ASTM E766-1998(2003) Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope《校准扫描电子显微镜的放大倍数》.pdf
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1、Designation: E 766 98 (Reapproved 2003)Standard Practice forCalibrating the Magnification of a Scanning ElectronMicroscope1This standard is issued under the fixed designation E 766; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, t
2、he year of last revision. A number in parentheses indicates the year of last reapproval. Asuperscript epsilon (e) indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice covers general procedures necessary forthe calibration of magnification of scanning electron
3、 micro-scopes. The relationship between true magnification and indi-cated magnification is a complicated function of operatingconditions.2Therefore, this practice must be applied to each setof standard operating conditions to be used.1.2 The values stated in SI units are to be regarded as thestandar
4、d.1.3 This standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced
5、 Documents2.1 ASTM Standards:3E 7 Terminology Relating to MetallographyE 29 Standard Practice For Using Significant Digits in TestData to Determine Conformance with SpecificationsE 177 Practice for Use of the Terms Precision and Bias inASTM Test MethodsE 456 Terminology Relating to Quality and Stati
6、sticsE 691 Practice for Conducting an Interlaboratory Study toDetermine the Precision of a Test Method2.2 ISO Standard:ISO Guide 30: 1992 Terms and Definitions Used in Con-nection with Reference Materials43. Terminology3.1 Definitions:3.1.1 For definitions of metallographic terms used in thispractic
7、e see Terminology E 7.3.1.2 The definitions related to statistical analysis of dateappearing in Practice E 77, Terminology E 456, and PracticeE 691 shall be considered as appropriate to the terms used inthis practice.3.2 Definitions of Terms Specific to This Standard:3.2.1 calibrationthe set of oper
8、ations which establish,under specified conditions, the relationship between magnifi-cation values indicated by the SEM and the correspondingmagnification values determined by examination of a referencematerial.3.2.2 calibration methoda technical procedure for per-forming a calibration.3.2.3 certifie
9、d reference materialreference material, ac-companied by a certificate, one or more of whose propertyvalues are certified by a procedure which establishes itstraceability to an accurate realization of the unit in which theproperty values are expressed, and for which each certifiedvalue is accompanied
10、 by an uncertainty at a stated level ofconfidence (see ISO Guide 30:1992).3.2.4 pitchthe separation of two similar structures, mea-sured as the center to center or edge to edge distance.3.2.5 reference materiala material or substance one ormore of whose property values are sufficiently homogeneous,s
11、table, and well established to be used for the calibration of anapparatus, the assessment of a measurement method, or forassigning values to materials (see ISO Guide 30:1992).3.2.6 reference standarda reference material, generally ofthe highest metrological quality available, from which mea-surement
12、s are derived.3.2.7 traceabilitythe property of a result of a measure-ment whereby it can be related to appropriate international/national standards through an unbroken chain of comparisons.3.2.8 verificationconfirmation by examination and provi-sion of evidence that specified requirements have been
13、 met.1This practice is under the jurisdiction of ASTM Committee E04 on Metallog-raphy and is the direct responsibility of Subcommittee E04.11 on X-Ray andElectron Metallography.Current edition approved Nov. 1, 2003. Published December 2003. Originallyapproved in 1980. Last previous edition approved
14、in 1998 E 766 98.2See Annex A1.3For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.4Available from American Natio
15、nal Standards Institute, 25 W. 43rd St., 4thFloor, New York, NY 10036.1Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.4. Significance and Use4.1 Proper use of this practice can yield calibrated magni-fications with precision of 5 % o
16、r better within a magnificationrange of from 10 to 50 000X.4.2 The use of calibration specimens traceable tointernational/national standards, such as NIST-SRM 484, withthis practice will yield magnifications accurate to better than5 % over the calibrated range of operating conditions.4.3 The accurac
17、y of the calibrated magnifications, or dimen-sional measurements, will be poorer than the accuracy of thecalibration specimen used with this practice.4.4 For accuracy approaching that of the calibration speci-men this practice must be applied with the identical operatingconditions (accelerating volt
18、age, working distance and magni-fication) used to image the specimens of interest.4.5 It is incumbent upon each facility using this practice todefine the standard range of magnification and operatingconditions as well as the desired accuracy for which thispractice will be applied. The standard opera
19、ting conditionsmust include those parameters which the operator can controlincluding: accelerating voltage, working distance, magnifica-tion, and imaging mode.5. Calibration Specimen5.1 The selection of calibration specimen(s) is dependent onthe magnification range and the accuracy required.5.2 The
20、use of reference standards, reference materials, orcertified reference materials traceable to international/nationalstandards (NIST, Gaithersburg, MD; NPL, Teddington, UK; orJNRLM, Tsukuba, Japan) calibration specimens is recom-mended. However, the use of internal or secondary referencematerials val
21、idated against reference standards or certifiedreference materials may be used with this practice.5.3 Where traceability to international or national standardsis not required, internal reference materials, verified as far astechnically practicable and economically feasible, are appro-priate as calib
22、ration specimens and may be used with thispractice.5.4 The most useful calibration specimens should have thefollowing characteristics:5.4.1 A series of patterns allowing calibration of the fullfield of view as well as fractional portions of the field of viewover the range of standard magnifications.
23、 Suitable standardsallow for the pattern “pitch” to be measured,5.4.2 Pitch patterns allowing calibration in both X and Ywithout having to rotate the sample or the raster,5.4.3 Made from materials which provide good contrast forthe various imaging modes, especially secondary electron andbackscatter
24、electron imaging.5.4.4 Made of or coated with electrically conductive, elec-tron beam stable materials, and5.4.5 Made of materials which can be cleaned to removecontamination which occurs during normal use.5.5 Under typical use some contamination of the calibrationspecimen should be expected. When c
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