1、June 2010 Translation by DIN-Sprachendienst.English price group 11No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).ICS 1
2、7.040.30!$iO“1700444www.din.deDDIN EN ISO 25178-6Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture(ISO 25178-6:2010)English translation of DIN EN ISO 25178-6:2010-06Geometrische Produktspezifikation (GPS) Oberflchenbeschaf
3、fenheit: Flchenhaft Teil 6: Klassifizierung von Methoden zur Messung der Oberflchenbeschaffenheit(ISO 25178-6:2010)Englische bersetzung von DIN EN ISO 25178-6:2010-06Spcification gomtrique des produits (GPS) tat de surface: Surfacique Partie 6: Classification des mthodes de mesurage de letat de surf
4、ace(ISO 25178-6:2010)Traduction anglaise de DIN EN ISO 25178-6:2010-06www.beuth.deIn case of doubt, the German-language original shall be considered authoritative.Document comprises 19 pages06.10 DIN EN ISO 25178-6:2010-06 2 A comma is used as the decimal marker. National foreword This standard has
5、been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification”, Working Group WG 16 “Areal and profile surface texture” (Secretariat: SIS, Sweden) in collaboration with Technical Committee CEN/TC 290 “Dimensional and geometrical product specific
6、ation and verification” (Secretariat: AFNOR, France). The responsible German body involved in its preparation was the Normenausschuss Technische Grundlagen (Fundamental Technical Standards Committee), Working Committee NA 152-03-03 AA Oberflchen. DIN EN ISO 25178 consists of the following parts, und
7、er the general title Geometrical product specifications (GPS) Surface texture: Areal: Part 2: Terms, definitions and surface texture parameters Part 3: Specification operators Part 6: Classification of methods for measuring surface texture Part 7: Software measurement standards Part 601: Nominal cha
8、racteristics of contact (stylus) instruments Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments Part 701: Calibration and measurement standards for contact (s
9、tylus) instruments The following parts are under preparation: Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments Part 605: Nominal characteristics of non-contact (point autofocusing) instruments The DIN Standards corresponding to the International Standa
10、rds referred to in this document are as follows: ISO 4287 DIN EN ISO 4287 ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM) DIN EN ISO 25178-6:2010-06 3 National Annex NA (informative) Bibliography DIN EN ISO 4287, Geometrical Product S
11、pecifications (GPS) Surface texture: Profile method Terms, definitions and surface texture parameters International vocabulary of metrology Basic and general concepts and associated terms (VIM), ISBN 978-3-410-20070-3 DIN EN ISO 25178-6:2010-06 4 This page is intentionally blank EUROPEAN STANDARD NO
12、RME EUROPENNE EUROPISCHE NORM EN ISO 25178-6 February 2010 ICS 17.040.20 English Version Geometrical product specifications (GPS) - Surface texture: Areal - Part 6: Classification of methods for measuring surface texture (ISO 25178-6:2010) Spcification gomtrique des produits (GPS) - tat de surface:
13、Surfacique - Partie 6: Classification des mthodes de mesurage de ltat de surface (ISO 25178-6:2010) Geometrische Produktspezifikation (GPS) - Oberflchenbeschaffenheit: Flchenhaft - Teil 6: Klassifizierung von Methoden zur Messung der Oberflchenbeschaffenheit (ISO 25178-6:2010) This European Standard
14、 was approved by CEN on 16 January 2010. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning suc
15、h national standards may be obtained on application to the CEN Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own languag
16、e and notified to the CEN Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithua
17、nia, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom. EUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN DE NORMALISATION EUROPISCHES KOMITEE FR NORMUNG Management Centre: Avenue Marnix 17, B-1000 Brussels 2010 CE
18、N All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 25178-6:2010: EContents 2 DIN EN ISO 25178-6:2010-06 EN ISO 25178-6:2010 (E) Page Foreword3 Introduction .4 1 Scope 5 2 Normative references 5 3 Terms and definitions .5 3.1 General
19、 terms.5 3.2 Definitions for classification of surface texture measurement methods.6 3.3 Terms and descriptions for specific methods7 4 Classification scheme .9 Annex A (informative) Metrological limitations. 12 Annex B (informative) Relation to the GPS matrix model 13 Bibliography. 14 Foreword CEN/
20、TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is held by AFNOR. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by August 2010, and conflicting
21、national standards shall be withdrawn at the latest by August 2010. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. According to the C
22、EN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, L
23、ithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 25178-6:2010 has been approved by CEN as a EN ISO 25178-6:2010 without any modification. This document (EN ISO 25178-
24、6:2010) has been prepared by Technical Committee ISO/TC 213 “Dimensional and geometrical product specifications and verification” in collaboration with Technical Committee 3 DIN EN ISO 25178-6:2010-06 EN ISO 25178-6:2010 (E) Introduction This part of ISO 25178 is a geometrical product specification
25、(GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 146382). It influences the chain link 5 of the chain of standards on roughness profile, waviness profile, primary profile and areal surface texture. This part of ISO 25178 describes a classification system for methods used pr
26、imarily for the measurement of surface texture. The classification system provides a context for the development of other parts of ISO 25178 that describe characteristics and measurement standards for some of the individual methods. Such a classification is also intended to aid in choosing and under
27、standing various types of methods and in determining which standards apply to their application. The classification system is aimed to be as general as possible. However, instruments may exist that do not clearly fit within any single method class. 4 DIN EN ISO 25178-6:2010-06 EN ISO 25178-6:2010 (E
28、) 1 Scope This part of ISO 25178 describes a classification system for methods used primarily for the measurement of surface texture. It defines three classes of methods, illustrates the relationships between the classes, and briefly describes specific methods. 2 Normative references The following r
29、eferenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 4287:1997, Geometrical Product Specifications (GPS) Surface
30、texture: Profile method Terms, definitions and surface texture parameters ISO 25178-2:1), Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters ISO/IEC Guide 99:2007, International vocabulary of metrology Basic and general concepts
31、and associated terms (VIM) 3 Terms and definitions 3.1 General terms For the purposes of this document, the terms and definitions given in ISO 4287, ISO 25178-2, ISO/IEC Guide 99 and the following apply. 3.1.1 measurement coordinate system system of coordinates in which surface texture parameters ar
32、e measured NOTE 1 If the nominal surface is a plane (or portion of a plane), it is usual to use a rectangular coordinate system in which the axes form a right-handed Cartesian set, the X-axis being the direction of tracing co-linear with the mean line and the Y-axis also lying on the nominal surface
33、, and the Z-axis being in an outward direction (from the material to the surrounding medium). The rectangular coordinate system is adopted in this part of ISO 25178 except for 3.2.1, Note 3, and 3.3.3, where a cylindrical coordinate system is described. NOTE 2 See also specification coordinate syste
34、m ISO 25178-2:. 1) To be published. 5 DIN EN ISO 25178-6:2010-06 EN ISO 25178-6:2010 (E) 3.1.2 surface profile profile that results from the intersection of the real surface by a specified plane NOTE In practice, it is usual to choose a plane with a normal that nominally lies parallel to the real su
35、rface and in a suitable direction. ISO 4287:1997, definition 3.1.4 3.1.3 ordinate value z(x, y) height of the surface at position (x, y) 3.2 Definitions for classification of surface texture measurement methods 3.2.1 line-profiling method surface topography measurement method that produces a two-dim
36、ensional graph or profile of the surface irregularities as measurement data, which may be represented mathematically as a height function z(x) NOTE 1 By contrast, areal-topography (3.2.2) and area-integrating (3.2.3) methods are used to quantify the surface texture over a selected area of a surface
37、instead of over single profiles. NOTE 2 Examples of instruments that were developed specifically to measure line profiles include contact stylus scanning1, early versions of the phase-shifting interferometer3, and the optical differential profiler45. NOTE 3 Certain methods have rotational scanning w
38、ithin a cylindrical coordinate system and measure circular profiles, that is, z as a function of angle . One example is the circular interferometric profiler6. 3.2.2 areal-topography method surface measurement method that produces a topographical image of a surface, which may be represented mathemat
39、ically as a height function z(x, y) of two independent variables (x, y) NOTE 1 Examples of methods that have been developed or adapted for areal-topography measurements include contact stylus scanning7, phase-shifting interferometric microscopy8, coherence scanning interferometry910, confocal micros
40、copy11, confocal chromatic microscopy12, structured light projection1314(including triangulation), focus variation microscopy15, optical differential profiler45, digital holography microscopy16, point autofocus profiling1718, angle-resolved scanning electron microscopy (SEM)1920, SEM stereoscopy2122
41、, scanning tunnelling microscopy23, and atomic force microscopy2425. The areal measurement capability of these methods is often derived from a set of parallel profiles scanned sequentially or from manipulation of 2D images in microscope cameras. All of these methods may also be used to produce line-
42、profiling results as well. NOTE 2 For methods that form a surface topography image z(x, y) from sequential profiles such as a set of parallel profiles z(x), care should be taken to ascertain the accuracy of measurement along the slow axis z(y). Although z(x, y) topographic images may be displayed fo
43、r an areal texture method, in some cases the method may not actually be sensitive to z(y) topography changes, or the accuracy of z(y) profiling may be limited by the drift of the instrument. 3.2.3 area-integrating method surface measurement method that measures a representative area of a surface and
44、 produces numerical results that depend on area-integrated properties of the surface texture NOTE 1 These methods do not produce line-profile data z(x) or areal-topography data z(x, y). NOTE 2 Examples of instruments that have been developed as area-integrating methods include those that use the tec
45、hniques of total integrated light scatter26, angle-resolved light scatter27, parallel-plate capacitance28and pneumatic (flow) measurement29. NOTE 3 Area-integrating methods have been used in conjunction with calibrated roughness comparison specimens or calibrated pilot specimens as comparators to di
46、stinguish the surface texture of parts manufactured by similar processes or to perform repetitive surface texture assessments. 6 DIN EN ISO 25178-6:2010-06 EN ISO 25178-6:2010 (E) 3.3 Terms and descriptions for specific methods 3.3.1 contact stylus scanning surface topography measurement method wher
47、eby the probing system uses a contacting stylus whose motion is converted into a signal as a function of position NOTE See ISO 25178-601 for more information. 3.3.2 phase-shifting interferometric microscopy PSI surface topography measurement method whereby an optical microscope with illumination of
48、a known effective wavelength is integrated with an interferometric attachment and produces multiple successive optical images with interferometric fringes from which the profile or areal surface topography image is calculated NOTE 1 Bands of light and dark interferometric fringes are produced in ima
49、ges when two or more mutually coherent optical beams are combined. NOTE 2 See ISO 25178-603 for more information. 3.3.3 circular interferometric profiling surface profiling method whereby the local surface height is sensed with an interferometric probe having a scanned beam on the circumference of a circle and the reference beam at the centre, thus generating a circular profile z() within a cylindrical coordinate system rather than a line pro
