BS ISO 3529-3-2014 Vacuum technology Vocabulary Total and partial pressure vacuum gauges《真空技术 词汇 总体和局部压力真空计》.pdf

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1、BSI Standards PublicationBS ISO 3529-3:2014Vacuum technology VocabularyPart 3: Total and partial pressure vacuumgaugesBS ISO 3529-3:2014 BRITISH STANDARDNational forewordThis British Standard is the UK implementation of ISO 3529-3:2014.The UK participation in its preparation was entrusted to Technic

2、alCommittee MCE/8/-/4, Vacuum technology.A list of organizations represented on this committee can beobtained on request to its secretary.This publication does not purport to include all the necessaryprovisions of a contract. Users are responsible for its correctapplication. The British Standards In

3、stitution 2014. Published by BSI StandardsLimited 2014ISBN 978 0 580 81460 0ICS 01.040.23; 23.160Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 30 April 2014.Amen

4、dments issued since publicationDate Text affectedBS ISO 3529-3:2014 ISO 2014Vacuum technology Vocabulary Part 3: Total and partial pressure vacuum gaugesTechnique du vide Vocabulaire Partie 3: Manomtres de pression totale et analyseurs de pressions partiellesINTERNATIONAL STANDARDISO3529-3Second edi

5、tion2014-04-15Reference numberISO 3529-3:2014(E)BS ISO 3529-3:2014ISO 3529-3:2014(E)ii ISO 2014 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2014All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, el

6、ectronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCase postale 56 CH-1211 Geneva 20Tel.

7、+ 41 22 749 01 11Fax + 41 22 749 09 47E-mail copyrightiso.orgWeb www.iso.orgPublished in SwitzerlandBS ISO 3529-3:2014ISO 3529-3:2014(E) ISO 2014 All rights reserved iiiContents PageForeword iv1 Scope . 12 Terms and definitions . 12.1 General terms . 12.2 General categories of vacuum gauges . 22.3 C

8、haracteristics of vacuum gauges 22.4 Total pressure vacuum gauges 32.5 Partial pressure vacuum gauges 7Annex A (informative) Tree diagram of total pressure vacuum gauges. 9Bibliography .10BS ISO 3529-3:2014ISO 3529-3:2014(E)ForewordISO (the International Organization for Standardization) is a worldw

9、ide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on th

10、at committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this docu

11、ment and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directiv

12、es, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the developmen

13、t of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the meaning of ISO specif

14、ic terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary informationThe committee responsible for this document is ISO/TC 112, Vacuum technolog

15、y.This second edition cancels and replaces the first edition (ISO 3529-3:1981), which has been technically revised in order to include terms of now common vacuum gauges and to adapt terms to new developments and general use of terms in publications.ISO 3529 consists of the following parts, under the

16、 general title Vacuum technology Vocabulary: Part 1: General terms Part 2: Vacuum pumps and related terms Part 3: Total and partial pressure vacuum gaugesiv ISO 2014 All rights reservedBS ISO 3529-3:2014INTERNATIONAL STANDARD ISO 3529-3:2014(E)Vacuum technology Vocabulary Part 3: Total and partial p

17、ressure vacuum gauges1 ScopeThis part of ISO 3529 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529-1, which defines general terms used in vacuum technology, and of ISO 3529-2, which gives definitions of vacuum pumps and related terms.The terms for those

18、 gauges are defined, which had been either very important in the past or are important today and normally commercially available or which physical principle is important still today.2 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.NOTE A tree diagra

19、m of total pressure vacuum gauges is illustrated in Figure A.1.2.1 General terms2.1.1pressure gaugeinstrument for measuring gas or vapour pressures, greater, equal to or less than the prevailing atmospheric pressure2.1.2vacuum gaugeinstrument for measuring gas or vapour pressures less than the preva

20、iling atmospheric pressureNote 1 to entry: A vacuum gauge is a subset of a pressure gauge.Note 2 to entry: Some types of vacuum gauges commonly in use do not actually measure a pressure (as expressed in terms of a force acting on a surface), but some other physical quantity related to pressure, unde

21、r specific conditions.2.1.2.1gauge headpart of the gauge which contains the pressure-sensitive element and which is directly connected to the vacuum system2.1.2.1.1nude gaugegauge head without an envelopeNote 1 to entry: In this case, the sensitive element is inserted directly into the vacuum system

22、.2.1.2.2control unitcontrollerpart of the gauge containing the power supply and all electrical circuitry necessary for the operation of the gauge ISO 2014 All rights reserved 1BS ISO 3529-3:2014ISO 3529-3:2014(E)2.1.2.2.1indicatorindicating unitpart of the gauge which indicates the output signal, us

23、ually scaled in units of pressure2.2 General categories of vacuum gauges2.2.1differential vacuum gaugevacuum gauge which measures the difference of pressures existing simultaneously on either side of a sensitive partition element, for example a flexible diaphragm or a movable separating liquid2.2.2a

24、bsolute vacuum gaugevacuum gauge by means of which pressure may be determined in terms of measured physical quantities alone2.2.3total pressure vacuum gaugevacuum gauge for measuring the total pressure of a gas or a gaseous mixture2.2.4partial pressure vacuum gaugepartial pressure analyservacuum gau

25、ge for measuring currents derived from the ionized constituents of a gaseous mixtureNote 1 to entry: These currents represent partial pressures with different proportionality constants for different components.Note 2 to entry: Sometimes this gauge is denoted as a “residual gas analyser”. Since this

26、term characterizes only one of several possible applications of partial pressure analysers, it should be avoided.2.3 Characteristics of vacuum gauges2.3.1measurement rangerange between minimum and maximum pressure where the reading of the gauge is within the specified measurement uncertainty limitsN

27、ote 1 to entry: For certain types of gauge, this range depends on the nature of the gas. In such a case, the pressure range for nitrogen shall always be specified.2.3.2sensitivity sensitivity coefficientchange in the signal indicated by the vacuum gauge, divided by the corresponding change in pressu

28、re and, where appropriate, divided by parameters not depending on pressureNote 1 to entry: For certain types of gauge, the sensitivity depends on the nature of the gas. In such a case, the sensitivity for nitrogen shall always be specified.2.3.3relative sensitivity factorsensitivity of the gauge for

29、 that gas divided by the sensitivity of the gauge for nitrogen, at the same pressure and under the same operating conditions2.3.4ionization sensitivitychange of ion current divided by the corresponding change in pressure2 ISO 2014 All rights reservedBS ISO 3529-3:2014ISO 3529-3:2014(E)2.3.5equivalen

30、t nitrogen pressurethat pressure of nitrogen which would produce the same gauge reading2.3.6X-ray limitthat pressure of pure nitrogen which would give the same gauge reading, without a X-ray effect, as is produced by the residual current caused by photo-electrons mainly emitted at the ion collectorN

31、ote 1 to entry: For ionization gauges with a discharge by crossed electromagnetic fields, the X-ray limit is normally not significant.2.4 Total pressure vacuum gauges2.4.1 Vacuum gauges based on mechanical phenomena2.4.1.1liquid level manometerabsolute differential manometer, commonly a U-tube, in w

32、hich the sensitive element is a movable separating liquid (for example mercury)Note 1 to entry: The pressure difference is obtained by measuring the difference in the liquid levels.2.4.1.2elastic element gaugedifferential vacuum gauge in which the flexible partition is an elastic elementEXAMPLE Bour

33、don gauge, diaphragm gauge, capacitance diaphragm gauge, etc.Note 1 to entry: The pressure difference can be determined by measuring either the displacement of the elastic element (direct method) or the force required to compensate its displacement (zero method).2.4.1.2.1Bourdon gaugeelastic element

34、 gauge where the elastic element is a tube formed into a spiral or a helix.2.4.1.2.2diaphragm gaugemembrane gaugeelastic element gauge where the elastic element is a membrane that changes the shape under a pressure difference across itEXAMPLE An example is a piezoresistive gauge where the force onto

35、 the membrane is measured by a piezo element. Another example is the capacitance diaphragm gauge (2.4.1.2.3) and the resonant silicon gauge.2.4.1.2.3capacitance diaphragm gaugediaphragm gauge where the membrane is part of a capacitorNote 1 to entry: A capacitance diaphragm gauge is sometimes also te

36、rmed a “capacitance manometer”. ISO 2014 All rights reserved 3BS ISO 3529-3:2014ISO 3529-3:2014(E)2.4.1.3compression gaugeMcLeod gaugevacuum gauge in which a known volume of the gas at the pressure to be measured is compressed (for example by the movement of a column of liquid e.g. mercury) in a kno

37、wn ratio and the resulting higher pressure then measuredNote 1 to entry: If the higher pressure is measured by a liquid level manometer, such a gauge is absolute for a gas which satisfies the ideal gas law.2.4.1.4pressure balancepiston gaugeabsolute vacuum gauge in which the pressure to be measured

38、is suitably applied to an accurately matched piston-cylinder assembly of known cross-sectional area, the resulting force being compared with the gravitational force acting on a group of known masses or being measured by a force meterNote 1 to entry: A piston gauge where the piston and surrounding cy

39、linder rotate against each other is called a “rotating piston gauge” or “rotating pressure balance”.2.4.2 Vacuum gauges based on transport phenomena in gases2.4.2.1viscosity gaugevacuum gauge in which the pressure is determined in relation to the viscous forces acting on a surfaceEXAMPLE Quartz fric

40、tion gauges, tuning fork gauges, decrement gauge, molecular drag gauge.Note 1 to entry: This gauge is based on the viscosity of a gas being pressure dependent. 2.4.2.1.1spinning rotor gaugeviscosity gauge in which the surface is a spinning rotor magnetically suspended in a vacuum thimble and the rel

41、ative deceleration rate of the rotor is measuredNote 1 to entry: The deceleration of the rotor is caused by momentum transfer from the rotor to the gas molecules in high vacuum and additionally by gas friction (viscous forces) at higher pressures.2.4.2.1.2quartz friction vacuum gaugeviscosity gauge

42、in which resonant frequency of the quartz tuning fork depends on the pressure2.4.2.2thermal conductivity gaugevacuum gauge in which the pressure is determined in relation to the transfer of thermal energy between the surfaces of two fixed elements maintained at different temperaturesEXAMPLE Pirani g

43、auge, thermocouple gauge, thermistor gauge, bimetal gauge.Note 1 to entry: This gauge is based on the thermal conductivity of a gas being pressure dependent.2.4.2.2.1thermocouple gaugethermal conductivity gauge in which the temperature of the heated element is measured by a thermocouple attached to

44、it4 ISO 2014 All rights reservedBS ISO 3529-3:2014ISO 3529-3:2014(E)2.4.2.2.2Pirani gaugethermal conductivity gauge in which the heated element is part of a Wheatstone bridge that supplies the energy to the element and by which the electrical resistance or the dissipated power of the element is bein

45、g measuredNote 1 to entry: The heated element, often a wire, may be maintained at a constant temperature and the required heating power in dependence of pressure is measured. This is the most accurate measuring principle of a Pirani gauge. Alternatively, the heating power (as in the original design

46、of Pirani) or the current is kept constant and the compensation current in the bridge is used as a measure of pressure.2.4.2.2.3thermistor gaugethermal conductivity gauge in which the heated element is a semiconductor with a high specific resistance coefficient2.4.2.2.4thermo-molecular gaugevacuum g

47、auge in which the pressure is determined by measuring the net rate of transfer of momentum by gas molecules striking fixed surfaces maintained at different temperaturesEXAMPLE Knudsen gauge, diamagnetic Ievitation.Note 1 to entry: The dimensions shall be very small compared to the mean free path of

48、the gas molecules.2.4.3 Vacuum gauges on ionization phenomena in gases2.4.3.1ionization vacuum gaugevacuum gauge in which the molecular density is determined by measuring the ion current produced in the gas by ionization under controlled conditionsNote 1 to entry: The pressure is directly related to

49、 gas density.2.4.3.2crossed field ionization gaugeionization vacuum gauge in which the ions are produced by a cold cathode discharge in crossed electrical and magnetic fieldsNote 1 to entry: This kind of gauge was formerly defined as a “cold cathode gauge”. Due to the availability of cold cathodes like field emission cathodes or carbon nano tubes as emitting cathodes, the new term was introduced.2.4.3.2.1Penning gaugecrossed field ionization gauge with a magnet and which has a particular electrode geometryNote 1 to entry: One of the electrodes