1、NTERNATIONAL STANDARD NORME INTERNATIONALE MEXAyHAPOAHblti CTAHAAPT 352911 INTERNATIONAL ORGANIZATION FOR STANDARDIZATION+4EXRYHAPOHAR OPTAHIl3AUMfl tl0 CTAHIIAPTH3AUHHRGANlSATlON INTERNATIONALE DE fdORMALISATION Vacuum technology - Vocabulary - Part 1 : General terms First edition - 1981-12-15 Tech
2、 nique du vide Vocabulaire - Partie 1 : Termes g. 21 Indexes English.,.,.,. 23 French . . . 25 Russian 27 German 28 V Sommaire Page Objet et domaine dapplication , . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1 Termesgnraux.,., 2 Annexes A Liste alphabetique des unites de pression en
3、usage avant Iadoption du SI, et facteurs de conversion . 16 A.1 Anglais . 16 A.2 FranCais 17 A.3 Russe 18 A.4 Allemand . 19 B Liste alphabetique des symboles . 21 Index Anglais. 23 Franais 25 Russe 27 Aemand. 28 vi CoAepmatiHe 06beKT klO6JlaCTbflpMMeHeHMFl. , . . . . . , . . . . . . . . . . . . , .
4、. . . 1 06llye TepMHHbl . , . . . . . . . , , . . , . , , , . . . . . . . A haBMTHbl CWCOK e#lHMQ AaBfleHklfi, MCflOflb30EaB!NlXCR A0 flpMHRTMR CMCTeMbl CM M IlepeBOAHble K03CflHHZHTbl . . . , . . , . . . . . . . A.2 paHqyxKne . . . . . . . . . , . . . . , . . . . . . . . . . A.3 Pyccwe . . , , , ,
5、, . . , , , , , , , . , . , . , . B hlaBI4THbltl CIlHCOK CMMBOJIOB . hlCiBl4THbl yKa3aTenb (bpaHqy3CKMh . . . . . . . . . PyCCKMil . . . . . . . . . . . . . . . . . . . . , . CTP. 3 3 16 16 17 18 19 21 23 25 27 28 vii lnhalt Seite Zweck und Anwendungsbereich . . . . . . . . . . . . . . . . . . . . .
6、 . . . . . . . . I. . . . . . . . 3 1 Allgemeine Ausdrijcke . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Anhtinge A Verzeichnis der vor der Annahme des SI verwendeten Druckeinheiten und Umrechnungsfaktoren 16 A.1 Englisch 16 A.2 Franzijsisch . 17 A.3 Russisch 18 A.4 De
7、utsch 19 B Alphabetisches Verzeichnis der Formelzeichen . 21 Alphabetisches Stichwortverzeichnis Englisch 23 Franzijsisch . 25 Russisch . 27 Deutsch 28 . . . VIII INTERNATIONAL STANDARD NORME INTERNATIONALE MEXAYHAPOAHbltl CTAHAAPT IS0 3529/l-1981 (E/F/R) M CO 3529/l -1981 (A/P) Vacuum technology -
8、Vocabulary - Part 1 : General terms Technique du vide - Vocabulaire - Partie 1 : Termes g these have been included at the request of Technical Committee ISO/TC 112, and are published under the responsibility of the Member Body for Germany, F.R. (DIN). However, only the terms and definitions given in
9、 the official languages can be considered as IS0 terms and definitions. 1 En supplement aux termes donn ces termes ont 6th inclus unit : Pal : a) of a gas on a boundary surface : the normal compo- nent of the force exerted by a gas on an area of a real sur- face divided by that area (the orientation
10、 of the surface Objet et domaine dapplication La presente partie de IISO 3529 definit les termes generaux uti- Ii unite : Pal : a) dun gaz sur une paroi : quotient de la composante normale de la force exercee par le gat sur un element de paroi, par Iaire de cet element de paroi (lorientation de 2 IS
11、0 3529/l-1981 (E/FIR) MC0 352911-l 981 (A/P) 06bCKT H 06naCTb Flpr(rMeHt?HWl Zweck und Anwendungsbereich HaCTORLqaR iaCTb MC0 3529 OflpeAeflReT Odlykle TepMLIHbl, MCnOflb- 3yeMble B BaKWMHOh TeXHMKe. B Hen flaHbl TeOpeTMcleCKHe OflpeAe- neHWl, KaK MOmHO bonee TOCIHble, C yqeTOM HeO6XOAMMOCTM MX MCnO
12、nb30BaHMR B npaKTWeCKMX qenRX. npkl 803HMKHOBeHMM TpyA- HOCTeii npkl MCilOnb30BaHMM 3TMX Ollpe,4efleHMh B CBR3M C l43Mepe: HMRMM HeKOTOpblX BeJlMWH, peKOMeHye-Wl #lR npaKWeCKOfl I4HTepflpeTakll4 TepMklHOB 06paqaTbCR K MeKFlyHBpOAHblM CTaH- AapTaM, OTHOCRll/MMCR K M3MepeHMtC 3TMX BenMWlH. 1 AOnOIlHMT
13、enbHO K TepMMHaM, MCnOJlb3yeMblM Ha TpeX OlyMaflbHblX R3blKaX VlCO (aHrJwL?CKL4ti, CjIpaHqy3CKMfi # pyCCK#fi), e 3TOM Mem CAeJlaHO 30 no npocbde TeXHWIeCKOrO KOMMTeTa 112 14 no4 KOBOCTEOM KOMWeTa- weHa QeAepameHoR PeCny6nMKM repMaHw4 (DIN). OAHaKo B KaLlecTae TepMMHOB M OnpeAeJleHHti MC0 MOQT PaCCMa
14、TptiBaTbCR JWIb TepMHHbl 1 OnpefleneHw Ha O(t)MMaflbHblX F13blKaX. 2 BO $JpaHqy3CKtlX M HeMeqKcHX TepMMHaX MCnOJlb3ytOTCS4 CfleyKllqMe CO- KpaqeHwl: (m) MyxcKoro poAa (0 xeHCKOr0 poAa (n) cpeflHer0 poAa 1 06uye TePMMHbl 1 Allgemeine Ausdriicke 1.0.1 CTaH#pTHblE! OKpyXGltOll#4e yCJlOBUR (CM. L/Ice 55
15、4): Dieser Teil von IS0 3529 enthtilt miiglichst genaue theoretische Definitionen der allgemeinen vakuum- technischen Ausdriicke, wobei such deren Verwend- barkeit in der Praxis berucksichtigt ist. Sollten bei der Messung gewisser GrijRen dennoch Schwierigkeiten in der Auslegung dieser Definitionen
16、entstehen, so empfiehlt es sich, fiir ihre praktische Interpretation diejenigen Ivternationalen Normen heranzuziehen, die die Messung der betreffenden Grbl3en behandeln. Die Fachausdrijcke sind in Englisch, Franzijsisch, Russisch und Deutsch angegeben, die Definitionen nur in Englisch, Franzijsisch
17、und Russisch. Im Dokument benutzte Abktirzungen : (m) maskulin IfI feminin (n) neutrum Normalklima h-d TeMnepaTypa: 20C OTHOCMTenbHBR BnaxHOCTb: 65 % aTMocepHoe AaeneHMe cyxoro BosAyxa: 101 325 lia = 1 013,25 M6ap 1.0.2 CTaHAapTHblZ? 3TaJlOHHble yCJlOBUR AIlsl r33OB: Normzustand (m) fiir Gase -reMne
18、ptiTypa: 0C ,qaeneHMe: 101 325 lla 1 .I .1 BaKyyM: UMPOKO MCnOJlb3yBMblti TBPMMH, OllLlCblBWll CO- cTo5itiHe pa3pemeHHoro ra38, nM60 oKpyltaqne ycnoeM5i, coo-r- BeTCTBytOqMe TBKOMy COCTORHMKI, IlpL4 KO-rOpOM ABBJlBHHB MJlM MaCCOBaR nJlOTHOCTb ra3a HMxe 06blHoro aTMOCepHOrO ypOBHR Vakuum (n) 1 .1.2 f
19、iuanaaotibl ealKe I-lpMBeAeHbl TMllW-lHble #Iarla3OHbl, #-WI KOTOpblX npkl6flkWeHHO ycTaHaBnmBamcR cneAyioou(me npeflenbi: Vakuumbereiche (m) OT 100 Kfla A0 100 t-k OT 100 na A0 O,l na OT o,l na A0 10 MKna HM*e 10 MKna Hkl3KMil BaKyyM CpeAHklti BaKflM BblCOKMti BaKyyM (BB) CBepXBblCOKklL! BaKWM (CBB
20、) 100 kPa bis 100 Pa Grobvakuum (n) (GV) 100 Pa bis 0,l Pa Feinvakuum (n) (FV) 0,l Pa bis IO pPa Hochvakuum InI (HV) unter 10 FPa Ultrahochvakuum (r-t) (UHV) 1.2.1 gaenewe cMMeon: p; eAw+a M3MepeHm: na: Druck (m) Formelzeichen : p; Einheit : Pa a) r838 Ha rpi3HUiHylo IlOBepXHOCTb: HOpMallbHblh KOMll
21、OHeHT CMnbI, AeticTByicqeh coc-ropoHbl ra3a Ha BceA nnolqwn peanbHoA noeepx- HOCTM, OTHeCeHHaR K nJlOl+l#4 3TOti nOBepXHOCTM (llpkl HanWMH IS0 3529/l-1981 (E/F/R) MC0 3529/l -1981 (A/P) relative to the mass flow vector being specified if there is a net mass flow of gas); b) at a specified point in a
22、 gas : the mean rate of transfer of the normal component of momentum, associated with the passage of molecules in both directions, through a small area of a plane located at the specified point, divided by that area (the orientation of the plane relative to the mass flow vector being specified if th
23、ere is a net mass flow of gas). NOTE - The term “pressure” when used alone refers to the pressure in a gas at rest, i.e. the static pressure in a gas flowing under steady- state conditions. 1.2.2 Pascal symbol : Pal : The name of the unit of pressure equal to one newton per square metre (unit of pre
24、ssure of the International System of Units). NOTE - See annex B for other units of pressure, the use of which is deprecated. 1.2.3 partial pressure if B is the particular component con- sidered, symbol : pe; unit : Pal : The pressure due to a specified component of a gaseous mixture. 1.2.4 total pre
25、ssure unit : Pal : A term which is often used to denote the sum of all the partial pressures of the constituents of a gas mixture in contexts where the shorter term “pressure” might not clearly distinguish between the individual partial pressures and their sum. 1.3.1 gas : Matter in a state such tha
26、t the molecules are vir- tually unrestricted by intermolecular forces so that the matter is free to occupy any available space. NOTE - In vacuum technology the word “gas” has been loosely ap- ptied. to both the non-condensable gas and the vapour. 1.3.2 non-condensable gas : A gas whose temperature i
27、s above the critical temperature of the substance considered, i.e. one which cannot be changed into the condensed phase by in- crease of pressure alone, 1.3.3 vapour; vapor/USA/ : A gas whose temperature is below the critical temperature of the substance considered, i.e. one which can be changed int
28、o the condensed phase by in- crease of pressure alone. 1.3.4 saturation vapour pressure symbol :pL; unit : Pal : The pressure exerted by a vapour which is in thermodynamic equilibrium with one of its condensed phases at the prevailing temperature. 1.3.5 degree of saturation : The ratio of the pressu
29、re ex- erted by a vapour to its saturation vapour pressure. 1.3.6 saturated vapour : Vapour which exerts a pressure equal to the saturation vapour pressure at a given temperature. The vapour is always saturated when it is in thermodynamic equilibrium with one of the condensed phases of the substance
30、 considered. 1616ment de paroi par rapport g la vitesse densemble doit 6tre spkcifi6e dans le cas dun Bcoulement); b) en un point dun gaz : quotient de la somme des com- posantes normales des quantitks de mouvement de-s mol unit6 : Pal : Pression due A un constituant particulier dun melange de gaz.
31、pression totale (f) unite : Pal : Expression souvent utilis6e pour designer la somme de toutes les pressions partielles des divers constituants dun melange de gaz, lorsque le terme plus court ccpressiom) ne permet pas de distinguer clairement entre les pressions partielles individuelles et leur somm
32、e. gaz (m) : Matike dans un pression de saturation symbole : pL; unit6 : Pal : Pression exercbe par une vapeur en Bquilibre thermodynamique avec Iune de ses phases conden- sees 2 une temperature don&e. degr& (m) de saturation : Rapport de la pression exerc6e par une vapeur B sa pression de saturation. vapeur saturante (f) : Vapeur dont la pression est r5gale B la pression de saturation pour la temperature consid&e. La vapeur est toujours saturante lorsquelle est en Bquilibre ther- modynamique avec Iune des phases condensbes du corps con- sidk5. 4
