ISO TR 14880-5-2010 Optics and photonics - Microlens arrays - Part 5 Guidance on testing《光学与光子学 显微镜头列阵 第5部分 测试指南》.pdf

《ISO TR 14880-5-2010 Optics and photonics - Microlens arrays - Part 5 Guidance on testing《光学与光子学 显微镜头列阵 第5部分 测试指南》.pdf》由会员分享，可在线阅读，更多相关《ISO TR 14880-5-2010 Optics and photonics - Microlens arrays - Part 5 Guidance on testing《光学与光子学 显微镜头列阵 第5部分 测试指南》.pdf（26页珍藏版）》请在麦多课文档分享上搜索。

1、 Reference number ISO/TR 14880-5:2010(E) ISO 2010TECHNICAL REPORT ISO/TR 14880-5 First edition 2010-12-15 Optics and photonics Microlens arrays Part 5: Guidance on testing Optique et photonique Rseaux de microlentilles Partie 5: Lignes directrices pour essai ISO/TR 14880-5:2010(E) PDF disclaimer Thi

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5、MENT ISO 2010 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISOs member body

6、 in the country of the requester. ISO copyright office Case postale 56 CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail copyrightiso.org Web www.iso.org Published in Switzerland ii ISO 2010 All rights reservedISO/TR 14880-5:2010(E) ISO 2010 All rights reserved iiiContents Page F

7、oreword iv Introduction.v 1 Scope1 2 Normative references1 3 Terms and definitions .1 4 Symbols and units.1 5 Coordinate system 2 6 Test conditions 3 7 Test guide.4 7.1 General .4 7.2 Guide to test with measurement equipment 4 7.3 Measurements possible with specific equipment6 7.4 Measurement equipm

8、ent for testing properties of a microlens .8 7.4.1 Test method flow chart .8 7.4.2 Test methods for optical properties of a single microlens.9 7.4.3 Test methods for geometrical properties of single microlenses .10 7.4.4 Test methods for optical properties of microlens arrays10 7.4.5 Test methods fo

9、r geometrical properties of microlens arrays.11 8 Test report11 Annex A (informative) Measurement guide for microlens property test.12 Annex B (informative) Discussion of Annexes to ISO 14880-2, ISO 14880-3 and ISO 14880-4.14 Bibliography17 ISO/TR 14880-5:2010(E) iv ISO 2010 All rights reservedForew

10、ord ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a techni

11、cal committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of e

12、lectrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to

13、the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. In exceptional circumstances, when a technical committee has collected data of a different kind from that which is normally published as an International Sta

14、ndard (“state of the art”, for example), it may decide by a simple majority vote of its participating members to publish a Technical Report. A Technical Report is entirely informative in nature and does not have to be reviewed until the data it provides are considered to be no longer valid or useful

15、. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. ISO/TR 14880-5 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee S

16、C 9, Electro-optical systems. ISO 14880 consists of the following parts, under the general title Optics and photonics Microlens arrays: Part 1: Vocabulary Part 2: Test methods for wavefront aberrations Part 3: Test methods for optical properties other than wavefront aberrations Part 4: Test methods

17、for geometrical properties Part 5: Guidance on testing Technical Report ISO/TR 14880-5:2010(E) ISO 2010 All rights reserved vIntroduction This part of ISO 14880 is intended as a guide to the selection and use of the appropriate method for testing optical and geometrical properties of a single microl

18、ens or microlens arrays. Examples of applications for microlens arrays include three-dimensional displays, coupling optics associated with arrayed light sources and photo-detectors, enhanced optics for liquid crystal displays, and optical parallel processor elements. The testing of microlenses is in

19、 principle no different to testing any other lens. The same parameters need to be measured and the same techniques used. However, in many cases the measurement of very small lenses presents practical problems which make it difficult to use the standard equipment that is available for testing normal-

20、size lenses. The growing market in microlens arrays has generated a need for agreement on basic terminology and test methods. Standard terminology and clear definitions are needed not only to promote applications but also to encourage scientists and engineers to exchange ideas and new concepts based

21、 on common understanding. The purpose of ISO 14880 is to improve the compatibility and interchange ability of lens arrays from different suppliers and to enhance development of the technology that uses microlens arrays. The various parts of ISO 14880 define terms and describe methods for testing wav

22、efront aberrations, optical properties other than wavefront aberrations, and test methods for geometrical properties. This part of ISO 14880 contributes to the purpose by guiding the user to select the appropriate part of ISO 14880 for testing microlens properties, however the user is not limited to

23、 these techniques. TECHNICAL REPORT ISO/TR 14880-5:2010(E) ISO 2010 All rights reserved 1Optics and photonics Microlens arrays Part 5: Guidance on testing 1 Scope This part of ISO 14880 gives guidelines for the testing of microlenses. It applies to microlenses in arrays where very small lenses are f

24、ormed inside or on one or more surfaces of a common substrate. This part of ISO 14880 addresses the measurement of optical and geometrical properties of single microlenses as well as microlens arrays. When testing a microlens or microlens array, the test method is selected according to the parameter

25、s to be measured, the size and structure of the microlens and its application. This part of ISO 14880 guides the user to select the appropriate measurement method from the available ISO standards. 2 Normative references The following referenced documents are indispensable for the application of this

26、 document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 14880-1, Optics and photonics Microlens arrays Part 1: Vocabulary 3 Terms and definitions For the purposes of this document,

27、the terms and definitions given in ISO 14880-1 apply. 4 Symbols and units Symbols and units of measurement that are used in this part of ISO 14880 are given in Table 1. ISO/TR 14880-5:2010(E) 2 ISO 2010 All rights reservedTable 1 Symbols and units of measurement Symbol Unit Term 1 A dmm 2diffraction

28、-limited optical aperture 2 A gmm 2geometric aperture 3 a 1 , a 2mm lens radius 4 2a 1 , 2a 2mm lens width 5 D nmm 2lens density 6 h mm surface modulation depth 7 L 1 , L 2mm edge length of substrate 8 NA none numerical aperture 9 NA dnone diffraction limited numerical aperture 10 NA gnone geometric

29、al numerical aperture 11 n (x, y, z) none refractive index 12 n 0none refractive index (lens centre) 13 P x , P ymm pitch 14 f E,bmm effective back focal length 15 f E,fmm effective front focal length 16 R cmm radius of curvature 17 S x , S y , S zmm coordinates of focal spot position 18 S x , S y ,

30、 S zmm focal spot position shift 19 T mm thickness of substrate 20 T cmm physical thickness 21 W x , W ymm focal spot size 22 x, y, z mm coordinate of lens aperture centre position 23 degree acceptance angle 24 rmsparts of the wavelength, wavefront aberration 25 m wavelength 26 v effnone effective A

31、bbe-number 5 Coordinate system A Cartesian coordinate system as shown in Figure 1 can be used to describe the radiation propagation in a microlens array. Most parameters to be measured relate to individual microlenses. The fundamental structure of a microlens array is illustrated in Figure 2. ISO/TR

32、 14880-5:2010(E) ISO 2010 All rights reserved 3Key 1 Substrate 2 Microlens Figure 1 Microlens array with a Cartesian coordinate system Figure 2 Fundamental structure of microlens array 6 Test conditions Care should be taken to ensure the test samples and equipment are handled under the conditions de

33、scribed in the appropriate standard, e.g. ISO 14880-2. ISO/TR 14880-5:2010(E) 4 ISO 2010 All rights reserved7 Test guide 7.1 General It is usually necessary to ensure optical surfaces are clean before measurement. 7.2 Guide to test with measurement equipment Table 2 shows several measurement methods

34、 and types of equipment which can be used to measure parameters. For example, a lens radius (a 1 , a 2 ) can be measured with a stylus instrument, a confocal measurement system or a microscope with linear scale. Table 2 Test equipment and reference standard for parameters to be measured Symbol Unit

35、Term (parameter to be measured) Equipment Reference standards microscope with linear scale 1 A dmm 2diffraction-limited optical aperture interferometer with aperture stop and linear scale micrometer 2 A gmm 2geometrical aperture microscope with linear scale stylus instrument ISO 14880-4 confocal mea

36、surement systems ISO 14880-4 3 a 1 , a 2mm lens radius microscope with linear scale stylus instrument ISO 14880-4 confocal measurement systems ISO 14880-4 4 2a 1 , 2a 2mm lens width microscope with linear scale stylus instrument ISO 14880-4 confocal measurement systems ISO 14880-4 5 D nmm 2lens dens

37、ity microscope with linear scale stylus instrument ISO 14880-4 6 h mm surface modulation depth confocal measurement systems ISO 14880-4 7 L 1 , L 2mm edge lengths of substrate microscope with linear scales calculated from aperture and focal length values 8 NA none numerical aperture measured directl

38、y from the divergence introduced by the microlens when illuminated by a collimated beam 9 NA dnone diffraction-limited numerical aperture calculated from diffraction-limited aperture and focal length values 10 NA gnone geometrical numerical aperture calculated from geometrical aperture and focal len

39、gth values ISO/TR 14880-5:2010(E) ISO 2010 All rights reserved 5Table 2 (continued) Symbol Unit Term (parameter to be measured) Equipment Reference standards 11 n (x, y, z) none refractive index refractometer, for example Abbe or Pulfrich type or interferometer such as Mach-Zehnder or shearing type

40、12 n 0none refractive index (lens centre) refractometer, for example Abbe or Pulfrich type or interferometer such as Mach-Zehnder or shearing type stylus instrument ISO 14880-4 13 P x , P ymm pitch microscope with linear scale collimated source and microscope ISO 14880-3 wavefront measuring systems

41、with linear scale ISO 14880-3 14 f E,bmm effective back focal length confocal measurement systems ISO 14880-3 collimated source and microscope ISO 14880-3 wavefront measuring systems with linear scale ISO 14880-3 15 f E,fmm effective front focal length confocal measurement systems ISO 14880-3 collim

42、ated source and microscope ISO 14880-4 16 R cmm radius of curvature interferometer with linear scale ISO 14880-4 17 S x , S y , S zmm coordinates of focal spot position microscope with linear scale 18 S x , S y , S zmm focal spot position shift microscope with linear scale 19 T mm thickness of subst

43、rate micrometer 20 T cmm physical thickness micrometer ISO 14880-4 21 W x , W ymm focal spot size image sensor camera 22 x, y, z mm coordinates of lens aperture centre position microscope with linear scale 23 degree acceptance angle gonio photometer interferometer ISO 14880-2 ISO 10110-14 24 rmspart

44、s of the wavelength, wavefront aberration Shack-Hartmann sensor ISO 14880-2 25 m wavelength spectrometer 26 v effnone effective Abbe-number effective Abbe-number is given by: 2 eff 13 1 () 11 () () f v ff = ISO 14880-3 27 CE none coupling efficiency calculated from Strehl ratio ISO 14880-3 ISO/TR 14

45、880-5:2010(E) 6 ISO 2010 All rights reservedTable 2 (continued) Symbol Unit Term (parameter to be measured) Equipment Reference standards test chart projection calculated wavefront analysis ISO 14880-2 28 IQ none imaging quality MTF analysis ISO 15529 29 uniformity none uniformity of array pair of s

46、imilar lens arrays to generate moir patterns Also, measurements on single lenses sampled from array may give a good indication. ISO 14880-4 7.3 Measurements possible with specific equipment Table 3 shows measurement methods and equipments which can be used to measure single microlens and/or microlen

47、s array properties. Several properties may be measured with each piece of equipment. Table 3 Measurements possible with specific equipment Equipment SA O G Symbol Unit Term Reference standards # # 14 f E,bmm effective back focal length ISO 14880-3 # # 15 f E,fmm effective front focal length ISO 1488

48、0-3 A collimated source and microscope # # 16 R cmm radius of curvature ISO 14880-4 effective Abbe-number is given by: 2 eff 13 1 () 11 () () f v ff = # # 26 v effnone effective Abbe-number (chromatic aberration) ISO 14880-3 # # 8 NA none numerical aperture # # 9 NA dnone diffraction-limited numeric

49、al aperture calculated from appropriate aperture and focal length values # # 10 NA gnone geometrical numerical aperture calculated from Strehl ration # # 27 CE none coupling efficiency ISO 14880-3 B calculated wavefront analysis # # 28 IQ none imaging quality ISO 14880-2 # # 14 f E,bmm effective back focal length ISO 14880-3 # # 15 f E,fmm effective front focal length ISO 14880-3 # # # 3 a 1 , a 2mm lens radius ISO