ASTM E2312-2011 Standard Practice for Tests of Cleanroom Materials《清结室材料测试的标准操作规程》.pdf
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1、Designation: E2312 11Standard Practice forTests of Cleanroom Materials1This standard is issued under the fixed designation E2312; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A number in parentheses in
2、dicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1. Scope1.1 This practice identifies test methods used to evaluate theproperties of various materials and products used in clean-rooms and for cleanroom construction.1.2 T
3、his standard does not purport to address all of thesafety concerns, if any, associated with its use. It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2. Referenced Docume
4、nts2.1 ASTM Standards:2E595 Test Method for Total Mass Loss and CollectedVolatile Condensable Materials from Outgassing in aVacuum EnvironmentE1216 Practice for Sampling for Particulate Contaminationby Tape LiftE1234 Practice for Handling, Transporting, and InstallingNonvolatile Residue (NVR) Sample
5、 Plates Used in Envi-ronmentally Controlled Areas for SpacecraftE1235 Test Method for Gravimetric Determination of Non-volatile Residue (NVR) in Environmentally ControlledAreas for SpacecraftE1549 Specification for ESD Controlled Garments Re-quired in Cleanrooms and Controlled Environments forSpacec
6、raft for Non-Hazardous and Hazardous OperationsE1559 Test Method for Contamination Outgassing Charac-teristics of Spacecraft MaterialsE1560 Test Method for Gravimetric Determination of Non-volatile Residue From Cleanroom WipersE1731 Test Method for Gravimetric Determination of Non-volatile Residue f
7、rom Cleanroom GlovesE2088 Practice for Selecting, Preparing, Exposing, andAnalyzing Witness Surfaces for Measuring Particle Depo-sition in Cleanrooms and Associated Controlled Environ-mentsE2090 Test Method for Size-Differentiated Counting ofParticles and Fibers Released from Cleanroom WipersUsing O
8、ptical and Scanning Electron MicroscopyE2217 Practice for Design and Construction of AerospaceCleanrooms and Contamination Controlled AreasF25 Test Method for Sizing and Counting Airborne Particu-late Contamination in Cleanrooms and Other Dust-Controlled AreasF51 Test Method for Sizing and Counting
9、Particulate Con-taminant In and On Clean Room GarmentsF739 Test Method for Permeation of Liquids and Gasesthrough Protective Clothing Materials under Conditions ofContinuous Contact2.2 IEST Standards:3IEST RP-CC003 Garment System Considerations forCleanrooms and Other Controlled EnvironmentsIEST RP-
10、CC004 Evaluating Wiping Materials Used inCleanrooms and Other Controlled EnvironmentsIEST RP-CC005 Gloves and Finger Cots Used in Clean-rooms and Other Controlled EnvironmentsIEST RP-CC020 Substrates and Forms for Documentationin CleanroomsIEST RP-CC022 Electrostatic Charge in Cleanrooms andOther Co
11、ntrolled Environments2.3 Others:4ANSI/AAMI/ISO 11137 Sterilization of Health Care Prod-ucts Radiation Part 13. Terminology3.1 Definitions:3.1.1 ESDelectrostatic discharge, the transfer of electro-static charge between bodies that have different electric poten-tial.1This practice is under the jurisdi
12、ction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved Jan. 1, 2011. Published February 2011. Originallyapproved in 2004. Last previous edition approved in 2004 as E2312 04.
13、DOI:10.1520/E2312-11.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document Summary page onthe ASTM website.3Available from Institute of Environment
14、al Sciences and Technology (IEST),Arlington Place One, 2340 S. Arlington Heights Rd., Suite 100, Arlington Heights,IL 60005-4516, http:/www.iest.org.4Available from American National Standards Institute (ANSI), 25 W. 43rd St.,4th Floor, New York, NY 10036, http:/www.ansi.org.1Copyright ASTM Internat
15、ional, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.3.1.2 fiberparticle having an aspect (length-to-width) ra-tio of 10 or more.3.1.3 microorganismliving organism of microscopic sizecapable of growth and reproduction. Examples include bacte-ria, yeasts, and mol
16、ds.3.1.4 non-volatile residue (NVR)that quantity of molecu-lar matter remaining after the filtration of a solvent containingcontaminants and evaporation of the solvent at a specifiedtemperature.3.1.5 outgassingevolution of volatile components froman item exposed to elevated temperature, normally in
17、vacuum.3.1.6 particlesmall piece of matter with defined physicalboundaries.4. Summary of Practice4.1 A number of tests for materials and products used incleanrooms or to fabricate cleanrooms have been issued byvarious organizations such as ASTM and IEST. The purpose ofthis practice is to identify te
18、st methods used to determine theproperties of various materials and products used in clean-rooms. A brief description and some of the features of thevarious tests are also given to aid interested users in selectingthe test or groups of tests that have the ability to meet theirneeds for evaluating ex
19、isting and candidate cleanroom prod-ucts.4.2 Table 1 lists the tests suggested to measure specificproperties of various cleanroom materials and products. Whereno test is presently listed it is probable that a test will berequired and must be identified or developed if none exist atpresent.5. Signifi
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