BS PD CEN ISO TS 80004-8-2015 Nanotechnologies Vocabulary Nanomanufacturing processes《纳米技术 词汇 纳米制造流程》.pdf

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1、BSI Standards Publication Nanotechnologies Vocabulary Part 8: Nanomanufacturing processes PD CEN ISO/TS 80004-8:2015National foreword This Published Document is the UK implementation of CEN ISO/TS 80004- 8:2015. It is identical to ISO/TS 80004-8:2013. The UK participation in its preparation was entr

2、usted to Technical Committee NTI/1, Nanotechnologies. A list of organizations represented on this committee can be obtained on request to its secretary. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. The Bri

3、tish Standards Institution 2015. Published by BSI Standards Limited 2015 ISBN 978 0 580 88464 1 ICS 01.040.07; 07.030 Compliance with a British Standard cannot confer immunity from legal obligations. This Published Document was published under the authority of the Standards Policy and Strategy Commi

4、ttee on 31 May 2015. Amendments/corrigenda issued since publication Date Text affected PUBLISHED DOCUMENT PD CEN ISO/TS 80004-8:2015 TECHNICAL SPECIFICATION SPCIFICATION TECHNIQUE TECHNISCHE SPEZIFIKATION CEN ISO/TS 80004-8 May 2015 ICS 07.030; 01.040.07 English Version Nanotechnologies - Vocabulary

5、 - Part 8: Nanomanufacturing processes (ISO/TS 80004-8:2013) Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication (ISO/TS 80004-8:2013) Nanotechnologien - Fachwrterverzeichnis - Teil 8: Industrieller Nanoherstellungsprozess (ISO/TS 80004- 8:2013) This Technical Specification (CEN/

6、TS) was approved by CEN on 16 May 2015 for provisional application. The period of validity of this CEN/TS is limited initially to three years. After two years the members of CEN will be requested to submit their comments, particularly on the question whether the CEN/TS can be converted into a Europe

7、an Standard. CEN members are required to announce the existence of this CEN/TS in the same way as for an EN and to make the CEN/TS available promptly at national level in an appropriate form. It is permissible to keep conflicting national standards in force (in parallel to the CEN/TS) until the fina

8、l decision about the possible conversion of the CEN/TS into an EN is reached. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ire

9、land, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG CEN-CENELEC Management Ce

10、ntre: Avenue Marnix 17, B-1000 Brussels 2015 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. CEN ISO/TS 80004-8:2015 E PD CEN ISO/TS 80004-8:2015CEN ISO/TS 80004-8:2015 (E) 2 Contents Page Foreword 3 PD CEN ISO/TS 80004-8:2015CEN ISO/

11、TS 80004-8:2015 (E) 3 Foreword The text of ISO/TS 80004-8:2013 has been prepared by Technical Committee ISO/TC 229 “Nanotechnologies” of the International Organization for Standardization (ISO) and has been taken over as CEN ISO/TS 80004-8:2015 by Technical Committee CEN/TC 352 “Nanotechnologies” th

12、e secretariat of which is held by AFNOR. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the CEN-CENELEC Internal Regulat

13、ions, the national standards organizations of the following countries are bound to announce this Technical Specification: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland,

14、 Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom. Endorsement notice The text of ISO/TS 80004-8:2013 has been approved by CEN as CEN ISO/TS 80004-8:2015 without any modification

15、. PD CEN ISO/TS 80004-8:2015 ISO/TS 80004-8:2013(E) ISO 2013 All rights reserved iii Contents Page Foreword iv Introduction vi 1 Scope . 1 2 T erms and definitions fr om other parts of ISO/T S 80004 1 3 General terms 3 4 Directed assembly . 4 5 Self-assembly processes . 4 6 Synthesis . 5 6.1 Gas pro

16、cess phase Physical methods . 5 6.2 Gas process phase Chemical methods . 6 6.3 Liquid process phase Physical methods 7 6.4 Liquid process phase Chemical methods 8 6.5 Solid process phase Physical methods 8 6.6 Solid process phase Chemical methods 10 7 Fabrication .11 7.1 Nanopatterning lithography .

17、11 7.2 Deposition processes 14 7.3 Etching processes 16 7.4 Printing and coating 18 Annex A (informative) Identification of output r esulting fr om defined s ynthesis pr oc esses 19 Annex B (informative) Index 21 Bibliography .27 PD CEN ISO/TS 80004-8:2015 ISO/TS 80004-8:2013(E) Foreword ISO (the In

18、ternational Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee h

19、as been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical

20、 standardization. The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in a

21、ccordance with the editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details

22、of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received. www.iso.org/patents Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement

23、. For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary information ISO/TS 80004-8 was prepar

24、ed jointly by Technical Committee ISO/TC 229, Nanotechnologies, and Technic a l Committee IEC/TC 113, Nanotechnology standardization for electrical and electronic products and systems. Documents in the 80000 to 89999 range of reference numbers are developed by collaboration between ISO and IEC. ISO/

25、TS 80004 consists of the following parts, under the general title Nanotechnologies Vocabulary: Part 1: Core terms Part 3: Carbon nano-objects Part 4: Nanostructured materials Part 5: Nano/bio interface Part 6: Nano-object characterization Part 7: Diagnostics and therapeutics for healthcare Part 8: N

26、anomanufacturing processes The following parts are under preparation: Part 2: Nano-objects: Nanoparticle, nanofibre and nanoplate 1) Part 9: Nano-enabled electrotechnical products and systems Part 10: Nano-enabled photonic components and systems Part 11: Nanolayer, nanocoating, nanofilm, and related

27、 terms Part 12: Quantum phenomena in nanotechnology 1) Revises and replaces ISO/TS 27687 5 .iv ISO 2013 All rights reserved PD CEN ISO/TS 80004-8:2015 ISO/TS 80004-8:2013(E) Graphene and other two-dimensional materials is to form the subject of a future part 13. ISO 2013 All rights reserved v PD CEN

28、 ISO/TS 80004-8:2015 ISO/TS 80004-8:2013(E) Introduction Nanomanufacturing is the essential bridge between the discoveries of the nanosciences and real-world nanotechnology products. Advancing nanotechnology from the laboratory into volume production ultimately requires careful study of manufacturin

29、g process issues including product design, reliability and quality, process design and control, shop floor operations, supply chain management, workplace safety and health practices during the production, use, and handling of nanomaterials. Nanomanufacturing encompasses directed self assembly and as

30、sembly techniques, synthetic methodologies, and fabrication processes such as lithography and biological processes. Nanomanufacturing also includes bottom-up directed assembly, top-down high resolution processing, molecular systems engineering, and hierarchical integration with larger scale systems.

31、 As dimensional scales of materials and molecular systems approach the nanoscale, the conventional rules governing their behaviour may change significantly. As such, the behaviour of a final product is enabled by the collective performance of its nanoscale building blocks. Biological process terms a

32、re not included in this first edition of the nanomanufacturing vocabulary, but considering the rapid development of the field, it is expected that terms in this important area will be added in a future update to this Technical Specification or in companion documents in the 80004 series. This could i

33、nclude both the processing of biological nanomaterials and the use of biological processes to manufacture materials at the nanoscale. Similarly, additional terms from other developing areas of nanomanufacturing, including composite manufacturing, roll-to-roll manufacturing, and others, will be inclu

34、ded in future documents. There is a distinction between the terms nanomanufacturing and nanofabrication. Nanomanufacturing encompasses a broader range of processes than does nanofabrication. Nanomanufacturing encompasses all nanofabrication techniques and also techniques associated with materials pr

35、ocessing and chemical synthesis. This document provides an introduction to processes used in the early stages of the nanomanufacturing value chain, namely the intentional synthesis, generation or control of nanomaterials, including fabrication steps in the nanoscale. The nanomaterials that result fr

36、om these manufacturing processes are distributed in commerce where, for example, they may be further purified, be compatabilized to be dispersed in mixtures or composite matrices, or serve as integrated components of systems and devices. The nanomanufacturing value chain is, in actuality, a large an

37、d diverse group of commercial value chains that stretch across these sectors: the semiconductor industry (where the push to create smaller, faster, and more efficient microprocessors heralded the creation of circuitry less than 100 nm in size); electronics and telecommunications; aerospace, defence,

38、 and national security; energy and automotive; plastics and ceramics; forest and paper products; food and food packaging; pharmaceuticals, biomedicine, and biotechnology; environmental remediation; clothing and personal care. There are thousands of tonnes of nanomaterials on the market with end use

39、applications in several of these sectors, such as carbon black and fumed silica. Nanomaterials which are rationally designed with vi ISO 2013 All rights reserved PD CEN ISO/TS 80004-8:2015 ISO/TS 80004-8:2013(E) specific purpose are expected to radically change the landscape in areas such as biotech

40、nology, water purification, and energy development. The majority of sections in this document are organized by process type. In the case of section 6, the logic of placement is as follows: in the step before the particle is made, the material itself is in a gas/liquid/ solid phase. The phase of the

41、substrate or carrier in the process does not drive the categorization of the process. As an example, consider iron particles that are catalysts in a process by which you seed oil with iron particles, the oil vaporizes and condenses forming carbon particles on the iron particles. What vaporizes is th

42、e oil, and therefore it is a gas phase process. Nanotubes grown from the gas phase, starting with catalyst particles that react with the gas phase to grow the nanotubes, thus this is characterized as a gas process. Indication of whether synthesis processes are used to manufacture nano-objects, nanop

43、articles, or both, is provided in Annex A. A common understanding of the terminology used in practical applications will enable communities of practice in nanomanufacturing and will advance nanomanufacturing strength worldwide. Extending the understanding of terms across the existing manufacturing i

44、nfrastructure will serve to bridge the transition between the innovations of the research laboratory and the economic viability of nanotechnologies. For informational terms supportive of nanomanufacturing terminology, see Reference 1. ISO 2013 All rights reserved vii PD CEN ISO/TS 80004-8:2015 Nanot

45、echnologies Vocabulary Part 8: Nanomanufacturing processes 1 Scope This Technical Specification gives terms and definitions related to nanomanufacturing processes in the field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation covering the different aspect

46、s of nanotechnologies. All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may result in material features at the nanoscale or, alternatively, larger

47、 scales. There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document. 2 T erms an d definiti ons fr om other parts of ISO/T S 80004 The terms and definitions in this claus

48、e are given in other parts of ISO/TS 80004. They are reproduced here for context and better understanding. 2.1 carbon nanotube CNT nanotube (2.9) composed of carbon Note 1 to entry: carbon nanotubes usually consist of curved graphene layers, including single-wall carbon nanotubes and multiwall carbo

49、n nanotubes. SOURCE: ISO/TS 80004-3:2010, 4.3. 2.2 nanocomposite solid comprising a mixture of two or more phase-separated materials, one or more being nanophase Note 1 to entry: Gaseous nanophases are excluded (they are covered by nanoporous material). Note 2 to entry: Materials with nanoscale (2.7) phases formed by precipitation alone are not considered to be nanocomposite materials. SOURCE: ISO/TS 80004-4:2011, 3.2. 2.3 n a no f ibr e nano-object with two similar external dimensions in