembo

15、urg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO 14644-10:2013 has been approved by CEN as EN ISO 14644-10:2013 without any modification. BS EN ISO 14644-10:2013ISO 14644-10:2

16、013(E) ISO 2013 All rights reserved iiiContents PageForeword iv1 Scope . 12 Normative references 13 Terms and definitions . 14 Classification 24.1 Principles for establishing classification of clean surfaces in cleanrooms and controlled environments 24.2 Classification for surface cleanliness by che

17、mical concentration . 24.3 ISO-SCC designation . 44.4 Converter for substances into surface atomic concentration . 45 Measuring and monitoring the cleanliness of surfaces for chemical contamination and demonstration of compliance . 55.1 Criteria for good cleanliness assessment . 55.2 Documentation a

18、nd reporting . 6Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances . 8Annex B (informative) Parameters influencing testing and interpretation of results 15Annex C (informative) Essential considerations for a good cleanliness assessmen

19、t 16Annex D (informative) Methods for testing surface cleanliness by chemical concentration .17Annex E (informative) Test record documentation 28Bibliography .29BS EN ISO 14644-10:2013ISO 14644-10:2013(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of na

20、tional standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. Intern

21、ational organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.International Standards are drafted in accordance with the r

22、ules given in the ISO/IEC Directives, Part 2.The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at

23、 least 75 % of the member bodies casting a vote.Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights.ISO 14644-10 was prepared by Technical Committee ISO/T

24、C 209, Cleanrooms and associated controlledenvironments.ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlledenvironments: Part 1: Classification of air cleanliness by particle concentration Part 2: Specifications for testing and monitoring to prove

25、continued compliance with ISO 14644-1 Part 3: Test methods Part 4: Design, construction and start-up Part 5: Operations Part 6: Vocabulary Part 7: Separative devices (clean air hoods, glove boxes, isolators, mini-environments) Part 8: Classification of air cleanliness by chemical concentration (ACC)

26、 Part 9: Classification of surface cleanliness by particle concentration Part 10: Classification of surface cleanliness by chemical concentrationThe following part is under preparation: Part 12: Classification of air cleanliness by nanoscale particle concentrationCleaning of surfaces to achieve defi

27、ned levels of cleanliness in terms of particle and chemical classifications will form the subject of a future Part 13.iv ISO 2013 All rights reservedBS EN ISO 14644-10:2013INTERNATIONAL STANDARD ISO 14644-10:2013(E)Cleanrooms and associated controlled environments Part 10: Classification of surface

28、cleanliness by chemical concentration1 ScopeThis part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all s

29、olid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties o

30、f the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface.NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or pro

31、cess-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.2 Normative referencesThe following referenced documents are recommended for the application of this document. For dated references, only the

32、 edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 14644-1:1), Cleanrooms and associated controlled environments Part 1: Classification of aircleanliness by particle concentrationISO 14644-6, Cleanrooms and associated

33、controlled environments Part 6: Vocabulary3 Terms and definitionsFor the purposes of this document, the terms and definitions given in ISO 14644-6 and the following apply.3.1air cleanliness by chemical concentrationACClevel, expressed as an ISO Class N, which represents the maximum allowable concent

34、ration of a given chemical species or group of chemical species, expressed in grams per cubic metre (g/m3)Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be particles.3.2contaminant categorycommon name for a group of compounds with a specifi

35、c and similar deleterious effect when deposited on the surface of interest1) To be published. (Revision of ISO 14644-1:1999.) ISO 2013 All rights reserved 1BS EN ISO 14644-10:2013ISO 14644-10:2013(E)3.3chemical contaminationchemical (non-particulate) substances that can have a deleterious effect on

36、the product, process or equipment3.4solid surfaceboundary between the solid phase and a second phase3.5surfaceboundary between two phasesNote 1 to entry: One of the phases is normally a solid phase and the other a gas, a liquid or another solid.3.6surface cleanliness by chemical concentrationSCCcond

37、ition of a surface with respect to its chemical concentration3.7surface cleanliness by chemical concentration classNSCCcommon logarithm (to the base of 10) of the chemical concentration on a surface in grams per square metre (g/m2)4 Classification4.1 Principles for establishing classification of cle

38、an surfaces in cleanrooms and con-trolled environmentsClassification shall be specified by use of a classification descriptor. This descriptor is designated “ISO-SCC” and specifies the maximum total chemical concentration permitted on a surface for an individual chemical substance or group of substa

39、nces. The classification of SCC is based upon the concentration of chemicals on a surface as calculated using Formula (1) (given in 4.2) and expressed in g/m2. For calculation of the class, all other units shall be converted to g/m2. In specific cases where low concentrations need to be specified, t

40、he maximum allowable concentration of chemicals on a surface may be expressed in atoms per square centimetre, ISO-SCC_atomic, using Formula (2) in 4.4.4.2 Classification for surface cleanliness by chemical concentrationThe SCC class shall be designated by a classification number, NSCC, where NSCCis

41、the common logarithm index of concentration CSCC, expressed in g/m2. The SCC class statement shall always be connected with a chemical substance or group of substances to which it is related. Intermediate concentrations may be specified, with 0,1 being the smallest permitted increment of NSCC. CSCCi

42、s determined from Formula (1), in terms of NSCC:CNSCCSCC=10(1)Therefore, NCSCCSCC= log10.CSCC, the maximum allowable concentration of the specified chemical substance or group of substances, is expressed in g/m2. The measured chemical concentration on a surface shall not exceed the maximum allowable

43、 concentration of SCC, CSCCto satisfy the predetermined SCC that is agreed between the customer and supplier.2 ISO 2013 All rights reservedBS EN ISO 14644-10:2013ISO 14644-10:2013(E)In all cases, NSCCclass numbers shall include the negative sign.NOTE 1 An SCC class number is only valid in connection

44、 with a descriptor (see 4.3).NOTE 2 For converting from gravimetric concentration (g/m2) to numeric concentration (number of atoms, molecules or ions per unit area), see 4.4.Table 1 and Figure 1 further illustrate the ISO-SCC classification as a function of chemical concentration on a surface.Note a

45、lso the parameters listed in Annex B that influence classification.Table 1 ISO-SCC classesISO-SCC class Concentration (g/m2)Concentration (g/cm2)Concentration (ng/cm2)0 1001061091 1011051082 1021041073 1031031064 1041021055 1051011046 1061001037 1071011028 1081021019 10910310010 101010410111 1011105

46、10212 1012106103 ISO 2013 All rights reserved 3BS EN ISO 14644-10:2013ISO 14644-10:2013(E)YX1X2X3+6KeyX1surface mass concentration (g/m2)X2surface mass concentration (g/cm2)X3surface mass concentration (ng/cm2)Y ISO-SCC classFigure 1 ISO-SCC classes as a function of concentration4.3 ISO-SCC designat

47、ionAn SCC class number is only valid in connection with a descriptor that includes the chemical substance or group of substances for which this class number is valid. The ISO-SCC descriptor is expressed in the format ISO-SCC Class N (X), where X is a chemical substance or group of chemical substance

48、s.EXAMPLE 1 With an N-Methyl-2-pyrrolidone (NMP) sample, the measured value of chemical contamination on a surface was 9,8E-7 g/m2. This is within the class limit of 1E-6 g/m2for Class 6. The designation would be: “ISO-SCC Class 6 (NMP).”EXAMPLE 2 With an organic compound sample, the measured value

49、was 6E-5 g/m2of total organic compounds (TOC). This is within the class limit of 1E-4 g/m2for Class 4. The designation would be: “ISO-SCC Class 4 (TOC).”4.4 Converter for substances into surface atomic concentrationVery low concentrations are usually measured in surface number concentrations in the units of number of molecules, atoms or ions per surface area 1/m2. For classification purposes, these should be 4 ISO 2013 All rights reservedBS EN ISO 14644-10:2013ISO 14644-10:2013(E)converted in