1、Vacuum technology Vacuum gauges Specifications, calibration and measurement uncertainties for Pirani gaugesBS ISO 19685:2017BSI Standards PublicationWB11885_BSI_StandardCovs_2013_AW.indd 1 15/05/2013 15:06 ISO 2017Vacuum technology Vacuum gauges Specifications, calibration and measurement uncertaint
2、ies for Pirani gaugesTechnique du vide Manomtres vide Spcifications, talonnage et incertitudes de mesure pour les jauges PiraniINTERNATIONAL STANDARDISO19685First edition2017-09Reference numberISO 19685:2017(E)National forewordThis British Standard is the UK implementation of ISO 19685:2017.The UK p
3、articipation in its preparation was entrusted to Technical Committee MCE/8/-/4, Vacuum technology.A list of organizations represented on this committee can be obtained on request to its secretary.This publication does not purport to include all the necessary provisions of a contract. Users are respo
4、nsible for its correct application. The British Standards Institution 2017 Published by BSI Standards Limited 2017ISBN 978 0 580 93829 0ICS 23.160Compliance with a British Standard cannot confer immunity from legal obligations.This British Standard was published under the authority of the Standards
5、Policy and Strategy Committee on 30 September 2017.Amendments/corrigenda issued since publicationDate Text affectedBRITISH STANDARDBS ISO 19685:2017 ISO 2017Vacuum technology Vacuum gauges Specifications, calibration and measurement uncertainties for Pirani gaugesTechnique du vide Manomtres vide Spc
6、ifications, talonnage et incertitudes de mesure pour les jauges PiraniINTERNATIONAL STANDARDISO19685First edition2017-09Reference numberISO 19685:2017(E)BS ISO 19685:2017ISO 19685:2017(E)ii ISO 2017 All rights reservedCOPYRIGHT PROTECTED DOCUMENT ISO 2017, Published in SwitzerlandAll rights reserved
7、. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at
8、 the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgBS ISO 19685:2017ISO 19685:2017(E)ii ISO 2017 All rights reservedCOPYRIGHT PROT
9、ECTED DOCUMENT ISO 2017, Published in SwitzerlandAll rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prio
10、r written permission. Permission can be requested from either ISO at the address below or ISOs member body in the country of the requester.ISO copyright officeCh. de Blandonnet 8 CP 401CH-1214 Vernier, Geneva, SwitzerlandTel. +41 22 749 01 11Fax +41 22 749 09 47copyrightiso.orgwww.iso.orgISO 19685:2
11、017(E)Foreword ivIntroduction v1 Scope . 12 Normative references 13 Terms and definitions . 14 Symbols and abbreviated terms . 45 Principle of Pirani gauge 46 Specifications for Pirani gauge 56.1 General . 56.2 Measuring principle 56.3 Type of output . 56.4 Range of output and output display resolut
12、ion 56.5 Measurement range and full scale . 56.6 Expected measurement uncertainty 56.7 Material exposed to gas . 56.8 Connecting flange . 56.9 Interface and pin-connections . 66.10 Warm-up period 66.11 Compatibility between gauge tube and controller 66.12 Normal operating (environment) conditions .
13、66.13 Electrical power supply . 66.14 Cable length . 66.15 Maximum bake-out temperature 66.16 Dimensions of gauge head and controller . 66.17 Mounting orientation 67 Additional (optional) specifications for Pirani gauge . 67.1 Long-term instability . 67.2 Relative sensitivity factor . 77.3 Hysteresi
14、s 77.4 Response time 77.5 Inspection record and calibration certificate . 77.6 Configuration 77.7 Weight . 77.8 Storage and transport condition 77.9 Photographs 77.10 Maximum power consumption . 77.11 Set point of pressure 78 Calibration and other measurement procedures. 78.1 General . 78.2 Conditio
15、ns for calibrations . 88.3 Assembly and adjustments of calibration item . 88.4 Calibration 98.5 Measurement uncertainties during calibration 98.6 Calibration certificate 98.7 Measurement procedure for hysteresis . 108.8 Measurement procedure of response time 109 Measurement uncertainties at use .10A
16、nnex A (informative) Typical Pirani gauge 12Bibliography .13 ISO 2017 All rights reserved iiiContents PageBS ISO 19685:2017ISO 19685:2017(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of prepari
17、ng International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in lia
18、ison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Dir
19、ectives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that s
20、ome of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent decla
21、rations received (see www.iso.org/patents).Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement.For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity as
22、sessment, as well as information about ISOs adherence to the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.This document was prepared by Technical Committee ISO/TC 112, Vacuum technology.iv ISO 2017 All rights
23、reservedBS ISO 19685:2017ISO 19685:2017(E)ForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member b
24、ody interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electro
25、technical Commission (IEC) on all matters of electrotechnical standardization.The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of I
26、SO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held re
27、sponsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see www.iso.org/patents).Any trade name used in this document is information giv
28、en for the convenience of users and does not constitute an endorsement.For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISOs adherence to the World Trade Organization (WTO) princi
29、ples in the Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.This document was prepared by Technical Committee ISO/TC 112, Vacuum technology.iv ISO 2017 All rights reserved ISO 19685:2017(E)IntroductionISO 3567 and ISO 27893 are basic standards with no specific
30、guidelines of a special type of vacuum gauge and are generally applicable. Detailed guidance for a specific gauge is intended to be given in separate technical specifications for the calibration of special types of gauges.This document complements ISO 3567 and ISO 27893 when characterizing or calibr
31、ating Pirani gauges or using them as reference gauges.Pirani gauges are widely used to measure pressures in the medium vacuum up to atmospheric pressure. The relevant parameters, calibration guidelines and uncertainties for the dissemination of the pressure scale and measurement of low and medium va
32、cuum pressures by a Pirani gauge are described in this document. ISO 2017 All rights reserved vBS ISO 19685:2017Vacuum technology Vacuum gauges Specifications, calibration and measurement uncertainties for Pirani gauges1 ScopeThis document identifies parameters of Pirani gauges, their calibration pr
33、ocedure, and describes measurement uncertainties to be considered when operating these gauges.This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as referenc
34、e standards.In addition, this document defines procedures to characterize Pirani gauges for response time and hysteresis.2 Normative referencesThe following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated refe
35、rences, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 3567:2011, Vacuum gauges Calibration by direct comparison with a reference gaugeISO 27893, Vacuum technology Vacuum gauges Evaluation of the uncertaint
36、ies of results of calibrations by direct comparison with a reference gaugeISO/IEC 17025, General requirements for the competence of testing and calibration laboratories3 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.ISO and IEC maintain terminologi
37、cal databases for use in standardization at the following addresses: ISO Online browsing platform: available at http:/www.iso.org/obp IEC Electropedia: available at http:/www.electropedia.org/3.1 Definitions of components3.1.1thermal conductivity gaugevacuum gauge in which the pressure is determined
38、 in relation to the transfer of thermal energy between the surfaces of two fixed elements maintained at different temperaturesNote 1 to entry: This gauge is based on the thermal conductivity of a gas being pressure dependent.SOURCE: ISO 3529-3:2014, 2.4.2.2, modified Example has been deleted.INTERNA
39、TIONAL STANDARD ISO 19685:2017(E) ISO 2017 All rights reserved 1BS ISO 19685:2017Vacuum technology Vacuum gauges Specifications, calibration and measurement uncertainties for Pirani gauges1 ScopeThis document identifies parameters of Pirani gauges, their calibration procedure, and describes measurem
40、ent uncertainties to be considered when operating these gauges.This document applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.This document complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards.In addition, this d
41、ocument defines procedures to characterize Pirani gauges for response time and hysteresis.2 Normative referencesThe following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited
42、applies. For undated references, the latest edition of the referenced document (including any amendments) applies.ISO 3567:2011, Vacuum gauges Calibration by direct comparison with a reference gaugeISO 27893, Vacuum technology Vacuum gauges Evaluation of the uncertainties of results of calibrations
43、by direct comparison with a reference gaugeISO/IEC 17025, General requirements for the competence of testing and calibration laboratories3 Terms and definitionsFor the purposes of this document, the following terms and definitions apply.ISO and IEC maintain terminological databases for use in standa
44、rdization at the following addresses: ISO Online browsing platform: available at http:/www.iso.org/obp IEC Electropedia: available at http:/www.electropedia.org/3.1 Definitions of components3.1.1thermal conductivity gaugevacuum gauge in which the pressure is determined in relation to the transfer of
45、 thermal energy between the surfaces of two fixed elements maintained at different temperaturesNote 1 to entry: This gauge is based on the thermal conductivity of a gas being pressure dependent.SOURCE: ISO 3529-3:2014, 2.4.2.2, modified Example has been deleted.INTERNATIONAL STANDARD ISO 19685:2017(
46、E) ISO 2017 All rights reserved 1 ISO 19685:2017(E)3.1.2Pirani gaugethermal conductivity gauge in which the heated element is part of a Wheatstone bridge that supplies the energy to the element and by which the electrical resistance or the dissipated power of the element is being measuredNote 1 to e
47、ntry: Some types of Pirani gauges have an extended upper limit of measurement range by using the heat convection inside the tube. This type is often called convection-enhanced Pirani gauge.Note 2 to entry: See Annex A.SOURCE: ISO 3529-3:2014, 2.4.2.2.2, modified Note 1 to entry has been replaced.3.2
48、 Definitions of physical parameters3.2.1internal volumevolume of the gauge that is exposed to the vacuum system where it is attached to, counted from the connecting flange plane3.2.2thermal accommodation coefficientratio of the absolute temperature of the molecule after a hit with the heated element
49、 in a Pirani gauge and the absolute temperature of the heated element3.2.3long-term instabilityquantity characterizing the typical change of relative measurement error eppppp=DUUCover time where the period needs to be specifiedNote 1 to entry: Measurement errors to determine long-term instability of this gauge type are taken for nitrogen at a pressure of p=()10 1 Pa (nitrogen) after a specified period. This quantity tshall be a relative quantity and may be determined in two wa
