1、 IEC 62047-7 Edition 1.0 2011-06 INTERNATIONAL STANDARD NORME INTERNATIONALE Semiconductor devices Micro-electromechanical devices Part 7: MEMS BAW filter and duplexer for radio frequency control and selection Dispositifs semiconducteurs Dispositifs microlectromcaniques Partie 7: Filtre et duplexeur
2、 BAW MEMS pour la commande et le choix des frquences radiolectriques IEC 62047-7:2011 colour inside THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2011 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form o
3、r by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IECs member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this
4、publication, please contact the address below or your local IEC member National Committee for further information. Droits de reproduction rservs. Sauf indication contraire, aucune partie de cette publication ne peut tre reproduite ni utilise sous quelque forme que ce soit et par aucun procd, lectron
5、ique ou mcanique, y compris la photocopie et les microfilms, sans laccord crit de la CEI ou du Comit national de la CEI du pays du demandeur. Si vous avez des questions sur le copyright de la CEI ou si vous dsirez obtenir des droits supplmentaires sur cette publication, utilisez les coordonnes ci-ap
6、rs ou contactez le Comit national de la CEI de votre pays de rsidence. IEC Central Office 3, rue de Varemb CH-1211 Geneva 20 Switzerland Email: inmailiec.ch Web: www.iec.ch About the IEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishe
7、s International Standards for all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition, a corrigenda or an amendment might have been published. Cat
8、alogue of IEC publications: www.iec.ch/searchpub The IEC on-line Catalogue enables you to search by a variety of criteria (reference number, text, technical committee,). It also gives information on projects, withdrawn and replaced publications. IEC Just Published: www.iec.ch/online_news/justpub Sta
9、y up to date on all new IEC publications. Just Published details twice a month all new publications released. Available on-line and also by email. Electropedia: www.electropedia.org The worlds leading online dictionary of electronic and electrical terms containing more than 20 000 terms and definiti
10、ons in English and French, with equivalent terms in additional languages. Also known as the International Electrotechnical Vocabulary online. Customer Service Centre: www.iec.ch/webstore/custserv If you wish to give us your feedback on this publication or need further assistance, please visit the Cu
11、stomer Service Centre FAQ or contact us: Email: csciec.ch Tel.: +41 22 919 02 11 Fax: +41 22 919 03 00 A propos de la CEI La Commission Electrotechnique Internationale (CEI) est la premire organisation mondiale qui labore et publie des normes internationales pour tout ce qui a trait llectricit, llec
12、tronique et aux technologies apparentes. A propos des publications CEI Le contenu technique des publications de la CEI est constamment revu. Veuillez vous assurer que vous possdez ldition la plus rcente, un corrigendum ou amendement peut avoir t publi. Catalogue des publications de la CEI: www.iec.c
13、h/searchpub/cur_fut-f.htm Le Catalogue en-ligne de la CEI vous permet deffectuer des recherches en utilisant diffrents critres (numro de rfrence, texte, comit dtudes,). Il donne aussi des informations sur les projets et les publications retires ou remplaces. Just Published CEI: www.iec.ch/online_new
14、s/justpub Restez inform sur les nouvelles publications de la CEI. Just Published dtaille deux fois par mois les nouvelles publications parues. Disponible en-ligne et aussi par email. Electropedia: www.electropedia.org Le premier dictionnaire en ligne au monde de termes lectroniques et lectriques. Il
15、 contient plus de 20 000 termes et dfinitions en anglais et en franais, ainsi que les termes quivalents dans les langues additionnelles. Egalement appel Vocabulaire Electrotechnique International en ligne. Service Clients: www.iec.ch/webstore/custserv/custserv_entry-f.htm Si vous dsirez nous donner
16、des commentaires sur cette publication ou si vous avez des questions, visitez le FAQ du Service clients ou contactez-nous: Email: csciec.ch Tl.: +41 22 919 02 11 Fax: +41 22 919 03 00 IEC 62047-7 Edition 1.0 2011-06 INTERNATIONAL STANDARD NORME INTERNATIONALE Semiconductor devices Micro-electromecha
17、nical devices Part 7: MEMS BAW filter and duplexer for radio frequency control and selection Dispositifs semiconducteurs Dispositifs microlectromcaniques Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des frquences radiolectriques INTERNATIONAL ELECTROTECHNICAL COMMISSION COMMIS
18、SION ELECTROTECHNIQUE INTERNATIONALE U ICS 31.080.99 PRICE CODE CODE PRIX ISBN 978-2-88912-537-1 Registered trademark of the International Electrotechnical Commission Marque dpose de la Commission Electrotechnique Internationale colour inside 2 62047-7 IEC:2011 CONTENTS FOREWORD . 4 1 Scope . 6 2 No
19、rmative references . 6 3 Terms and definitions . 6 3.1 General terms . 6 3.2 Related with BAW filter 7 3.3 Related with BAW duplexer . 9 3.4 Characteristic parameters . 10 3.4.1 BAW resonator 10 3.4.2 BAW filter and duplexer . 13 3.4.3 Temperature characteristics 16 4 Essential ratings and character
20、istic parameters 16 4.1 Resonator, filter and duplexer marking . 16 4.2 Additional information 17 5 Test methods . 17 5.1 Test procedure 17 5.2 RF characteristics . 19 5.2.1 Insertion attenuation, IA . 19 5.2.2 Return attenuation, RA 20 5.2.3 Bandwidth . 21 5.2.4 Isolation 21 5.2.5 Ripple 22 5.2.6 V
21、oltage standing wave ratio (VSWR) . 22 5.2.7 Impedances of input and output . 23 5.3 Reliability test method . 23 5.3.1 Test procedure 23 Annex A (informative) Geometries of BAW resonators . 25 Annex B (informative) Operation of BAW resonators 26 Bibliography 28 Figure 1 Basic structure of BAW reson
22、ator . 7 Figure 2 Topologies for BAW filter design 8 Figure 3 Frequency responses of ladder and lattice type BAW filters . 8 Figure 4 An example of BAW duplexer configuration 9 Figure 5 Equivalent circuit of BAW resonator (one-port resonator) . 10 Figure 6 Measurement procedure of BAW filters and du
23、plexers . 18 Figure 7 Electrical measurement setup of BAW resonators, filters and duplexers . 19 Figure 8 Insertion attenuation of BAW filter 20 Figure 9 Return attenuation of BAW filter . 21 Figure 10 Isolation (Tx-Rx) of BAW duplexer 22 Figure 11 Ripple of BAW filter 22 Figure 12 Smith chart plot
24、of input and output impedances of BAW filter 23 Figure 13 Block diagram of a test setup for evaluating the reliability of BAW resonators and filters 24 62047-7 IEC:2011 3 Figure A.1 Geometry comparison of BAW resonators . 25 Figure B.1 Modified BVD (Butterworth-Van Dyke) equivalent circuit model . 2
25、7 4 62047-7 IEC:2011 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ SEMICONDUCTOR DEVICES MICRO-ELECTROMECHANICAL DEVICES Part 7: MEMS BAW filter and duplexer for radio frequency control and selection FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standa
26、rdization comprising all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes Inte
27、rnational Standards, Technical Specifications, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participat
28、e in this preparatory work. International, governmental and non- governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between
29、 the two organizations. 2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees. 3) IEC Publications
30、have the form of recommendations for international use and are accepted by IEC National Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any m
31、isinterpretation by any end user. 4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications. Any divergence between any IEC Publication and the corresponding na
32、tional or regional publication shall be clearly indicated in the latter. 5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any service
33、s carried out by independent certification bodies. 6) All users should ensure that they have the latest edition of this publication. 7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC Nation
34、al Committees for any personal injury, property damage or other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications. 8) Attention is
35、drawn to the Normative references cited in this publication. Use of the referenced publications is indispensable for the correct application of this publication. 9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights. IEC shall
36、not be held responsible for identifying any or all such patent rights. International Standard IEC 62047-7 has been prepared by subcommittee 47F: Micro- electromechanical systems, of IEC technical committee 47: Semiconductor devices. The text of this standard is based on the following documents: FDIS
37、 Report on voting 47F/79/FDIS 47F/87/RVD Full information on the voting for the approval of this standard can be found in the report on voting indicated in the above table. This publication has been drafted in accordance with the ISO/IEC Directives, Part 2. 62047-7 IEC:2011 5 The committee has decid
38、ed that the contents of this publication will remain unchanged until the stability date indicated on the IEC web site under “http:/webstore.iec.ch“ in the data related to the specific publication. At this date, the publication will be reconfirmed, withdrawn, replaced by a revised edition, or amended
39、. IMPORTANT The “colour inside” logo on the cover page of this publication indicates that it contains colours which are considered to be useful for the correct understanding of its contents. Users should therefore print this publication using a colour printer. 6 62047-7 IEC:2011 SEMICONDUCTOR DEVICE
40、S MICRO-ELECTROMECHANICAL DEVICES Part 7: MEMS BAW filter and duplexer for radio frequency control and selection 1 Scope This part of IEC 62047 describes terms, definition, symbols, configurations, and test methods that can be used to evaluate and determine the performance characteristics of BAW res
41、onator, filter, and duplexer devices as radio frequency control and selection devices. This standard specifies the methods of tests and general requirements for BAW resonator, filter, and duplexer devices of assessed quality using either capability or qualification approval procedures. 2 Normative r
42、eferences Void. 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. 3.1 General terms 3.1.1 bulk acoustic wave BAW acoustic wave propagating in a bulk body 3.1.2 BAW resonator resonator employing bulk acoustic wave NOTE BAW resonator consists of piez
43、oelectric material between top and bottom electrodes, as shown in Figure 1. The top and bottom electrodes which can be made to vibrate in a vertical direction of the deposited piezoelectric film. The electrodes are either two air-to-solid interfaces or an acoustic Bragg reflector and an air-to-solid
44、 interface. The former is often called the film bulk acoustic resonator (FBAR), and the latter is called the solidly-mounted resonator (SMR). 62047-7 IEC:2011 7 AC power supply Electrode Piezoelectric film Air-to-solid interfaceKey Layers of a piece of BAW resonator Components to operate a BAW reson
45、ator Electrode To provide electrical input to a body of piezoelectric film and electrical connections with a external circuit AC power supply Electric power supply to vibrate a BAW resonator Piezoelectric film Body layer of a kind of BAW resonator Air to solid interface Figure 1 Basic structure of B
46、AW resonator 3.1.3 electrode electrically conductive plate in proximity to or film in contact with a face of the piezoelectric film by means of which a polarizing or driving field is applied to the element IEC/TS 61994-1, 3.21 3.1.4 piezoelectric film film which has piezoelectricity NOTE Piezoelectr
47、ic films can be distinguished as non-ferroelectric and ferroelectric materials. The non- ferroelectric materials, such as AlN (aluminium nitride) and ZnO (zinc oxide) have low dielectric constant, small dielectric loss, good hardness, and excellent insulating properties. Thus, they are good for micr
48、owave resonator and filter applications. The ferroelectric materials, such as PZT (lead-zirconate-titanate) and PLZT (lead- lanthanum-zirconate) have high dielectric constant, large dielectric loss, and fair insulating properties. Thus, they are good for memory and actuator applications. 3.1.5 direc
49、t piezoelectric effect effect which a mechanical deformation of piezoelectric material produces a proportional change in the electric polarization of that material 3.1.6 converse (or reverse) piezoelectric effect effect which mechanical stress proportional to an acting external electric field is induced in the piezoelectric material NOTE Converse piezoelectric effect is widely
