1、I MIL- HDBH-4 O 6 310CTOBER 19.71 MILITARY STANOARDIZBTION HANDBOOK COMTAMINATION CONTROL TECHNOLOGY Cleaning Materials for Precision Precleaning and Use in Clean Rooms and Clean Work Stations , Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-
2、HDBK-406 Con tami nati on Control Techno1 ogy Cleaning Materials for Precision Precleaning and Use in Clean Rooms and Clean Work Areas 31 October 1971 1. This standardization handbook was developed by the US Army Missile Command in accordance with established procedure. 2. This publication was appro
3、ved on 31 October 1971 for printing and inclusion in the military standardization handbook series. 3. This document provides basic and fundamental information on cleaning materials for use in precision precleaning of material to be further processed in clean rooms or clean work areas. It provides va
4、luable information to both design and logistics personfiel who are concerned with material which requires precision cleaning techniques. The handbook is not intended to be referenced in its entirety for mandatory use in procurement specifications except for informational purposes. Specific materials
5、 may be specified. No cri teri a herein is intended to supersede any speci fi cati on requi rements . 4. Every effort has been made to reflect the latest information on materials suitable for use as delineated. It is the intent to review this handbook periodically to i nsure its completeness and cur
6、rency. Users of this document for changes and inclusions to: Commanding General US Army Missile Command Standardi zation Di vi si on Redstone Arsenal , Al abama 35809 AMSMI - RCS ii Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-I I MIL-HDBK-LlOb
7、 36 7777770 0040677 5 = MIL - HDBK - 406 31 October 1971 FOREWORD The purpose of this document is to focus the attention of designers, clean room personnel and those persons engaged in contamination control, on the importance of the proper selection of cleaning materials, and cleaning agents; and th
8、eir compatibilities with the materials being cleaned. This report should serve as a guide for the proper selection of cleaning materials. however, recommend any given cleaning agent or process for specific hardware, as the types of materials used in various systems differ widely . It does not, .- Th
9、e purpose of this handbook was to present as much pertinent data as possible, in one volume, on most of the cleaning agents associated wi th preci cion cleaning of hardware. It has been observed that most of the indeptt studies to date, of materials compatibilities with cleaning agents, have been un
10、dertaken as the result of catastrophic failure or system malfunction. It should be pointed out that safety and compatibility testing must be performed prior to hardware production. ii i Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-_ MIL-HDBK-40
11、6 36 M 7977770 0040698 7 II MIL - HDBK - 406 31 October 1971 SAFETY WARNING Adequate safety precautions should be taken when handling any chemical (solvent, cleaning material, etc.). Inhalation or direct contact with the skin should be avoided. Appropriate protective clothing (suits, gloves, masks,
12、etc.) should be utilized at all times, while handling chemicals or in their inunediate proximity. Some chemicals present fire hazards others vary in toxicity and yet others are asphyxiants. The THRESHOLD LIMIT VALUES (TLV) or MAXIMUM ALLOWABLE CONCENTRATION (MAC) is listed for most chemicals encount
13、ered in the clean room environment. These are recomended values only, and should be used as a guide, as some individuals are more sensitive to certain chemi cals than others. When combinations of chemicals are used togeather or in proximity to each- other the effects of the different hazards should
14、be considered as additive. That is the sum of the following fractions. EXAMPLE; General /case; when the air is analyzed for each component; the air contains 15 ppm Carbontetrachloride (TLV=25) , 100 ppm Trichloroethylene (TLV=200), and 200 ppm Methyl Ethyl Ketone (TLV=250). ,- 15 1 O0 200 = 475 - 1.
15、9 -+ 25 mtm -?!%- Thus the threshold limit is exceeded. NOTE: More detailed information may be obtained from the Governmental Industrial hygienists , 1014 Broadway, Cincinnati , Ohio 45202 Or the Handbook of Toxicology, Vol. 1, Acute Toxicities, prepared by The Nati onal Academy of Sciences , Nation
16、al Research Counci 1. iv Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,- - MIL-HDBK-406 36 W 9999970 OOLtOb79 9 MIL - HDBK - 406 31 October 1971 CONTENTS FORE WO RD SAFETY - WARNING Contents Paragraph 1.1 1.2 1.3 1.4 2. 2.1 2.1.1 2.1.2 2.1.3 2.1.
17、4 2.2 22.1 2.2.1.1 2,2.1.2 2.2.2 2.2.3 2.2.4 -. 2.2.5 2.2.6 2.3 2.4 2.4.1 2.4.2 2.5 2.5.1 2.5.2 2.5.3 2.5.4 2.6 2.6.1 2.6.2 2.6.3 2.6.4 2.6.5 Page iii iv v - XY SECTION 1 Page SCOPE SELECTION OF CLEANING AGENTS CON FL I CTS CLASS I FI CAT ION SECTION 2 CONTAMINANTS What are they? Oxidation Light Mi
18、crobi al organi sms Lubricants Sources and Forms Petroleum Industry Crude Oi 1 Production Refinery Operations Metallurgical Industry Organic Sol vents Mineral Processi ng Mo tor Ve h i cl es Natural Environment The Environment Man in the Contaminant Generation Cycle How much can Man Generate? People
19、 Packaging Con tami na ti on Mi g ra t i on F1 ui d Sol ids Physical Contact Carriers Waves Contamination Retention Gravity Electrostatic Charges Mol ecul ar Attraction Viscous Surface Coatings Physical Entrapment V 3 3 3 3 3 3 3 4 4 4 4 4 4 5 5 5 5 5 12 12 12 12 12 12 T2 13 13 13 13 13 Provided by
20、IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-/ MIL-HDBK-q0b 3b M 7797770 O040700 I = MIL - HDBK - 406 31 October 1971 CONTENTS (CON T) Paragraph 2.7 2.7.1 2.7.1.1 2.7.1.2 2.7.2 2.7.3 2.7.3.1 2.7.3.2 3. 3.1 3.2 3.2.1 3.2.2 3.2.3 3.3 3.3.1 3.3.2 3.3.3 3.4 3.
21、4.1 3.4.2 3.4.3 3.4.4 3.4.5 3.5 3.5.1 3.5.2 3.5.3 3.5.3.1 3.5.3.2 3.5.3.3 4. 4.1 4.1.1 4.1.2 4.1.3 4.2 4.2.1 4.2.2 4.2.3 Contamination in Liquids ,Solids and Gases Liquids Particles in Liquids Di ssol ved Matter in Liquids Sol ids Gases Parti cul ates in Gases Gases in Gases SECTION 3 CONTAMINATION
22、CONTROL THROUGH PRODUCT DESIGN How Clean is Clean? Manufacturing and Processing Environments Manufacturing Precautions Fabrication as a Contamination Generator Assembly Generates Contamination Also Test Procedures Gauges, Fixtures and Test Equipment Opera ti ons Storage Wood Cus hi oni ng Vapors Cop
23、per, Iron and Manganese Organic Materi als The Designer in Contamination Control The Systems Designer Designers Must Define and Identify Methods, Techniques and Considerations Cons i dera ti qns Control Tech ni ques Control Methods . Chemi cal Tests SECTION 4 CONTROL OF SURFACE CONTAMINANTS C1 eani
24、ng of Surfaces Physical Cleanl iness Chemi cal C1 eanl i ness Metallurgical Cleanl iness C1 eani ng Forces. F1 ui d Dynami cal Inertial Di rect Mechani cal Contact Page 14 14 14 14 15 15 15 15 17 17 17 17 18 18 18 19 19 19 19 19 19 19 19 19 19 20 21 21 21 22 22 23 23 23 23 23 24 24 24 24 . Provided
25、by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-LI06 36 m 7977970 OOLI0701 3 m MIL - HDBK - 406 31 October 1971 CONTENTS (CON T) Pa rag rap h 4.3 4.3.1 4.3.2 4.3.3 4.3.4 4.3.5 4.3.6 4.3.7 4.3.8 4.4 4.5 4.5.1 4.5.2 4.5.3.1 4.5.3.2 4.5.4 4.5.5 4.5.6
26、 4.5.7 4.5.8 4.6 4.6.1 4.6.2 4.6.3 4.6.4 4.6.4.1 4.6.4.2 5 4.6.4.3 4.6.5 4.6.6 4.6.7 4.6.8 4.6.9 5 5.1 5.2 5.3 5.4 5.4.1 5.4.2 5.4.3 5.5 Liquid Cleaning Wetting Emu1 si fi cati on Saponification Defloccul ation Solvent Activity PH Buffer Activity Al ka1 i ni ty and Aci di ty Corros i on Corrosion Fo
27、rms Intergranular Corrosi on Crevice Corrosion Sources of Stress The Favorable Environment Hydrogen Embri ttl ement Galvanic Corrosion Porous Castings Fungi and Bacteria Metal Whiskers Corrosion Prevention Intergranular Corrosion Crevice Corrosi on Stress Corrosion Hydrogen Embri ttl ement Choose or
28、ganic fils or vacuum deposited films P1 a ti ng Materials not subject to Hydrogen Embri ttlement Galvanic Corrosion Fungi The Environment Me ta 1 1 i c Coat i ng s Materi al Choices SECTION 5 GROSS CLEAN I NG Barrel Cleaning Mechani cal C1 eani ng Abrasi ve B1 as t Was hers Si ngl e-Stage Two-Stage
29、Mu1 ti -Stage Agitation vi i Page 24 24 25 25 25 26 27 27 27 28 29. 29 30 30 30 31 31 32 32 32 32 32 32 32 33 33 33 33 33 34 38 41 41 51 51 52 52 53 54 54 54 54 Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-906 36 m 9777970 OOLI0702 5 m
30、 MIL - HDBK - 406 31 October 1971 CONTENTS (CON T) Paragraph 6 6.1 6.1.1 6.1.1.1 6.1.1.2 6.1.1.3 6.1.1.3.1 6.1.2 6.1.2.1 6.1.2.2 6.1.2.3 6.1.2.4 6.1.2.5 6.1.2.6 6.1.3 6.2 6.2.1 6.2.1.1 6.2.1.2 6.2.1.3 6.2.1.4 6.2.1.5 6.2.1.6 6.2.1.7 6.3 6.3.1 5 6.3.2 6.3.3 7 7.1 7.1.1 7.1.2 7.1.2.1 7.1.3 7.1.4 7.1.5
31、 7.1.6 7.1.7 7.1.8 7.1.9 7.1.10 7.1 11 7.1.12 Page SECTION 6 PRECIS ION CLEAN1 NG Met hods Vapor Degreasers Design Types Sol vents Characteristi cs U1 trasoni c C1 eani ng Components How does it Work? Sol vent Property Effects How is the System Evaluated? How is the Cleaning Monitored? What must be
32、Considered? Drying Methods The Environment The Clean Room Non-Lami nar Ai rfl ow Fume Hoods Laminar Airflow Vertical Laminar Airflow Hori zon tal Lami nar Ai rf 1 ow Horizontal Airflow Tunnels Horizontal Airflow Work Bench Packaging Packaging Elements Packagi ng Fi 1 ms Attack by Packaging SECTION 7
33、 DETAIL REQUIREMENTS Properties Sol vency Toxi ci ty TLV Non Volatile Residue (NVR) F1 ammabi 1 i ty Boi 1 i ng Poi nt Freezing Poi nt Particulate Content Stabi 1 i ty Vapor Pressure Surface Tens i on Viscosity Dens i ty 57 57 57 57 58 62 62 65 65 68 68 70 71 71 78 78 78 78 80 81 81 83 84 84 85 85 8
34、6 87 89 89 89 89 90 90 90 91 91 91 92 92 92 92 93 Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-406 36 m 7777770 0040703 7 m Paragraph 7.2 7.3 7.3.1 7.3.2 7.3.3 7.3.4 7.4 7.4.1 7.4.2 704.3 -7.4.4 7.4.5 7.5 7.5.1 7.5.2 7.5.3 7.6 7.6.1 7.
35、6.2 7.6.3 7.6.4 7.6.5 7.7 7.7.1 7.7.2 7B7.3 7.0 7.8.1 5 7.8.2 7.8,3 7.8.4 7.9 7.9.1 7.9.2 ,709.3 7.10 7.10.1 7.10.2 7.10.3 7.10B4 7.11 7,ll.l 7.11.2 7.11.3 7.11.4 MIL - HDBK - 406 31 October 1971 CONTENTS (CON T) Compati bi 1 i ty Consi derati ons Bu1 k Hand1 ing and Storage The Tank Pi pes, Fi tti
36、ngs , Gaskets and Hoses Pumps, Meters , Valves and Gages Tank C1 eani ng - Acetone i%ZGi Properties spci fi cations General Information Sol ubi 1 i ty Data Materi als Compatl bi li ty Benzene lTEEi Properties Spcifications General Information Carbon Tetrachloride Phvsi cal ProDerti es spci fications
37、 General Information Decomposition Materi als Compati bl 1 1 ty Chloroform Physical Properties Speci fi cations General Information #%$erti es Specifications General Information Materi als Compati bi li ty Ethylene Chloride Phvs i cal Properti es Spcifications General In formati on Isopropyl Al coho
38、1 Phvsical Properties Spci fi cations General Information Materials Compatibility Meth 1 Alcohol hrties Spici fi cations General Information Materi als Compati bi 1 i ty ix Page 93 93 93 93 94 94 129 129 129 129 129 131 132 132 132 132 132 132 133 133 133 134 134 134 134 134 135 135 135 135 136 136
39、136 136 136 137 137 137 137 137 138 138 138 138 139 A .- Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-406 36 = 9777970 00407Oi.1 7 W MIL- HDBK - 406 31 October 1971 CONTENTS (CON T) Paragraph 7.12 7.12.1 7.12.2 7.12.3 7.12.4 7.12.5 7.1
40、2.6 7.12.6.1 7.12.6.2 7.12.6.3 7.12.6.4 7.12.6.5 7.12.6.6 7.12.7 7.13 7.13.1 7.13.2 7.13.3 7.13.4 7.14 7.14.1 7.14.2 7.14.3 7.14.4 7.14.5 7.15 . 7.15.1 7.15.2 5 7.15.3 7.16 7.16.1 7.16.1.1 7.16;2 7.16.3 7.16.4 7.16.5 7.16.6 7.16.6.1 7.16.6.2 7.16.6.3 7.16.6.4 7.16.6.5 7.16.6.6 7.16.6.7 METHYLENE CHL
41、ORIDE Phvsical ProPerties Spcificatiois Typical Commercial Specifications General Information Sol ubi 1 i ty Data Decompos i ti on Effects of Temperature on Decomposition Effects of Water on Decomposition Effects of Oxygen on Decomposition Effects of Metals on Decomposition Effects of Water and Meta
42、ls on Decomposition Decomposition under Varied Conditions Ma te ri a 1 s Cornpa ti bi 1 i tv METHYL ETHYL KETONE - Phvsical ProDerties Spici ficatiois General Information Sol ubi 1 i ty Data PERCHLOROETHYLENE Physical Properties Specifications Typical Comercial Analysis General Information Materials
43、 Compatibili t.y - TOLUENE Physical Properties specifications General Information 1 ,I ,1-TRICHLOROETHANE Phvsical ProPerties Spleci fi c Properti es Typical Comercial Properti es Specifications General Information Solubility Data Materials Compatibility Effects on plastics Effects on El as tomers E
44、ffects on Various Materi als Effects on Wire Coatings Effects on Aluminum Alloys Effects on Various Metals Compatibility With Missile Fuels % Page 139 139 140 140 140 140 141 142 142 142 142 142 142 143 144 144 145 145 145 147 147 147 147 148 148 149 149 150 150 150 150 151 151 151 152 3 52 154 154
45、155 155 156 156 157 157 A Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,- , Paragraph 7.17 7.17.1 7.17.2 7.17.3 7.17.4 7.17.4-1 7.17.4.2 7.17.4.3 7.17.4.4 7.17.4.5 7.18 7.18.1 7.18.1.1 7.18.2 7.18.3 7.18.4 7.18.4.1 7.18.4.2 7.18.4.3 7.18.4.4 7.18
46、.4.5 7.19 7.19.1 7.19.1.1 7.19.1.2 7.19.2 7.19.2.1 7.19.3 7.19.3.2 7.19.3.3 7.19.4 7.19.4.1 7.19.4.2 7.19.4.3 7.19.4.4 7.19.4.5 7.19.4.6 7.19.4.7 7.19.4.8 7.19.4.9 MIL-HDBK-406 36 W 7777770 0040705 O a MIL - HDBK - 406 31 October 1971 CONTENTS (CON T) TRICHLOROETHYLENE Physical Properties Speciflcat
47、ions Sol ubi 1 i ty Data Materials Compatibi ity Effect on Materials of Construction Effect on P1 as tics El astomers and Rubbers Effect on Aluniinum Alloys Effect on Various Metals LOX & NTO Sensi ti vi tv TRICHLOROFLUOROETHAN Phvs i cal Properti es Liiui d Density Genera 1 In format i on Sol ubi 1
48、 i ty Data Materials Compati bi 1 i ty Effects on Plastics Effects on El astomers Effects on Machinery Enamel Effect on Wire Insulation NTO Sensi ti vi ty TRICHLOROTRI FLUOROETHAME Physical Proper ties- Comercial Solvent Grade Specificatioc Commerical White Room Grade Specification Speci fi cations
49、Comercial Specification and Test Sol ubi 1 i ty Data Solubility of Various Materials Various Oils Totally Miscible with Trichlorotri- Materials Compati bi 1 i ty Effect on Plastics Effect on. Plastics and Rubber Effect or: Wire Coatings Effect on Wire Insulation Effect on Various Metals Effect on Aluminum Alloys Effect on Various Metals Effect on Air
